Biochip

Abstract

The utility model provides a kind of biochip, including substrate, semiconductor layer, insulating layer, metal layer, first protective layer and second protective layer.Semiconductor layer is set on substrate and has reaction zone.Insulating layer is set on semiconductor layer and has the first opening of reaction zone exposed.Insulating layer is set on metal layer and includes source electrode, drain electrode and wall structure.Wall structure surrounds the first opening, source electrode and drain electrode.First protective layer is set on metal layer and has second opening.Second protective layer is set on first protective layer, has third opening and fourth opening, and includes the first protruding part of the source electrode, the second protruding part of the drain electrode and the third protruding part of the wall structure.Corresponding to source electrode setting.Third protruding part surrounds and defines fourth opening.In the normal direction of substrate, third opening overlaps second opening and first opening.Fourth opening exposes first protective layer.The biochip of the utility model can avoid the problem of solution overflow.

Description

Technical Field

[0001] This utility model relates to a semiconductor chip, and more particularly to a biochip. Background Technology

[0002] In typical biochips, the space available to hold solutions (such as polymeric staining solutions or sample solutions) is usually limited by the size of the reaction zone. Therefore, when the amount of solution is large or when there is an error in adding the solution, the problem of solution overflow can easily occur. Utility Model Content

[0003] This invention relates to a biochip that avoids the problem of solution (such as polymeric dot-printing solution or sample solution) overflow, can accommodate a large solution volume, and can simultaneously detect multiple biological materials without mutual interference.

[0004] According to an embodiment of the present invention, a biochip for detecting biological materials includes a substrate, a semiconductor layer, an insulating layer, a metal layer, a first protective layer, and a second protective layer. The semiconductor layer is disposed on the substrate and has a reaction region. The insulating layer is disposed on the semiconductor layer and has a first opening exposing the reaction region. The metal layer is disposed on the insulating layer and includes a source, a drain, and a wall structure. The source and drain are electrically connected to the semiconductor layer, respectively. The wall structure surrounds the first opening, the source, and the drain. The first protective layer is disposed on the metal layer and has a second opening. The second protective layer is disposed on the first protective layer and has a third and a fourth opening. The second protective layer includes a first protrusion, a second protrusion, and a third protrusion. The first protrusion corresponds to the source. The second protrusion corresponds to the drain. The third protrusion corresponds to the wall structure and surrounds and defines the fourth opening. In the normal direction of the substrate, the third opening overlaps the second and first openings. The fourth opening exposes the first protective layer.

[0005] In the biochip according to an embodiment of the present invention, the source, drain, and wall structure are on the same layer and separated from each other, and the source and drain are electrically insulated from the wall structure.

[0006] In the biochip according to an embodiment of the present invention, the first protective layer is a hydrophobic material.

[0007] In the biochip according to an embodiment of the present invention, the second protective layer is a hydrophilic material.

[0008] In the biochip according to an embodiment of the present invention, the first protrusion, the second protrusion, and the third protrusion are separated from each other.

[0009] In the biochip according to an embodiment of the present invention, the third protrusion completely surrounds the fourth opening.

[0010] In the biochip according to an embodiment of the present invention, a third opening is disposed between the first protrusion and the second protrusion, and a fourth opening is disposed between the second protrusion and the third protrusion.

[0011] In the biochip according to an embodiment of the present invention, the size of the fourth opening is larger than the size of the third opening.

[0012] In the biochip according to an embodiment of the present invention, the biochip further includes a solution. The solution contacts the upper surface of the first protective layer exposed by the fourth opening, and the solution includes a biological probe.

[0013] Based on the above, in the biochip according to the embodiment of the present invention, since the third protrusion provided above the enclosure structure is a closed pattern that completely surrounds the fourth opening, the solution (e.g., polymer dotting solution or sample solution) can be prevented from overflowing outside the fourth opening, a larger solution volume can be accommodated, and multiple biological materials can be detected simultaneously without mutual interference. Attached Figure Description

[0014] Figure 1 This is a top view schematic diagram of a biochip according to an embodiment of the present invention;

[0015] Figures 2 to 6 for Figure 1 A three-dimensional schematic diagram of the manufacturing method of biochips;

[0016] Figure 7 for Figure 6 A schematic diagram of the cross-section of the biochip along section line I-I'.

[0017] Figure 8 for Figure 6 A schematic diagram of the cross-section of the biochip along section line II-II'.

[0018] Explanation of icon numbers

[0019] 10: Biochips

[0020] 100: Detection Unit

[0021] 110: Substrate

[0022] 120: Semiconductor layer

[0023] 121: Reaction Zone

[0024] 122: Source Region

[0025] 123: Drain region

[0026] 130, IL1, IL2: Insulation layer

[0027] 131, 132, 151: Opening

[0028] 140: Metal layer

[0029] 141: Source Pole

[0030] 142: Drain

[0031] 143: Fence Structure

[0032] 150: First protective layer

[0033] 152: Flat area

[0034] 153: Protrusion

[0035] 160: Second protective layer

[0036] 161: First protrusion

[0037] 162: Second protrusion

[0038] 163: Third protrusion

[0039] 200: solution

[0040] 210: Biological probe

[0041] 220: Liquid

[0042] O1: First opening

[0043] O2: Second opening

[0044] O3: Third opening

[0045] O4: Fourth opening

[0046] S1: Upper surface

[0047] Z: Normal direction Detailed Implementation

[0048] Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same component reference numerals are used in the drawings and description to denote the same or similar parts.

[0049] Figure 1 This is a top view schematic diagram of a biochip according to an embodiment of the present invention. Figures 2 to 6 for Figure 1 A three-dimensional schematic diagram of the manufacturing method of biochips. Figure 7 for Figure 6 A schematic diagram of the cross-section of the biochip along section line I-I'. Figure 8 for Figure 6A schematic cross-sectional view of the biochip along section line II-II'. For clarity and ease of explanation, the accompanying diagram is shown. Figure 5 and Figure 6 The semiconductor layer 120, metal layer 140, and solution 200 in the biochip 10 are not shown in the diagram.

[0050] Please refer to the following simultaneously: Figure 1 , Figure 6 , Figure 7 as well as Figure 8 The biochip 10 in this embodiment may include at least one detection unit 100. Figure 1 Three detection units 100 are schematically shown, but are not limited thereto. Each detection unit 100 includes a substrate 110, insulating layers IL1 and IL2, a semiconductor layer 120, an insulating layer 130, a metal layer 140, a first protective layer 150, and a second protective layer 160. The semiconductor layer 120 is disposed on the substrate 110 and has a reaction region 121. The insulating layer 130 is disposed on the semiconductor layer 120 and has a first opening O1 exposing the reaction region 121. The metal layer 140 is disposed on the insulating layer 130 and includes a source electrode 141, a drain electrode 142, and a barrier structure 143. The source electrode 141 and the drain electrode 142 are electrically connected to the semiconductor layer 120, respectively. The barrier structure 143 surrounds the first opening O1, the source electrode 141, and the drain electrode 142. The first protective layer 150 is disposed on the metal layer 140 and has a second opening O2. A second protective layer 160 is disposed on the first protective layer 150, and the second protective layer 160 has a third opening O3 and a fourth opening O4. The second protective layer 160 includes a first protrusion 161, a second protrusion 162, and a third protrusion 163. The first protrusion 161 is disposed corresponding to the source electrode 141. The second protrusion 162 is disposed corresponding to the drain electrode 142. The third protrusion 163 is disposed corresponding to the wall structure 143, and the third protrusion 163 may surround and define the fourth opening O4. In the normal direction Z of the substrate 110, the third opening O3 may overlap the second opening O2 and the first opening O1. The fourth opening O4 may expose a portion of the first protective layer 150.

[0051] The biochip 10 of this embodiment can be used to detect biological materials. Biological materials may be, for example, microorganisms or biomolecules in a sample solution, but are not limited thereto. Microorganisms may include, for example, bacteria, viruses or combinations thereof, and biomolecules may include, for example, nucleic acids (including deoxyribonucleic acid, ribonucleic acid or combinations thereof), nucleotides, proteins, carbohydrates, lipids or combinations thereof, but are not limited thereto.

[0052] The manufacturing method of the biochip 10 of this embodiment will be described below. The manufacturing method of the biochip 10 of this embodiment may include the following steps:

[0053] First, please refer to Figure 2 , Figure 7 as well as Figure 8 A substrate 110 is provided, an insulating layer IL1 is formed on the substrate 110, an insulating layer IL2 is formed on the insulating layer IL1, and a semiconductor layer 120 is formed on the substrate 110 and the insulating layer IL2. In this embodiment, the substrate 110 can be a silicon substrate or a silicon wafer. For example, the substrate 110 can be a P-type silicon substrate, but is not limited thereto.

[0054] In this embodiment, the semiconductor layer 120 has a reactive region 121, a source region 122, and a drain region 123. The reactive region 121 is located between the source region 122 and the drain region 123, and the reactive region 121 can connect the source region 122 and the drain region 123. In this embodiment, the material of the semiconductor layer 120 may include polysilicon or other suitable semiconductor materials, but is not limited thereto. In some embodiments, the reactive region 121 can be regarded as a channel in a transistor structure. Therefore, when the threshold voltage of the reactive region 121 (channel) is exceeded, the reactive region 121 (channel) can be turned on, and the current from the drain 142 can be transferred to the source 141 through the reactive region 121 (channel).

[0055] Then, please refer to Figure 3 , Figure 7 as well as Figure 8 An insulating layer 130 is formed on the semiconductor layer 120. Specifically, the insulating layer 130 has a first opening O1, an opening 131, and an opening 132. The first opening O1 exposes a portion of the reaction region 121 and a portion of the insulating layer 130, the opening 131 exposes a portion of the source region 122, and the opening 132 exposes a portion of the drain region 123.

[0056] Then, please refer to Figure 4 , Figure 7 as well as Figure 8A metal layer 140 is formed on the insulating layer 130. Specifically, the metal layer 140 may expose a portion of the insulating layer 130. The metal layer 140 includes a source 141, a drain 142, and a barrier structure 143. The source 141 is disposed on the insulating layer 130 and within the opening 131, and the drain 142 is disposed on the insulating layer 130 and within the opening 132. In the normal direction Z of the substrate 110, the source 141 may overlap and be disposed corresponding to the source region 122, and the drain 142 may overlap and be disposed corresponding to the drain region 123. The barrier structure 143 is disposed on the insulating layer 130, and the barrier structure 143 may surround the source 141 and the drain 142. In this embodiment, the source 141, drain 142 and the enclosure structure 143 can be on the same layer; the source 141, drain 142 and enclosure structure 143 can be physically separated from each other; and the source 141 and drain 142 can be electrically insulated from the enclosure structure 143.

[0057] Then, please refer to Figure 5 , Figure 7 as well as Figure 8 A first protective layer 150 is formed on the metal layer 140. Specifically, the first protective layer 150 has a second opening O2 and an opening 151, and the first protective layer 150 includes a planar portion 152 and a protrusion 153. The planar portion 152 may cover the insulating layer 130 exposed by the metal layer 140, and the planar portion 152 may surround and define the second opening O2. The protrusion 153 may cover the metal layer 140, and the protrusion 153 may completely surround and define the opening 151. In the normal direction Z of the substrate 110, the protrusion 153 may overlap and correspond to the source 141, the drain 142, and the barrier structure 143, and the second opening O2 may overlap and correspond to the portion of the reaction region 121 exposed by the first opening O1.

[0058] In such Figure 5 In the three-dimensional view of the biochip 10 shown, the protrusion 153 can be a closed shape without gaps, the opening 151 can be connected to the second opening O2, and the size of the opening 151 can be larger than the size of the second opening O2.

[0059] In this embodiment, the material of the first protective layer 150 can be a hydrophobic material and not a hydrophilic material. For example, the material of the first protective layer 150 may include silicon nitride (SiN), plasma-enhanced silicon nitride (PESIN), oxynitrides (SION), other suitable hydrophobic materials, or combinations thereof, but is not limited thereto.

[0060] Then, please refer to Figure 6 , Figure 7 as well as Figure 8A second protective layer 160 is formed on the first protective layer 150, and a solution 200 containing a biological probe 210 is added. Specifically, the second protective layer 160 has a third opening O3 and a fourth opening O4, and includes a first protrusion 161, a second protrusion 162, and a third protrusion 163. In the normal direction Z of the substrate 110, the first protrusion 161 may overlap and correspond to the source electrode 141, the second protrusion 162 may overlap and correspond to the drain electrode 142, and the third protrusion 163 may overlap and correspond to the enclosure structure 143. The first protrusion 161, the second protrusion 162, and the third protrusion 163 can be separated from each other. The third protrusion 163 may completely surround and define the fourth opening O4.

[0061] In this embodiment, a third opening O3 is disposed between the first protrusion 161 and the second protrusion 162, and a fourth opening O4 is disposed between the second protrusion 162 and the third protrusion 163. In the normal direction Z of the substrate 110, the third opening O3 may overlap and correspond to the second opening O2 and the first opening O1, exposing a portion of the reaction region 121. The fourth opening O4 may expose a portion of the first protective layer 150, for example, the upper surface S1 of the exposed flat portion 152. The upper surface S1 faces away from the substrate 110.

[0062] In such Figure 6 In the three-dimensional view of the biochip 10 shown, the third protrusion 163 can be a closed shape without gaps, the fourth opening O4 can be connected to the third opening O3, and the size of the fourth opening O4 can be larger than the size of the third opening O3, the size of the second opening O2 and the size of the first opening O1.

[0063] In this embodiment, the second protective layer 160 can be a hydrophilic material and not a hydrophobic material. For example, the material of the second protective layer 160 may include oxides, silicon oxide (SiO2), plasma-enhanced silicon oxide (PEOX), low-pressure tetraethoxysilane (LPTEOS), plasma-enhanced tetraethoxysilane (PETEOS), phosphosilicate glass (PSG), borosilicate glass (BPSG), spin-on glass (SOG), other suitable hydrophilic materials, or combinations thereof, but is not limited thereto.

[0064] Then, please continue to refer to Figure 7 and Figure 8Solution 200 may be disposed within the first opening O1, the second opening O2, the third opening O3, the opening 151, and the fourth opening O4. A portion of solution 200 may contact the reaction region 121 of the semiconductor layer 120, and another portion of solution 200 may contact the upper surface S1 of the first protective layer 150 exposed by the fourth opening O4.

[0065] In this embodiment, solution 200 may include a biological probe 210 and a liquid 220. The biological probe 210 may be attached to the reaction region 121 of the semiconductor layer 120 for specific identification and binding to biological materials in the sample solution. Specifically, after adding solution 200 containing the biological probe 210, one end of the biological probe 210 may be connected and fixed to the reaction region 121, and the other end of the biological probe 210 may be used to identify and bind to biological materials. The biological probe 210 may be a chemical molecule or a biological molecule. For example, the biological probe 210 may be an antibody, antigen, nucleic acid, carbohydrate, or a combination thereof, but is not limited thereto, as long as the biological probe 210 can specifically identify and bind to biological materials. In this embodiment, solution 200 containing the biological probe 210 may be a polymeric dispensing solution, but is not limited thereto.

[0066] In this embodiment, since the protrusion 153 and the third protrusion 163 provided above the enclosure structure 143 are respectively closed patterns completely surrounding the opening 151 and the fourth opening O4, the solution 200 can be confined within the opening 151 or the fourth opening O4, and overflow of the solution 200 to the outside of the fourth opening O4 can be prevented. Figure 7 and Figure 8 As shown. For example, when the solution 200 added to the first opening O1 or the second opening O2 of one of the detection units 100 of the biochip 10 overflows the second opening O2, the protrusion 153 and the third protrusion 163 can respectively confine the solution 200 within the opening 151 and the fourth opening O4, thereby preventing the solution from interfering with the detection results of the adjacent detection unit 100 due to overflow. Therefore, compared with a general biochip, the biochip 10 of this embodiment can increase the volume of solution 200 that the biochip 10 can hold by setting the opening 151 and the fourth opening O4, and can improve the operational margin and convenience of the biochip 10. In this way, the biochip 10 of this embodiment can simultaneously detect different biological materials in different detection units 100, and there is no need to worry about the risk of cross-contamination between adjacent detection units due to solution overflow, thereby achieving the effect of simultaneous detection of multiple biological materials.

[0067] In this embodiment, since the third protrusion 163 of the second protective layer 160 above the wall structure 143 can be a hydrophilic material and not a hydrophobic material, the fluidity of the solution 200 in contact with the third protrusion 163 can be reduced, thereby reducing the probability of the solution 200 climbing over the third protrusion 163 and further reducing the probability of solution overflow.

[0068] In this embodiment, since the fourth opening O4 can expose part of the first protective layer 150, and the first protective layer 150 can be a hydrophobic material and not a hydrophilic material, the fluidity of the solution 200 in contact with the first protective layer 150 can be increased, and the solution 200 can be quickly guided into the third opening O3 for detection in the reaction zone 121.

[0069] In summary, in the biochip of this embodiment, since the third protrusion above the enclosure structure is a completely closed pattern surrounding the fourth opening, solution overflow outside the fourth opening can be prevented. It can accommodate a larger solution volume and simultaneously detect multiple biological materials without interference. Because the third protrusion can be a hydrophilic material rather than a hydrophobic material, the fluidity of the solution in contact with the third protrusion is reduced, thereby reducing the probability of the solution climbing over the third protrusion and further reducing the probability of solution overflow. Since the first protective layer exposed by the fourth opening can be a hydrophobic material rather than a hydrophilic material, the fluidity of the solution in contact with the first protective layer is increased, allowing the solution to be quickly guided into the third opening for detection.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A biochip, characterized in that, include: substrate; A semiconductor layer is disposed on the substrate and has a reaction region; An insulating layer is disposed on the semiconductor layer and has a first opening that exposes the reaction region; A metal layer, disposed on the insulating layer, and comprising: The source and drain are electrically connected to the semiconductor layer, respectively; and A wall structure surrounds the first opening, the source electrode, and the drain electrode; A first protective layer is disposed on the metal layer and has a second opening; and A second protective layer, disposed on the first protective layer, has a third opening and a fourth opening, and includes: The first protrusion is provided corresponding to the source electrode; A second protrusion is provided corresponding to the drain electrode; and The third protrusion is provided corresponding to the wall structure and surrounds and defines the fourth opening; In the normal direction of the substrate, the third opening overlaps the second opening and the first opening, and the fourth opening exposes the first protective layer.

2. The biochip according to claim 1, characterized in that, The source, the drain, and the enclosure structure are on the same layer and separated from each other, and the source and the drain are electrically insulated from the enclosure structure.

3. The biochip according to claim 1, characterized in that, The first protective layer is made of a hydrophobic material.

4. The biochip according to claim 1, characterized in that, The second protective layer is made of a hydrophilic material.

5. The biochip according to claim 1, characterized in that, The first protrusion, the second protrusion, and the third protrusion are separated from each other.

6. The biochip according to claim 1, characterized in that, The third protrusion completely surrounds the fourth opening.

7. The biochip according to claim 1, characterized in that, The third opening is disposed between the first protrusion and the second protrusion, and the fourth opening is disposed between the second protrusion and the third protrusion.

8. The biochip according to claim 1, characterized in that, The size of the fourth opening is larger than the size of the third opening.

9. The biochip according to claim 1, characterized in that, Also includes: The solution contacts the upper surface of the first protective layer exposed by the fourth opening and includes a biological probe.

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