Horizontal automatic blowers

Abstract

The utility model belongs to dust removal environmental protection technical field discloses a kind of horizontal automatic blowing machine.The horizontal automatic blowing machine includes workbench, first drive module, second drive module, blowing module and control module, workbench is along vertical direction respectively arranged first drive module and second drive module, and it is defined to form the object space for placing the plate member to be blown by first drive module and second drive module between, blowing module has air outlet, and control module can control two blowing module to blow the plate member.The horizontal automatic blowing machine provided in this embodiment can realize omnibearing blowing and cleaning of the plate body, in addition, the horizontal automatic blowing machine can make high-pressure gas uniformly and effectively enter the through hole opened on the plate body to clean the dust particles adhered, which is more efficient and effective than manual blowing, reduces the high failure rate of the plate body caused by dust particles, and also solves the problems of low automation and poor safety of existing blowing methods.

Description

Technical Field

[0001] This utility model relates to the field of dust removal and environmental protection technology, and in particular to a horizontal automatic blowing machine. Background Technology

[0002] The CVD (Chemical Vapor Deposition Chamber) diffuser is a crucial gas diffusion component within the CVD equipment. The diffuser is made of aluminum sheet with a honeycomb-like perforation evenly distributed across a half-cup shape. It has two surfaces: an IN (inlet) surface and an OUT (outlet) surface. Gas flows to the IN surface of the diffuser and through the honeycomb perforations to the OUT surface. Due to the unique flatness of the OUT surface, the gas flows out uniformly and at a constant speed.

[0003] Diffuser regeneration and cleaning is necessary when the diffuser reaches its service life limit within the CVD chamber or malfunctions, requiring re-alignment of the flatness of the diffuser's outgoing surface. Current cleaning and regeneration techniques generate a large amount of dust particles inside the diffuser's through-holes. This dust needs to be reduced to below a required level. Currently, after diffuser regeneration and cleaning, the diffuser is typically suspended in mid-air, and air is manually blown out from the bottom using an air gun. However, this method results in uneven airflow, limited effectiveness, and the safety risk of the diffuser falling.

[0004] Based on the above situation, it is necessary to design a horizontal automatic purging machine to address the shortcomings of existing purging methods. Utility Model Content

[0005] The purpose of this invention is to provide a horizontal automatic blowing machine that can improve the uniformity and effectiveness of blowing dust particles attached to plates, increase the degree of automation, and enhance safety in use.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] The horizontal automatic purging machine includes: a worktable, a first drive module, a second drive module, a purging module, and a control module, wherein:

[0008] The workbench is provided with the first drive module and the second drive module at its upper and lower ends along the vertical direction, respectively. The first drive module and the second drive module define a loading space, which is used to place the plate to be purged.

[0009] The first drive module includes a first horizontal lateral motion module and a first horizontal longitudinal motion module, which are perpendicular to each other. The first horizontal lateral motion module is driven to the first horizontal longitudinal motion module, and the first horizontal longitudinal motion module is driven to the purging module.

[0010] The second drive module includes a second horizontal lateral motion module and a second horizontal longitudinal motion module, which are perpendicular to each other. The second horizontal lateral motion module is driven to the second horizontal longitudinal motion module, and the second horizontal longitudinal motion module is driven to the purging module.

[0011] The purging module has an air blowing port disposed opposite to the plate, and the air blowing port can guide gas onto the plate.

[0012] The control module is connected to the purging module and is configured to control the two purging modules to purge the opposite surfaces of the plate.

[0013] Preferably, along the extension direction of the first horizontal longitudinal motion module, each end of the first horizontal longitudinal motion module is connected to a first horizontal transverse motion module.

[0014] Along the extension direction of the second horizontal longitudinal motion module, each end of the second horizontal longitudinal motion module is connected to a second horizontal transverse motion module, and the first horizontal longitudinal motion module and the second horizontal longitudinal motion module are arranged in parallel.

[0015] Preferably, the workbench includes a transverse support, a longitudinal support, and a support beam. Two transverse supports are arranged at intervals relative to each other, and two first horizontal transverse motion modules and two second horizontal transverse motion modules are arranged on each transverse support. Two longitudinal supports are arranged at intervals relative to each other at both ends of the transverse supports to form a rectangular frame together with the transverse supports. The first horizontal longitudinal motion modules and the second horizontal longitudinal motion modules are arranged on the same longitudinal support. The support beam is fixedly arranged in the loading space, and multiple support beams are combined to form a loading platform for supporting the plate.

[0016] Preferably, the purging module includes an air knife, an air pipe, a pressure regulating device, and a gas delivery component. The air knife has the air inlet, one end of the air pipe is connected to the air knife, the other end of the air pipe is connected to the gas delivery component, the pressure regulating device is disposed on the air pipe, and the gas delivery component is connected to the control module.

[0017] Preferably, the horizontal automatic blowing machine further includes a third drive module, wherein the first horizontal longitudinal motion module and the second horizontal longitudinal motion module are each connected to the third drive module. The third drive module is connected to the blowing module and can drive the blowing module to move closer to or away from the plate in the vertical direction.

[0018] Preferably, the control module includes a first detection unit, a second detection unit, and a control unit. The first detection unit is used to detect the straight-line distance between the air outlet and the plate. The second detection unit is used to detect the horizontal and vertical dimensions of the plate. The control unit is connected to the first drive module, the second drive module, the third drive module, and the pressure regulating device.

[0019] Preferably, both the first detection unit and the second detection unit are connected to the control unit.

[0020] Preferably, the control module further includes a display terminal screen, which is connected to the first detection unit, the second detection unit, and the control unit.

[0021] Preferably, the blowing module includes a dust suction hood, and the dust suction hood and the air blowing port are respectively disposed on opposite sides of the plate.

[0022] Preferably, the bottom of the worktable is also provided with a movable component.

[0023] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0024] This utility model provides a horizontal automatic blowing machine, including a worktable, a first drive module, a second drive module, a blowing module, and a control module. The first drive module and the second drive module are respectively arranged at the upper and lower ends of the worktable along the vertical direction, defining a loading space between the first drive module and the second drive module for placing the plate to be blown. The first drive module includes a first horizontal lateral movement module and a first horizontal longitudinal movement module, which are perpendicular to each other and are driveably connected to the first horizontal longitudinal movement module, which is also driveably connected to the blowing module. The second drive module includes a second horizontal lateral movement module and a second horizontal longitudinal movement module, which are perpendicular to each other and are driveably connected to the blowing module. The blowing module has air ports arranged opposite to the plate. The control module is connected to the blowing module and can control the two blowing modules to blow the opposite surfaces of the plate. With the above settings, the horizontal automatic blowing machine can perform all-round blowing and cleaning of the board. In addition, the horizontal automatic blowing machine can make high-pressure gas evenly and effectively enter the through holes opened on the board to clean the adhering dust particles. Compared with manual blowing, it is more efficient and effective, reducing the high defect rate of the board due to dust particles. At the same time, it can also solve the problems of low automation and poor safety of existing blowing methods. Attached Figure Description

[0025] Figure 1 This is a schematic diagram showing the connection between the horizontal automatic purging machine and the plate provided by this utility model;

[0026] Figure 2 This is an isometric view of the horizontal automatic purging machine provided by this utility model;

[0027] Figure 3 This is a front view of the horizontal automatic purging machine provided by this utility model.

[0028] In the picture:

[0029] 100. Diffuser tablet;

[0030] 1. Workbench; 11. Horizontal support; 12. Vertical support; 13. Support beam; 2. First drive module; 21. First horizontal movement module; 22. First horizontal vertical movement module; 3. Second drive module; 31. Second horizontal movement module; 32. Second horizontal vertical movement module; 4. Blowing module; 41. Air knife; 5. Moving component. Detailed Implementation

[0031] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0032] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0035] Current Diffuser 100 cleaning and regeneration technologies generate a large amount of dust particles inside the through-holes of the Diffuser 100. It is necessary to reduce the dust particles inside the holes to below a required level. Currently, after cleaning and regeneration, the Diffuser 100 is mainly suspended in mid-air, and air is manually blown out from the bottom using an air gun. However, this method results in uneven airflow, limited effectiveness, and the safety risk of the Diffuser 100 falling. Therefore, this invention provides a horizontal automatic blowing machine to improve the uniformity and safety of blowing the Diffuser 100.

[0036] The technical solution provided by this utility model will be described below with reference to the accompanying drawings and specific embodiments.

[0037] Combination Figures 1 to 3 As shown, this embodiment provides a horizontal automatic cleaning machine, including a worktable 1, a first drive module 2, a second drive module 3, a cleaning module 4, and a control module. The first drive module 2 and the second drive module 3 are respectively arranged at the upper and lower ends of the worktable 1 along the vertical direction, forming a loading space between them for placing the plates to be cleaned. The first drive module 2 includes a first horizontal transverse motion module 21 and a first horizontal longitudinal motion module 22, which are perpendicular to each other (see reference). Figure 1 The first horizontal lateral motion module 21 is parallel to the X-axis, and the first horizontal longitudinal motion module 22 is parallel to the Y-axis. The first horizontal lateral motion module 21 is drivenly connected to the first horizontal longitudinal motion module 22, and the first horizontal longitudinal motion module 22 is drivenly connected to the blowing module 4. The second drive module 3 includes a second horizontal lateral motion module 31 and a second horizontal longitudinal motion module 32, which are perpendicular to each other and are drivenly connected to the blowing module 4. In addition, the blowing module 4 has an air outlet that is opposite to the plate. The control module is connected to the blowing module 4 and can control the two blowing modules 4 to blow on the opposite surfaces of the plate.

[0038] It should be noted that in other parallel embodiments, the first horizontal transverse motion module 21, the first horizontal longitudinal motion module 22, the second horizontal transverse motion module 31, and the second horizontal longitudinal motion module 32 can be directly fixed to the worktable 1 by welding or other means, or they can be detachably connected to the worktable 1 by threaded connection, snap-fit, or other means. As long as it is ensured that the first horizontal transverse motion module 21, the first horizontal longitudinal motion module 22, the second horizontal transverse motion module 31, and the second horizontal longitudinal motion module 32 can be stably connected to the worktable during use, they all fall within the protection scope of this utility model, and this utility model does not limit them in this regard.

[0039] In practical use, for example, the panel is a diffuser plate 100 made of aluminum. First, the diffuser plate 100 is placed at a preset position in the carrying space. Blowing modules 4 are respectively provided on the upper and lower sides of the diffuser plate 100. Preferably, the control module first drives the second drive module 3 to start, so that the second horizontal movement module 31 and the second horizontal vertical movement module 32 drive the blowing module 4 to sweep across every position on the lower surface of the diffuser plate 100. At the same time, the control module drives the blowing module 4 connected to the second drive module 3 to blow air onto the lower surface of the diffuser plate 100, so that the dust particles attached to the lower surface of the diffuser plate 100 and in the through holes can be blown away. Then, the control module drives the first drive module 2 and the blowing module 4 connected to the first drive module 2 to start, so that the first horizontal movement module 21 and the first horizontal vertical movement module 22 drive the blowing module 4 to sweep through every position on the upper surface of the Diffuser plate 100, so that the dust particles attached to the upper surface of the Diffuser plate 100 and in the through holes can be blown away.

[0040] With the above settings, the Diffuser flat panel 100 can be thoroughly cleaned by blowing air, and it can also meet the cleaning requirements of all different sizes of Diffuser flat panel 100 products currently on the market. Furthermore, this horizontal automatic blower allows high-pressure gas to be evenly and effectively introduced into the through-holes to clean dust particles, resulting in higher efficiency and better performance compared to manual blowing. This reduces the high defect rate of Diffuser flat panel 100 caused by dust particles, and also solves the problems of low automation and poor safety in existing blowing methods.

[0041] Optionally, the blowing module 4 includes a dust suction hood, with the dust suction hood and air outlet respectively located on opposite sides of the panel. During the blowing process of the blowing module 4 moving to blow clean the diffuser plate 100, the dust suction hood collects dust particles blown out from the through-holes, preventing the blown dust particles from re-scattering and adsorbing onto the diffuser plate 100, thus ensuring blowing efficiency and effectiveness. The dust suction hood can be connected to an external vacuum pump, which absorbs the gas inside the dust suction hood, thereby creating a negative pressure environment within the hood to absorb dust particles.

[0042] refer to Figure 2As shown, in this embodiment, the workbench 1 specifically includes a transverse support 11, a longitudinal support 12, and a support beam 13. The two transverse supports 11 are arranged at intervals relative to each other, and a first horizontal transverse motion module 21 and a second horizontal transverse motion module 31 are mounted on the transverse supports 11. The two longitudinal supports 12 are arranged at intervals relative to each other at both ends of the transverse supports 11, and a first horizontal longitudinal motion module 22 and a second horizontal longitudinal motion module 32 are mounted on the longitudinal supports 12. The longitudinal supports 12 and the transverse supports 11 together form a rectangular frame, improving the support strength and stability of the workbench 1. Preferably, the transverse support 11 and the longitudinal support 12 are made of stainless steel profiles, which have strong bending resistance and can provide high load-bearing capacity for the first horizontal transverse motion module 21, the first horizontal longitudinal motion module 22, the second horizontal transverse motion module 31 and the second horizontal longitudinal motion module 32. This ensures the installation stability of the first horizontal transverse motion module 21, the first horizontal longitudinal motion module 22, the second horizontal transverse motion module 31 and the second horizontal longitudinal motion module 32, as well as the precise connection relationship between the first horizontal transverse motion module 21 and the first horizontal longitudinal motion module 22, the second horizontal transverse motion module 31 and the second horizontal longitudinal motion module 32.

[0043] In addition, the support beams 13 are also made of stainless steel profiles, and multiple support beams 13 are fixedly connected in the cavity enclosed by the transverse support 11 and the longitudinal support 12. The multiple support beams 13 can be arranged at intervals along the same direction or arranged in a cross-shaped grid so that the multiple support beams 13 can be combined together to form a platform for supporting the plate, thereby ensuring that the Diffuser plate 100 can be stably attached to the platform during the blowing and cleaning process, thus ensuring the blowing and cleaning effect.

[0044] Optionally, in this embodiment, along the extension direction of the first horizontal longitudinal motion module 22, each end of the first horizontal longitudinal motion module 22 is connected to a first horizontal transverse motion module 21, and the two first horizontal transverse motion modules 21 are respectively mounted on two transverse supports 11; along the extension direction of the second horizontal longitudinal motion module 32, each end of the second horizontal longitudinal motion module 32 is connected to a second horizontal transverse motion module 31, and the two second horizontal transverse motion modules 31 are respectively mounted on two transverse supports 11, and the first horizontal longitudinal motion module 22 and the second horizontal longitudinal motion module 32 are mounted on the same longitudinal support 12. Through the above arrangement, the horizontal movement stability of the first horizontal longitudinal motion module 22 and the second horizontal longitudinal motion module 32 is improved, and the layout design of the first horizontal longitudinal motion module 22 and the second horizontal longitudinal motion module 32 is optimized, avoiding the complex installation situation caused by installing the first horizontal longitudinal motion module 22 and the second horizontal longitudinal motion module 32 on different longitudinal supports 12.

[0045] Optionally, the horizontal automatic blowing mechanism provided in this embodiment may further include a third drive module. The first horizontal longitudinal motion module 22 and the second horizontal longitudinal motion module 32 are each connected to a third drive module. The third drive module is drively connected to the blowing module 4 and can drive the blowing module 4 to move vertically closer to or further away from the diffuser plate 100. This configuration adjusts the straight-line distance between the air outlet and the diffuser plate 100, ensuring that the high-pressure gas blown from the air outlet can more evenly cover each adjacent through hole, achieving higher blowing and cleaning efficiency, while also better protecting the diffuser plate 100 from scratches caused by human factors.

[0046] Specifically, in this embodiment, taking the third drive module connected to the first horizontal longitudinal motion module 22 as an example, the third drive module includes a third guide rail, a third connector, and a third drive component. The third guide rail is connected to the first horizontal longitudinal motion module 22 and extends vertically. The third connector is movably connected to the third guide rail in the vertical direction and is fixedly connected to the purging module 4. The third drive component can drive the third connector to move on the third guide rail, so as to achieve precise control of the straight distance between the purging module 4 and the plate in the vertical direction. At the same time, it can effectively improve the automation control capability, reduce the manual adjustment process, and thus improve the accuracy of the spacing adjustment.

[0047] The structure and working principle of the third drive module connected to the second horizontal longitudinal motion module 32 are the same as those of the third drive module connected to the first horizontal longitudinal motion module 22, so this embodiment will not be described in detail here.

[0048] It should be noted that, in this embodiment, a first drive module 2 and a second drive module 3 with a higher degree of automation can also be used to move the blowing module 4. Exemplarily, the first drive module 2 includes a first guide rail, a first connector, and a first drive component. The first guide rail is connected to the transverse support 11. The first connector is movably connected to the first guide rail along the X-axis and fixedly connected to the second drive module 3. The first drive component can drive the first connector to move on the first guide rail to automatically adjust the blowing position of the blowing module 4 in the X-axis direction. The second drive module 3 includes a second guide rail, a second connector, and a second drive component. Each end of the second guide rail is fixedly connected to a first connector. The second connector is movably connected to the second guide rail along the Y-axis and fixedly connected to a third guide rail. The second drive component can drive the second connector to move on the second guide rail to automatically adjust the blowing position of the blowing module 4 in the Y-axis direction.

[0049] Optionally, in this embodiment, the purging module 4 further includes an air knife 41, an air pipe, a pressure regulating device, and a gas delivery component. The air knife 41 has the aforementioned air inlet, one end of the air pipe is connected to the air knife 41, and the other end of the air pipe is connected to the gas delivery component. The pressure regulating device is mounted on the air pipe, and the gas delivery component is connected to the control module. This configuration allows for the generation of a high-speed, uniform airflow within the air knife 41. Combined with the pressure regulating device, the purging module 4 can adjust the gas flow rate through the air pipe per unit time according to the actual pressure, thereby providing a suitable flow rate of purging gas to the diffuser plate 100. The pressure regulating device can be an electromagnetic pressure valve (e.g., a switch-type electromagnetic valve, a proportional pressure valve, or a digital pressure valve). The electromagnetic pressure valve is connected to the control module, allowing the control module to adjust the gas flow rate by real-time adjustment of the opening of the electromagnetic pressure valve.

[0050] It is understood that in other embodiments, the pressure regulating device may also be a manual pressure regulating valve (such as a manual ball valve or throttle valve), which manually regulates the gas flow in the trachea through manual intervention, resulting in lower cost and greater reliability in extreme environments. Therefore, this invention does not limit the type of pressure regulating device.

[0051] Optionally, the control module provided in this embodiment includes a first detection unit, a second detection unit, and a control unit. The first detection unit is used to detect the vertical distance between the air outlet and the Diffuser plate 100. The second detection unit is used to detect the horizontal and vertical dimensions of the Diffuser plate 100 (i.e., the length and width of the Diffuser plate 100). The control unit is connected to the first drive module 2, the second drive module 3, the third drive module, and the pressure regulating device. This allows the air knife 41 to adjust its distance from the Diffuser plate 100, the horizontal row spacing, the step spacing, and the gas flow rate delivered to the Diffuser plate 100 according to the detection information from the first and second detection units, thereby further improving the automation level and purging efficiency of the horizontal automatic purging machine.

[0052] Specifically, in this embodiment, the first detection unit uses a laser rangefinder, and the second detection unit can use a vision camera or laser scanner or other components with a communication module. Both the first and second detection units are communicatively connected to the control unit. In use, for example, after the Diffuser plate 100 is hoisted and placed flat on the platform, the first detection unit first detects the vertical distance between the air blade 41 and the Diffuser plate 100, and sends the distance information to the control unit. The control unit can determine whether the vertical distance between the two exceeds the target distance value, and based on the determination result, decide whether to adjust the vertical height of the air blade 41 through the third drive module to adjust the vertical distance between the air blade 41 and the Diffuser plate 100 to within the target distance value. Next, the second detection unit is used to obtain the length and width dimensions of the Diffuser plate 100. Based on the captured data, the planar dimensions of the Diffuser plate 100 are obtained. The control unit then controls the air knife 41 to move to a designated point as the purging origin (for example, the lower left corner of the Diffuser plate 100 can be set as the purging origin). The row spacing and step spacing of the air knife 41 are adjusted, and the gas flow rate is adjusted through the air pressure regulating device. Finally, the entire device is started and operated.

[0053] It should be noted that in other embodiments, the control module may also include a display terminal screen connected to the first detection unit, the second detection unit, and the control unit. The first and second detection units can collect, input, and display the vertical distance between the air knife 41 and the diffuser plate 100, as well as the length and width dimensions of the diffuser plate 100. Operators can set the target vertical distance parameters and the specific location of the purging origin according to specific needs. After setting, pressing the start button will send a start signal to the control unit, causing the control unit to execute the above commands, thereby adjusting the vertical distance between the air knife 41 and the diffuser plate 100 to within the target distance value, and ensuring that the air knife 41 is located at the purging origin before purging. This allows the horizontal automatic purging machine to also allow manual operation to adjust the horizontal and vertical positions of the air knife 41, the row spacing and step distance of the air knife 41, and the gas flow rate, ensuring operational safety and reliability. Furthermore, the target vertical distance and the specific location of the purging origin can be adjusted at any time according to needs, providing greater flexibility.

[0054] Optionally, in this embodiment, a moving component 5 is also provided at the bottom of the workbench 1. The moving component 5 can be a slide rail or a roller pair, so that the horizontal automatic purging machine can adjust its working position, thereby facilitating transportation and sorting.

[0055] It should be noted that in other parallel embodiments, the moving component 5 can be directly fixed to the worktable 1 by welding or other methods, or it can be detachably connected to the worktable 1 by threaded connection, snap-fit, or other methods, as long as it ensures that the moving component 5 can be stably connected to the worktable when the worktable 1 needs to be moved. Furthermore, in other parallel embodiments, the moving component 5 can be a roller pair with a self-locking function to ensure that the worktable 1 remains stable and does not move during the purging process of the diffuser plate 100.

[0056] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0057] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A horizontal automatic purging machine, characterized by, include: The system comprises a workbench (1), a first drive module (2), a second drive module (3), a purging module (4), and a control module, wherein: The workbench (1) is provided with the first drive module (2) and the second drive module (3) at its upper and lower ends along the vertical direction, respectively. The first drive module (2) and the second drive module (3) define a loading space, which is used to place the plate to be purged. The first drive module (2) includes a first horizontal lateral motion module (21) and a first horizontal longitudinal motion module (22). The first horizontal lateral motion module (21) and the first horizontal longitudinal motion module (22) are perpendicular to each other. The first horizontal lateral motion module (21) is driven to the first horizontal longitudinal motion module (22), and the first horizontal longitudinal motion module (22) is driven to the purging module (4). The second drive module (3) includes a second horizontal lateral motion module (31) and a second horizontal longitudinal motion module (32). The second horizontal lateral motion module (31) and the second horizontal longitudinal motion module (32) are perpendicular to each other. The second horizontal lateral motion module (31) is driven to the second horizontal longitudinal motion module (32), and the second horizontal longitudinal motion module (32) is driven to the purging module (4). The purging module (4) has an air blowing port disposed opposite to the plate, and the air blowing port can guide gas onto the plate; The control module is connected to the purging module (4) and is configured to control the two purging modules (4) to purify the two opposite surfaces of the plate.

2. The horizontal automatic purging machine according to claim 1, characterized in that, Along the extension direction of the first horizontal longitudinal motion module (22), each end of the first horizontal longitudinal motion module (22) is connected to a first horizontal transverse motion module (21); Along the extension direction of the second horizontal longitudinal motion module (32), each end of the second horizontal longitudinal motion module (32) is connected to a second horizontal transverse motion module (31), and the first horizontal longitudinal motion module (22) and the second horizontal longitudinal motion module (32) are arranged in parallel.

3. The horizontal automatic purging machine according to claim 2, characterized in that, The workbench (1) includes a transverse support (11), a longitudinal support (12), and a support beam (13). Two transverse supports (11) are arranged at intervals relative to each other, and two first horizontal transverse motion modules (21) and two second horizontal transverse motion modules (31) are arranged on each transverse support (11). Two longitudinal supports (12) are arranged at intervals relative to each other at both ends of the transverse supports (11) to form a rectangular frame together with the transverse supports (11). The first horizontal longitudinal motion module (22) and the second horizontal longitudinal motion module (32) are arranged on the same longitudinal support (12). The support beam (13) is fixedly arranged in the loading space, and multiple support beams (13) are combined to form a loading platform for supporting the plate.

4. The horizontal automatic purging machine according to claim 1, characterized in that, The purging module (4) includes an air knife (41), an air pipe, a pressure regulating device, and a gas delivery component. The air knife (41) has the air inlet. One end of the air pipe is connected to the air knife (41), and the other end of the air pipe is connected to the gas delivery component. The pressure regulating device is installed on the air pipe, and the gas delivery component is connected to the control module.

5. The horizontal automatic purging machine according to claim 4, characterized in that, The horizontal automatic blowing machine also includes a third drive module. The first horizontal longitudinal motion module (22) and the second horizontal longitudinal motion module (32) are each connected to the third drive module. The third drive module is connected to the blowing module (4) and can drive the blowing module (4) to move closer to or further away from the plate in the vertical direction.

6. The horizontal automatic purging machine according to claim 5, characterized in that, The control module includes a first detection unit, a second detection unit, and a control unit. The first detection unit is used to detect the straight distance between the air outlet and the plate. The second detection unit is used to detect the horizontal and vertical dimensions of the plate. The control unit is connected to the first drive module (2), the second drive module (3), the third drive module, and the pressure regulating device.

7. The horizontal automatic purging machine according to claim 6, characterized in that, Both the first detection unit and the second detection unit are connected to the control unit.

8. The horizontal automatic purging machine according to claim 6, characterized in that, The control module also includes a display terminal screen, which is connected to the first detection unit, the second detection unit, and the control unit.

9. The horizontal automatic purging machine according to claim 1, characterized in that, The blowing module (4) includes a dust suction hood, and the dust suction hood and the air blowing port are respectively disposed on opposite sides of the plate.

10. The horizontal automatic purging machine according to claim 1, characterized in that, The bottom of the workbench (1) is also provided with a moving component (5).

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