Automated handling conveyor line and test system for power semiconductor device testing

Abstract

This utility model relates to an automated transport line and testing system for testing power semiconductor devices. The system comprises N testing devices, where N is greater than or equal to two, arranged side-by-side along a first straight line. The transport line includes: a tray, each capable of holding N devices simultaneously; a first conveying channel located in front of the inlet of the testing devices for transporting the trays; a gripper mechanism comprising N gripper units, each gripper unit gripping one device; and a transport device, with the N gripper units mounted on the moving end of the transport device. The transport device drives the gripper mechanism to move, adapting the gripper units to grip the N devices on the trays and sequentially transporting the N devices to each testing device. After testing, once the N gripper units have sequentially gripped the N devices, the transport device drives the gripper mechanism to move, transporting the devices to the next workstation, thereby saving space while improving testing efficiency.

Description

Technical Field

[0001] This utility model relates to the field of power semiconductor device testing technology, and in particular to an automated transport line and testing system for power semiconductor device testing. Background Technology

[0002] Power semiconductor devices, such as IGBT modules, are widely used in various industries as core components for energy conversion and transmission, and their demand is increasing daily. Currently, power semiconductor devices require various tests during the production process to ensure their performance meets requirements, such as insulation testing and dynamic / static testing.

[0003] With the automation of production and the demand for increased capacity, the testing efficiency of current production lines cannot match the capacity requirements, and it is necessary to increase the testing cycle time. However, increasing production volume is constrained by space limitations. Therefore, there is an urgent need to develop a miniaturized, high-efficiency automated testing system. Utility Model Content

[0004] In response to the shortcomings of the existing production technology, the applicant provides an automated transport line and testing system for power semiconductor device testing, thereby saving space while improving testing efficiency.

[0005] The technical solution adopted in this utility model is as follows:

[0006] An automated transport line for testing power semiconductor devices, comprising N test devices (N being greater than or equal to two) arranged side-by-side along a first straight line, the transport line including:

[0007] Trays, each tray can hold N devices at the same time;

[0008] The first conveying channel is located in front of the feed inlet of the testing equipment and is used to convey the tray;

[0009] The gripper mechanism comprises N gripper units, each gripper unit being used to grip one device;

[0010] The conveying device has N gripper units installed on its moving end;

[0011] The transport device drives the gripper mechanism to move, so that the gripper unit is adapted to grasp N devices on the tray and transport the N devices to each test device in sequence. After the test is completed, after the N gripper units grasp the N devices in sequence, the transport device drives the gripper mechanism to move and transport the devices to the next workstation.

[0012] As a further improvement to the above technical solution:

[0013] The conveying direction of the first conveying channel is parallel to the first straight line direction, and the next station includes an NG receiving station and a material unloading station;

[0014] The conveyor line also includes a second conveyor channel. The NG receiving station is located between the first conveyor channel and the testing equipment. One end of the second conveyor channel is located below the NG receiving station and is connected to the gripper unit for receiving devices that do not meet the requirements after testing. The other end of the second conveyor channel is located outside the range of motion of the gripper unit.

[0015] The unloading station is located on an empty tray in the first conveyor channel and is used to receive devices that have been tested and meet the requirements.

[0016] The gripper mechanism also includes an information acquisition device installed on the mobile end of the conveying device, and the control systems of the testing equipment and the conveyor line are both electrically connected to the information acquisition device.

[0017] The conveying direction of the second conveying channel is perpendicular to that of the first conveying channel, and the second conveying channel is located below the first conveying channel.

[0018] The first conveying channel is provided with a material gripping station and a material discharging station along the conveying direction;

[0019] The material handling station is used to position and place the tray containing the components to be tested, while the material unloading station is used to position and place the tray containing the components that have been tested and meet the requirements.

[0020] The first conveyor channel is provided with a positioning mechanism for positioning the pallet at the gripping station and the unloading station, the positioning mechanism comprising:

[0021] Two blocking mechanisms are provided, located downstream of the material gripping station and downstream of the material discharging station, respectively, to prevent the pallet from moving along the conveying direction of the first conveying channel.

[0022] There are two lifting mechanisms, one located below the material grabbing station and the other below the material unloading station, used to position and lift the pallet and detach it from the first conveying channel.

[0023] The conveying device includes:

[0024] A first linear drive mechanism, wherein the moving direction of the drive end of the first linear drive mechanism is a second linear direction, the second linear direction is perpendicular to the first linear direction and both are horizontal, and the first linear direction is parallel to the conveying direction of the first conveying channel.

[0025] The second linear drive mechanism has a mounting end fixedly connected to the driving end of the first linear drive mechanism, and the moving end of the second linear drive mechanism moves in the first linear direction.

[0026] The third linear drive mechanism has its mounting end fixedly connected to the drive end of the second linear drive mechanism. The drive end of the third linear drive mechanism moves vertically and is the moving end of the conveying device.

[0027] The N devices on the tray are placed side by side, and the arrangement direction of the N devices is consistent with or perpendicular to the first straight line direction. The arrangement of the N gripper units is the same as the arrangement of the N devices.

[0028] The gripper mechanism also includes a rotary drive mechanism installed at the drive end of the third linear drive mechanism, and N gripper units are fixedly installed at the output end of the rotary drive mechanism.

[0029] Each testing device is equipped with a feeding and transfer mechanism at its inlet, the feeding and transfer mechanism comprising:

[0030] A fourth linear drive mechanism, wherein the mounting end of the fourth linear drive mechanism is fixedly connected to the test equipment, and the moving direction of the driving end of the fourth linear drive mechanism is consistent with the second linear direction;

[0031] A transfer fixture is fixedly connected to the drive end of the fourth linear drive mechanism, and the transfer fixture is used to position and place the device.

[0032] The fourth linear drive mechanism drives the transfer fixture into the testing equipment for testing and drives the transfer fixture out of the testing equipment, which is suitable for the gripper unit to grasp and place the device.

[0033] A test system for testing power semiconductor devices includes any of the above-described automated transport lines for testing power semiconductor devices, and also includes N test devices arranged side by side along the first straight line direction.

[0034] The beneficial effects of this utility model are as follows:

[0035] This utility model features a compact and reasonable structure and is easy to operate. By setting up a first conveyor channel in front of N test devices arranged side by side, N devices are transported at a time using a pallet, and the handling device simultaneously grabs the N devices, completing the loading before testing and unloading after testing. This allows one conveyor line to be suitable for loading and unloading multiple test devices, with multiple devices being loaded and unloaded sequentially. This reduces the number of times the handling device moves between the test devices and the first conveyor channel, making the layout of the test equipment and conveyor line of the test system compact, saving space while improving testing efficiency.

[0036] This utility model also has the following advantages:

[0037] (1) The position for receiving non-compliant devices is set between the first conveyor channel and the testing equipment. The empty tray after loading and testing is used as the station for receiving compliant devices, and the first conveyor channel transports them. This achieves separate unloading of different devices after testing without increasing the travel of the moving end of the handling device.

[0038] (2) The first conveyor receives the device to be tested and conveys the compliant device to be transferred. The conveying direction of the second conveyor is different from and perpendicular to the conveying direction of the first conveyor, which facilitates the automated connection between the first conveyor and the upstream and downstream of the testing system, saves space and optimizes the layout.

[0039] (3) By setting two stations on the first conveyor channel for positioning and loading of the device and positioning and unloading of the device respectively, the gripper mechanism can immediately pick up the material after unloading, shortening the waiting time of the test equipment and improving the test efficiency.

[0040] (4) The handling device is a three-axis robotic arm, which reduces the cost of the handling device. In addition, the handling device can be installed as a whole in the space between the first conveying channel and the testing equipment, so as to reduce the footprint of the entire testing system while handling. Attached Figure Description

[0041] Figure 1 This is a schematic diagram of the structure of this utility model.

[0042] Figure 2 This is a perspective view (top view) of the present invention.

[0043] Figure 3 This is a perspective view (bottom view) of the present invention.

[0044] Figure 4 This is a schematic diagram of the structure of the first conveying channel of this utility model.

[0045] Figure 5 This is a schematic diagram of the gripper mechanism of this utility model.

[0046] Figure 6 This is a schematic diagram of the feeding and transfer mechanism of this utility model.

[0047] in:

[0048] 1. Testing equipment;

[0049] 2. Feeding and transferring mechanism; 21. Fourth linear drive mechanism; 22. Transfer fixture; 23. Sensor;

[0050] 3. Conveying device; 31. First linear drive mechanism; 32. Second linear drive mechanism; 33. Third linear drive mechanism;

[0051] 4. Gripper mechanism; 41. Gripper unit; 42. Rotary drive mechanism; 43. Information acquisition device;

[0052] 5. First conveyor channel; 51. Detection device; 52. Blocking mechanism; 53. Lifting mechanism;

[0053] 6. Pallet; 7. NG receiving station; 8. Second conveyor channel; 9. Components. Detailed Implementation

[0054] The specific embodiments of this utility model are described below with reference to the accompanying drawings.

[0055] Example 1:

[0056] like Figures 1-3 As shown, the automatic transport line for testing power semiconductor devices in this embodiment has N test devices 1 for testing device 9, where N is greater than or equal to two, and the test devices 1 are arranged side by side along the first straight line. The transport line includes a tray 6, a first conveying channel 5, a gripper mechanism 4, and a transport device 3.

[0057] Each tray 6 can hold N devices 9 at the same time;

[0058] The first conveying channel 5 is located in front of the feed inlet of the testing equipment 1 and is used to convey the pallet 6.

[0059] The gripper mechanism 4 includes N gripper units 41, each gripper unit 41 being used to grip one device 9;

[0060] All N gripper units 41 are installed on the moving end of the conveying device 3;

[0061] The conveying device 3 drives the gripper mechanism 4 to move, so that the gripper unit 41 is suitable for gripping N devices 9 on the tray 6 and sequentially transports the N devices 9 to each test device 1. After the test is completed, the N gripper units 41 sequentially grip the N devices 9, and the conveying device 3 drives the gripper mechanism 4 to move, transporting the devices 9 to the next station.

[0062] The testing system for testing device 9 includes testing equipment 1 and a conveyor line for loading and unloading testing equipment 1. Typically, the distance between two adjacent testing equipment 1 is greater than or equal to the distance between two adjacent gripper units 41.

[0063] The conveying direction of the first conveying channel 5 is parallel to or at an angle of less than 90 degrees to the first straight line direction to realize the unidirectional conveying of the tray 6. Alternatively, the conveying direction of the first conveying channel 5 can be perpendicular to the first straight line direction, and the conveying direction of the first conveying channel 5 can be bidirectional. However, one tray 6 can be used to convey N devices 9 at the same time.

[0064] In one specific implementation, such as Figure 2 As shown, the number of devices 9 placed on the tray 6 is two, that is, N is two. The distance between the two test devices 1 is greater than the distance between two adjacent gripper units 41. The working process of the conveyor line during loading and unloading is as follows:

[0065] First, after the gripper unit 41 grips the two devices 9, under the drive of the transport device 3, the gripper mechanism 4 carries the two devices 9 to the test equipment 1, at which time the tray 6 becomes an empty tray 6.

[0066] Then, first place one device 9 in one test device 1, and then place another device 9 in another test device 1;

[0067] After a test device 1 completes the test, one gripper unit 41 of the gripper mechanism 4 grabs the device 9 inside and takes it away. Then the gripper mechanism 4 moves to another test device 1, and the other gripper unit 41 grabs the device 9 inside that has completed the test.

[0068] Finally, the gripper mechanism 4 changes its spatial position under the drive of the conveying device 3, and places the tested device 9 on the empty tray 6 on the first conveying channel 5, which then continues to convey it.

[0069] A first conveyor channel 5 is set up in front of N test devices 1 arranged side by side. A pallet 6 is used to transport N devices 9 at a time, and a handling device 3 simultaneously grabs N devices 9 to complete the loading before testing and unloading after testing. This allows one conveyor line to be used for loading and unloading multiple test devices 1, with multiple devices 9 being loaded and unloaded sequentially. This reduces the number of times the handling device 3 moves between the test devices 1 and the first conveyor channel 5, making the layout of the test devices 1 and the conveyor line of the test system compact, thereby saving space and improving testing efficiency.

[0070] Example 2:

[0071] Among the devices 9 that have completed testing, which are gripped by the gripper unit 41 of the gripper mechanism 4, there may be devices 9 that do not meet the requirements. Based on the first embodiment, this embodiment adds the function of conveying the non-compliant devices 9 separately by the conveyor line.

[0072] The conveying direction of the first conveying channel 5 is parallel to the first straight direction, and the next station includes the NG receiving station 7 and the unloading station B;

[0073] The conveyor line also includes a second conveyor channel 8. The NG receiving station 7 is located between the first conveyor channel 5 and the testing equipment 1. One end of the second conveyor channel 8 is located below the NG receiving station 7 and is connected to the gripper unit 41 to receive the device 9 that does not meet the requirements after testing. The other end of the second conveyor channel 8 is located outside the range of motion of the gripper unit 41.

[0074] The unloading station B is located on an empty tray 6 in the first conveyor channel 5, and is used to receive the tested and qualified devices 9.

[0075] A second conveying channel 8 is set up in the conveyor line to accept non-compliant devices 9. The tray 6 on which the removed devices 9 were originally loaded on the first conveying channel 5 is used as the unloading station B, so that the first conveying channel 5 is used to convey compliant devices 9.

[0076] The position for receiving non-compliant devices 9 is set between the first conveyor channel 5 and the testing equipment 1. The empty tray 6 after loading and testing is used as the station for receiving compliant devices 9, which are then conveyed by the first conveyor channel 5. This allows for the separate unloading of different devices 9 after testing without increasing the travel distance of the moving end of the handling device 3.

[0077] Specifically, the second conveying channel 8 can be a belt conveyor. Unsuitable devices 9 can be buffered on the second conveying channel 8, and manual removal will be prompted when the second conveying channel 8 is full.

[0078] For example, such as Figure 3 As shown, the gripper mechanism 4 also includes an information acquisition device 43 installed on the mobile end of the conveying device 3. The control systems of the testing equipment 1 and the conveyor line are both electrically connected to the information acquisition device 43.

[0079] The information acquisition device 43 collects product information of the device 9 that is grasped or released during the handling process, and transmits it to the control system of the testing equipment 1 and the control system of the conveyor line. It then records and feeds back the product information based on its correspondence. Specifically, the information acquisition device 43 is a barcode scanner or a vision camera.

[0080] Specifically, such as Figure 2As shown, the conveying direction of the second conveying channel 8 is perpendicular to that of the first conveying channel 5, and the second conveying channel 8 is located below the first conveying channel 5.

[0081] The first conveyor channel 5 receives the device 9 to be tested and conveys the compliant device 9 to be transferred. The conveying direction of the second conveyor channel 8 is different from and perpendicular to the conveying direction of the first conveyor channel 5, which facilitates the automated connection between the first conveyor channel 5 and the upstream and downstream of the testing system, saves space, and optimizes the layout.

[0082] Example 3:

[0083] Based on Embodiment 2, in order to further improve testing efficiency, in the conveyor line of this embodiment, the first conveyor channel 5 is provided with a material gripping station A and a material discharging station B along the conveying direction;

[0084] The material handling station A is used to position and place the tray 6 containing the device 9 that needs to be tested, and the material unloading station B is used to position and place the tray 6 containing the device 9 that needs to be tested and meets the requirements.

[0085] The function of the first conveying channel 5 in this embodiment is as follows:

[0086] After the pallet 6 is conveyed to the material grabbing station A, the gripper mechanism 4 grabs N devices 9, and then the empty pallet 6 is conveyed to the material unloading station B. At this time, the position of the material grabbing station A can hold another pallet 6 filled with devices 9 to be tested.

[0087] After the device 9 completes the test, the gripper mechanism 4 places the device 9 on the tray 6 at the unloading station B. The device 9 is the tested and qualified device 9, and then it is transported to the downstream of the first conveying channel 5.

[0088] After the gripper mechanism 4 places the device 9 on the tray 6 at the feeding station B, the gripper unit 41 can immediately move to the gripping station A to grab the device 9 to be tested and transport it to the testing equipment 1.

[0089] By setting two stations on the first conveyor channel 5 for positioning and loading of the device 9 and positioning and unloading of the device 9 respectively, the gripper mechanism 4 can immediately pick up the material after unloading, shortening the waiting time of the test equipment 1 and improving the test efficiency.

[0090] For example, such as Figure 4 As shown, the first conveyor 5 is equipped with a positioning mechanism for positioning the pallet 6 at the gripping station A and the unloading station B. The positioning mechanism includes:

[0091] There are two sets of blocking mechanisms 52, located downstream of the material grabbing station A and the material discharging station B respectively, used to block the pallet 6 from moving along the conveying direction of the first conveying channel 5.

[0092] There are two lifting mechanisms 53, located below the material grabbing station A and the material unloading station B respectively, used to position and lift the pallet 6 and detach the pallet 6 from the first conveying channel 5.

[0093] Specifically, the first conveyor channel 5 includes two parallel conveyor belts that support the pallet 6 from both sides of its bottom, thereby driving the pallet 6 to move along the conveying direction. The blocking mechanism 52 includes a first cylinder fixedly installed on the frame of the first conveyor channel 5. A stop bar is installed at the output end of the first cylinder. When the stop bar extends and is located above the conveyor belt, it acts as a stop. The lifting mechanism 53 includes a second cylinder. A bracket that cooperates with the bottom of the pallet 6 is installed at the output end of the second cylinder. During the contact between the bracket and the pallet 6, the pallet 6 is positioned in the horizontal direction. When the pallet 6 is lifted, it is positioned in the vertical direction. The three-quadrant coordinates of the spatial position of the pallet 6 are fixed, which facilitates the positioning and gripping of the gripper unit 41. The cooperation structure between the bracket and the pallet 6 can be achieved by using a guide post and guide hole insertion structure. The horizontal positioning adjustment of the pallet 6 is achieved during the insertion of the guide post and guide hole.

[0094] In addition, such as Figure 4 As shown, an inspection device 51 is provided upstream of the first conveying channel 5 upstream of the material handling station A. This device is used to determine whether the posture and model of the device 9 conveyed to the first conveying channel 5 meet the requirements. Specifically, the inspection device 51 is a barcode scanner or a vision camera.

[0095] Example 4:

[0096] Based on the above embodiments, the conveying device 3 of the conveyor line in this embodiment includes: a first linear drive mechanism 31, a second linear drive mechanism 32 and a third linear drive mechanism 33.

[0097] The driving end of the first linear drive mechanism 31 moves in the second linear direction, which is perpendicular to the first linear direction and both are horizontal. The first linear direction is parallel to the conveying direction of the first conveying channel 5.

[0098] The mounting end of the first linear drive mechanism 31 is fixedly connected to the driving end of the first linear drive mechanism 31, and the moving end of the second linear drive mechanism 32 moves in the first linear direction.

[0099] The mounting end of the third linear drive mechanism 33 is fixedly connected to the driving end of the second linear drive mechanism 32. The moving direction of the driving end of the third linear drive mechanism 33 is vertical, and the driving end of the third linear drive mechanism 33 is the moving end of the conveying device 3.

[0100] N devices 9 are placed side by side on the tray 6. The arrangement direction of the N devices 9 is the same as or perpendicular to the first straight line direction. The arrangement of the N gripper units 41 is the same as the arrangement of the N devices 9.

[0101] Specifically, the first linear drive mechanism 31, the second linear drive mechanism 32, and the third linear drive mechanism 33 are all linear modules. The second linear drive mechanism 32 is slidably connected to the frame of the conveyor line through a guide rail slider structure, thereby playing the role of sliding support for the second linear drive mechanism 32 and the third linear drive mechanism 33.

[0102] In this embodiment, the handling device 3 is a three-axis robotic arm, which reduces the cost of the handling device 3. In addition, the handling device 3 can be installed as a whole in the space between the first conveying channel 5 and the testing equipment 1, so as to reduce the footprint of the entire testing system while carrying out the handling.

[0103] Specifically, the gripper unit 41 is a gripper cylinder, and the opening direction of the gripper unit 41 is perpendicular to the arrangement direction of the N devices 9, thereby reducing the lateral space occupied by the gripper mechanism 4.

[0104] Furthermore, such as Figure 5 As shown, the gripper mechanism 4 also includes a rotary drive mechanism 42 installed at the drive end of the third linear drive mechanism 33, and N gripper units 41 are fixedly installed at the output end of the rotary drive mechanism 42.

[0105] A rotary drive mechanism 42 is set in the gripper mechanism 4. The rotary drive mechanism 42 can be a rotary cylinder or a rotary mechanism driven by a servo motor, so that the gripper mechanism 4 is compatible with the tray 6 with different placement methods. It can also rotate the gripper unit 41 before loading the test equipment 1 after gripping the device 9, so as to adapt to the placement posture of the device 9 in the test equipment 1 and facilitate adjustment according to the posture requirements of the device 9 under different conditions.

[0106] Furthermore, such as Figure 1 , Figure 2 , Figure 6 As shown, each test device 1 is equipped with a feeding and transfer mechanism 2 at its inlet. The feeding and transfer mechanism 2 includes a fourth linear drive mechanism 21 and a transfer fixture 22.

[0107] The mounting end of the fourth linear drive mechanism 21 is fixedly connected to the test equipment 1, and the moving direction of the driving end of the fourth linear drive mechanism 21 is consistent with the second linear direction.

[0108] The transfer fixture 22 is fixedly connected to the drive end of the fourth linear drive mechanism 21. The transfer fixture 22 is used to position and place the device 9.

[0109] The fourth linear drive mechanism 21 drives the transfer fixture 22 into the test equipment 1 for testing, and drives the transfer fixture 22 out of the test equipment 1, which is suitable for the gripper unit 41 to grip and place the device 9.

[0110] A feeding and transfer mechanism 2 is set at the feed inlet of the testing equipment 1 to reduce the complexity of the gripper mechanism 4 and reduce the complexity of the mechanical structure of the testing system.

[0111] Specifically, the fourth linear drive mechanism 21 is a linear module, the transfer fixture 22 is slidably mounted on the frame of the test equipment 1, and the feeding transfer mechanism 2 also includes a sensor 23 for detecting whether there is a device 9 on the transfer fixture 22.

[0112] Example 5:

[0113] This embodiment proposes a test system for testing power semiconductor devices, including the automated transport line for testing power semiconductor devices according to any of the above embodiments, and also includes N test devices 1 arranged side by side along a first straight direction.

[0114] The above description is an explanation of the present utility model and not a limitation thereof. The scope of the present utility model is defined by the claims. Within the protection scope of the present utility model, any form of modification may be made.

Claims

1. An automated handling conveyor line for power semiconductor device testing, characterized by: The number of test equipment (1) used for testing device (9) is N, where N is greater than or equal to two, and the test equipment (1) is arranged side by side along a first straight line. The conveyor line includes: Tray (6), each tray (6) can hold N devices (9) at the same time; The first conveying channel (5) is located in front of the feed inlet of the test equipment (1) and is used to convey the tray (6); The gripper mechanism (4) includes N gripper units (41), each gripper unit (41) being used to grip a device (9); The conveying device (3) has N gripper units (41) installed on the moving end of the conveying device (3); The conveying device (3) drives the gripper mechanism (4) to move, so that the gripper unit (41) is adapted to grasp N devices (9) on the tray (6) and transport the N devices (9) to each test device (1) in sequence. After the test is completed, after the N gripper units (41) grasp the N devices (9) in sequence, the conveying device (3) drives the gripper mechanism (4) to move and transport the devices (9) to the next station.

2. The automated handling conveyor line for power semiconductor device testing of claim 1, wherein: The conveying direction of the first conveying channel (5) is parallel to the first straight line direction, and the next station includes the NG receiving station (7) and the unloading station (B); The conveyor line also includes a second conveyor channel (8). The NG receiving station (7) is located between the first conveyor channel (5) and the testing equipment (1). One end of the second conveyor channel (8) is located below the NG receiving station (7) and is connected to the gripper unit (41) for receiving devices (9) that do not meet the requirements after testing. The other end of the second conveyor channel (8) is located outside the range of motion of the gripper unit (41). The feeding station (B) is located on an empty tray (6) of the first conveying channel (5) and is used to receive the tested and qualified devices (9).

3. The automated handling conveyor line for power semiconductor device testing of claim 2, wherein: The gripper mechanism (4) also includes an information acquisition device (43) installed on the mobile end of the conveying device (3), and the control system of the test equipment (1) and the conveyor line are both electrically connected to the information acquisition device (43).

4. The automated transport line for power semiconductor device testing as described in claim 2, characterized in that: The conveying direction of the second conveying channel (8) is perpendicular to that of the first conveying channel (5), and the second conveying channel (8) is located below the first conveying channel (5).

5. The automated transport line for power semiconductor device testing as described in claim 2, characterized in that: The first conveying channel (5) is provided with a material gripping station (A) and a material discharging station (B) along the conveying direction; The material handling station (A) is used to position and place the tray (6) containing the device (9) to be tested, and the material unloading station (B) is used to position and place the tray (6) containing the device (9) that has been tested and meets the requirements.

6. The automated transport line for power semiconductor device testing as described in claim 5, characterized in that: The first conveying channel (5) is provided with a positioning mechanism for positioning the pallet (6) at the gripping station (A) and the unloading station (B), the positioning mechanism comprising: The blocking mechanism (52) consists of two sets, located downstream of the material grabbing station (A) and the material discharging station (B), respectively, and is used to block the pallet (6) from moving along the conveying direction of the first conveying channel (5). The lifting mechanism (53) consists of two sets, located below the material grabbing station (A) and the material unloading station (B), respectively, and is used to position and lift the pallet (6) and detach the pallet (6) from the first conveying channel (5).

7. The automated transport line for power semiconductor device testing as described in any one of claims 1-6, characterized in that: The conveying device (3) includes: The first linear drive mechanism (31) has a driving end that moves in a second linear direction. The second linear direction is perpendicular to the first linear direction and both are horizontal. The first linear direction is parallel to the conveying direction of the first conveying channel (5). The second linear drive mechanism (32) has its mounting end fixedly connected to the driving end of the first linear drive mechanism (31), and the moving end of the second linear drive mechanism (32) moves in the first linear direction. The third linear drive mechanism (33) has its mounting end fixedly connected to the drive end of the second linear drive mechanism (32). The moving direction of the drive end of the third linear drive mechanism (33) is vertical. The drive end of the third linear drive mechanism (33) is the moving end of the conveying device (3). The N devices (9) on the tray (6) are arranged in a row, and the arrangement direction of the N devices (9) is consistent with or perpendicular to the first straight line direction. The arrangement of the N gripper units (41) is the same as the arrangement of the N devices (9).

8. The automated transport line for power semiconductor device testing as described in claim 7, characterized in that: The gripper mechanism (4) further includes a rotary drive mechanism (42) installed at the drive end of the third linear drive mechanism (33), and N gripper units (41) are fixedly installed at the output end of the rotary drive mechanism (42).

9. The automated transport line for power semiconductor device testing as described in claim 7, characterized in that: Each testing device (1) is equipped with a feeding transfer mechanism (2) at its inlet, the feeding transfer mechanism (2) comprising: The fourth linear drive mechanism (21) is fixedly connected to the test equipment (1) at its mounting end, and the moving direction of the driving end of the fourth linear drive mechanism (21) is consistent with the second linear direction. A transfer fixture (22) is fixedly connected to the drive end of the fourth linear drive mechanism (21), and the transfer fixture (22) is used to position and place the device (9); The fourth linear drive mechanism (21) drives the transfer fixture (22) into the test equipment (1) for testing, and drives the transfer fixture (22) out of the test equipment (1), which is suitable for the gripper unit (41) to grip and place the device (9).

10. A test system for testing power semiconductor devices, characterized in that: The system includes an automated transport line for testing power semiconductor devices as described in any one of claims 1-9, and further includes N test devices (1) arranged side by side along the first straight direction.

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