Semiconductor gas explosion-proof cabinet with protective structure

Abstract

The utility model relates to gas explosion -proof cabinet technical field discloses a semiconductor gas explosion -proof cabinet with protective structure, including explosion -proof cabinet body, the top of explosion -proof cabinet body inboard is provided with the pressing plate, the bottom of pressing plate is provided with the clamping groove, the inboard of clamping groove is provided with third rubber pad, the bottom of clamping groove is provided with round groove, the lateral wall of round groove evenly is provided with a plurality of air holes, the utility model discloses the inboard of explosion -proof cabinet body is provided with the pressing plate, the bottom of pressing plate is provided with the clamping groove, and the clamping groove is correspondingly set with gas cylinder, can effectively set up the top of gas cylinder inboard in the clamping groove, the bottom of clamping groove is provided with round groove simultaneously, can effectively set up the bottle mouth of gas cylinder inboard in round groove, can effectively seal it, and the air hole in the round groove, the air hole and the connecting mouth intercommunication, can effectively avoid gas outflow, avoid gas leakage, effectively improve the protection effect of explosion -proof cabinet body.

Description

Technical Field

[0001] This utility model relates to the field of gas explosion-proof cabinet technology, and in particular to a semiconductor gas explosion-proof cabinet with a protective structure. Background Technology

[0002] Semiconductor gas explosion-proof cabinets are safety equipment specifically designed for storing flammable, explosive, toxic, and harmful gases commonly used in the semiconductor industry. They adopt a double-layer explosion-proof steel plate structure and are equipped with safety components such as gas leak detection alarm devices, pressure relief valves, and anti-static grounding terminals. Some models also have constant temperature control functions. The cabinet body is mostly made of stainless steel, which meets the requirements of cleanrooms. They can effectively isolate risks and prevent explosions or poisoning accidents caused by gas leaks. They are key facilities for ensuring the safety of personnel and equipment in semiconductor production and R&D processes.

[0003] In the semiconductor manufacturing industry, specialty gases such as silane and phosphine, due to their flammable, explosive, and highly toxic properties, require safe storage in semiconductor gas explosion-proof cabinets. Critical sealing components such as pressure reducing valves and valve interfaces at the cylinder openings are exposed for extended periods. When cylinders are moved into the cabinet, or when the cabinet is subjected to external impacts or accidental collisions with internal equipment, problems such as loosening of interfaces and damage to seals can easily occur, directly leading to gas leaks. Leaked specialty gases can not only trigger explosions and poisoning accidents but also contaminate the cleanroom environment, seriously threatening production safety and product quality, becoming a safety hazard that urgently needs to be addressed in the industry.

[0004] Therefore, it is necessary to invent a semiconductor gas explosion-proof cabinet with a protective structure to solve the above problems. Utility Model Content

[0005] The purpose of this utility model is to provide a semiconductor gas explosion-proof cabinet with a protective structure to solve the problem mentioned in the background art. In the semiconductor manufacturing field, special gases such as silane and phosphine are flammable, explosive, and highly toxic, requiring safe storage in semiconductor gas explosion-proof cabinets. However, critical sealing parts such as pressure reducing valves and valve interfaces at the gas cylinder openings are exposed for extended periods. When gas cylinders are moved into the cabinet, or when the cabinet is subjected to external impacts or accidental collisions with internal equipment, problems such as loosening of interfaces and damage to seals are easily caused, directly leading to gas leakage. Leaked special gases may not only trigger explosions and poisoning accidents but also pollute the cleanroom environment, seriously threatening production safety and product quality, becoming a safety hazard that urgently needs to be addressed in the industry.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a semiconductor gas explosion-proof cabinet with a protective structure, comprising an explosion-proof cabinet body, cabinet doors symmetrically arranged at the front end of the explosion-proof cabinet body, a pressure plate arranged at the top of the inner side of the explosion-proof cabinet body, slots symmetrically arranged at the bottom end of the pressure plate, and a third rubber pad arranged on the inner side of the slots.

[0007] The bottom of the card slot is provided with a circular groove, and multiple air holes are evenly opened on the side wall of the circular groove. The circular groove is interconnected with the interior of the pressure plate through the air holes. A connection port is fixedly connected to the side of the pressure plate, and the connection port is interconnected with the interior of the pressure plate.

[0008] As a preferred embodiment, a cylinder is fixedly connected to the top of the explosion-proof cabinet body, the output end of the cylinder passes through the top of the explosion-proof cabinet body and is located inside the explosion-proof cabinet body, and the pressure plate is fixedly connected to the output end of the cylinder.

[0009] As a preferred embodiment, a groove is provided at the bottom of the inner side of the explosion-proof cabinet body, and a bottom plate is slidably connected to the inner side of the groove.

[0010] As a preferred embodiment, each of the four inner corners of the trough is fixedly connected with a sliding rod, and each of the four corners of the base plate is provided with a hole corresponding to the sliding rod. The base plate is slidably connected to the outside of the sliding rod.

[0011] As a preferred embodiment, the top of the base plate is symmetrically provided with placement grooves, and a first rubber pad is provided on the inner side of the placement groove.

[0012] As a preferred embodiment, a connecting rod is fixedly connected to the rear wall inside the explosion-proof cabinet body, and an arc-shaped clamping arm is fixedly connected to the end of the connecting rod. Side fixing blocks are fixedly connected to both sides of the arc-shaped clamping arm, and a second rubber pad is provided on the inner side of the arc-shaped clamping arm.

[0013] The technical effects and advantages of this utility model are as follows:

[0014] 1. This utility model has a pressure plate set on the inner side of the explosion-proof cabinet body. The bottom end of the pressure plate is symmetrically provided with slots, which correspond to the gas cylinder. This can effectively place the top of the gas cylinder inside the slot. At the same time, the bottom end of the slot is provided with a circular groove, which can effectively place the mouth of the gas cylinder inside the circular groove, effectively sealing it. The air hole in the circular groove is connected to the connection port, which can effectively prevent gas from flowing out and prevent gas leakage, thus effectively improving the protective effect of the explosion-proof cabinet body.

[0015] 2. This utility model has a cylinder fixedly connected to the top of the explosion-proof cabinet body, and a pressure plate fixedly connected to the output end of the cylinder, which can drive the pressure plate to move up and down. A bottom plate is provided at the bottom of the inner side of the explosion-proof cabinet body, and a placement groove is symmetrically provided at the top of the bottom plate, which makes it easy to place the gas cylinder inside the placement groove. At the same time, the downward movement of the pressure plate can effectively press the gas cylinder between the pressure plate and the bottom plate, effectively ensuring the stability of the gas cylinder placement. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0017] Figure 2 This is a schematic diagram of the internal structure of the explosion-proof cabinet body in this utility model;

[0018] Figure 3 This is a schematic diagram of the arc-shaped clamping arm in this utility model;

[0019] Figure 4 This is a schematic diagram of the main structure of the pressure plate of this utility model;

[0020] Figure 5 This is a schematic diagram of the structure of the pressure plate in reverse view of this utility model.

[0021] In the picture:

[0022] 1. Explosion-proof cabinet body; 11. Cabinet door; 12. Arc-shaped clamping arm; 13. Base plate; 131. Placement slot; 132. First rubber pad; 133. Slide rod; 134. Slot body; 14. Second rubber pad; 15. Side fixing block; 16. Connecting rod;

[0023] 2. Cylinder; 21. Pressure plate; 22. Connection port; 23. Third rubber gasket; 24. Slot; 25. Circular groove; 26. Air hole. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see the appendix Figure 1 - Appendix Figure 5 A semiconductor gas explosion-proof cabinet with a protective structure includes an explosion-proof cabinet body 1. The explosion-proof cabinet body 1 is a safety device designed specifically for storing flammable, explosive, toxic and harmful gases commonly used in the semiconductor industry. The flammable, explosive, toxic and harmful gases are stored in dedicated gas cylinders, which are stored inside the explosion-proof cabinet body 1. The front end of the explosion-proof cabinet body 1 is symmetrically provided with cabinet doors 11. The top of the inner side of the explosion-proof cabinet body 1 is provided with a pressure plate 21. The bottom end of the pressure plate 21 is symmetrically provided with slots 24. The inner side of the slots 24 is provided with a third rubber pad 23.

[0026] The bottom of the slot 24 is provided with a circular groove 25. Multiple air holes 26 are evenly opened on the side wall of the circular groove 25. The circular groove 25 is connected to the interior of the pressure plate 21 through the air holes 26. A connection port 22 is fixedly connected to the side of the pressure plate 21. The connection port 22 is connected to the interior of the pressure plate 21.

[0027] Specifically, a pressure plate 21 is provided on the inner side of the explosion-proof cabinet body 1. The bottom end of the pressure plate 21 is symmetrically provided with slots 24, which correspond to the gas cylinder. The top of the gas cylinder is effectively placed inside the slot 24. At the same time, a circular groove 25 is provided at the bottom end of the slot 24, which effectively places the mouth of the gas cylinder inside the circular groove 25, effectively sealing it. The air hole 26 provided in the circular groove 25 is connected to the connection port 22, which effectively prevents gas from flowing out and leaking, thus effectively improving the protective effect of the explosion-proof cabinet body 1. By providing the connection port 22, it can be connected to a special hazardous gas collection device. In the event of a leak, it can effectively prevent hazardous gas from being discharged into the interior of the explosion-proof cabinet body 1.

[0028] Please see the appendix Figure 1 Figure 4 A cylinder 2 is fixedly connected to the top of the explosion-proof cabinet body 1. The output end of the cylinder 2 passes through the top of the explosion-proof cabinet body 1 and is located inside the explosion-proof cabinet body 1. The pressure plate 21 is fixedly connected to the output end of the cylinder 2.

[0029] Specifically, a cylinder 2 is fixedly connected to the top of the explosion-proof cabinet body 1. The output end of the cylinder 2 passes through the top of the explosion-proof cabinet body 1 and is located inside the explosion-proof cabinet body 1. The pressure plate 21 is fixedly connected to the output end of the cylinder 2. Thus, the cylinder 2 can drive the pressure plate 21 to move up and down, so as to press the gas cylinder between the pressure plate 21 and the bottom plate 13.

[0030] Please see the appendix Figure 2 The bottom of the inner side of the explosion-proof cabinet body 1 is provided with a groove 134, and the inner side of the groove 134 is slidably connected with a base plate 13.

[0031] Specifically, a groove 134 is provided at the bottom of the inner side of the explosion-proof cabinet body 1. A base plate 13 is slidably connected to the inner side of the groove 134. Two sets of springs are symmetrically arranged at the bottom of the base plate 13. The spring force makes the base plate 13 and the groove 134 level. When the pressure plate 21 moves down to press the gas cylinder, the gas cylinder presses the base plate 13 down, thereby effectively improving the fixing effect of the gas cylinder. After the pressure plate 21 is released, the base plate 13 moves up under the action of the spring, so that the base plate 13 returns to its original position, making it easy to remove the gas cylinder from the placement groove 131.

[0032] Please see the appendix Figure 2 The four inner corners of the trough 134 are fixedly connected with slide rods 133, and the four corners of the base plate 13 are provided with holes corresponding to the slide rods 133. The base plate 13 is slidably connected to the outside of the slide rods 133.

[0033] Specifically, by fixing slide rods 133 to the four corners of the inner side of the tank 134, and providing holes corresponding to the slide rods 133 at the four corners of the base plate 13, the base plate 13 is slidably connected to the outer side of the slide rods 133, thereby effectively ensuring the stability of the movement of the base plate 13 when it moves up and down inside the tank 134.

[0034] Please see the appendix Figure 2 The top of the base plate 13 is symmetrically provided with placement grooves 131, and the inner side of the placement grooves 131 is provided with a first rubber pad 132.

[0035] Specifically, a placement groove 131 is symmetrically provided at the top of the base plate 13, and a first rubber pad 132 is provided on the inner side of the placement groove 131 to facilitate the placement of the gas cylinder on the inner side of the placement groove 131 for positioning.

[0036] Please see the appendix Figure 2 and Figure 3 A connecting rod 16 is fixedly connected to the rear wall inside the explosion-proof cabinet body 1. An arc-shaped clamping arm 12 is fixedly connected to the end of the connecting rod 16. Side fixing blocks 15 are fixedly connected to both sides of the arc-shaped clamping arm 12. A second rubber pad 14 is provided on the inner side of the arc-shaped clamping arm 12.

[0037] Specifically, a connecting rod 16 is fixedly connected to the rear wall inside the explosion-proof cabinet body 1. An arc-shaped clamping arm 12 is fixedly connected to the end of the connecting rod 16. Side fixing blocks 15 are fixedly connected to both sides of the arc-shaped clamping arm 12. A second rubber pad 14 is provided on the inner side of the arc-shaped clamping arm 12. The arc-shaped clamping arm 12 is the same size as the gas cylinder, which can place the gas cylinder inside the arc-shaped clamping arm 12 for limiting. At the same time, the second rubber pad 14 can effectively increase the friction between the gas cylinder and the cylinder. This improves the stability of placement. By fixing side fixing blocks 15 to both sides of the arc-shaped clamping arm 12, and providing another half of the clamping arm on the outside corresponding to the arc-shaped clamping arm 12 and the side fixing blocks 15, after the gas cylinder is placed inside the arc-shaped clamping arm 12, the other half of the clamping arm can be brought close to the arc-shaped clamping arm 12 so that the side fixing blocks 15 on both sides are aligned and installed and fixed with bolts, thereby fixing the gas cylinder therein, that is, effectively fixing the gas cylinder to the inside of the explosion-proof cabinet body 1.

[0038] The working principle of this utility model is as follows: When in use, the gas cylinder to be stored is placed inside the placement slot 131, and the cylinder 2 is started to drive the pressure plate 21 to move downward, so that the top of the gas cylinder is set inside the slot 24 and the mouth of the gas cylinder is set inside the circular slot 25.

[0039] By setting the slot 24 to correspond with the gas cylinder, the top of the gas cylinder can be effectively positioned inside the slot 24. At the same time, the bottom of the slot 24 is provided with a circular groove 25, which can effectively position the mouth of the gas cylinder inside the circular groove 25, effectively sealing it. The air hole 26 provided in the circular groove 25 is interconnected with the connection port 22, which can effectively prevent gas from flowing out and leaking, thus effectively improving the protection effect of the explosion-proof cabinet body 1. By setting the connection port 22, the connection port 22 can be connected to a special harmful gas collection device. If a leak occurs, it can effectively prevent harmful gas from being discharged into the interior of the explosion-proof cabinet body 1.

[0040] By setting cylinder 2 and pressure plate 21, pressure plate 21 presses the gas cylinder between pressure plate 21 and base plate 13, effectively improving the stability of the gas cylinder placement. Simultaneously, a connecting rod 16 is fixedly connected to the rear wall inside the explosion-proof cabinet body 1. An arc-shaped clamping arm 12 is fixedly connected to the end of the connecting rod 16. Side fixing blocks 15 are fixedly connected to both sides of the arc-shaped clamping arm 12. A second rubber pad 14 is provided on the inner side of the arc-shaped clamping arm 12. The arc-shaped clamping arm 12 is the same size as the gas cylinder, allowing the gas cylinder to be placed inside the arc-shaped clamping arm 12 for positioning. The second rubber pad 14 is set to effectively increase the friction between the gas cylinder and the cylinder, thus improving the stability of the placement. Side fixing blocks 15 are fixedly connected to both sides of the arc-shaped clamping arm 12, and another half of the clamping arm corresponding to the arc-shaped clamping arm 12 and the side fixing blocks 15 is set on the outside. After the gas cylinder is placed on the inside of the arc-shaped clamping arm 12, the other half of the clamping arm can be brought close to the arc-shaped clamping arm 12 so that the side fixing blocks 15 on both sides are aligned. The cylinder is then fixed in place by bolts, thus effectively fixing the gas cylinder to the inside of the explosion-proof cabinet body 1.

[0041] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A semiconductor gas explosion-proof cabinet with a protective structure, comprising an explosion-proof cabinet body (1), wherein cabinet doors (11) are symmetrically arranged at the front end of the explosion-proof cabinet body (1), characterized in that: A pressure plate (21) is provided at the top of the inner side of the explosion-proof cabinet body (1), and a slot (24) is symmetrically provided at the bottom of the pressure plate (21), and a third rubber pad (23) is provided on the inner side of the slot (24). The bottom end of the slot (24) is provided with a circular groove (25), and a plurality of air holes (26) are evenly opened on the side wall of the circular groove (25). The circular groove (25) is connected to the interior of the pressure plate (21) through the air holes (26). The side of the pressure plate (21) is fixedly connected with a connection port (22), and the connection port (22) is connected to the interior of the pressure plate (21).

2. The semiconductor gas explosion-proof cabinet with a protective structure according to claim 1, characterized in that: A cylinder (2) is fixedly connected to the top of the explosion-proof cabinet body (1). The output end of the cylinder (2) passes through the top of the explosion-proof cabinet body (1) and is located inside the explosion-proof cabinet body (1). The pressure plate (21) is fixedly connected to the output end of the cylinder (2).

3. A semiconductor gas explosion-proof cabinet with a protective structure according to claim 2, characterized in that: The bottom of the inner side of the explosion-proof cabinet body (1) is provided with a groove (134), and the inner side of the groove (134) is slidably connected with a bottom plate (13).

4. A semiconductor gas explosion-proof cabinet with a protective structure according to claim 3, characterized in that: The four inner corners of the groove (134) are fixedly connected with sliding rods (133), and the four corners of the base plate (13) are provided with holes corresponding to the sliding rods (133). The base plate (13) is slidably connected to the outside of the sliding rods (133).

5. A semiconductor gas explosion-proof cabinet with a protective structure according to claim 4, characterized in that: The top of the base plate (13) is symmetrically provided with placement grooves (131), and a first rubber pad (132) is provided on the inner side of the placement grooves (131).

6. A semiconductor gas explosion-proof cabinet with a protective structure according to claim 5, characterized in that: A connecting rod (16) is fixedly connected to the rear wall inside the explosion-proof cabinet body (1). An arc-shaped clamping arm (12) is fixedly connected to the end of the connecting rod (16). Side fixing blocks (15) are fixedly connected to both sides of the arc-shaped clamping arm (12). A second rubber pad (14) is provided on the inner side of the arc-shaped clamping arm (12).

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