A piezoelectric thin film testing apparatus

Abstract

This utility model discloses a piezoelectric thin film testing device, relating to the field of piezoelectric thin film testing technology. The device includes a base, on which a support frame is fixedly mounted. A transverse moving component is provided on the top surface of the support frame. An electric push rod is fixedly mounted on the moving part of the transverse moving component. A pressure regulating component is fixedly connected to the bottom end of the electric push rod, and a roller is rotatably mounted on the pressure regulating component. In this utility model, the electric push rod allows the roller to contact the piezoelectric thin film. Extending the electric push rod compresses the pressure regulating component, thereby adjusting the pressure on the roller and the piezoelectric thin film. The transverse moving component drives the electric push rod, the pressure regulating component, and the roller to move horizontally on the piezoelectric thin film. The pressure regulating component can detect the pressure of the roller on the piezoelectric thin film, thus enabling performance testing of the piezoelectric thin film under different pressures.

Description

Technical Field

[0001] This utility model relates to the field of piezoelectric thin film testing technology, and specifically to a piezoelectric thin film testing device. Background Technology

[0002] As an important functional material, piezoelectric thin films have wide applications in sensors, actuators, energy conversion and other fields. Accurate testing of the performance parameters of piezoelectric thin films is crucial for their research and development and application.

[0003] Traditional piezoelectric film testing equipment uses a relatively fixed testing pressure when testing piezoelectric films. It cannot flexibly adjust the pressure according to different testing requirements or the specific piezoelectric film, thus failing to meet the testing requirements of various specifications of piezoelectric films.

[0004] Therefore, a piezoelectric thin film testing device is proposed. Utility Model Content

[0005] The purpose of this invention is to provide a piezoelectric thin film testing device to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model specifically adopts the following technical solution:

[0007] A piezoelectric thin film testing device includes a base, on which a support frame is fixedly mounted. A lateral moving component is provided on the top surface of the support frame. An electric push rod is fixedly mounted on the moving part of the lateral moving component. A pressure regulating component is fixedly connected to the bottom end of the electric push rod, and a roller is rotatably mounted on the pressure regulating component.

[0008] Furthermore, two sets of U-shaped limiting frames are fixedly installed on the top surface of the base, so as to limit the piezoelectric film placed on the top surface of the base.

[0009] Furthermore, an oscilloscope is fixedly mounted on the front side wall of the support frame. When testing the piezoelectric film, the piezoelectric film is connected to the oscilloscope via wires.

[0010] Furthermore, the lateral movement assembly includes two sets of electric linear guides fixedly installed on the top surface of the support frame, wherein electric sliders are slidably arranged on the surface of the electric linear guides, and a cross frame is fixedly installed on the top surface of the two sets of electric sliders, and an electric push rod is fixedly installed on the top surface of the cross frame.

[0011] Furthermore, a pressure sensor is fixedly installed at the bottom end of the electric push rod, and a connecting plate is connected to the bottom end of the pressure sensor. Two sets of stepped guide rods are movably inserted into the surface of the connecting plate, and tension springs are sleeved on the surface of the stepped guide rods. The two ends of the tension springs are fixedly connected to the opposite surfaces of the connecting plate and the stepped guide rods, respectively. A wheel frame is fixedly connected to the bottom end of the two sets of stepped guide rods, and rollers are rotatably installed in the wheel frame.

[0012] Furthermore, when the roller contacts the piezoelectric film on the top surface of the base, its tension spring is stretched, and the elastic force of the tension spring reacts on the connecting plate, so that the pressure of the roller on the piezoelectric film can be detected by the pressure sensor.

[0013] The beneficial effects of this utility model are as follows:

[0014] An electric actuator brings the roller into contact with the piezoelectric film. Extending the electric actuator compresses the pressure regulating component, thus adjusting the pressure on the roller and the piezoelectric film. A lateral movement component moves the electric actuator, the pressure regulating component, and the roller horizontally on the piezoelectric film. The pressure regulating component detects the pressure of the roller on the piezoelectric film, thereby enabling performance testing of the piezoelectric film under different pressures. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0016] Figure 2 This is a front view of the present invention;

[0017] Figure 3 This is a partial side view of the present invention;

[0018] Figure 4 This is a partial schematic diagram of the present invention;

[0019] Reference numerals in the attached diagram: 1. Base; 2. U-shaped limiting frame; 3. Support frame; 4. Lateral movement assembly; 401. Electric linear guide rail; 402. Electric slider; 403. Crossbar; 5. Electric push rod; 6. Pressure adjustment assembly; 601. Pressure sensor; 602. Connecting plate; 603. Stepped guide rod; 604. Tension spring; 605. Wheel frame; 7. Roller; 8. Oscilloscope. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0022] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0023] In the description of the embodiments of this utility model, it should be noted that the terms "inner", "outer", "upper", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship that the utility model product is usually placed in during use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] like Figures 1 to 4 As shown, a piezoelectric thin film testing device includes a base 1;

[0025] like Figure 1 , Figure 2 and Figure 3 As shown, in some practical applications, two sets of U-shaped limiting frames 2 are fixedly installed on the top surface of the base 1, so as to limit the piezoelectric film placed on the top surface of the base 1.

[0026] More specifically, when the piezoelectric film is placed on the base 1, the U-shaped limiting frame 2 can prevent the piezoelectric film from shifting during the test.

[0027] A support frame 3 is fixedly installed on the base 1;

[0028] like Figure 1 , Figure 2 and Figure 3 As shown, in some practical applications, an oscilloscope 8 is fixedly installed on the front side wall of the support frame 3. When testing the piezoelectric film, the piezoelectric film is connected to the oscilloscope 8 via wires.

[0029] More specifically, the oscilloscope 8 is used to display the changes in electrical signals of the piezoelectric film in real time during the test. When the roller 7 applies pressure to the piezoelectric film, the piezoelectric film generates a corresponding electrical signal. The electrical signal is transmitted to the oscilloscope 8 through the wires. The oscilloscope 8 converts the electrical signal into a visual waveform, which is convenient for operators to observe and analyze the performance of the piezoelectric film.

[0030] A transverse moving assembly 4 is provided on the top surface of the support frame 3, and an electric push rod 5 is fixedly installed on the moving part of the transverse moving assembly 4; for example Figures 1 to 4 As shown, specifically, the lateral movement component 4 includes two sets of electric linear guide rails 401 fixedly installed on the top surface of the support frame 3. Electric sliders 402 are slidably arranged on the surface of the electric linear guide rails 401. A cross frame 403 is fixedly installed on the top surface of the two sets of electric sliders 402. An electric push rod 5 is fixedly installed on the top surface of the cross frame 403.

[0031] More specifically, the cooperation between the electric linear guide 401 and the electric slider 402 enables the crossbeam 403 to move in the horizontal direction, thereby driving the electric push rod 5 and the pressure adjustment component 6 to move horizontally, so that the roller 7 can roll on the surface of the piezoelectric film.

[0032] The bottom end of the electric push rod 5 is fixedly connected to a pressure regulating component 6, and a roller 7 is rotatably mounted on the pressure regulating component 6; for example Figure 4 As shown, specifically, a pressure sensor 601 is fixedly installed at the bottom of the electric push rod 5. A connecting plate 602 is connected to the bottom of the pressure sensor 601. Two sets of stepped guide rods 603 are movably inserted into the surface of the connecting plate 602. A tension spring 604 is sleeved on the surface of the stepped guide rod 603. The two ends of the tension spring 604 are fixedly connected to the opposite surfaces of the connecting plate 602 and the stepped guide rod 603, respectively. A wheel frame 605 is fixedly connected to the bottom of the two sets of stepped guide rods 603, and a roller 7 is rotatably installed in the wheel frame 605.

[0033] More specifically, when the roller 7 contacts the piezoelectric film, the movable part of the electric push rod 5 extends, causing the pressure sensor 601 and the connecting plate 602 to continue moving downwards. This stretches the tension spring 604, generating a spring force that reacts on the connecting plate 602. The pressure sensor 601 can detect the pressure of the roller 7 on the piezoelectric film. By adjusting the extension and retraction of the electric push rod 5, the stretching degree of the tension spring 604 can be adjusted, thus flexibly adjusting the pressure of the roller 7 on the piezoelectric film to meet different testing requirements. It can adapt to piezoelectric films of various specifications and the pressure can be adjusted according to the testing requirements.

[0034] In some practical applications, when the roller 7 contacts the piezoelectric film on the top surface of the base 1, its tension spring 604 is stretched. The elastic force of the tension spring 604 reacts on the connecting plate 602, so that the pressure of the roller 7 on the piezoelectric film can be detected by the pressure sensor 601.

[0035] More specifically, the pressure sensor 601 detects the pressure of the roller 7 on the piezoelectric film, and the pressure sensor 601 converts the detected pressure signal into an electrical signal and transmits it to the controller.

[0036] In summary: During the test, the electric push rod 5 can bring the roller 7 into contact with the piezoelectric film, and the extension of the electric push rod 5 can compress the pressure regulating component 6, thereby adjusting the pressure on the roller 7 and the piezoelectric film. The lateral movement component 4 can drive the electric push rod 5, the pressure regulating component 6, and the roller 7 to move horizontally on the piezoelectric film. The pressure regulating component 6 can detect the pressure of the roller 7 on the piezoelectric film, thus realizing the performance test of the piezoelectric film under different pressures.

[0037] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A piezoelectric thin film testing device, characterized in that, Includes a base (1), on which a support frame (3) is fixedly installed, and a transverse moving component (4) is provided on the top surface of the support frame (3). An electric push rod (5) is fixedly installed on the moving part of the transverse moving component (4), and a pressure regulating component (6) is fixedly connected to the bottom end of the electric push rod (5). A roller (7) is rotatably installed on the pressure regulating component (6).

2. The piezoelectric thin film testing device according to claim 1, characterized in that, Two sets of U-shaped limiting frames (2) are fixedly installed on the top surface of the base (1) to limit the piezoelectric film placed on the top surface of the base (1).

3. The piezoelectric thin film testing device according to claim 1, characterized in that, An oscilloscope (8) is fixedly installed on the front side wall of the support frame (3). When testing the piezoelectric film, the piezoelectric film is connected to the oscilloscope (8) via a wire.

4. The piezoelectric thin film testing device according to claim 1, characterized in that, The lateral movement component (4) includes two sets of electric linear guides (401) fixedly installed on the top surface of the support frame (3), wherein electric sliders (402) are slidably arranged on the surface of the electric linear guides (401), and a cross frame (403) is fixedly installed on the top surface of the two sets of electric sliders (402), and an electric push rod (5) is fixedly installed on the top surface of the cross frame (403).

5. The piezoelectric thin film testing device according to claim 1, characterized in that, A pressure sensor (601) is fixedly installed at the bottom of the electric push rod (5). A connecting plate (602) is connected to the bottom of the pressure sensor (601). Two sets of stepped guide rods (603) are movably inserted into the surface of the connecting plate (602). A tension spring (604) is sleeved on the surface of the stepped guide rod (603). The two ends of the tension spring (604) are fixedly connected to the opposite surfaces of the connecting plate (602) and the stepped guide rod (603), respectively. A wheel frame (605) is fixedly connected to the bottom of the two sets of stepped guide rods (603), and a roller (7) is rotatably installed in the wheel frame (605).

6. The piezoelectric thin film testing device according to claim 5, characterized in that, When the roller (7) comes into contact with the piezoelectric film on the top surface of the base (1), its tension spring (604) is stretched. The elastic force of the tension spring (604) reacts on the connecting plate (602) so that the pressure of the roller (7) on the piezoelectric film can be detected by the pressure sensor (601).

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