Grinding fluid stirring device

Abstract

The utility model provides a kind of grinding fluid stirring device, including motor module and stirring module, motor module includes stator coil and shell, stator coil is fixed on the inner wall of shell;Stirring module includes base, rotor coil and stirring assembly, rotor coil and stirring assembly are connected, rotor coil and stirring assembly are both fixed on base, base is used to place on stock solution bucket.Stirring assembly has elongation state and contraction state;Motor module is used to place on base, and the position of stator coil and the position of rotor coil correspond, stator coil can drive rotor coil rotation, rotor coil can drive stirring assembly switch between elongation state and contraction state after rotation.The stirring device will motor module and stirring module be set apart, can be conveniently disassembled and assembled of stirring device.And, the stirring assembly of the device can be telescopic, ensure that stirring assembly can be inserted into the bottom of stock solution bucket, can improve the uniformity after grinding fluid is stirred.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a grinding slurry stirring device. Background Technology

[0002] Due to the current diversity of chemical mechanical polishing (CMP) processes and the need for smaller linewidths, the uniformity of the polishing slurry is becoming increasingly important. Many types of polishing slurries contain a large amount of solid abrasive suspended in the solution. To ensure uniform mixing of the abrasive and the solution, a stirring paddle needs to be installed in the stock solution tank for stirring.

[0003] Due to the requirements of chemical mechanical grinding (CMP) processes, the abrasive content in the grinding slurry generally needs to exceed 40%. To ensure the uniformity of the grinding slurry, the stirring paddle in the raw slurry tank needs to be constantly stirring.

[0004] Existing agitators have the following problems: 1. Due to space constraints and manufacturing costs, the internal height of the Central Chemical Supply System (CDS) is limited, and the space between the feed tank and the top of the supply device is narrow, making it impossible to vertically insert or remove the agitator. Shortening the length of the agitator rod makes it difficult to reach the bottom of the feed tank, requiring a longer stirring time. 2. Due to insufficient motor cable length, tilting the agitator inside the feed tank makes it difficult to remove the agitator. Utility Model Content

[0005] To address the problems existing in the prior art, this utility model provides a grinding slurry stirring device. This device separates the motor module from the stirring module, facilitating easy assembly and disassembly. Furthermore, the stirring component of this device is telescopic, ensuring it can reach the bottom of the raw slurry tank, thereby improving the uniformity of the grinding slurry after stirring.

[0006] To achieve the above objectives, this utility model provides a grinding fluid stirring device, including a motor module and a stirring module. The motor module includes a stator coil and a housing, with the stator coil fixed to the inner wall of the housing. The stirring module includes a base, a rotor coil, and a stirring assembly. The rotor coil and the stirring assembly are connected, and both the rotor coil and the stirring assembly are fixed to the base, which is used to place the device on the raw liquid tank.

[0007] The stirring assembly has an extended state and a contracted state; the motor module is used to be placed on the base and to make the position of the stator coil correspond to the position of the rotor coil. The stator coil can drive the rotor coil to rotate, and after the rotor coil rotates, it can drive the stirring assembly to switch between the extended state and the contracted state.

[0008] Optionally, the motor module further includes two fixing hooks, which are rotatably fixed to both sides of the housing and are used to engage with both ends of the raw liquid tank.

[0009] Optionally, the stirring module further includes a speed reduction assembly, which is fixed on the base and connected to the rotor coil and the stirring assembly respectively.

[0010] Optionally, the stirring assembly includes a drive rod and at least two stirring rods, and the deceleration assembly can be selectively connected to either the drive rod or the stirring rods; the drive rod is connected to one of the stirring rods; when the deceleration assembly is connected to the drive rod, the deceleration assembly can drive the drive rod to rotate; after the drive rod rotates, it can drive the connected stirring rod to move relative to the other stirring rods; when the deceleration assembly is connected to the other stirring rod, the deceleration assembly can also drive all the stirring rods to rotate synchronously through the connected stirring rod.

[0011] Optionally, the stirring module further includes stirring blades, which are fixed to a stirring rod at the end of the stirring assembly.

[0012] Optionally, the stirring assembly includes a first stirring rod and a second stirring rod, the second stirring rod being slidably connected to the first stirring rod and rotatably connected to the drive rod; the first stirring rod has a first receiving groove, and the drive rod, when rotated, can drive the second stirring rod to move into or out of the first receiving groove; the first stirring rod is connected to the deceleration assembly, and the deceleration assembly can drive the first stirring rod and the second stirring rod to rotate synchronously.

[0013] Optionally, the stirring module further includes a first connector, which is fixedly connected to the second stirring rod and rotatably connected to the drive rod; after the drive rod rotates, it can drive the second stirring rod to move in its own axial direction through the first connector.

[0014] Optionally, the stirring module further includes a third stirring rod and a second connecting member connected to each other, the third stirring rod being slidably connected to the second stirring rod; the first connecting member includes an upper ring bearing, a lower ring bearing, and a sleeve, the sleeve being fixed to the side of the lower ring bearing away from the upper ring bearing; the upper ring bearing is fixedly connected to the second stirring rod and rotatably connected to the drive rod, the lower ring bearing being slidably connected to the drive rod; the sleeve is rotatably connected to the second connecting member; after the drive rod rotates, it can drive the lower ring bearing and the sleeve to rotate synchronously, and after the sleeve rotates, it can drive the second connecting member and the third stirring rod to move relative to the second stirring rod along their own axial direction.

[0015] Optionally, the second stirring rod has a second receiving groove, and the third stirring rod is capable of moving into or out of the second receiving groove.

[0016] Optionally, the stirring module further includes a third connector, which connects the deceleration assembly and the first stirring rod respectively.

[0017] This application provides a grinding slurry stirring device. This device separates the motor module and the stirring module, allowing for convenient installation and removal in confined spaces, even with a short motor module cable. This avoids frequent cable insertion and removal, which could cause short circuits. Furthermore, the stirring module is extendable. In its retracted state, it can be vertically inserted and removed, preventing tilting. In its extended state, it can reach the bottom of the raw material tank, providing a greater working depth, shortening the stirring time, improving the uniformity of the grinding slurry, and ensuring the grinding effect of the chemical mechanical grinding process. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the grinding fluid stirring device in a preferred embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of the motor module in a preferred embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of the stirring module in a preferred embodiment of the present invention;

[0021] Figure 4 This is a partial structural schematic diagram of the stirring assembly in a preferred embodiment of the present invention, wherein the stirring assembly is in a retracted state;

[0022] Figure 5 This is a partial structural schematic diagram of the stirring assembly in a preferred embodiment of the present invention, wherein the stirring assembly is in an extended state;

[0023] Figure 6 This is a top view of all the stirring rods in a preferred embodiment of the present invention.

[0024] In the picture:

[0025] Motor module 1; stator coil 11; housing 12; fixing hook 13; stirring module 2; base 3; rotor coil 4; stirring assembly 5; drive rod 51; first stirring rod 52; first receiving groove 521; second stirring rod 53; second receiving groove 531; first connecting piece 54; upper bearing ring 541; lower bearing ring 542; sleeve 543; third stirring rod 55; second connecting piece 56; third connecting piece 57; reduction assembly 6; stirring blade 7. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0027] The terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the mechanism or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "fixation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between the components; they can refer to a direct connection or a connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0029] The present invention will now be described in detail with reference to the accompanying drawings and preferred embodiments. Unless otherwise specified, the following embodiments and features can complement or combine with each other.

[0030] Reference Figures 1-3As shown, a preferred embodiment of this utility model provides a grinding fluid stirring device, including a motor module 1 and a stirring module 2. The motor module 1 includes a stator coil 11 and a housing 12, with the stator coil 11 fixed to the inner wall of the housing 12. The stator coil 1 can be constructed from copper wire windings. The stirring module 2 includes a base 3, a rotor coil 4, and a stirring assembly 5. The rotor coil 4 and the stirring assembly 5 are connected, and both the rotor coil 4 and the stirring assembly 5 are fixed to the base 3, which is used to place the device on the raw liquid tank.

[0031] Furthermore, the stirring component 5 has an extended state and a contracted state (see reference). Figure 4 and Figure 5 The motor module 1 is placed on the base 3, with the stator coil 11 corresponding to the rotor coil 4. The stator coil 11 can drive the rotor coil 4 to rotate. Specifically, the stator coil 11 can be connected to a power source via wires. When energized, the stator coil 11 generates magnetic force to drive the rotor coil 4 to rotate. After the rotor coil 4 rotates, it can drive the stirring assembly 5 to switch between an extended state and a contracted state.

[0032] This application provides a grinding slurry stirring device, which separates the motor module 1 and the stirring module 2. This allows for convenient installation and removal of the stirring device in confined spaces, even when the cable length of the motor module 1 is short, avoiding frequent plugging and unplugging of the motor cable that could cause loose connections and short circuits. Simultaneously, the stirring module 2 is telescopic. In its retracted state, the stirring module 2 can be vertically inserted and removed, preventing it from tilting. In its extended state, the stirring module 2 can reach the bottom of the raw material tank, providing a greater working depth, shortening the stirring time, improving the uniformity of the grinding slurry after stirring, and ensuring the grinding effect of the chemical mechanical grinding process.

[0033] The existing stirring paddle is difficult to fix on the raw liquid tank. When the stirring paddle rotates, it generates a counter-torque that causes the stirring paddle motor to shift. If the stirring paddle motor moves more than a certain distance, the stirring paddle will tip over due to the shift in the center of gravity. This causes the rotating stirring paddle to collide with the inner wall of the raw liquid tank, damaging the stirring paddle and potentially causing wear on the inner wall of the raw liquid tank. Particles from the damaged area will mix into the grinding liquid, affecting the grinding effect of the product.

[0034] Reference Figure 1 and Figure 2 As shown, to solve the above problems, the motor module 1 also includes two fixing hooks 13. The two fixing hooks 13 are rotatably fixed on both sides of the housing 12. The two fixing hooks 13 are used to engage with both ends of the original liquid tank, thereby fixing and limiting the motor module 1 and the stirring module 2 on the original liquid tank.

[0035] Specifically, during the installation of the grinding slurry stirring device, the base 3 of the stirring module 2 can be placed on the raw slurry tank first, and the stirring component 5 can be inserted into the raw slurry tank. Then, the motor module 1 is fitted onto the rotor coil 4, and the housing 12 is placed on the base 3. After that, the fixing hooks 13 on both sides of the housing 12 are rotated to make them contact the outer walls of both sides of the raw slurry tank, thereby fixing the stirring device on the raw slurry tank to prevent the stirring component 5 from moving or tilting relative to the raw slurry tank.

[0036] Continue to refer to Figure 3 As shown, the stirring module 2 preferably also includes a speed reduction assembly 6, which is fixed on the base 3 and connected to the rotor coil 4 and the stirring assembly 5 respectively. In one example, one end of the speed reduction assembly 6 is connected to the rotor coil 4, and the other end is connected to the stirring assembly 5. After the rotor coil 4 rotates, it can reduce the rotational speed of the stirring assembly 5 through the speed reduction assembly 6, thereby ensuring that the rotational speed of the stirring assembly 5 meets the requirements.

[0037] Furthermore, referring to Figures 3-5 As shown, the stirring assembly 5 includes a drive rod 51 and at least two stirring rods. A reduction gear 6 can be selectively connected to either the drive rod 51 or one of the stirring rods. The drive rod 51 is connected to one of the stirring rods. When the reduction gear 6 is connected to the drive rod 51, it can drive the drive rod 51 to rotate. After the drive rod 51 rotates, it can drive the connected stirring rod to move relative to the other stirring rods, thereby switching the stirring assembly 5 between an extended state and a contracted state. When the reduction gear 6 is connected to the other stirring rod, it can also drive all the stirring rods to rotate synchronously through the connected stirring rod.

[0038] Reference Figures 3-5 As shown, the stirring module 2 also includes a stirring blade 7, which is fixed to a stirring rod at the end of the stirring assembly 5. That is, the stirring blade 7 is fixed to the end of a stirring rod away from the rotor coil 4.

[0039] It should be noted that the reduction gear 6 can be connected to either the stirring rod or the drive rod 51 as needed, and drive the stirring assembly 5 or the drive rod 51 to rotate. More specifically, the reduction gear 6 can be connected to the drive rod 51 after the stirring assembly 5 is inserted into the raw liquid tank. After the drive rod 51 rotates, it can drive at least one stirring rod to move, thereby changing the stirring assembly 5 from a contracted state to an extended state. At this time, the stirring assembly 5 can extend into the bottom of the raw liquid tank. After the stirring assembly 5 has extended to its full position, the reduction gear 6 needs to be separated from the drive rod 51 and connected to one of the stirring rods. At this time, the reduction gear 6 can drive all the stirring rods and stirring blades 7 to rotate synchronously, so as to continuously stir the abrasive and liquid in the raw liquid tank.

[0040] It should be noted that the specific structure and working process of the deceleration component 6 can be set with reference to the existing structure, and will not be elaborated here.

[0041] Continue to refer to Figure 4 and Figure 5 The stirring assembly 5 includes a first stirring rod 52 and a second stirring rod 53. The second stirring rod 53 is slidably connected to the first stirring rod 52 and rotatably connected to the drive rod 51.

[0042] In one specific example, there are two stirring rods. The outer wall of the drive rod 51 is provided with external threads, and the inner wall of the second stirring rod 52 is provided with internal threads. The second stirring rod 52 is threadedly connected to the drive rod 51. The drive rod 51 rotates under the drive of the reduction assembly 6. Since the first stirring rod 52 and the second stirring rod 53 are slidably connected, after the drive rod 51 rotates, it can only move the second stirring rod 53 relative to the first stirring rod 52 in its own axial direction.

[0043] Reference Figure 5 As shown, the first stirring rod 52 has a first receiving groove 521. After the driving rod 51 rotates, it can drive the second stirring rod 53 to move into or out of the first receiving groove 521. After the stirring module 2 changes from a contracted state to an extended state, the first stirring rod 52 can be connected to the reduction assembly 6. The reduction assembly 6 can drive the first stirring rod 52 and the second stirring rod 53 to rotate synchronously.

[0044] Reference Figure 5 and Figure 6 As shown, the inner wall of the first stirring rod 52 is provided with either a first groove or a first slider extending along its own axial direction, and the outer wall of the second stirring rod 53 is provided with either a first groove or a first slider extending along its own axial direction. The first slider is located in the first groove and can slide in the first groove, thereby realizing the sliding connection between the first stirring rod and the second stirring rod.

[0045] Continue to refer to Figure 4 and Figure 5 The stirring module 2 preferably further includes a first connecting member 54, which is fixedly connected to the second stirring rod 53 and rotatably connected to the drive rod 51. After the drive rod 51 rotates, it can drive the second stirring rod 53 to move in its own axial direction through the first connecting member 54.

[0046] Reference Figure 5 and Figure 6As shown, in a preferred embodiment, the stirring assembly 5 further includes a third stirring rod 55 and a second connecting member 56 connected to it. In this case, the stirring assembly 5 has three stirring rods, with the third stirring rod 55 slidably connected to the second stirring rod 53. The first connecting member 54 includes an upper ring bearing 541, a lower ring bearing 542, and a sleeve 543. The sleeve 543 is fixed to the side of the lower ring bearing 542 away from the upper ring bearing 541, i.e., the sleeve 543 is fixed to the bottom of the lower ring bearing 542. The upper ring bearing 541 is fixedly connected to the second stirring rod 53 and rotatably connected to the drive rod 51 (e.g., threaded connection). The lower ring bearing 542 is slidably connected to the drive rod 51. The upper ring bearing 541 and the lower ring bearing 542 may be thrust ball bearings, but are not limited to this.

[0047] Continue to refer to Figure 5 The sleeve 543 is rotatably connected to the second connecting member 56. After the drive rod 51 rotates, it can drive the lower ring bearing 542 and the sleeve 543 to rotate synchronously. Since the second stirring rod 53 and the third stirring rod 55 are slidably connected, after the sleeve 543 rotates, it can only move the second connecting member 56 and the third stirring rod 55 relative to the second stirring rod 53 in their own axial direction.

[0048] like Figure 5 As shown, the second stirring rod 53 has a second receiving groove 531, and the third stirring rod 55 can move into or out of the second receiving groove 531.

[0049] Continue to refer to Figure 5 and Figure 6 The inner wall of the lower ring bearing 542 is provided with either a second sliding groove or a second sliding block extending along its own axial direction, and the outer wall of the drive rod 51 is provided with either a second sliding groove or a second sliding block extending along its own axial direction. The second sliding block is located in the second sliding groove and can slide in the second sliding groove, thereby realizing the sliding connection between the lower ring bearing 542 and the drive rod 51.

[0050] More preferably, the inner wall of the second stirring rod 53 is provided with either a third groove or a third slider extending along its own axial direction, and the outer wall of the third stirring rod 55 is provided with either a third groove or a third slider extending along its own axial direction. The third slider is located in the third groove and can slide in the third groove, thereby realizing the sliding connection between the third stirring rod 55 and the second stirring rod 53.

[0051] This application does not limit the number of stirring rods. The number of stirring rods depends on the length that the stirring module 2 needs to extend. The number of stirring rods can be set to two, three, four or more as needed.

[0052] More specifically, because the first stirring rod 52 and the second stirring rod 53 are slidably connected, the drive rod 51, after rotating, can only drive the upper ring bearing 541 and the second stirring rod 53 to move axially along the first stirring rod 52, so that the second stirring rod 53 moves into or out of the first receiving groove 521. After the upper ring bearing 541 moves, it moves axially synchronously with the lower ring bearing 542 and the sleeve 543. Because the lower ring bearing 542 is slidably connected to the drive rod 51, the lower ring bearing 542 and the sleeve 543 can also rotate under the drive of the drive rod 51 while moving axially relative to the drive rod 51. After the sleeve 543 rotates, it can drive the second connecting member 56 and the third stirring rod 55 to move axially relative to the second stirring rod 53, thereby causing the third stirring rod 55 to move into or out of the second receiving groove 531.

[0053] Reference Figure 4 and Figure 5 As shown, in a preferred embodiment, the stirring assembly 5 further includes a third connector 57, which connects the deceleration assembly 6 and the first stirring rod 52 respectively, so as to transmit the motion of the deceleration assembly 6 to the first stirring rod 52.

[0054] In a non-limiting embodiment, the grinding slurry stirring device is used as follows:

[0055] Place the base 3 of the stirring module 2 on the raw liquid tank. Then, put the housing 12 of the motor module 1 onto the rotor coil 4 and place the housing 12 on the base 3. Then rotate the fixing hooks 13 on both sides of the housing 12 so that the fixing hooks 13 on both sides contact the outer walls of the raw liquid tank, thereby fixing the stirring device on the raw liquid tank.

[0056] Connect the reduction gear assembly 6 to the drive rod 51. Start the motor to energize the stator coil 11, which drives the rotor coil 4 to rotate. After the rotor coil 4 rotates, it drives the drive rod 51 to rotate via the reduction gear assembly 6. After the drive rod 51 rotates, it drives the second stirring rod 53 to extend from the first receiving groove 521 via the upper ring bearing 541. At the same time, the drive rod 51 drives the third stirring rod 55 to extend from the second receiving groove 531 via the sleeve 543 and the second connecting piece 56, thereby changing the stirring module 2 from a contracted state to an extended state.

[0057] Then, the deceleration assembly 6 is separated from the drive rod 51 and connected to the third connector 57. After the rotor coil 4 rotates, it drives the first stirring rod 52, the second stirring rod 53, the third stirring rod 55 and the stirring blade 7 to rotate synchronously through the deceleration assembly 6, thereby stirring the medicine and abrasive in the original liquid tank.

[0058] After stirring is complete, the deceleration assembly 6 is separated from the third connecting piece 57 and connected to the drive rod 51, thereby changing the stirring module 2 from an extended state to a retracted state. Then, the power supply to the stator coil 11 is cut off, the fixed hooks 13 on both sides are rotated, and the motor module 1 is removed. Then, the stirring assembly 2 is pulled vertically out of the raw liquid tank.

[0059] In summary, this utility model provides a grinding slurry stirring device. This device separates the motor module 1 and the stirring module 2, allowing for convenient installation and removal in confined spaces, even with a short cable length for the motor module 1. This avoids frequent plugging and unplugging of the motor cable, which could cause loose connections and short circuits. Furthermore, the stirring module 2 is telescopic. In its retracted state, the stirring module 2 can be vertically inserted and removed, preventing it from tilting. In its extended state, the stirring module 2 can reach the bottom of the raw material tank, providing a greater working depth, shortening the stirring time, improving the uniformity of the grinding slurry after stirring, and ensuring the grinding effect of the chemical mechanical grinding process.

[0060] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present utility model.

Claims

1. A grinding fluid stirring device, characterized in that, The device includes a motor module and a stirring module. The motor module includes a stator coil and a housing, with the stator coil fixed to the inner wall of the housing. The stirring module includes a base, a rotor coil, and a stirring assembly. The rotor coil and the stirring assembly are connected and both are fixed to the base, which is used to place the device on the original liquid tank. The stirring assembly has an extended state and a contracted state; the motor module is used to be placed on the base and to make the position of the stator coil correspond to the position of the rotor coil. The stator coil can drive the rotor coil to rotate, and after the rotor coil rotates, it can drive the stirring assembly to switch between the extended state and the contracted state.

2. The grinding slurry stirring device as described in claim 1, characterized in that, The motor module also includes two fixing hooks, which are rotatably fixed to both sides of the housing and are used to engage with both ends of the raw liquid tank.

3. The grinding slurry stirring device as described in claim 1, characterized in that, The stirring module also includes a speed reduction assembly, which is fixed on the base and connected to the rotor coil and the stirring assembly respectively.

4. The grinding slurry stirring device as described in claim 3, characterized in that, The stirring assembly includes a drive rod and at least two stirring rods. The deceleration assembly can be selectively connected to either the drive rod or the stirring rods. The drive rod is connected to one of the stirring rods. When the deceleration assembly is connected to the drive rod, the deceleration assembly can drive the drive rod to rotate. After the drive rod rotates, it can drive the connected stirring rod to move relative to the other stirring rods. When the deceleration assembly is connected to the other stirring rod, the deceleration assembly can also drive all the stirring rods to rotate synchronously through the connected stirring rod.

5. The grinding slurry stirring device as described in claim 4, characterized in that, The stirring module also includes stirring blades, which are fixed to a stirring rod at the end of the stirring assembly.

6. The grinding slurry stirring device as described in claim 4, characterized in that, The stirring assembly includes a first stirring rod and a second stirring rod, the second stirring rod being slidably connected to the first stirring rod and rotatably connected to the drive rod; the first stirring rod has a first receiving groove, and the drive rod, when rotated, can drive the second stirring rod to move into or out of the first receiving groove; The first stirring rod is connected to the deceleration assembly, which can drive the first stirring rod and the second stirring rod to rotate synchronously.

7. The grinding slurry stirring device as described in claim 6, characterized in that, The stirring module further includes a first connector, which is fixedly connected to the second stirring rod and rotatably connected to the drive rod; after the drive rod rotates, it can drive the second stirring rod to move in its own axial direction through the first connector.

8. The grinding slurry stirring device as described in claim 7, characterized in that, The stirring module further includes a third stirring rod and a second connecting member connected to each other. The third stirring rod is slidably connected to the second stirring rod. The first connecting member includes an upper ring bearing, a lower ring bearing, and a sleeve. The sleeve is fixed to the side of the lower ring bearing away from the upper ring bearing. The upper ring bearing is fixedly connected to the second stirring rod and rotatably connected to the drive rod. The lower ring bearing is slidably connected to the drive rod. The sleeve is rotatably connected to the second connecting member. When the drive rod rotates, it can drive the lower ring bearing and the sleeve to rotate synchronously. When the sleeve rotates, it can drive the second connecting member and the third stirring rod to move relative to the second stirring rod along their own axial direction.

9. The grinding slurry stirring device as described in claim 8, characterized in that, The second stirring rod has a second receiving groove, and the third stirring rod is capable of moving into or out of the second receiving groove.

10. The grinding slurry stirring device as described in claim 6, characterized in that, The stirring module further includes a third connector, which connects the deceleration assembly and the first stirring rod respectively.

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