Nanoimprint uniform coating pipe system with cleaning structure

Abstract

The utility model discloses a kind of nanometer imprinting glue-distributing pipeline systems with cleaning structure, comprising: glue bucket assembly, cleaning agent component, glue conveying pipeline, cleaning agent conveying pipeline and pump body;Glue bucket assembly includes: glue bucket, glue bucket sealing cover, glue bucket nitrogen inlet and glue outlet;Cleaning agent component includes: cleaning agent bucket, cleaning agent sealing cover, cleaning agent bucket nitrogen inlet and cleaning agent outlet;Glue conveying pipeline is communicated with glue outlet pipe, cleaning agent conveying pipeline is communicated with cleaning agent outflow pipe, and glue conveying pipeline and cleaning agent conveying pipeline are connected in parallel, and in the upstream convergence of pump body, form common flow channel, and pump body is transmitted to the glue nozzle of nanometer imprinting with glue-distributing arm by total conveying pipeline with glue or cleaning agent.The utility model is designed by common flow channel, without manual replacement pipeline, just switch air control on-off valve, to realize the automatic switching of glue conveying and cleaning agent cleaning, substantially improve cleaning efficiency.

Description

Technical Field

[0001] This utility model specifically relates to a nano-imprint uniform adhesive pipeline system with a cleaning structure. Background Technology

[0002] In the field of nanoimprint technology, nanoimprinting of wafers coated with imprinting adhesive using a flexible liner is a crucial process. The spin coating system is responsible for delivering the adhesive from the adhesive tank to the nozzle of the spin coating arm to achieve uniform coating. However, existing spin coating systems have significant drawbacks.

[0003] Current technology cannot automate pipeline cleaning. Each cleaning requires manual removal of the glue inlet tube from the glue tank and replacement with the cleaning agent tank, a cumbersome and inefficient process. Furthermore, if left unused for extended periods, the glue easily hardens in the pipelines and glue pump, leading to blockages and pump malfunctions. Once such problems occur, cleaning the glue pump is not only time-consuming and labor-intensive, but dismantling and replacing the pipeline is also costly and complex, severely impacting the continuity and production efficiency of the nanoimprinting process and causing unnecessary financial losses. Utility Model Content

[0004] To address the aforementioned technical problems, this invention proposes a nano-imprint uniform adhesive pipeline system with a cleaning structure.

[0005] To achieve the above objectives, the technical solution of this utility model is as follows:

[0006] This utility model discloses a nano-imprinting uniform adhesive pipeline system with a cleaning structure, including: an adhesive bucket assembly, a cleaning agent assembly, an adhesive delivery pipeline, a cleaning agent delivery pipeline, and a pump body;

[0007] The glue bucket assembly includes: a glue bucket, a glue bucket sealing cap, and a glue bucket nitrogen inlet and a glue outlet located on the glue bucket sealing cap. A glue bucket nitrogen input pipe is installed at the glue bucket nitrogen inlet, and a glue outlet pipe is installed at the glue outlet, extending to the bottom of the glue bucket.

[0008] The cleaning agent assembly includes: a cleaning agent tank, a cleaning agent sealing cap, and a nitrogen inlet and a cleaning agent outlet located on the cleaning agent sealing cap. A nitrogen inlet pipe is installed at the nitrogen inlet of the cleaning agent tank, and a cleaning agent outlet pipe is installed at the cleaning agent outlet, extending to the bottom of the cleaning agent tank.

[0009] The glue delivery pipeline is connected to the glue outlet pipe, and the cleaning agent delivery pipeline is connected to the cleaning agent outlet pipe. The glue delivery pipeline and the cleaning agent delivery pipeline are set in parallel and converge upstream of the pump body to form a common flow channel. The pump body transmits the glue or cleaning agent to the spray nozzle of the nanoimprinting uniform arm through the main delivery pipeline.

[0010] Pneumatic on / off valves are installed on both the cleaning agent delivery pipeline and the main delivery pipeline.

[0011] This utility model discloses a nano-imprint uniform adhesive pipeline system with a cleaning structure. The adhesive tank assembly and the cleaning agent assembly are connected in parallel and converge upstream of the pump body to form a common flow channel. It has the following beneficial effects:

[0012] First, through the shared flow channel design, there is no need to manually replace the pipeline. Simply switch the pneumatic on / off valve to achieve automatic switching between glue delivery and cleaning agent cleaning, which greatly improves cleaning efficiency.

[0013] Secondly, the adhesive and cleaning agent flow together in front of the pump body to ensure that the two media are transported independently, avoiding mixing and contamination between the adhesive and cleaning agent.

[0014] Third, shared flow channels reduce pipeline redundancy, lower system complexity, and reduce potential leakage points.

[0015] Based on the above technical solution, the following improvements can be made:

[0016] As a preferred embodiment, the dispensing tube is connected to the glue delivery pipeline via a buffer bottle, which is used to buffer the glue.

[0017] By adopting the above-mentioned preferred solution, the buffer bottle can store a certain amount of glue, avoiding fluctuations in glue supply pressure caused by changes in the liquid level in the glue tank, and ensuring the stability of the glue mixing process. Furthermore, when the pump draws glue too quickly, the buffer bottle can provide instantaneous replenishment to prevent the pump from running dry and being damaged.

[0018] As a preferred option, a glue check valve is installed on the glue delivery pipeline, between the manifold and the buffer bottle.

[0019] By adopting the above-mentioned preferred solution, backflow of the cleaning agent is prevented. During the cleaning process, the glue one-way valve prevents the cleaning agent from flowing back into the glue tank, protecting the glue from contamination. The cleaning path is optimized to ensure that the cleaning agent flows only along the common flow channel, improving cleaning efficiency and reducing the amount of cleaning agent used.

[0020] As a preferred option, a cleaning agent check valve is installed on the cleaning agent delivery pipeline, and the cleaning agent check valve is located between the manifold and the cleaning agent tank.

[0021] Using the preferred solution described above, the cleaning agent check valve ensures that the cleaning agent can only flow in one direction, preventing glue from flowing back into the cleaning agent tank when the pressure fluctuates.

[0022] As a preferred embodiment, the main delivery pipeline is equipped with a filter, an air bubble eliminator, and a pneumatic on / off valve in sequence along the flow direction of the adhesive or cleaning agent.

[0023] By adopting the above-mentioned preferred solution, the filter removes particulate impurities from the glue, and the bubble eliminator removes gas, thus avoiding imprint defects caused by impurities or bubbles.

[0024] As a preferred option, differential pressure sensors are installed at both ends of the filter.

[0025] Using the preferred scheme described above, the differential pressure sensor monitors the degree of filter clogging. When the differential pressure exceeds the threshold, it prompts the replacement of the filter element to avoid affecting the homogenization quality due to decreased filtration efficiency.

[0026] As a preferred option, the bottom of the glue bucket has a conical structure.

[0027] By adopting the above-mentioned preferred solution, the conical bottom causes the glue to converge towards the dispensing tube under air pressure, reducing residue and preventing the glue from curing and clogging the glue tank.

[0028] As a preferred option, a flow sensor is installed at the nozzle of the glue spraying arm to monitor the glue spraying flow in real time.

[0029] By adopting the above-mentioned preferred scheme, the glue spraying flow rate is monitored in real time, and the pump speed is adjusted accordingly to ensure the uniformity of glue thickness. Attached Figure Description

[0030] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the nanoimprint uniform coating pipeline system provided in an embodiment of the present invention.

[0032] Figure 2 This is a schematic diagram of the coating arm provided in an embodiment of the present invention.

[0033] in:

[0034] 1-Glue bucket, 11-Glue bucket nitrogen inlet, 12-Glue outlet, 2-Cleaning agent bucket, 21-Cleaning agent bucket nitrogen inlet, 22-Cleaning agent outlet, 3-Pump body, 4-Pneumatic on / off valve, 5-Buffer bottle, 61-Glue check valve, 62-Cleaning agent check valve, 7-Filter, 8-Bubble eliminator, 9-Glue spreading arm, 10-Glue spray nozzle, 101-Wafer, 102-Wafer suction cup. Detailed Implementation

[0035] The preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings.

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0037] The expression “includes” is an “open-ended” expression, which means that there is a corresponding component and should not be interpreted as excluding additional components.

[0038] To achieve the purpose of this utility model, some embodiments of a nano-imprint uniform coating pipeline system with a cleaning structure are provided, such as... Figure 1-2 As shown, the nano-imprinting uniform adhesive pipeline system includes: adhesive tank assembly, cleaning agent assembly, adhesive delivery pipeline, cleaning agent delivery pipeline and pump body 3.

[0039] The glue bucket assembly includes: a glue bucket 1, a glue bucket sealing cover, and a glue bucket nitrogen inlet 11 and a glue outlet 12 provided on the glue bucket sealing cover. A nitrogen input pipe for the glue bucket 1 is installed at the glue bucket nitrogen inlet 11, and a glue outlet pipe is installed at the glue outlet 12, extending to the bottom of the glue bucket 1.

[0040] The cleaning agent assembly includes: a cleaning agent tank 2, a cleaning agent sealing cap, and a nitrogen inlet 21 and a cleaning agent outlet 22 located on the cleaning agent sealing cap. A nitrogen inlet pipe for the cleaning agent tank 2 is installed at the nitrogen inlet 21, and a cleaning agent outlet pipe is installed at the cleaning agent outlet 22, extending to the bottom of the cleaning agent tank 2.

[0041] The adhesive delivery pipeline is connected to the adhesive outlet pipe, and the cleaning agent delivery pipeline is connected to the cleaning agent outlet pipe. The adhesive delivery pipeline and the cleaning agent delivery pipeline are connected in parallel and converge upstream of the pump body 3 to form a common flow channel. The pump body 3 transmits the adhesive or cleaning agent to the nozzle 10 of the nanoimprinting spin coater 9 through the main delivery pipeline. The adhesive flowing from the nozzle 10 spin coats the wafer 101. During the spin coat process, the wafer chuck 102 adsorbs and fixes the wafer 101.

[0042] Furthermore, pneumatic on / off valves 4 are installed on both the cleaning agent delivery pipeline and the main delivery pipeline.

[0043] Furthermore, the glue dispensing tube is connected to the glue delivery pipeline via a buffer bottle 5, which is used to buffer the glue. The buffer bottle 5 can store a certain amount of glue to avoid pressure fluctuations caused by changes in the liquid level in the glue tank 1, ensuring the stability of the glue mixing process. Furthermore, when the pump body 3 draws glue too quickly, the buffer bottle 5 can provide instantaneous replenishment to prevent the pump body 3 from running dry and being damaged.

[0044] Furthermore, a one-way glue valve 61 is installed on the glue delivery pipeline, located between the manifold and the buffer bottle 5. This structure effectively prevents backflow of the cleaning agent. During the cleaning process, the one-way glue valve 61 prevents the cleaning agent from flowing back into the glue tank 1, protecting the glue from contamination. Optimizing the cleaning path ensures that the cleaning agent flows only along the common flow channel, improving cleaning efficiency and reducing the amount of cleaning agent used.

[0045] Furthermore, a one-way valve 62 for the cleaning agent is installed on the cleaning agent delivery pipeline. The one-way valve 62 is located between the manifold and the cleaning agent tank 2. The one-way valve 62 ensures that the cleaning agent can only flow in one direction, preventing the glue from flowing back into the cleaning agent tank 2 when the pressure fluctuates.

[0046] Furthermore, along the flow direction of the adhesive or cleaning agent, the main delivery pipeline is sequentially equipped with a filter 7, a bubble eliminator 8, and a pneumatic on / off valve 4. This improves the coating quality; the filter 7 removes particulate impurities from the adhesive, and the bubble eliminator 8 removes gas, preventing imprinting defects caused by impurities or bubbles. The pneumatic on / off valve 4 allows for flexible control of the adhesive spraying process, enabling precise dosage control suitable for coating needs of wafers of different sizes.

[0047] The homogenization process of this invention is as follows:

[0048] 1) Turn on the nitrogen source and inject nitrogen gas with a pressure greater than atmospheric pressure into glue container 1. Under the action of air pressure, the glue is forced out from the bottom of glue container 1 and flows along the glue outlet tube to the buffer bottle 5.

[0049] 2) After the glue enters the buffer bottle 5, fill the buffer bottle 5 with 50%-60% of the space with glue. The buffer bottle 5 plays a role in stabilizing the glue supply and preventing insufficient supply when the pump draws glue.

[0050] 3) Pump 3 starts and draws glue from buffer bottle 5. At this time, the pneumatic on / off valve 4 on the main delivery pipeline is in the open state. The glue passes through filter 7, bubble eliminator 8 and pneumatic on / off valve 4 in sequence and is finally delivered to the glue spray nozzle 10 of glue spreading arm 9.

[0051] During this process, the pneumatic on / off valve 4 controls the flow of adhesive, ensuring that the adhesive is delivered to the spray nozzle 10 according to the set program and requirements, thereby achieving the uniform coating operation on the wafer.

[0052] When the glue coating process is completed or the system detects a risk of glue curing (e.g., due to prolonged disuse), initiate the cleaning process as follows:

[0053] 1) On the sealing cap of cleaning agent container 2, connect the main nitrogen inlet to a nitrogen source (nitrogen pressure is 1-2 times atmospheric pressure, generally within 0.2 MPa), and connect the cleaning agent outlet to a cleaning agent outlet pipe, which should be inserted to the bottom of cleaning agent container 2. Turn on the nitrogen source and inject nitrogen into cleaning agent container 2. Under the action of air pressure, the cleaning agent is sprayed out along the cleaning agent outlet pipe, passing sequentially through the pneumatic on / off valve 4 and the cleaning agent one-way valve 62. Due to the function of the cleaning agent one-way valve 62, the cleaning agent can only flow in one direction and will not flow back into the glue container.

[0054] 2) Under the action of pump body 3, the cleaning agent washes out the residual glue inside pump body 3, flows through filter 7 and bubble eliminator 8 in sequence, then through pneumatic control valve 4, and is finally delivered to the glue nozzle 10 of glue-spraying arm 9 for discharge. By continuously delivering the cleaning agent, the glue in components such as pump body 3, filter 7, and bubble eliminator 8 is thoroughly washed away, preventing the glue from hardening and clogging the pipeline and pump body 3.

[0055] After cleaning, close the pneumatic on / off valve 4 and the pump body 3 to prepare for the next uniform coating operation.

[0056] It is worth noting that a precision pressure regulating valve is installed on the nitrogen source's output pipeline to ensure a stable nitrogen inlet pressure.

[0057] In summary, this utility model discloses a nano-imprint uniform adhesive pipeline system with a cleaning structure. The adhesive tank assembly and the cleaning agent assembly are connected in parallel and converge upstream of the pump body 3 to form a common flow channel. It has the following beneficial effects:

[0058] First, through the shared flow channel design, there is no need to manually replace the pipeline. Simply switch the pneumatic on / off valve 4 to achieve automatic switching between glue delivery and cleaning agent cleaning, which greatly improves cleaning efficiency.

[0059] Second, the adhesive and cleaning agent converge in front of the pump body 3 to ensure that the two media are transported independently, avoiding mixing and contamination between the adhesive and cleaning agent.

[0060] Third, shared flow channels reduce pipeline redundancy, lower system complexity, and reduce potential leakage points.

[0061] In order to further optimize the implementation effect of this utility model, in some other embodiments, the remaining features are the same, except that differential pressure sensors are provided at both ends of the filter 7.

[0062] Using the above-mentioned preferred scheme, the differential pressure sensor monitors the degree of clogging of the filter 7. When the differential pressure exceeds the threshold, it prompts the replacement of the filter element to avoid affecting the quality of the gel coating due to the decrease in filtration efficiency.

[0063] To further optimize the implementation effect of this utility model, in some other embodiments, the remaining features are the same, except that a nano-imprint uniform adhesive pipeline system with a cleaning structure further includes: a stirring device or a vibration device, the stirring device or vibration device being electrically connected to a pulse controller, the pulse controller being used to pulse-stir the adhesive before it is filled into the adhesive bucket to prevent it from curing or separating.

[0064] The above-mentioned preferred solution is used to prevent the adhesive from curing or delaminating.

[0065] In order to further optimize the implementation effect of this utility model, in some other embodiments, the remaining technical features are the same, except that the bottom of the glue bucket 1 is a conical structure.

[0066] Using the above-mentioned preferred solution, the conical bottom causes the glue to converge towards the dispensing tube under air pressure, reducing residue and preventing the glue from curing and clogging the glue container 1.

[0067] In order to further optimize the implementation effect of this utility model, in some other embodiments, the remaining features are the same, except that a flow sensor is provided at the nozzle 10 of the glue-spraying arm 9 for real-time monitoring of the glue spraying flow.

[0068] By adopting the above-mentioned preferred scheme, the glue spraying flow rate is monitored in real time, and the pump body speed is adjusted accordingly to ensure the uniformity of glue thickness.

[0069] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0070] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0071] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications may be made to this utility model without departing from its spirit and scope. All such changes and modifications fall within the scope of protection of this utility model as defined by the appended claims and their equivalents.

[0072] The control method of this utility model is to control the device by manually starting and stopping the switch. The wiring diagram of the power element and the supply of power are common knowledge in the field. Since this utility model is mainly used to protect mechanical devices, the control method and wiring layout will not be explained in detail.

Claims

1. A nanoimprinting uniform coating pipeline system with a cleaning structure, characterized in that, include: Glue bucket assembly, cleaning agent assembly, glue delivery pipeline, cleaning agent delivery pipeline and pump body; The glue bucket assembly includes: a glue bucket, a glue bucket sealing cap, and a glue bucket nitrogen inlet and a glue outlet provided on the glue bucket sealing cap. A glue bucket nitrogen input pipe is installed at the glue bucket nitrogen inlet, and a glue outlet pipe is installed at the glue outlet, with the glue outlet pipe extending to the bottom of the glue bucket. The cleaning agent assembly includes: a cleaning agent tank, a cleaning agent sealing cap, and a nitrogen inlet and a cleaning agent outlet provided on the cleaning agent sealing cap. A nitrogen inlet pipe is installed at the nitrogen inlet of the cleaning agent tank, and a cleaning agent outlet pipe is installed at the cleaning agent outlet, extending to the bottom of the cleaning agent tank. The glue delivery pipeline is connected to the glue outlet pipe, the cleaning agent delivery pipeline is connected to the cleaning agent outlet pipe, and the glue delivery pipeline and the cleaning agent delivery pipeline are arranged in parallel and converge upstream of the pump body to form a common flow channel. The pump body transmits the glue or cleaning agent to the spray nozzle of the nanoimprinting uniform arm through the main delivery pipeline. Pneumatic on / off valves are installed on both the cleaning agent delivery pipeline and the main delivery pipeline.

2. The nanoimprinting uniform coating pipeline system according to claim 1, characterized in that, The dispensing tube is connected to the glue delivery pipeline via a buffer bottle, which is used to buffer the glue.

3. The nanoimprinting uniform coating pipeline system according to claim 2, characterized in that, A glue check valve is installed on the glue delivery pipeline, and the glue check valve is installed between the manifold and the buffer bottle.

4. The nanoimprinting uniform coating pipeline system according to claim 2, characterized in that, A cleaning agent check valve is installed on the cleaning agent delivery pipeline, and the cleaning agent check valve is located between the manifold and the cleaning agent tank.

5. The nanoimprinting uniform coating pipeline system according to claim 1, characterized in that, Along the flow direction of the adhesive or cleaning agent, the main delivery pipeline is sequentially equipped with a filter, an air bubble eliminator, and a pneumatic on / off valve.

6. The nanoimprinting uniform coating pipeline system according to claim 5, characterized in that, Differential pressure sensors are installed at both ends of the filter.

7. The nanoimprinting uniform coating pipeline system according to claim 1, characterized in that, The bottom of the glue bucket has a conical structure.

8. The nanoimprinting uniform coating pipeline system according to claim 1, characterized in that, The glue-spraying arm is equipped with a flow sensor at the glue nozzle to monitor the glue flow rate in real time.

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