A quick take-out device for FOSB filter element

Abstract

The utility model relates to a kind of take-out device of quick taking out FOSB filter core, including outer tube, linear bearing and inner shaft, the outer tube upper end is equipped with linear bearing, the inner ring of the linear bearing is vertically equipped with the inner shaft that can slide up and down, the lower end of the outer tube is provided with hook mounting port, two hooks are symmetrically installed on the hook mounting port, when inner shaft lower end is completely inserted, inner shaft lower end is located between two hooks, and push hook lower end moves towards left and right sides, the lower end of the inner shaft is provided with docking interface, the inner side wall of the docking interface is provided with two clamping protrusions.The utility model has the characteristics of convenient filter core taking out, reducing operation difficulty, low manufacturing cost.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment accessories technology, and in particular to a device for quickly removing FOSB filter cartridges. Background Technology

[0002] FOSB refers to Front-Opening Transport Wafer Container, a key device used for wafer storage and transportation. It has the following core characteristics and application scenarios. It contains a filter structure to adsorb waste from the wafer cleaning process. The filter structure will become unusable during use. The conventional filter structure is very complicated and difficult to disassemble and replace. To solve this problem, an auxiliary device is needed to facilitate the disassembly and assembly of the filter. Summary of the Invention

[0003] The technical problem to be solved by this utility model is to provide a quick removal device for FOSB filter elements, which has the characteristics of convenient filter element removal, reduced operation difficulty and low manufacturing cost.

[0004] The technical solution adopted by this utility model to solve its technical problem is as follows: a device for quickly removing FOSB filter elements is provided, including an outer cylinder, a linear bearing, and an inner shaft. The upper end of the outer cylinder is equipped with a linear bearing, and the inner shaft, which can slide up and down, is vertically installed on the inner ring of the linear bearing. The lower end of the outer cylinder is provided with a hook mounting port, and two hooks are symmetrically installed on the hook mounting port. When the lower end of the inner shaft is fully inserted, the lower end of the inner shaft is located between the two hooks and pushes the lower ends of the hooks to move to the left and right sides. The middle of the lower end of the inner shaft is provided with a mating interface, and two snap-fit ​​protrusions are provided on the inner side wall of the mating interface.

[0005] After the filter element structure is inserted into the equipment, there are two snap-fit ​​protrusions inside the equipment that hold the upper end of the filter element structure in place, thus ensuring that the filter element structure is installed in place. At the same time, there are two symmetrical mating ears on the upper end of the filter element structure.

[0006] The outer cylinder serves as the docking body for inserting the equipment, facilitating docking with the device. A linear bearing is installed to stabilize the movement of the inner shaft, which can move vertically along the inner ring of the linear bearing. A hook mounting port is provided at the lower end of the outer cylinder for easy hook installation. The hook is used to push the snap protrusion at the filter element installation position, opening the snap protrusion and facilitating the removal of the filter element structure. At the same time, a mating interface is provided to facilitate docking between the inner shaft and the upper end of the filter element structure, and the snap protrusion can mate with the docking lug.

[0007] When removing the filter element, first insert the outer sleeve into the mounting port of the filter element structure on the equipment. Then insert the inner shaft. When the inner shaft is inserted to the bottom, the lower end of the inner shaft will push the hook, and the lower end of the hook will push outward. The hook will push the snap-fit ​​protrusion, and the snap-fit ​​protrusion will disengage from the filter element structure. At the same time, the interface at the lower end of the inner shaft will fit into the filter element structure. Then rotate the inner shaft so that the snap-fit ​​protrusion of the inner shaft aligns with the mating ear of the filter element structure. Finally, pull up the filter element structure with the inner shaft so that the filter element structure can be detached from the equipment.

[0008] As a supplement to this technical solution, the lower end of the linear bearing is inserted into the inner ring of the outer cylinder, and the upper end of the linear bearing is annular and fixed at the upper end of the outer cylinder. In this technical solution, the structural compactness of the device is improved by setting a linear bearing.

[0009] As a supplement to this technical solution, the upper end of the hook is connected to the hook mounting port via a longitudinal rotating shaft, and a reset coil spring is sleeved on the longitudinal rotating shaft. By setting the reset coil spring, the hook can easily return to its original state.

[0010] As a supplement to this technical solution, the two snap-fit ​​protrusions are arranged clockwise along the inner wall of the interface.

[0011] As a supplement to this technical solution, the snap-fit ​​protrusion is arc-shaped and fits snugly on the inner side wall of the interface, and a stepped protrusion extending towards the center of the interface is provided on the lower side of the snap-fit ​​protrusion.

[0012] As a supplement to this technical solution, a handle is installed at the upper end of the inner shaft, and the handle controls the rotation of the inner shaft.

[0013] Beneficial Effects: This utility model relates to a quick-release device for FOSB filter elements. An outer cylinder serves as the docking body for insertion into the equipment, facilitating docking. A linear bearing stabilizes the movement of the inner shaft, allowing it to move vertically along the inner ring of the bearing. A hook mounting port at the lower end of the outer cylinder facilitates hook installation. This hook allows for easy pushing of the snap-fit ​​protrusion at the filter element mounting position, opening the protrusion and facilitating filter element removal. A mating interface facilitates docking between the inner shaft and the upper part of the filter element structure. The snap-fit ​​protrusion engages with the docking lug. This device offers advantages such as convenient filter element removal, reduced operational difficulty, and low manufacturing cost. Attached Figure Description

[0014] Figure 1 This is a structural view of the present invention;

[0015] Figure 2 This is a front view of the filter element structure described in this utility model;

[0016] Figure 3 This is a top view of the filter element structure described in this utility model;

[0017] Figure 4 This is a structural view of the filter element structure at the installation position described in this utility model;

[0018] Figure 5 This is a utility model Figure 4 Sectional view along the AA direction;

[0019] Figure 6 This is the front view of the inner shaft described in this utility model;

[0020] Figure 7 This is a bottom view of the inner shaft described in this utility model;

[0021] Figure 8 This is a cross-sectional view of the interface described in this utility model. Detailed Implementation

[0022] The present invention will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, it should be understood that after reading the teachings of this invention, those skilled in the art can make various alterations or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims.

[0023] The present invention relates to a device for quickly removing FOSB filter cartridges, such as... Figure 1 As shown in Figure 8, the device includes an outer cylinder 4, a linear bearing 3, and an inner shaft 2. The linear bearing 3 is installed on the upper end of the outer cylinder 4. The inner shaft 2, which can slide up and down, is vertically installed on the inner ring of the linear bearing 3. A hook mounting port 11 is provided at the lower end of the outer cylinder 4. Two hooks 6 are symmetrically installed on the hook mounting port 11. When the lower end of the inner shaft 2 is fully inserted, the lower end of the inner shaft 2 is located between the two hooks 6 and pushes the lower end of the hooks 6 to move to the left and right sides. A mating interface 9 is provided in the middle of the lower end of the inner shaft 2. Two snap-fit ​​protrusions 10 are provided on the inner side wall of the mating interface 9.

[0024] After the filter element structure is inserted into the equipment, there will be two snap-fit ​​protrusions 8 inside the equipment to hold the upper end of the filter element structure, so that the filter element structure is installed in place. At the same time, there are two symmetrical docking ears 7 on the upper end of the filter element structure.

[0025] The outer cylinder 4 is designed as the docking body for inserting the device, facilitating docking with the device. A linear bearing 3 is installed to stabilize the movement of the inner shaft 2, which can move vertically along the inner ring of the linear bearing 3. A hook mounting port 11 is provided at the lower end of the outer cylinder 4 to facilitate the installation of the hook 6. The hook 6 is used to push the snap protrusion 8 at the filter element installation position, allowing the snap protrusion 8 to open and the filter element structure to be removed. At the same time, a docking interface 9 is provided to facilitate docking between the inner shaft 2 and the upper end of the filter element structure, while the snap protrusion 10 can dock with the docking ear 7.

[0026] When removing the filter element, first insert the outer sleeve into the installation port of the filter element structure on the equipment, then insert the inner shaft 2. When the inner shaft 2 is inserted to the bottom, the lower end of the inner shaft 2 will push the hook 6, and the lower end of the hook 6 will push outward. The hook 6 will push the snap protrusion 8, and the snap protrusion 8 will disengage from the filter element structure. At the same time, the interface 9 at the lower end of the inner shaft 2 will be fitted into the filter element structure. Then rotate the inner shaft 2 so that the snap protrusion 10 of the inner shaft 2 aligns with the docking ear 7 of the filter element structure. Finally, pull up the filter element structure with the inner shaft 2 so that the filter element structure can be detached from the equipment.

[0027] As a supplement to this technical solution, the lower end of the linear bearing 3 is inserted into the inner ring of the outer cylinder 4, and the upper end of the linear bearing 3 is annular and fixed at the upper end of the outer cylinder 4. In this technical solution, the structural compactness of the device is improved by setting the linear bearing 3.

[0028] As a supplement to this technical solution, the upper end of the hook 6 is connected to the hook mounting port 11 via a longitudinal rotating shaft 5. A reset coil spring is sleeved on the longitudinal rotating shaft 5. By setting the reset coil spring, the hook 6 can easily return to its original state.

[0029] As a supplement to this technical solution, the two snap-fit ​​protrusions 10 are arranged clockwise along the inner wall of the interface 9.

[0030] As a supplement to this technical solution, the snap-fit ​​protrusion 10 is arc-shaped and fits snugly on the inner side wall of the interface 9, and a stepped protrusion extending toward the center of the interface 9 is provided on the lower side of the snap-fit ​​protrusion 10.

[0031] As a supplement to this technical solution, a handle 1 is installed on the upper end of the inner shaft 2, and the handle 1 controls the inner shaft 2 to rotate.

[0032] Example

[0033] When removing the filter element, first insert the outer sleeve into the installation port of the filter element structure on the equipment, then insert the inner shaft 2. When the inner shaft 2 is inserted to the bottom, the lower end of the inner shaft 2 will push the hook 6, and the lower end of the hook 6 will push outward. The hook 6 will push the snap protrusion 8, and the snap protrusion 8 will disengage from the filter element structure. At the same time, the interface 9 at the lower end of the inner shaft 2 will be fitted into the filter element structure. Then rotate the inner shaft 2 so that the snap protrusion 10 of the inner shaft 2 aligns with the docking ear 7 of the filter element structure. Finally, pull up the filter element structure with the inner shaft 2 so that the filter element structure can be detached from the equipment.

Claims

1. A device for quickly removing FOSB filter cartridges, characterized in that: The device includes an outer cylinder (4), a linear bearing (3), and an inner shaft (2). The upper end of the outer cylinder (4) is equipped with a linear bearing (3). The inner shaft (2) that can slide up and down is vertically installed on the inner ring of the linear bearing (3). The lower end of the outer cylinder (4) is provided with a hook mounting port (11). Two hooks (6) are symmetrically installed on the hook mounting port (11). When the lower end of the inner shaft (2) is fully inserted, the lower end of the inner shaft (2) is located between the two hooks (6) and pushes the lower end of the hooks (6) to move to the left and right sides. The middle of the lower end of the inner shaft (2) is provided with a mating interface (9). The inner side wall of the mating interface (9) is provided with two snap-fit ​​protrusions (10).

2. The extraction device for quickly extracting a FOSB filter element according to claim 1, characterized in that: The lower end of the linear bearing (3) is inserted into the inner ring of the outer cylinder (4), and the upper end of the linear bearing (3) is annular and fixed at the upper end of the outer cylinder (4).

3. The removal device for quickly removing FOSB filter cartridges according to claim 1, characterized in that: The upper end of the hook (6) is connected to the hook mounting port (11) via a longitudinal rotating shaft (5), and a reset coil spring is sleeved on the longitudinal rotating shaft (5).

4. The removal device for quickly removing FOSB filter cartridges according to claim 1, characterized in that: Two snap-fit ​​protrusions (10) are arranged clockwise along the inner wall of the interface (9).

5. The removal device for quickly removing FOSB filter cartridges according to claim 4, characterized in that: The snap-fit ​​protrusion (10) is arc-shaped and fits against the inner wall of the interface (9). The lower side of the snap-fit ​​protrusion (10) is provided with a stepped protrusion extending toward the center of the interface (9).

6. The extraction device for quickly extracting a FOSB filter element according to claim 1, characterized in that: The inner shaft (2) is equipped with a handle (1) at its upper end, and the handle (1) controls the inner shaft (2) to rotate.

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