A continuous pressurized stable liquid supply system
By combining the chemical dispensing module with pressure sensors and PLC modules, the start and stop of the liquid supply pump are automatically controlled, solving the problem of inaccurate pressure change control in the existing liquid supply system. This achieves precise chemical supply and equipment protection, improves production efficiency, and reduces system costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHEJIANG DONGKAI SEMICON TECH CO LTD
- Filing Date
- 2025-07-07
- Publication Date
- 2026-06-23
AI Technical Summary
Existing chemical supply systems struggle to control the operation of the supply pumps in a timely and accurate manner based on actual pressure changes, leading to disruptions in production schedules or equipment damage.
The design combines a chemical dispensing module with a pressure sensor and a PLC module. It automatically controls the start and stop of the liquid supply pump by monitoring pressure changes in real time. Combined with the linkage between the valve group box and the process equipment, it simplifies signal cables and eliminates the need for an I/O panel.
It enables precise chemical supply, protects equipment, improves production efficiency, and reduces system costs and complexity.
Smart Images

Figure CN224397616U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of liquid supply, and in particular to a continuous pressurized and stable liquid supply system. Background Technology
[0002] In many industrial production processes, a precise and stable supply of chemicals is required. Existing chemical supply systems often struggle to control the operation of the supply pump in a timely and accurate manner based on actual pressure changes. This system can effectively save on signal cables and eliminate the need for I / O panels (signal relay distribution panels) used as relay signals, while also enabling timely and rapid response to supply demands.
[0003] For example, if the liquid supply system cannot respond in time to increase the liquid supply when the back-end equipment needs chemicals, it may affect the production schedule; and if the liquid supply pump cannot stop working in time when the system pressure is too high, it may damage the system pipelines and equipment.
[0004] Therefore, how to enable the chemical supply system to automatically and accurately control the working status of the supply pump and pneumatic valve according to pressure changes is an urgent problem to be solved. Utility Model Content
[0005] Purpose of the utility model: The purpose of this utility model is to solve the problems in the prior art and provide a continuous pressurized and stable liquid supply system.
[0006] Technical solution: A continuous pressurized and stable liquid supply system is proposed, comprising:
[0007] The chemical dispensing module is connected to an external nitrogen pipeline. The output end of the chemical dispensing module is connected to the control box. The output end of the control box is connected to the valve group box. The output end of the valve group box is connected to the process machine.
[0008] The chemical dispensing module includes a pressure sensor and a PLC module, with the pressure sensor located at the output end of the chemical dispensing module;
[0009] The pressure sensor is electrically connected to the PLC module.
[0010] Preferably, the chemical dispensing module includes a first barrel of chemicals and a second barrel of chemicals, and the input ends of the first barrel of chemicals and the second barrel of chemicals are both connected to an external nitrogen pipeline;
[0011] The output terminals of the first and second barrelled chemicals are respectively connected to the first and second liquid supply pumps. The output terminals of the first and second liquid supply pumps are connected to the pressure sensor, and the output terminal of the pressure sensor is connected to the control box.
[0012] Preferably, the control box is equipped with a first manual valve that is connected to the output of the pressure sensor via a three-way valve, and a first leakage sensor.
[0013] Preferably, the valve assembly box includes a second leakage sensor and multiple electrically controlled valves. The process machine is connected to one of the electrically controlled valves, and the electrically controlled valve is electrically connected to the process machine. The other ends of the multiple electrically controlled valves are connected to the first manual valve in sequence through a second manual valve and a third manual valve.
[0014] Preferably, the input end of the first drummed chemical is connected to a first pneumatic valve;
[0015] The input end of the second drum of chemicals is connected to a second pneumatic valve;
[0016] The output end of the first drummed chemical is connected to a third pneumatic valve;
[0017] The output end of the second drummed chemical is connected to a fourth pneumatic valve;
[0018] The output end of the pressure sensor is connected to a fifth pneumatic valve.
[0019] Preferably, the input ends of the first and second liquid supply pumps are equipped with liquid level sensors.
[0020] Preferably, the liquid level sensor, the first pneumatic valve, the second pneumatic valve, the third pneumatic valve, the fourth pneumatic valve, the fifth pneumatic valve, the first leakage sensor, the second leakage sensor, the first liquid supply pump, and the second liquid supply pump are all electrically connected to the PLC module.
[0021] Preferably, the PLC module is connected to a touch screen.
[0022] Beneficial effects:
[0023] To improve the accuracy of liquid supply, the pressure at the outlet of the chemical distribution module is monitored in real time, and the start and stop of the liquid supply pump are automatically controlled according to the pressure changes. This effectively keeps the system pressure stable within the set range, thereby achieving precise supply of chemicals and meeting the high precision requirements for chemical usage control in the production process.
[0024] The system protects equipment by promptly stopping the liquid supply pump when it detects an abnormal increase in pressure, preventing overpressure operation and effectively avoiding damage to pipelines and equipment, thereby extending equipment lifespan and reducing maintenance costs.
[0025] With rapid response and improved production efficiency, the electric valves in the valve group box of this system are linked to the "liquid demand" signal of the process equipment, which can quickly open when the back-end equipment issues a demand. At the same time, the system can quickly start the liquid supply pump according to the pressure drop, ensuring a continuous and stable supply of chemicals and improving overall production efficiency and response speed.
[0026] This system simplifies the signal interfaces of process equipment, significantly reducing the number of linkage signal cables between the system and the equipment compared to traditional systems. Process equipment only requires branch lines controlled by pneumatic or electric signal control valve groups, eliminating the need for complex electrical linkage wiring and reducing installation and commissioning difficulty.
[0027] By reducing the configuration of existing I / O panels, the system cost is reduced. Traditional liquid supply systems require I / O panels as signal relays, while this system achieves linkage control through pressure detection and PLC control, eliminating the need for I / O relay panels. This simplifies the system structure and significantly reduces hardware costs and system integration complexity. Attached Figure Description
[0028] Figure 1 This is a schematic diagram of the structure of this utility model.
[0029] Figure label:
[0030] 1. Pressure sensor; 2. PLC module; 3. First barrel of chemicals; 4. Second barrel of chemicals; 5. External nitrogen pipeline; 6. First liquid supply pump; 7. Second liquid supply pump; 8. First manual valve; 9. First leakage sensor; 10. Second leakage sensor; 11. Electrically controlled valve; 12. Second manual valve; 13. Third manual valve; 14. First pneumatic valve; 15. Second pneumatic valve; 16. Third pneumatic valve; 17. Fourth pneumatic valve; 18. Fifth pneumatic valve; 19. Liquid level sensor; 20. Touch screen. Detailed Implementation
[0031] To make the technical solution of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0032] Example 1
[0033] To make the technical solution of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0034] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.
[0035] In response to the problems existing in the current technology, combined with Figure 1 A continuously pressurized and stable liquid supply system, comprising:
[0036] The chemical dispensing module is connected to the external nitrogen pipeline 5. The output end of the chemical dispensing module is connected to the control box. The output end of the control box is connected to the valve group box. The output end of the valve group box is connected to the process machine 21.
[0037] The chemical dispensing module includes a pressure sensor 1 and a PLC module 2, wherein the pressure sensor 1 is located at the output end of the chemical dispensing module;
[0038] The pressure sensor 1 is electrically connected to the PLC module 2.
[0039] In some specific embodiments, the chemical dispensing module includes a first barrel of chemical 3 and a second barrel of chemical 4, the input ends of the first barrel of chemical 3 and the second barrel of chemical 4 being connected to an external nitrogen pipeline 5;
[0040] The output ends of the first barrelled chemical 3 and the second barrelled chemical 4 are respectively connected to the first liquid supply pump 6 and the second liquid supply pump 7. The output ends of the first liquid supply pump 6 and the second liquid supply pump 7 are connected to the pressure sensor 1. The output end of the pressure sensor 1 is connected to the control box.
[0041] Specifically, the first barrel of chemicals 3 and the second barrel of chemicals 4 are supplied through an external nitrogen pipeline 5;
[0042] When the first liquid supply pump 6 and the second liquid supply pump 7 are turned on, nitrogen gas can be output through the pressure sensor 1.
[0043] In some specific embodiments, the control box is equipped with a first manual valve 8 that is connected to the output of the pressure sensor 1 via a three-way valve, and a first leakage sensor 9.
[0044] Specifically, it facilitates manual forced pressure relief via the first manual valve 8, and facilitates real-time detection of any leakage via the first leakage sensor 9.
[0045] In some specific embodiments, the valve assembly box includes a second leakage sensor 10 and a plurality of electrically controlled valves 11. The process machine 21 is connected to one of the electrically controlled valves 11, and the electrically controlled valve 11 is electrically connected to the process machine 21. The other ends of the plurality of electrically controlled valves 11 are connected to the first manual valve 8 in sequence through a second manual valve 12 and a third manual valve 13.
[0046] Specifically, it facilitates connection between multiple electrically controlled valves 11 and external process equipment 21, and facilitates the opening and closing of each individual electrically controlled valve 11 to determine whether nitrogen can flow through the second manual valve 12;
[0047] The opening and closing of all individual electrically controlled valves 11 via the third manual valve 13 determines whether nitrogen can flow.
[0048] In some specific embodiments, the input end of the first drummed chemical 3 is connected to a first pneumatic valve 14;
[0049] The input end of the second drummed chemical 4 is connected to a second pneumatic valve 15;
[0050] The output end of the first drummed chemical 3 is connected to a third pneumatic valve 16;
[0051] The output end of the second drummed chemical 4 is connected to a fourth pneumatic valve 17;
[0052] The output end of the pressure sensor 1 is connected to a fifth pneumatic valve 18.
[0053] Specifically, this allows for the switching on and off of the input terminals of the first barrel of chemicals 3 and the second barrel of chemicals 4 via PLC module 2;
[0054] This allows for the switching on and off of the output terminals of the first barrel of chemicals 3 and the second barrel of chemicals 4 via PLC module 2;
[0055] This allows for easy control of the on / off state of the input terminal of the pressure sensor 1 via the PLC module 2.
[0056] In some specific embodiments, the input terminals of the first liquid supply pump 6 and the second liquid supply pump 7 are provided with liquid level sensors 19.
[0057] Specifically, it facilitates the acquisition of liquid levels at the output terminals of the first barrel of chemicals 3 and the second barrel of chemicals 4 via the liquid level sensor 19.
[0058] In some specific embodiments, the liquid level sensor 19, the first pneumatic valve 14, the second pneumatic valve 15, the third pneumatic valve 16, the fourth pneumatic valve 17, the fifth pneumatic valve 18, the first leakage sensor 9, the second leakage sensor 10, the first liquid supply pump 6, and the second liquid supply pump 7 are all electrically connected to the PLC module 2.
[0059] In some specific embodiments, the PLC module 2 is connected to a touch screen 20, which facilitates the control of the PLC module through the touch screen.
[0060] Specifically, the PLC module 2 presets the pressure. In actual implementation, the pressure threshold can be set to 0.4 MPa. When the pressure sensor 1 detects a pressure higher than 0.45 MPa, the PLC module 2 controls the first liquid supply pump 6 and the second liquid supply pump 7 to shut down. When the pressure sensor 1 detects a pressure lower than 0.4 MPa, the PLC module 2 sends an electrical signal to turn on the first liquid supply pump 6 and the second liquid supply pump 7, so that the first liquid supply pump 6 and the second liquid supply pump 7 can start supplying liquid.
[0061] When the first liquid supply pump 6 and the second liquid supply pump 7 are turned on, the chemicals in the first barrel of chemicals 3 and the second barrel of chemicals 4 can be extracted and supplied to the process equipment 21 in sequence through the first liquid supply pump 6, the second liquid supply pump 7, the pressure sensor 1, the third manual valve 13, the second manual valve 12 and the electric control valve 11.
[0062] The process equipment 21 and the electric control valve 11 are electrically linked. When the electric control valve 11 receives the liquid demand signal (signal to open the electric valve) from the process equipment, it opens. At this time, the detection signal of the pressure sensor 1 will decrease. When the decrease is lower than 0.4 MPa, the PLC module 2 controls the first liquid supply pump 6 and the second liquid supply pump 7 to open.
[0063] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.
Claims
1. A continuously pressurized and stable liquid supply system, characterized in that, include: The chemical distribution module is connected to the external nitrogen pipeline (5). The output end of the chemical distribution module is connected to the control box. The output end of the control box is connected to the valve group box. The output end of the valve group box is connected to the process machine (21). The chemical dispensing module includes a pressure sensor (1) and a PLC module (2), wherein the pressure sensor (1) is located at the output end of the chemical dispensing module; The pressure sensor (1) is electrically connected to the PLC module (2).
2. The continuous pressurized stable liquid supply system according to claim 1, characterized in that, The chemical dispensing module includes a first barrel of chemicals (3) and a second barrel of chemicals (4), and the input ends of the first barrel of chemicals (3) and the second barrel of chemicals (4) are both connected to an external nitrogen pipeline (5). The output ends of the first barrelled chemical (3) and the second barrelled chemical (4) are respectively connected to the first liquid supply pump (6) and the second liquid supply pump (7). The output ends of the first liquid supply pump (6) and the second liquid supply pump (7) are connected to the pressure sensor (1). The output end of the pressure sensor (1) is connected to the control box.
3. The continuous pressurized stable liquid supply system according to claim 2, characterized in that, The control box is equipped with a first manual valve (8) that is connected to the output of the pressure sensor (1) via a three-way valve, and a first leakage sensor (9).
4. The continuous pressurized stable liquid supply system according to claim 3, characterized in that, The valve assembly box includes a second leakage sensor (10) and multiple electrically controlled valves (11). The process machine (21) is connected to one of the electrically controlled valves (11), and the electrically controlled valve (11) is electrically connected to the process machine (21). The other ends of the multiple electrically controlled valves (11) are connected to the first manual valve (8) in sequence through a second manual valve (12) and a third manual valve (13).
5. The continuous pressurized stable liquid supply system according to claim 4, characterized in that, The input end of the first drummed chemical (3) is connected to a first pneumatic valve (14); The input end of the second drummed chemical (4) is connected to a second pneumatic valve (15); The first barrelled chemical (3) is connected to a third pneumatic valve (16) at its output end. The output end of the second drum of chemicals (4) is connected to a fourth pneumatic valve (17); The output end of the pressure sensor (1) is connected to a fifth pneumatic valve (18).
6. The continuous pressurized stable liquid supply system according to claim 5, characterized in that, The first liquid supply pump (6) and the second liquid supply pump (7) are equipped with liquid level sensors (19) at their input ends.
7. The continuous pressurized stable liquid supply system according to claim 6, characterized in that, The level sensor (19), the first pneumatic valve (14), the second pneumatic valve (15), the third pneumatic valve (16), the fourth pneumatic valve (17), the fifth pneumatic valve (18), the first leakage sensor (9), the second leakage sensor (10), the first liquid supply pump (6), and the second liquid supply pump (7) are all electrically connected to the PLC module (2).
8. The continuous pressurized stable liquid supply system according to claim 1, characterized in that, The PLC module (2) is connected to a touch screen (20).