High purity diaphragm pressure gauge

By designing a high-purity diaphragm pressure gauge, using 316L stainless steel and a precision structure, the problems of accuracy and contamination prevention in monitoring medium pressure in ultra-high purity environments have been solved, achieving accurate monitoring and shock-resistant protection in the transmission of high-purity media.

CN224398868UActive Publication Date: 2026-06-23YAMANO INSTRUMENTS (HEBEI) CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
YAMANO INSTRUMENTS (HEBEI) CO LTD
Filing Date
2025-09-04
Publication Date
2026-06-23

AI Technical Summary

Technical Problem

Existing technologies struggle to accurately monitor medium pressure in ultra-high purity environments, and traditional diaphragm pressure gauges are susceptible to contamination, failing to meet the demands of high-purity medium transmission.

Method used

A high-purity diaphragm pressure gauge was designed, made of 316L stainless steel, and includes a lower body, an upper body, a diaphragm, a support sleeve, an interface assembly, a glass plate, a movement, and an indicating assembly. It achieves accurate indication through the meshing of sector gears and transmission gears, and is equipped with a high overpressure protection device. The surface finish of all parts in contact with the medium is Ra≤0.5μm.

Benefits of technology

It enables precise monitoring of medium pressure in ultra-high purity environments, prevents contamination, extends service life, has a wide range of applications, is not limited by space, and is resistant to instantaneous overpressure impacts.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a kind of high-purity diaphragm pressure gauges, including watch case, further include: lower connector, the lower connector is arranged at the bottom side of the watch case, the top end of the lower connector is located inside the watch case;Upper connector, the upper connector is located at the top of the lower connector, the gap between the lower connector and the upper connector constitutes accommodating cavity;Diaphragm, the diaphragm is arranged in the accommodating cavity.This application structure design is more ingenious, reasonable, can be installed very conveniently, more extensive, not restricted by space;Fan gear and transmission gear are engaged with each other, can guarantee instrument indication accurate and correct;High overvoltage protection device design can ensure not to be impacted by instantaneous overvoltage, and prolong the service life of high-purity diaphragm pressure gauge;All with the inner surface finish of medium contact component Ra≤0.5 μm, effectively protect high-purity system medium from pollution, completely applicable to ultrahigh pure field environment use.
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Description

Technical Field

[0001] This utility model relates to the field of diaphragm pressure gauge technology, and in particular to a high-purity diaphragm pressure gauge. Background Technology

[0002] In integrated engineering systems for the production, transportation, and control of high-purity media (such as gases, liquids, or chemicals), or in industries like biomedicine and cutting-edge scientific research, the core function is to control impurity concentrations at the ppb (parts per billion) to ppt (parts per trillion) level through precise design and manufacturing technologies. This ensures that the media remains uncontaminated during transmission and use. The requirement for an ultra-high purity environment permeates the entire production process, far exceeding the stringency of ordinary industrial standards. The precision required for the high-purity environment in the manufacturing process is correspondingly higher, necessitating highly clean manufacturing processes. These processes require ultra-high purity environments and specific process gas environments. To achieve real-time monitoring of the system's media pressure, a high-purity diaphragm pressure gauge suitable for ultra-high purity environments is needed. Utility Model Content

[0003] The purpose of this invention is to provide a high-purity diaphragm pressure gauge in order to solve the above-mentioned problems.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A high-purity diaphragm pressure gauge includes a housing and further includes:

[0006] The lower connector is disposed on the bottom side of the watch case, and the top end of the lower connector is located inside the watch case;

[0007] An upper connector is located on top of a lower connector, and the gap between the lower connector and the upper connector forms an accommodating cavity;

[0008] A diaphragm is disposed within the accommodating cavity, and a protrusion is provided on the side of the diaphragm opposite to the upper connector.

[0009] A support sleeve is embedded in the upper connector, and the protrusion and the support sleeve are adapted to each other.

[0010] An interface component, which is interconnected with the lower connector.

[0011] A glass plate, the glass plate being disposed on the side of the watch case;

[0012] The movement is fixedly installed inside the watch case;

[0013] An indicator component, wherein the movement controls the operation of the indicator component.

[0014] Preferably, the interface component is connected to the bottom of the lower connector.

[0015] Preferably, the interface component may be equipped with a process connection interface.

[0016] Preferably, the indicating component includes a hand and a dial, the dial being fixedly connected to the inner wall of the watch case by a first screw, and the hand and the dial being rotatably connected.

[0017] Preferably, the movement includes a positioning frame, a support column is fixedly connected to the upper body, the positioning frame is fixedly connected to the support column by a second screw, a drive shaft is rotatably connected to the bottom side of the positioning frame, an adjusting rod is provided on the drive shaft, the bottom end of the adjusting rod abuts against a protrusion on the diaphragm, a first rotating shaft is rotatably connected to the positioning frame, and the first rotating shaft is fixedly connected to the dial needle.

[0018] Preferably, the positioning frame has a limiting hole, the transmission shaft is provided with a pressure rod, the pressure rod can swing in the limiting hole, the positioning frame is rotatably connected with a second rotating shaft, the second rotating shaft is provided with a sector gear, the second rotating shaft is provided with a transmission gear, the transmission gear and the sector gear are meshed and connected, the side of the second rotating shaft is provided with a transmission rod, the transmission rod and the pressure rod are slidably connected.

[0019] Preferably, a turntable is rotatably connected to the pressure rod, a limit block is provided on the turntable, a sliding hole is provided on the limit block, and the sliding hole is slidably connected to the transmission rod.

[0020] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0021] The structure is more sophisticated and reasonable, making installation very convenient and applicable to a wider range of situations without space limitations; the meshing of the sector gear and transmission gear ensures accurate instrument readings; the high overpressure protection device design ensures protection against instantaneous overpressure impacts and extends the service life of the high-purity diaphragm pressure gauge; the surface finish of all parts in contact with the medium has a surface finish Ra≤0.5μm, effectively protecting the medium in the high-purity system from contamination, making it fully suitable for use in ultra-high purity environments. Attached Figure Description

[0022] Figure 1 A three-dimensional structural schematic diagram of a pressure gauge provided according to an embodiment of the present invention is shown;

[0023] Figure 2 A schematic diagram of the exploded structure of a pressure gauge according to an embodiment of the present invention is shown;

[0024] Figure 3A cross-sectional view of a pressure gauge according to an embodiment of the present invention is shown.

[0025] Figure 4 A top view of the movement structure according to an embodiment of the present invention is shown;

[0026] Figure 5 A bottom-view schematic diagram of the movement structure provided according to an embodiment of the present invention is shown.

[0027] Legend:

[0028] 1. Interface component; 2. Lower connector; 3. Diaphragm; 4. Upper connector; 5. Support sleeve; 6. Support column; 7. Movement; 8. Dial; 9. Hands; 10. Glass plate; 11. First screw; 12. Second screw; 13. Case; 14. Positioning frame; 15. Limiting hole; 16. Drive shaft; 17. Adjusting rod; 18. Pressure rod; 19. First rotating shaft; 20. Transmission gear; 21. Second rotating shaft; 22. Sector gear; 23. Transmission rod; 24. Turntable; 25. Limiting block; 26. Sliding hole. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0030] Please see Figure 1-5 This utility model provides a technical solution:

[0031] A high-purity diaphragm pressure gauge includes a housing 13, and further includes: a lower connector 2 disposed on the bottom side of the housing 13, with its top end located inside the housing 13; an upper connector 4 located on top of the lower connector 2, with a gap between the lower connector 2 and the upper connector 4 forming a receiving cavity; a diaphragm 3 disposed within the receiving cavity, with a protrusion on the side of the diaphragm 3 opposite to the upper connector 4; a support sleeve 5 embedded in the upper connector 4, with the protrusion and the support sleeve 5 mutually adapted; an interface assembly 1 communicating with the lower connector 2; a glass plate 10 disposed on the side of the housing 13; and a movement 7 fixedly disposed in the housing 13. The inner part includes an indicating component, with the movement 7 controlling its operation. The interface component 1, lower connector 2, diaphragm 3, and upper connector 4 can be made of 316L stainless steel or other special materials to ensure the high-purity system is protected from contamination or chemical reactions with special gases. The casing 13, support column 6, movement 7, second screw 12, and first screw 11 can all be made of 316L stainless steel. The diaphragm 3 is positioned between the lower connector 2 and the upper connector 4. Compared with existing diaphragm pressure gauges, the new high-purity diaphragm pressure gauge has an overload capacity 20 times greater than existing pressure gauges. The support sleeve 5 provides overpressure protection for the diaphragm 3, effectively preventing damage to the pressure gauge caused by instantaneous overpressure within the system.

[0032] Specifically, such as Figure 1 and Figure 3 As shown, interface component 1 is connected to the bottom of lower body 2. Interface component 1 can be equipped with process connection interface. The indicating component includes needle 9 and dial 8. Dial 8 is fixedly connected to the inner wall of housing 13 by first screw 11. Needle 9 and dial 8 are rotatably connected. Process connection interface is the mechanical connection method between pressure gauge and pipeline or equipment. Its selection directly affects sealing performance, pressure resistance and installation and maintenance efficiency.

[0033] Specifically, such as Figure 3 , Figure 4 and Figure 5 As shown, the movement 7 includes a positioning frame 14, a support column 6 is fixedly connected to the upper body 4, the positioning frame 14 is fixedly connected to the support column 6 by a second screw 12, a drive shaft 16 is rotatably connected to the bottom side of the positioning frame 14, an adjusting rod 17 is provided on the drive shaft 16, the bottom end of the adjusting rod 17 abuts against a protrusion on the diaphragm 3, a first rotating shaft 19 is rotatably connected to the positioning frame 14, and the first rotating shaft 19 is fixedly connected to the dial needle 9.

[0034] Specifically, such as Figure 4 and Figure 5As shown, a limiting hole 15 is provided on the positioning frame 14, and a pressure rod 18 is provided on the transmission shaft 16. The pressure rod 18 can swing in the limiting hole 15. A second rotating shaft 21 is rotatably connected to the positioning frame 14. A sector gear 22 is provided on the second rotating shaft 21. A transmission gear 20 is provided on the second rotating shaft 21. The transmission gear 20 and the sector gear 22 are meshed and connected. A transmission rod 23 is provided on the side of the second rotating shaft 21. The transmission rod 23 and the pressure rod 18 are slidably connected. A turntable 24 is rotatably connected to the pressure rod 18. A limiting block 25 is provided on the turntable 24. A sliding hole 26 is provided on the limiting block 25. The sliding hole 26 and the transmission rod 23 are slidably connected.

[0035] In summary, the high-purity diaphragm pressure gauge provided in this embodiment, after the medium pressure acts on the diaphragm 3, the upper support sleeve 5 transmits the force to one end of the adjusting rod 17 at the lower part of the movement 7 through the deformation of the diaphragm 3. The adjusting rod 17 swings upward, and the transmission shaft 16 drives the pressure rod 18 to make a circular motion. The pressure rod 18 drives the sector gear 22 to swing through the transmission rod 23. With the cooperation of the sector gear 22 and the transmission gear 20, the needle 9 is driven to indicate the value.

[0036] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high purity diaphragm pressure gauge comprising a gauge case (13), characterised in that, Also include: Lower connector body (2), the lower connector body (2) is arranged at the bottom side of the watch case (13), and the top end of the lower connector body (2) is located inside the watch case (13); Upper connector body (4), the upper connector body (4) is located at the top of the lower connector body (2), and the gap between the lower connector body (2) and the upper connector body (4) constitutes a containing cavity; Diaphragm (3), the diaphragm (3) is arranged in the containing cavity, and the side of the diaphragm (3) opposite to the upper connector body (4) is provided with a protrusion; Support sleeve (5), the support sleeve (5) is embedded on the upper connector body (4), and the protrusion and the support sleeve (5) are matched with each other; Interface assembly (1), the interface assembly (1) is in communication with the lower connector body (2) Glass plate (10), the glass plate (10) is arranged on the side of the watch case (13); Movement (7), the movement (7) is fixedly arranged in the watch case (13); Indication assembly, the movement (7) controls the indication assembly to work.

2. A high purity diaphragm pressure gauge according to claim 1, wherein The interface assembly (1) is connected with the bottom of the lower connector body (2).

3. A high purity diaphragm pressure gauge according to claim 2, wherein The interface assembly (1) can be connected with a process interface.

4. A high purity diaphragm pressure gauge according to claim 1, wherein The indication assembly includes a watch needle (9) and a watch dial (8), the watch dial (8) is fixedly connected with the inner wall of the watch case (13) through a first screw (11), and the watch needle (9) and the watch dial (8) are rotationally connected.

5. A high purity diaphragm pressure gauge according to claim 4, wherein The movement (7) includes a positioning frame (14), the upper connector body (4) is fixedly connected with a support column (6), the positioning frame (14) is fixedly connected with the support column (6) through a second screw (12), the bottom side of the positioning frame (14) is rotationally connected with a transmission shaft (16), the transmission shaft (16) is provided with an adjusting rod (17), the bottom end of the adjusting rod (17) abuts against the protrusion on the diaphragm (3), the positioning frame (14) is rotationally connected with a first rotating shaft (19), and the first rotating shaft (19) is fixedly connected with the watch needle (9).

6. A high purity diaphragm pressure gauge according to claim 5, wherein A limiting hole (15) is formed in the positioning frame (14), a pressing rod (18) is arranged on the transmission shaft (16), the pressing rod (18) can swing in the limiting hole (15), a second rotating shaft (21) is rotationally connected to the positioning frame (14), a fan gear (22) is arranged on the second rotating shaft (21), a transmission gear (20) is arranged on the second rotating shaft (21), the transmission gear (20) and the fan gear (22) are meshedly connected, a transmission rod (23) is arranged on the side surface of the second rotating shaft (21), and the transmission rod (23) and the pressing rod (18) are slidingly connected.

7. A high purity diaphragm pressure gauge according to claim 6, wherein A rotating disc (24) is rotationally connected to the pressing rod (18), a limiting block (25) is arranged on the rotating disc (24), a sliding hole (26) is arranged on the limiting block (25), and the sliding hole (26) and the transmission rod (23) are slidingly connected.