A high-energy laser focusing lens focal plane detection device

Abstract

The utility model discloses a high -power laser focusing lens focal plane detection device, in order to solve the low precision, device easy to be damaged, operation complex etc. of existing detection system under high -power laser scene, through the light path system of building contains 1 / 2 wave plate, polarization beam splitter prism, 1 / 4 wave plate, aperture diaphragm and reflector, utilize polarization state modulation principle, convert reflected light into S polarized light and are detected by power meter probe. Through moving reflector and recording power and position data, draw power -position curve, with the critical point of power rapid attenuation as focal plane measurement value. Further combine the error curve (obtain through simulation fitting) generated in advance, compensate the theoretical error of laser divergence angle introduction, realize the high accuracy positioning of focal plane.

Description

Technical Field

[0001] This utility model relates to the field of laser processing and manufacturing technology, specifically to a device for detecting the focal plane of a high-energy laser focusing lens. Background Technology

[0002] High-energy laser systems play an irreplaceable role in materials processing, nuclear fusion ignition, and national defense technology. The accuracy of their focal position directly determines the energy transmission efficiency and effectiveness. Current mainstream high-energy laser focusing lens focal plane detection systems (such as thermocouple array scanning and sapphire probe contact methods) all have significant limitations: mechanical contact detection easily causes surface abrasion of optical components, especially with kilowatt-level lasers where probe lifespan is less than 100 hours; off-axis imaging systems are limited by the CCD target surface damage threshold, making them unsuitable for high-power-density scenarios; and traditional knife-edge systems suffer a sharp drop in positioning accuracy due to thermal deformation. These bottlenecks have long resulted in a triple dilemma for high-energy laser beam focal plane in-situ detection systems: complex operation, limited accuracy, and severe device wear. Utility Model Content

[0003] To address the problems of low accuracy, fragile components, and complex operation in existing detection systems under high-power laser conditions, this invention provides a high-energy laser focusing lens focal plane detection device. It converts reflected light into S-polarized light for detection through a polarization modulation optical path, and combines power attenuation critical point positioning and divergence angle error compensation to achieve in-situ high-precision detection of the focal plane of a high-energy laser focusing lens.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] This utility model provides a focal plane detection device for a high-energy laser focusing lens, including a focusing lens to be tested. A laser, a half-wave plate, a first polarizing beam splitter, a second polarizing beam splitter, a quarter-wave plate, and an aperture stop are arranged sequentially in front of the focusing lens along the optical axis of the optical path. An axially adjustable reflector is arranged behind the focusing lens along the optical axis of the optical path. A power meter detector is arranged on the reflected optical path of the second polarizing beam splitter.

[0006] The high-energy laser emitted by the laser is first modulated into elliptically polarized light by a half-wave plate, and then separated into P-polarized light by a first polarizing beam splitter. The P-polarized light is converted into elliptically polarized light by a second polarizing beam splitter and a quarter-wave plate. After the stray light is filtered out by the aperture stop, the beam is focused by the focusing lens under test. The mirror reflects the beam back along the original path. After the beam passes through the quarter-wave plate again, its polarization state becomes S-polarized light, and finally it is reflected to the power meter detector by the second polarizing beam splitter.

[0007] The reflector is moved along the optical axis of the optical path to change the distance between the reflector and the focusing lens under test. The power meter detector simultaneously records the power value of the beam reflected by the second polarizing beam splitter.

[0008] The above technical solution is adopted:

[0009] 1. Without the need for an additional light source, the polarization direction of the linearly polarized light is changed by rotating and adjusting the foremost half-wave plate. This works in conjunction with the first polarizing beam splitter prism behind it. Rotating the half-wave plate changes the ratio of transmitted to reflected beam power of the first polarizing beam splitter prism (e.g., rotating the half-wave plate so that the polarization direction of the incident laser is parallel to the transmission axis of the first polarizing beam splitter prism, at which point the transmitted power is maximum and the reflected power is minimum). By controlling the rotation angle of the half-wave plate, the transmitted beam power of the first polarizing beam splitter prism can be continuously and repeatedly adjusted, thus controlling the input light power entering the measurement system and effectively preventing damage to optical components due to excessive power.

[0010] 2. Through optical path modulation, the incident light passes through a 1 / 2 wave plate → the first polarizing beam splitter separates it into P-polarized light → the second polarizing beam splitter and the 1 / 4 wave plate convert it into elliptically polarized light → the aperture stop filters out stray light → the focusing lens under test focuses it; the light reflected by the mirror passes through the 1 / 4 wave plate again and is converted into S-polarized light → the second polarizing beam splitter reflects it to the power meter;

[0011] Linearly polarized P-beam is converted into linearly polarized S-beam after passing through a quarter-wave plate twice. Due to the characteristics of the polarization beam splitter (high transmission of P-polarized light and high reflection of S-polarized light), the linearly polarized S-beam, which is orthogonally polarized to the P-beam, is reflected by the second polarization beam splitter and guided to the detector end. The detector end is located in the non-focusing region, avoiding the risk of damage to the CCD target surface. This fundamentally avoids the problem that off-axis imaging is difficult to apply to high power density scenarios due to the limitation of the CCD target surface damage threshold.

[0012] 3. In specific experiments, it was found that when the reflecting mirror is outside the focal length range of the focusing lens under test, the light rays reflected by the mirror diverge significantly at their edges and cannot all pass back through the focusing lens, causing the total power of the light spot received by the power meter detector to decrease rapidly. Conversely, when the reflecting mirror is within the focal length range of the focusing lens under test, the light rays reflected by the mirror can (all or most of them) pass back through the focusing lens. Therefore, the total power of the light spot received by the power meter detector remains basically stable (for an ideal lens, the optical power theoretically remains unchanged; for a non-ideal lens with aberrations such as spherical aberration, the optical power only changes slightly). Based on the above principle, by moving the reflecting mirror back and forth along the optical axis and simultaneously recording the distance (position) between the reflecting mirror and the focusing lens, as well as the optical power measured by the power meter detector at that position, a power-position relationship curve is plotted. The critical position where the power decreases rapidly on the curve is identified, and this position corresponds to the measurement position of the focal point of the focusing lens under test.

[0013] Furthermore, the fast axis direction of the quarter-wave plate is set to 45°, and the phase delay is set to 90°. By adjusting the fast axis direction of the quarter-wave plate located in front of the aperture stop, it is ensured that the beam reflected back by the mirror is converted into S-polarized light after passing through the quarter-wave plate again, and then reflected by the second polarizing beam splitter prism, and finally detected by the power meter detector. The power meter detector is located in the non-focusing area to avoid the risk of damage to the CCD target surface.

[0014] Furthermore, the aperture stop has a diameter 1 mm smaller than the diameter of the incident light spot, and the aperture stop is located 3 cm in front of the focusing lens under test.

[0015] Furthermore, the first polarizing beam splitter and the second polarizing beam splitter have high transmission for P-polarized light and high reflection for S-polarized light.

[0016] Specifically, the first polarizing beam splitter and the second polarizing beam splitter are model PBS-JGS1-12.7 / 12.7 / 12.7.

[0017] Furthermore, the half-wave plate is mounted on a wave plate rotating frame, and the half-wave plate is rotated by the wave plate rotating frame, which, in conjunction with the first polarizing beam splitter prism, controls the power ratio of the transmitted laser beam.

[0018] By rotating and adjusting the foremost half-wave plate, the polarization direction of the linearly polarized light is changed. This, in conjunction with the first polarizing beam splitter behind it, allows for continuous and repeatable adjustment of the transmitted beam power of the first polarizing beam splitter, thus controlling the input light power entering the measurement system.

[0019] Furthermore, the reflector is mounted on a reflector bracket, and the bottom of the reflector bracket is mounted on a linear guide rail assembly via a slider. The linear guide rail assembly is arranged along the optical axis of the optical path.

[0020] In actual operation, the slider moves linearly along the linear guide assembly, thereby moving the reflector along the optical axis of the optical path and changing the distance between the reflector and the focusing lens under test.

[0021] Furthermore, the laser is mounted on a lifting device, and the high-intensity laser beam emitted by the laser is adjusted to maintain the same optical axis center as the subsequent modulation optical path.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] 1. Without the need for an additional light source, the polarization direction of the linearly polarized light is rotated by adjusting the front half-wave plate. This, in conjunction with the first polarizing beam splitter behind it, changes the ratio of transmitted / reflected beam power of the first polarizing beam splitter. This allows for continuous and repeatable adjustment of the transmitted beam power of the first polarizing beam splitter, effectively controlling the input light power entering the measurement system and preventing damage to optical components due to excessive power.

[0024] 2. By constructing an optical path system including a half-wave plate, a polarizing beam splitter prism, a quarter-wave plate, an aperture stop, and a mirror, the reflected light is converted into S-polarized light using the principle of polarization state modulation. The reflected light is then guided to the power meter detector by the second polarizing beam splitter for power detection. The detector end is located in the non-focusing area, avoiding the risk of CCD target surface damage. This fundamentally avoids the problem that off-axis imaging methods are difficult to apply to high power density scenarios due to the limitation of CCD target surface damage threshold.

[0025] 3. In specific experiments, it was found that when the reflector is outside the focal length range of the focusing lens under test, the total optical power received by the power meter detector decreases rapidly as the reflector moves further away from the focal point. When the reflector is within the focal length range of the focusing lens under test, the total optical power received by the power meter detector does not decrease significantly with the change of the reflector position. Based on the above principle, by moving the reflector back and forth along the optical axis and simultaneously recording the distance (position) between the reflector and the focusing lens and the optical power measured by the power meter detector at that position, a power-position relationship curve is plotted. The critical position where the power decreases rapidly on the curve is identified, and this position corresponds to the measurement position of the focal point of the focusing lens under test. Attached Figure Description

[0026] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0027] Figure 1This is a schematic diagram of the high-energy laser focusing lens focal plane detection device in the embodiment;

[0028] Figure 2 This is an optical path diagram of the high-energy laser focusing lens focal plane detection device in the embodiment;

[0029] Figure 3 This is a schematic diagram showing that the reflector is located outside the focal length range of the focusing lens being measured in the embodiment.

[0030] Figure 4 This is a schematic diagram showing that the reflector is located within the focal length range of the focusing lens being tested in the embodiment.

[0031] Figure 5 This is a power-position curve obtained from the experiment in the example;

[0032] Figure 6 This is a partial schematic diagram of the simulation model built using Zemax software in the embodiment.

[0033] Figure 7 The example shows the error curves of lenses with different focal lengths under the condition that the laser divergence angle is 1.12 mrad.

[0034] The specific reference numerals in the attached figures are as follows:

[0035] Laser 1, lifting device 2, half-wave plate 3, wave plate rotating frame 4, first polarizing beam splitter prism 5, second polarizing beam splitter prism 6, half-wave plate 7, aperture stop 8, focusing lens 9, reflecting mirror 10, reflecting mirror support 11, slider 12, linear guide rail assembly 13, power meter detector 14. Detailed Implementation

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example 1

[0037] This embodiment discloses a device for detecting the focal plane of a high-energy laser focusing lens, such as... Figure 1 As shown, the core optical components of this detection system include a half-wave plate 3, two polarizing beam splitters (a first polarizing beam splitter 5 and a second polarizing beam splitter 6), a quarter-wave plate 7, an aperture stop 8, a focusing lens 9, and a plane mirror 10. The experimental platform is as follows. Figure 1As shown. A half-wave plate 3, a first polarizing beam splitter 5, a second polarizing beam splitter 6, a quarter-wave plate 7, and an aperture stop 8 are arranged sequentially in front of the focusing lens 9 along the optical axis of the optical path. An axially adjustable reflector 10 is arranged behind the focusing lens 9 along the optical axis of the optical path. A power meter detector 14 is arranged on the reflected optical path of the second polarizing beam splitter 6.

[0038] A half-wave plate 3 is mounted on a wave plate rotating frame 4. The half-wave plate 3 is rotated around the optical axis by the wave plate rotating frame 4, and works in conjunction with the first polarizing beam splitter prism 5 to control the power ratio of the transmitted laser beam. By rotating and adjusting the foremost half-wave plate 3, the polarization direction of the linearly polarized light is rotated. In conjunction with the first polarizing beam splitter prism 5 behind it, the power of the beam transmitted by the first polarizing beam splitter prism 5 can be continuously and repeatedly adjusted, thereby controlling the input light power entering the measurement system.

[0039] The reflector 10 is mounted on the reflector bracket 11, and the bottom of the reflector bracket 11 is mounted on the linear guide rail assembly 13 via a slider 12. The linear guide rail assembly 13 is set along the optical axis of the optical path. In actual operation, the slider 12 moves linearly along the linear guide rail assembly 13, thereby moving the reflector 10 along the optical axis of the optical path and changing the distance between the reflector 10 and the focusing lens 9 under test.

[0040] Laser 1 is mounted on lifting device 2, and the high-intensity laser beam emitted by laser 1 is adjusted to keep the optical axis center of the subsequent modulation optical path.

[0041] like Figure 2 As shown, the high-energy laser emitted by laser 1 is first modulated into elliptically polarized light by a half-wave plate 3, and then separated into P-polarized light by a first polarizing beam splitter prism 5. Subsequently, the transmitted P-polarized light is converted into elliptically polarized light by a second polarizing beam splitter prism 6 and a quarter-wave plate 7, changing the polarization characteristics of the laser. After passing through an aperture stop 8 to filter out stray light in the reflected light, the laser beam is focused by a focusing lens 9, causing it to propagate towards the focal point. The reflecting mirror 10, placed behind the focusing lens 9, reflects the focused laser beam back along its original path. Returning, the reflector 10 reflects the beam back along its original path. The beam reflected by the reflector 10 passes sequentially through the focusing lens 9, the aperture stop 8, and the quarter-wave plate 7 (after passing through the quarter-wave plate 7 again, the elliptically polarized light becomes S-polarized light). Due to the characteristics of the polarizing beam splitter prism (high transmission of P-polarized light and high reflection of S-polarized light), the linearly polarized S-light, which is orthogonally polarized to the linearly polarized P-light, is reflected by the second polarizing beam splitter prism 6 and becomes S-parallel light, which is guided to the power meter detector 14. The power meter detector 14 records the power value of the reflected beam.

[0042] The principle of polarization state modulation is as follows:

[0043] After the incident light passes through the half-wave plate 3 and the first polarizing beam splitter prism 5, the incident light becomes linearly polarized light P propagating along the z-axis (optical axis), with its Jones vector being...

[0044] .

[0045] P-polarized light is converted into S-polarized light after passing twice through a quarter-wave plate 7 with a fast axis at a 45° angle to the horizontal. The Jones matrix of the emitted light is:

[0046] .

[0047] Due to the characteristics of the polarization beam splitter prism (high transmission of P-polarized light and high reflection of S-polarized light), the S-light, which is orthogonally polarized to the P-light, will be reflected by the second polarization beam splitter prism 6 and directed to the power meter detector 14.

[0048] like Figure 3 As shown, when the reflector 10 is outside the focal length range of the focusing lens 9 under test, the light rays reflected by the reflector 10 exhibit significant edge divergence and cannot all re-pass through the focusing lens 9, resulting in a rapid attenuation of the total power of the light spot received by the detector. Conversely, as... Figure 4 As shown, when the reflector 10 is within the focal length range of the focusing lens 9 being measured, the light reflected by the reflector 10 can (all or most of it) pass through the focusing lens 9 again. Therefore, the total power of the light spot received by the detector remains basically stable (for an ideal lens, the light power theoretically remains unchanged; for a non-ideal lens with aberrations such as spherical aberration, the light power only changes slightly).

[0049] Based on the above principle, by reciprocating the reflector 10 along the optical axis and simultaneously recording the distance (position) between the reflector 10 and the focusing lens 9 under test, as well as the optical power of the detector at that position, a graph is plotted as follows: Figure 5 The power-position relationship curve shown identifies the critical position where the power rapidly decays on the curve, which corresponds to the measurement position of the focal point of the focusing lens 9 under test.

[0050] In practical applications, the beam divergence angle of laser 1 introduces a theoretical error value into the focal length measurement of focusing lens 9. To improve measurement accuracy, this application determines the beam divergence angle of laser 1 according to its technical specifications. Based on this beam divergence angle, simulation is performed to obtain a curve showing the error versus focal length (error / focal length curve). The measured value of the focal plane position of the focusing lens 9 is then substituted into the error / focal length curve to calculate the theoretical error value introduced by the laser 1 divergence angle. Subtracting this theoretical error value from the measured value allows for the accurate determination of the actual focal plane position of focusing lens 9, eliminating the theoretical error caused by the laser 1 beam divergence angle and significantly improving measurement accuracy.

[0051] The specific process for obtaining the error / focal length curve is as follows:

[0052] 1. Optical Component Modeling

[0053] This system uses the non-sequential mode of Zemax optical design software for simulation. Compared to the sequential mode, the non-sequential mode can accurately track the propagation path of light on the surface and inside of each optical element, and consider complex optical phenomena such as light scattering and polarization state changes, which meets the simulation requirements of the propagation characteristics of high-energy laser beams in polarization modulation detection systems.

[0054] Based on the practical application scenario, the laser wavelength is set to 1064nm, a wavelength widely used in solid-state lasers and exhibiting good atmospheric transmission performance. A Gaussian distribution is used to describe the intensity distribution of the laser beam, consistent with the intensity distribution characteristics of high-energy laser beams under far-field conditions. The mathematical expression is:

[0055] ;

[0056] Where is the light intensity at a distance r from the beam center, is the light intensity at the beam center, and is the beam waist radius. The initial polarization state is defined as P-polarized light. Using the polarization element library in Zemax software, the polarization splitting characteristics of the polarization beam splitter are defined. Based on Fresnel's law and thin-film optics theory, by setting specific film structures, high transmittance of P-polarized light and high reflectivity of S-polarized light are achieved. Using the Jones matrix, a quarter-wave plate 7 is set in Zemax, with the fast axis direction set to 45° and the phase retardation set to 90°. The beam passes through the quarter-wave plate 7 twice, achieving the mutual conversion between P-polarized and S-polarized light. The aperture and position parameters of the aperture are precisely set to simulate its filtering effect on stray light, allowing only light within a specific aperture range to pass through. Based on the actual design parameters, the focusing lens 9 was input into Zemax with attributes such as a radius of curvature of 9.786, an aperture of 25.4 mm, an N-BK7 material, and a focal length of 100 mm. A geometric and optical model of the focusing lens 9 was constructed to simulate the laser beam converging effect. The reflectivity of the mirror 10 was set to close to 100% to minimize energy loss. Finally, a power meter detector 14 was placed above the second polarization beam splitter prism 6 to detect changes in the system's optical field. The simulation model diagram of the system design is shown below. Figure 6 As shown.

[0057] 2. Establish the error / focal length curve

[0058] In geometrical optics, the imaging of an ideal lens satisfies the Gaussian formula. (u is the object distance, v is the image distance, and f is the focal length), but actual laser sources have a divergence angle. When the beam enters the lens at the divergence angle, the light rays are not strictly parallel to the optical axis, causing a deviation between the actual focusing position and the ideal focal plane. That is, the error originates from the interference of non-parallel incident light on the focusing and imaging.

[0059] Let the laser divergence angle be ϕ. After passing through an ideal lens with aperture D and focal length f, the deviation between the actual image distance v and the ideal image distance f can be derived through geometric relationships:

[0060] ;

[0061] ;

[0062] Theoretical error rate = ;

[0063] Theoretical error rate = ;

[0064] With an ideal lens of 100mm focal length, the relative deviation introduced by laser 1 with a divergence angle of 1.12mrad should be around 4%. The error / focal length curve at ϕ=1.12mrad is shown below. Figure 7 As shown in the figure

[0065] according to Figure 5 Obtain the measured value of the focal point of focusing lens 9, and substitute the measured value of the focal length into the... Figure 7 The theoretical error rate is obtained by subtracting the theoretical error rate from the measured value. The final accurate measurement value of the focal plane position of the focusing lens 9 can then be obtained by subtracting the measured focal length value from the theoretical error rate. Example 2

[0066] This embodiment discloses a specific implementation method for the above-mentioned high-energy laser focusing lens focal plane detection device. The specific implementation steps are as follows:

[0067] (1) Install the following components in sequence along the light transmission direction: 1 / 2 wave plate 3 → First polarizing beam splitter 5 → Second polarizing beam splitter 6 → 1 / 4 wave plate 7 → Aperture stop 8 → Focusing lens under test 9 (nominal back focal length: 99mm) → Reflector 10. Place the power meter detector 14 at the end of the reflected light path of the second polarizing beam splitter 6.

[0068] (2) Adjust the angle of the 1 / 2 wave plate to control the laser power incident on the system.

[0069] (3) Adjust the fast axis direction of the 1 / 4 wave plate 7 to 45° to ensure that the reflected light is converted from P-polarized light to S-polarized light after passing through the 1 / 4 wave plate 7 twice, and is finally reflected by the second polarization beam splitter prism 6 to the power meter detector 14.

[0070] (4) Data acquisition: Move the reflector 10 along the optical axis to change its distance from the focusing lens 9; and simultaneously record the position of the reflector 10 and the reflected light power value measured by the power meter detector 14.

[0071] (5) Plot the power-position curve (e.g.) Figure 5 As shown in the figure, the critical point of rapid power decay in the power-position curve is 104.7 mm.

[0072] (6) Error compensation and precise positioning: Based on the pre-acquired error / focal length curve (e.g. Figure 7 As shown), substituting the measured value in step (5) into the error curve, we obtain the theoretical error value caused by the divergence angle of laser 1 = 104.7 * 4.19% = 4.3869 mm.

[0073] (7) Final focal length = measured value − theoretical error value = 104.7 - 4.3869 = 100.3131 mm. The error value of the measurement result = (100.3131 - 99) / 99 * 100% = 1.33%. This error is mainly due to the fact that the lens being measured is a non-ideal lens and has spherical aberration.

[0074] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-energy laser focusing lens focal plane detection device, characterized in that, The focusing lens is provided with a laser, a 1 / 2 wave plate, a first polarization beam splitting prism, a second polarization beam splitting prism, a 1 / 4 wave plate and an aperture diaphragm in sequence along the optical axis direction of the optical path in front of the focusing lens, and an axially adjustable mirror is arranged along the optical axis direction of the optical path behind the focusing lens, and a power meter detector is arranged on the reflection path of the second polarization beam splitting prism; The high-energy laser emitted by the laser is first modulated into elliptically polarized light by the 1 / 2 wave plate, then the P-polarized light is separated out by the first polarization beam splitting prism, the P-polarized light is converted into elliptically polarized light by the second polarization beam splitting prism and the 1 / 4 wave plate, the stray light is filtered out by the aperture diaphragm, and then the light is converged by the focusing lens, the mirror reflects the light beam back to the original path, the polarization state of the light beam changes to S-polarized light after passing through the 1 / 4 wave plate again, and finally the light is reflected to the power meter detector by the second polarization beam splitting prism. The mirror is moved along the optical axis direction of the optical path, the distance between the mirror and the focusing lens is changed, and the power meter detector synchronously records the power value of the light beam reflected by the second polarization beam splitting prism.

2. The high-energy laser focusing lens focal plane detection apparatus according to claim 1, wherein, The fast axis direction of the 1 / 4 wave plate is set to 45°, and the phase delay is set to 90°.

3. The high-energy laser focusing lens focal plane detection apparatus of claim 1, wherein, The aperture of the aperture diaphragm is 1mm smaller than the diameter of the incident light spot, and the aperture diaphragm is located 3cm in front of the focusing lens to be measured.

4. The high-energy laser focusing lens focal plane detection apparatus of claim 1, wherein, The first polarization beam splitting prism and the second polarization beam splitting prism have high transmission to P-polarized light and high reflection to S-polarized light.

5. The high-energy laser focusing lens focal plane detection apparatus of claim 1, wherein, The 1 / 2 wave plate is installed on a wave plate rotating frame, and the 1 / 2 wave plate is rotated by the wave plate rotating frame to control the power ratio of the transmitted laser beam in cooperation with the first polarization beam splitting prism.

6. The high-energy laser focusing lens focal plane detection apparatus according to claim 1, wherein, The mirror is installed on a mirror support, the bottom of the mirror support is installed on a linear guide rail assembly through a sliding block, and the linear guide rail assembly is arranged along the optical axis direction of the optical path.

7. The high-energy laser focusing lens focal plane detection apparatus according to claim 1, wherein, The laser is installed on a lifting device.

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