A calibration cavity module

Abstract

The utility model relates to a semiconductor technical field especially is a kind of calibration cavity module, including cavity, install cavity being set in cavity, rotationally connected in the supporting component and at least two visual inspection units of install cavity, the supporting component is used to support the mask plate to be measured, the mask plate to be measured is provided with two mutually opposite first side and second side, two the visual inspection units detect first side and second side respectively, install cavity is provided with transmission port, the cavity is equipped with light source, the light source and visual inspection unit are located the upper and lower sides of mask plate to be measured respectively;When first side or second side is not parallel to the symmetry center of transmission port, supporting component rotates and drives mask plate to rotate, to make mask plate rotate to the angle required;The utility model can be combined with the closed-loop control of double visual inspection and angle adjustable supporting component, dynamically corrects mask plate angle, ensures that taking and placing path collinearity, guarantees that mask plate grabbing path meets ideal state.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a calibration cavity module. Background Technology

[0002] The calibration chamber, acting as a physical standard carrier, links the equipment's output values ​​to higher-order metrological standards, enabling traceability of measurement values. Through its built-in reference standard, the calibration chamber corrects systematic errors caused by manufacturing tolerances, temperature drift, and other factors in real time, thereby avoiding performance fluctuations due to process variations.

[0003] The existing mask is located at the mechanical interface for picking and placing, corresponding to the gripping component at the end of the robot, which facilitates smooth picking and placing of the mask. The two sides of the mask are designed to be parallel to the picking and placing direction, ensuring that the end of the robot can accurately insert / extract along a straight trajectory, thus realizing the rapid picking and placing of the mask.

[0004] However, since it is difficult to avoid the angle between the two opposing sides of the mask and the axis of the pick-and-place port, it means that the sensor's posture in the cavity does not match the robot's preset motion trajectory. The mask and the pick-and-place port are prone to mechanical interference or local jamming, which directly destroys the collinearity of the grasping path and causes the grasping path to deviate from the ideal state. Utility Model Content

[0005] This invention addresses the shortcomings of existing technologies by providing a calibration cavity module that combines dual-vision detection with closed-loop control of an angle-adjustable support component to dynamically correct the mask angle, ensuring collinearity of the pick-and-place paths and guaranteeing that the mask gripping path meets the ideal condition.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] This utility model provides a calibration cavity module, including a cavity, a mounting cavity disposed within the cavity, a support member rotatably connected within the mounting cavity, and at least two vision detection units. The support member is used to support a mask to be tested. The mask to be tested has two opposing first sides and second sides. The two vision detection units respectively detect the first side and the second side. The mounting cavity is provided with a transmission port. A light source is installed in the cavity. The light source and the vision detection units are located on the upper and lower sides of the mask to be tested, respectively.

[0008] When the first or second side is not parallel to the center of symmetry of the transmission port, the support member rotates, causing the mask to rotate so that the mask rotates to the required angle.

[0009] The supporting component includes a support frame and at least three support columns connected to the support frame and parallel to each other. The support frame is rotatably connected to the cavity, and the top of the support column is used to support the mask plate to be tested.

[0010] The top of the support column is provided with a docking part, which makes point contact with the mask plate to be tested.

[0011] The calibration cavity module further includes a cavity cover and a locking component. The cavity is rotatably connected to a rotating shaft. One end of the cavity cover rotates around the rotating shaft. The cavity cover is placed at the top opening of the cavity. The locking component is used to lock the cavity cover to the cavity.

[0012] The cavity cover is provided with a movable hole, the rotating shaft passes through the movable hole, the rotating shaft is connected to a movable component, and the movable component slides on the cavity cover along the radial direction of the rotating shaft;

[0013] When the cavity cover rotates, it drives the movable part to move radially along the rotating shaft within the movable hole, so that the movable part rotates synchronously with the rotating shaft.

[0014] The cavity is equipped with at least two sheaths, the two ends of the rotating shaft are rotatably connected to the sheaths, the movable part is located between the sheaths, the cavity is equipped with a damper, and the damper is connected to the rotating shaft.

[0015] The cavity is provided with a support portion;

[0016] When the cavity cover is flipped upward to the desired position, the center of gravity of the cavity cover is located between the rotation center of the rotating shaft and the support part, and one end of the cavity cover abuts against the support part.

[0017] The locking component includes a locking rod hinged to the cavity at one end, a locking sleeve sleeved on the locking rod, and a bearing member threadedly connected to the locking rod. The cavity is provided with a receiving part, and the receiving part is provided with a notch. When the locking component swings to the cavity to the required position, the locking rod passes through the notch.

[0018] When it is necessary to lock the cavity cover, force is applied to rotate the carrier, which moves the locking sleeve toward the cavity cover and presses against the receiving part, so that the cavity cover and the cavity are locked together.

[0019] The carrier is provided with an annular groove, and the locking sleeve is circumferentially connected with at least three positioning members, one end of which is inserted into the annular groove.

[0020] The cavity is equipped with a support, and the support is provided with a limiting part;

[0021] When the other end of the locking rod swings away from the cavity to the desired position, the limiting part abuts against one side of the locking rod.

[0022] The beneficial effects of this utility model are:

[0023] In practical applications, the robotic arm places the mask to be tested onto the support member through the transfer port. When the first or second side is not parallel to the center of symmetry of the transfer port, the support member rotates, causing the mask to rotate to the required angle. The light source provides a clear acquisition area for the vision inspection unit, which facilitates improved detection accuracy. This allows for real-time feedback on the parallelism deviation between the first or second side and the center of symmetry of the transfer port. The transfer port serves as the reference channel for the robotic arm's pick-up and place, and its center of symmetry is the target axis for attitude calibration. By combining dual vision inspection with closed-loop control of the angle-adjustable support member, the mask angle is dynamically corrected to ensure collinearity of the pick-up and place path and to guarantee that the mask gripping path meets the ideal state. Attached Figure Description

[0024] Figure 1 This is a front view of the structure of this calibration cavity module.

[0025] Figure 2 An exploded view of the three-dimensional structure of the supporting components.

[0026] Figure 3 This is a three-dimensional structural diagram of the calibration cavity module.

[0027] Figure 4 This is an exploded view of the connection structure between the rotating shaft and the cavity cover.

[0028] Figure 5 This is an exploded view of the three-dimensional structure at the connection between the cavity cover and the cavity body.

[0029] Figure 6 This is a cross-sectional view of the connection between the cavity cover and the cavity body.

[0030] Figure 7 This is a three-dimensional view of the connection structure between the rotating shaft and the cavity cover.

[0031] Figure 8 This is an exploded view of the three-dimensional structure of the locking component.

[0032] Figure 9 This is an exploded view of the installation structure at the connection between the support and the cavity.

[0033] 01. Mask to be tested; 011. First side; 012. Second side;

[0034] 1. Cavity; 11. Rotating shaft; 12. Moving part; 13. Sheath; 14. Damper; 15. Support; 16. Receiving part; 161. Notch;

[0035] 2. Mounting cavity; 21. Transmission port;

[0036] 3. Supporting components;

[0037] 31. Support frame; 32. Support column; 321. Connecting part;

[0038] 4. Visual inspection unit; 5. Light source;

[0039] 6. Cavity cover; 601. Movable hole;

[0040] 7. Locking components;

[0041] 71. Locking rod; 72. Locking sleeve; 721. Positioning component; 73. Bearing component; 731. Annular groove;

[0042] 8. Support; 81. Limiting part. Detailed Implementation

[0043] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0044] refer to Figures 1 to 9 As shown, this utility model provides a calibration cavity module, including a cavity 1, a mounting cavity 2 disposed within the cavity 1, a support member 3 rotatably connected within the mounting cavity 2, and at least two vision detection units 4. The support member 3 is used to support a mask 01 to be tested. The mask 01 to be tested is provided with two opposing first sides 011 and second sides 012. The two vision detection units 4 respectively detect the first side 011 and the second side 012. The mounting cavity 2 is provided with a transmission port 21. The cavity 1 is equipped with a light source 5. The light source 5 and the vision detection units 4 are located on the upper and lower sides of the mask 01 to be tested, respectively.

[0045] refer to Figure 1 , 2 As shown, in practical applications, a detection sensor is installed in cavity 1 to detect whether the mask has successfully entered cavity 1; a cooling pipe is installed outside cavity 1 to cool it down, thus controlling the ambient temperature of cavity 1 within a predetermined range; a power unit is installed in cavity 1, which is driven by the support member 3. The power unit can be a servo motor or a stepper motor to smoothly drive the support member 3 to rotate; Reference Figure 1 , 2As shown, the robotic arm places the mask 01 to be tested onto the support member 3 through the transfer port 21. When the first side 011 or the second side 012 is not parallel to the center of symmetry of the transfer port 21, the support member 3 rotates, causing the mask to rotate so that the mask rotates to the required angle. The light source 5 provides a clear acquisition area for the vision inspection unit 4, which facilitates the improvement of detection accuracy. This allows for real-time feedback on the parallelism deviation between the first side 011 or the second side 012 and the center of symmetry of the transfer port 21. The transfer port 21 serves as the reference channel for the robotic arm to pick up and place the mask. Its center of symmetry is the target axis for attitude calibration. By combining dual vision inspection with the closed-loop control of the angle-adjustable support member 3, the angle of the mask is dynamically corrected to ensure that the picking and placing paths are collinear and that the mask grasping path meets the ideal state.

[0046] refer to Figure 1 , 2 As shown, in this embodiment, the support member 3 includes a support frame 31 and at least three support columns 32 connected to the support frame 31 and parallel to each other. The support frame 31 is rotatably connected to the cavity 1, and the top of the support column 32 is used to support the mask plate 01 to be tested. In actual application, the support frame 31 is driven by a power source. The power source drives the support frame 31 to rotate, and the support member 3 serves as a rotating base to drive the mask plate 01 to be tested to rotate synchronously. When the support frame 31 rotates, the torque is smoothly transmitted to the support column 32, realizing the overall rotation of the mask plate 01 to be tested and the support member 3. By setting at least three support columns 32, the load of the mask plate 01 to be tested is evenly distributed at multiple points to avoid local deformation. The parallel layout of the support columns 32 ensures that the attitude of the mask plate 01 to be tested is adjusted synchronously during rotation, ensuring that there is no risk of skew during the rotation of the mask plate 01 to be tested.

[0047] refer to Figure 2 As shown, in this embodiment, the top of the support column 32 is provided with a docking part 321. The docking part 321 makes point contact with the mask plate 01 to be tested, thereby reducing the contact area, reducing frictional damage between the mask plate 01 to be tested and the docking part 321, and avoiding scratching the surface of the mask plate; minimizing rotational resistance, improving the angle adjustment sensitivity, and eliminating the interference of sliding resistance on the angle fine adjustment.

[0048] refer to Figure 1 , 3As shown, in this embodiment, the calibration chamber module further includes a chamber cover 6 and a locking component 7. The chamber 1 is rotatably connected to a rotating shaft 11. One end of the chamber cover 6 rotates around the circumference of the rotating shaft 11. The chamber cover 6 is placed over the top opening of the chamber 1. The locking component 7 is used to lock the chamber cover 6 to the chamber 1. In practical applications, force is applied to rotate the chamber cover 6. The locking component 7 locks the chamber cover 6 to the chamber 1, achieving rapid sealing and opening of the top opening of the chamber 1, which helps maintain the stability of the calibration environment. After closing, the chamber cover 6 is pressed against the chamber 1 to prevent external contaminants from entering the calibration chamber and ensure that the environmental parameters remain constant during the calibration process. Specifically, the chamber cover 6 is provided with a positioning hole arranged circumferentially along the rotating shaft 11. The chamber 1 is provided with a locking hole corresponding to the positioning hole. When the chamber cover 6 rotates to the designated position, a locking component passes through the positioning hole and the locking hole to lock the chamber cover 6 in the current position. The locking component is a bolt or screw.

[0049] refer to Figure 3 , 4 As shown, in this embodiment, the cavity cover 6 is provided with a movable hole 601, and the rotating shaft 11 passes through the movable hole 601. The rotating shaft 11 is connected to a movable component 12, which slides radially on the cavity cover 6 along the rotating shaft 11. In practical applications, bearings are installed at both ends of the rotating shaft to facilitate stable rotation. When force is applied to rotate the cavity cover 6, the movable component 12 moves radially along the rotating shaft 11 within the movable hole 601, so that the movable component 12 rotates synchronously with the rotating shaft 11. The movable component 12 is a pin for easy installation and disassembly. (Reference) Figure 6 As shown, since the movable part 12 slides radially on the cavity cover 6, only the rotational torque is transmitted between the rotating shaft 11 and the cavity cover 6, allowing small radial displacement, preventing radial force from acting on the rotating shaft 11, reducing bearing wear, and ensuring smooth opening and closing; when assembly errors or thermal expansion cause the rotating shaft 11 and the hole position of the cavity cover 6 to be misaligned, the movable part 12 absorbs the deviation by sliding radially, avoiding structural stress and improving structural reliability.

[0050] refer to Figure 3 , 4 As shown in Figure 5, in this embodiment, the cavity 1 is equipped with at least two protective sleeves 13, and the two ends of the rotating shaft 11 are respectively rotatably connected to the protective sleeves 13. The movable part 12 is located between the protective sleeves 13. The protective sleeves 13 provide stable support for the two ends of the rotating shaft 11, restricting the radial runout of the rotating shaft 11 and improving the rotational coaxiality. The cavity 1 is equipped with a damper 14, which is connected to the rotating shaft 11. The damper 14 applies resistance in the opposite direction to the rotation of the cavity cover 6, so that the cavity cover 6 opens and closes at a uniform speed, avoiding the impact of gravity on the cavity 1 and protecting the precision vision unit from vibration and impact.

[0051] refer to Figure 5 , 7As shown, in this embodiment, the cavity 1 is provided with a support part 15; when the cavity cover 6 is flipped upward to the desired position, the center of gravity of the cavity cover 6 is located between the rotation center of the rotating shaft 11 and the support part 15, and one end of the cavity cover 6 abuts against the support part 15; in practical applications, at least two support parts 15 are provided to facilitate stable support of the cavity cover 6. The support part 15 serves as a physical limit, providing a hard limit when the cavity cover 6 is fully open. By placing the center of gravity of the cavity cover 6 between the rotating shaft 11 and the support part 15, combined with the support part 15, the open state has self-stabilizing characteristics. Even if manual intervention is removed, the cavity cover 6 can maintain a stable open state under the combined action of gravity and the support part 15, without the need for continuous manual support, completely freeing the operator's hands and greatly improving safety and ease of operation.

[0052] refer to Figure 3 , 8 As shown, in this embodiment, the locking member 7 includes a locking rod 71 with one end hinged to the cavity 1, a locking sleeve 72 sleeved on the locking rod 71, and a bearing member 73 threadedly connected to the locking rod 71. The cavity 1 is provided with a receiving part 16, and the receiving part 16 is provided with a notch 161. When the locking member 7 swings to the cavity 1 to the required position, the locking rod 71 passes through the notch 161. In actual application, after the cavity cover 6 is closed, the locking rod 71 is manually swung to pass through the notch 161 on the receiving part 16 to achieve quick coarse positioning. Then, the bearing member 73 is rotated and the locking sleeve 72 is pushed to move along the rod axis through the threaded transmission, so that the locking sleeve 72 presses against the receiving part 16, thereby sealing and fitting the cavity cover 6 with the cavity 1, and locking the cavity cover 6 with the cavity 1.

[0053] refer to Figure 8 As shown, in this embodiment, the bearing member 73 is provided with an annular groove 731, and the locking sleeve 72 is circumferentially connected with at least three positioning members 721. One end of the positioning member 721 is inserted into the annular groove 731. In actual application, the positioning member 721 is threadedly connected to the locking sleeve 72. The bearing member 73 can be removed by disassembling the positioning member 721, which facilitates the replacement and maintenance of the bearing member 73. The positioning member 721 has a cylindrical structure, so that there is a line contact between the positioning member 721 and the annular groove 731. The stable force can be transmitted axially through at least three line contacts, which can effectively reduce structural wear and extend service life.

[0054] refer to Figure 9As shown, in this embodiment, the cavity 1 is equipped with a support 8, and the support 8 is provided with a limiting part 81; when the other end of the locking rod 71 swings away from the cavity 1 to the desired position, the limiting part 81 abuts against one side of the locking rod 71; in actual application, when the cavity cover 6 is not needed to be locked, the other end of the locking rod 71 is swung away from the cavity 1 to the desired position, and the limiting part 81 abuts against one side of the locking rod 71, so that the locking rod 71 can be easily released from the locked state, which facilitates accurate positioning of the locking rod 71.

[0055] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A calibration cavity module, characterized in that, The device includes a cavity (1), an installation cavity (2) disposed within the cavity (1), a support member (3) rotatably connected within the installation cavity (2), and at least two vision detection units (4). The support member (3) is used to support the mask plate (01) to be tested. The mask plate (01) to be tested is provided with two opposing first sides (011) and second sides (012). The two vision detection units (4) respectively detect the first side (011) and the second side (012). The installation cavity (2) is provided with a transmission port (21). The cavity (1) is equipped with a light source (5). The light source (5) and the vision detection units (4) are located on the upper and lower sides of the mask plate (01) to be tested, respectively. When the first side (011) or the second side (012) is not parallel to the center of symmetry of the transmission port (21), the support member (3) rotates to drive the mask plate to rotate so that the mask plate rotates to the required angle.

2. The calibration chamber module according to claim 1, characterized in that, The support member (3) includes a support frame (31) and at least three support columns (32) connected to the support frame (31) and parallel to each other. The support frame (31) is rotatably connected to the cavity (1), and the top of the support column (32) is used to support the mask plate (01) to be tested.

3. The calibration cavity module according to claim 2, characterized in that, The top of the support column (32) is provided with a docking part (321), which makes point contact with the mask plate (01) to be tested.

4. The calibration chamber module according to claim 1, characterized in that, The calibration cavity module also includes a cavity cover (6) and a locking member (7). The cavity (1) is rotatably connected to a rotating shaft (11). One end of the cavity cover (6) rotates around the rotating shaft (11) in the circumferential direction. The cavity cover (6) is placed on the top opening of the cavity (1). The locking member (7) is used to lock the cavity cover (6) and the cavity (1).

5. The calibration cavity module according to claim 4, characterized in that, The cavity cover (6) is provided with a movable hole (601), the rotating shaft (11) passes through the movable hole (601), the rotating shaft (11) is connected to a movable part (12), and the movable part (12) slides on the cavity cover (6) along the radial direction of the rotating shaft (11). When the cavity cover (6) rotates, it drives the movable part (12) to move in the movable hole (601) along the radial direction of the rotating shaft (11), so that the movable part (12) rotates synchronously with the rotating shaft (11).

6. The calibration chamber module according to claim 5, characterized in that, The cavity (1) is equipped with at least two sheaths (13), and the two ends of the rotating shaft (11) are rotatably connected to the sheaths (13). The movable part (12) is located between the sheaths (13). The cavity (1) is equipped with a damper (14), and the damper (14) is connected to the rotating shaft (11).

7. The calibration cavity module according to claim 5, characterized in that, The cavity (1) is provided with a support (15); When the cavity cover (6) is flipped upward to the desired position, the center of gravity of the cavity cover (6) is located between the rotation center of the rotating shaft (11) and the support part (15), and one end of the cavity cover (6) abuts against the support part (15).

8. The calibration cavity module according to claim 4, characterized in that, The locking member (7) includes a locking rod (71) hinged to the cavity (1) at one end, a locking sleeve (72) sleeved on the locking rod (71) and a bearing member (73) threadedly connected to the locking rod (71). The cavity (1) is provided with a receiving part (16) and a notch (161). When the locking member (7) swings to the cavity (1) to the required position, the locking rod (71) passes through the notch (161). When it is necessary to lock the cavity cover (6), force is applied to rotate the bearing (73), which drives the locking sleeve (72) to move toward the cavity cover (6) and press against the receiving part (16) so that the cavity cover (6) and the cavity (1) are locked together.

9. The calibration cavity module according to claim 8, characterized in that, The bearing member (73) is provided with an annular groove (731), and the locking sleeve (72) is circumferentially connected with at least three positioning members (721), one end of the positioning member (721) being inserted into the annular groove (731).

10. The calibration cavity module according to claim 8, characterized in that, The cavity (1) is equipped with a support (8), and the support (8) is provided with a limiting part (81). When the other end of the locking rod (71) swings away from the cavity (1) to the desired position, the limiting part (81) abuts against one side of the locking rod (71).

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