A quartz boat taking device

Abstract

The application provides a quartz boat taking device, and relates to the field of semiconductor manufacturing. The quartz boat taking device comprises a taking device body, a connecting piece and a handheld piece. The connecting piece is connected with the taking device body and the handheld piece respectively. The taking device body is used for cooperating with a quartz boat. The handheld piece is used for being held by an operator to take and place the quartz boat through the taking device body. The quartz boat taking device has the characteristics of being convenient to hold, can facilitate the operator to take and place the quartz boat, can effectively reduce or avoid the problem of collision and damage of the quartz boat and fragments caused by improper operation when the operator places and takes the quartz boat, and can also reduce or avoid the problems of cost waste caused by damage of the quartz boat and contamination of the furnace tube caused by the broken chips, thereby helping to improve the quality of the chips and improve the yield of the chips.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and more specifically, to a quartz boat retriever. Background Technology

[0002] In semiconductor manufacturing, quartz boats are widely used for supporting silicon wafers and for high-temperature processing. Quartz boats are generally used in high-temperature environments, and their material is fragile. The current method of using a steel wire boat lifter has many drawbacks. Improper operation not only poses a risk of burns due to the high temperature, but also, even slight mishandling during wafer placement and removal can cause collisions with the quartz boat, damaging it and wasting costs. Collisions can also easily break the chips on the quartz boat, causing contamination of the shovel and furnace tubes, affecting chip quality, yield, and production time. Utility Model Content

[0003] To overcome the aforementioned shortcomings in the prior art, the purpose of this application is to provide a quartz boat retrieval device. This quartz boat retrieval device is easy to hold, allowing operators to conveniently place and retrieve quartz boats. It effectively reduces or avoids damage and fragmentation of the quartz boat caused by improper operation during placement and retrieval. Furthermore, it reduces or avoids costly losses due to quartz boat damage and furnace tube contamination caused by chip breakage, thus contributing to improved chip quality and yield.

[0004] This utility model provides a quartz boat retrieval device for retrieving and placing quartz boats. The quartz boat retrieval device includes a retrieval device body, a connector, and a handheld component. The connector is connected to the retrieval device body and the handheld component respectively. The retrieval device body is used to cooperate with the quartz boat, and the handheld component is used for the operator to hold and retrieve the quartz boat through the retrieval device body.

[0005] The quartz boat retriever body refers to the component used in conjunction with the quartz boat. The connector refers to the component used to connect the quartz boat retriever body and the handheld component. The handheld component is connected to the quartz boat retriever body via the connector, making it easy for the operator to hold, thereby effectively reducing or avoiding damage to the quartz boat and fragmentation caused by improper operation during launching and retrieving. The connector is used to connect the handheld component to the quartz boat retriever body, thus enabling the quartz boat retriever body to be placed and retrieved using the handheld component. The connection between the handheld component and the connector, and between the quartz boat retriever body and the connector, can be implemented in various ways. The usage process of this quartz boat retriever can be referenced in the following steps: First, the operator holds the handheld part of the quartz boat retriever; then, the operator holds the handheld part and moves the quartz boat retriever to the quartz boat position; the operator mates the quartz boat retriever body with the quartz boat to launch and retrieve the quartz crystals.

[0006] Furthermore, in an optional embodiment, the handheld component includes a handheld body and a heat insulation layer. The handheld body is connected to the connector, and the heat insulation layer is sleeved on the outside of the handheld body for the operator to grip. The aforementioned handheld component can be designed with a structure in which the handheld body and the heat insulation layer cooperate with each other. The handheld body is the main part of the handheld component, and the heat insulation layer is sleeved on the outside of the handheld body; that is, the entire outside of the handheld body is covered with a heat insulation layer. The heat insulation layer provides heat insulation, and also serves to prevent heat and slippage, preventing burns and film drop caused by the operator placing or retrieving films in high-temperature environments.

[0007] Furthermore, in an optional embodiment, the handheld body has a through hole that extends through both opposite end faces of the handheld body. Having a through hole in the handheld body reduces the amount of material used and lightens its weight, thus reducing the overall weight of the quartz boat retriever and making it easier for the operator to retrieve and place the quartz boat.

[0008] Furthermore, in an optional embodiment, the through hole is circular in shape, and the axis of the through hole is substantially aligned with the axis of the handheld body.

[0009] Furthermore, in an optional embodiment, one end of the handheld body is provided with a mounting hole, which is set at an angle to the axis of the handheld body. The connector is connected to the handheld body through the mounting hole. The mounting hole allows bolts or screws to be inserted, thereby fixing the connector and the handheld body together. This bolt or screw installation method for connecting the connector to the handheld body is simple in structure and convenient in operation.

[0010] Furthermore, in an optional embodiment, the connector has a first connecting portion and a second connecting portion. The first connecting portion is connected to the handheld component, and the second connecting portion is connected to the boat retriever body. That is, the connector is connected to the handheld component via the first connecting portion and to the boat retriever body via the second connecting portion. The handheld component and the boat retriever body are connected together via the first and second connecting portions, thereby enabling operation of the boat retriever body via the handheld component, making it more convenient to retrieve and place quartz crystals from the boat.

[0011] Furthermore, in an optional embodiment, the first connecting portion is provided with a first connecting hole, and the handheld component is connected to the connector through the first connecting hole. The first connecting portion is provided with a first connecting hole, and the handheld component is connected to the connector through the first connecting hole. That is, the first connecting hole enables the connection between the handheld component and the connector. As mentioned above, the handheld body of the handheld component is designed with a mounting hole, which can mate with the first connecting hole to achieve a fixed connection between the handheld component and the connector.

[0012] Furthermore, in an optional embodiment, the first connecting hole is circular in shape.

[0013] Furthermore, in an optional embodiment, the second connecting portion is provided with a second connecting hole, through which the boat retriever body is connected to the connecting member. That is, the second connecting hole enables the connection between the boat retriever body and the connecting member. The boat retriever body may be designed with a corresponding hole that mates with the second connecting hole, thereby achieving a fixed connection between the boat retriever body and the connecting member.

[0014] Furthermore, in an optional embodiment, the second connecting hole is circular in shape.

[0015] Furthermore, in an optional embodiment, the connector is provided with a weight-reducing hole located between the first connecting portion and the second connecting portion. The weight-reducing hole primarily reduces the weight of the connector itself without affecting its structural strength requirements. By designing a structure with a weight-reducing hole, the structural strength requirements of the connector can be met while simultaneously reducing its weight, which helps to reduce the overall weight of the quartz boat retrieval device, thereby reducing the weight for the operator when retrieving and placing the quartz boat.

[0016] Furthermore, in an optional embodiment, the weight-reducing hole on the connector is generally rectangular, and the four corners of the rectangle are rounded.

[0017] Furthermore, in an optional embodiment, one end of the connector is designed to be arc-shaped, and the other end is designed to be rectangular.

[0018] Furthermore, in an optional embodiment, the boat retrieval device body includes a boat retrieval part and a boat retrieval device connecting part connected to each other, the boat retrieval part being used to cooperate with the boat retrieval device, and the boat retrieval device connecting part being connected to the connecting member.

[0019] Furthermore, in an optional embodiment, the boat retriever connecting part is provided with a boat retriever connecting hole and an assembly hole. The boat retriever connecting hole is connected to the boat retrieval part, and the assembly hole is connected to the connector. That is, corresponding to the second connecting hole mentioned above, the connection between the boat retriever body and the connector is realized through the assembly hole and the second connecting hole.

[0020] In existing technologies, quartz boats are widely used for supporting silicon wafers and for high-temperature processing. Quartz boats are generally used in high-temperature environments and are made of fragile materials. Currently, a boat lifter made of bent steel wire is used to handle quartz boats. However, operators using existing boat lifters are at risk of burns due to the high temperatures. Furthermore, slight mishandling during wafer placement and removal can cause collisions with the quartz boat, damaging it and wasting costs. Collisions also easily break the chips on the quartz boat, causing contamination of the shovel and furnace tubes, affecting chip quality, yield, and production time. Compared to existing technologies, this application offers the following advantages:

[0021] This utility model provides a quartz boat retrieval device, which includes a retrieval device body, a connector, and a handheld component. The connector is connected to both the retrieval device body and the handheld component. The retrieval device body is used to engage with a quartz boat, and the handheld component is used by the operator to hold and retrieve the quartz boat. The retrieval device body refers to the component that engages with the quartz boat, the connector refers to the component that connects the retrieval device body and the handheld component, and the handheld component refers to the component connected to the retrieval device body via the connector. This facilitates the operator's grip, effectively reducing or avoiding collision damage and fragmentation of the quartz boat due to improper operation during retrieval. In this utility model embodiment, the connector is used to connect the handheld component to the retrieval device body, thereby enabling the retrieval of the quartz boat body to be retrieved and placed using the handheld component. The process of using the quartz boat retriever provided in this embodiment is as follows: First, the operator holds the handheld part of the quartz boat retriever; then, the operator holds the handheld part and moves the quartz boat retriever to the quartz boat position; the operator mates the retriever body with the quartz boat to place and retrieve the wafers. In the prior art, using a retriever made of bent steel wire to place and retrieve the quartz boat poses a risk of burns to the operator due to high temperatures. The quartz boat retriever provided in this embodiment allows the operator to operate the retriever body by holding the handheld part. The handheld part is more ergonomic, facilitating grip and force application, significantly reducing or avoiding improper operation during wafer placement and retrieval, thus reducing or avoiding damage to the quartz boat itself. This reduces or avoids the risk of chips on the quartz boat easily breaking upon impact, causing contamination of the shovel and furnace tube, affecting chip quality, improving yield, and ensuring production time. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of the quartz boat retriever provided in the embodiments of this application;

[0024] Figure 2 A schematic diagram of the quartz boat retriever provided in an embodiment of this application from another perspective;

[0025] Figure 3 A schematic diagram of the structure of the handheld device provided in the embodiments of this application;

[0026] Figure 4 This is a schematic diagram of the structure of the connector provided in the embodiments of this application;

[0027] Figure 5 A schematic diagram showing the structure of the boat retriever body with a boat retriever connection hole provided in the embodiment of this application;

[0028] Figure 6 This is a schematic diagram showing the structure of the boat retriever body with an assembly hole provided in the embodiment of this application.

[0029] Icons: 100, Quartz boat retriever; 110, Retrieval body; 112, Retrieval section; 113, Retrieval connection; 1131, Retrieval connection hole; 1132, Assembly hole; 120, Connector; 121, First connection; 122, Second connection; 123, Weight reduction hole; 130, Handheld part; 131, Handheld body; 1311, Through hole; 1312, Mounting hole; 132, Insulation layer. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0032] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0033] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0034] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0035] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0036] Please see Figure 1 This utility model provides a quartz boat retrieval device 100. This quartz boat retrieval device 100 can be used to retrieve and place quartz boats. This quartz boat retrieval device 100 is easy to hold, allowing operators to conveniently retrieve and place quartz boats. It effectively reduces or avoids damage and fragmentation of the quartz boat caused by improper operation during placement and retrieval. Simultaneously, it reduces or avoids cost waste due to quartz boat damage and furnace tube contamination caused by chip breakage, thus contributing to improved chip quality and yield.

[0037] like Figure 1 and Figure 2 As shown in the embodiment of this utility model, the quartz boat retriever 100 includes a retriever body 110, a connector 120, and a handheld component 130. The connector 120 is connected to the retriever body 110 and the handheld component 130 respectively. The retriever body 110 is used to cooperate with the quartz boat, and the handheld component 130 is used for the operator to hold so as to retrieve and place the quartz boat through the retriever body 110.

[0038] It should be noted that in this embodiment of the invention, the boat retrieval body 110 refers to the component used to cooperate with the quartz boat, and the connector 120 refers to the component used to connect the boat retrieval body 110 and the handheld component 130. The handheld component 130 refers to the component connected to the boat retrieval body 110 through the connector 120, which facilitates the operator's grip and effectively reduces or avoids collision damage and fragmentation of the quartz boat caused by improper operation during boat placement and retrieval. In this embodiment of the invention, the connector 120 is used to connect the handheld component 130 to the boat retrieval body 110, thereby enabling the use of the handheld component 130 to pick up and place the boat retrieval body 110. It should be understood that the connection between the handheld component 130 and the connector 120 can be in various optional forms, such as a detachable connection or an integrated connection (welding, bonding, or using an integrated molding process, etc.). This embodiment of the invention does not impose specific requirements or limitations on the connection method between the handheld component 130 and the connector 120. At the same time, it can be understood that the boat retrieval body 110 is connected to the connector 120 in various ways, such as detachable connection or integrated connection (welding, bonding, or integral molding process). This utility model embodiment does not make specific requirements or limitations on the connection method of the boat retrieval body 110 and the connector 120.

[0039] It should also be noted that the quartz boat retriever 100 provided in this embodiment of the present invention facilitates operation by personnel. In the prior art, quartz boats are widely used for supporting silicon wafers and for high-temperature processing. Quartz boats are generally used in high-temperature environments, and the material itself is fragile. Currently, retrievers made of bent steel wire are used to retrieve and place quartz boats. However, operators are at risk of burns due to high temperatures when using existing retrievers. Moreover, slight mishandling during wafer placement and retrieval can cause collisions with the quartz boat, damaging the boat itself, wasting costs, and easily breaking the chips on the quartz boat after a collision, causing contamination of the shovel and furnace tube, affecting chip quality, yield, and production time. The quartz boat retriever 100 provided in this embodiment of the present invention can reduce or avoid improper operation during wafer placement and retrieval. In this embodiment of the utility model, the quartz boat retrieval device 100 includes a retrieval device body 110, a connector 120, and a handheld component 130. The retrieval device body 110 is connected to the handheld component 130 through the connector 120. The handheld component 130 is used for the operator to hold, that is, the operator can operate the retrieval device body 110 by holding the handheld component 130. The handheld component 130 is more ergonomic, which makes it easier for the operator to hold and exert force. It can significantly reduce or avoid improper operation during the wafer placement and retrieval process, and reduce or avoid damage to the quartz boat itself. Therefore, it reduces or avoids the chips on the quartz boat being easily broken after collision, which can easily cause the large shovel and furnace tube to become contaminated, affecting the chip quality. It is beneficial to improve the yield and ensure production time.

[0040] Furthermore, it should be understood that the use of the quartz boat retrieval device 100 provided in this embodiment of the present invention can be referenced in the following steps: First, the operator holds the handheld part of the quartz boat retrieval device 100; then, the operator holds the handheld part and moves the quartz boat retrieval device 100 to the position of the quartz boat; the operator aligns the retrieval device body 110 with the quartz boat to place and retrieve the quartz pieces from the boat. Of course, this is not the only possible method. The above-described process of placing and retrieving the quartz boat using the quartz boat retrieval device 100 provided in this embodiment of the present invention is for reference only and should not be considered a limitation on the structure and function of the quartz boat retrieval device 100 provided in this embodiment of the present invention.

[0041] like Figure 3 As shown, in an optional embodiment of the present invention, the handheld component 130 may include a handheld body 131 and a heat insulation layer 132. The handheld body 131 is connected to the connector 120, and the heat insulation layer 132 is sleeved on the outside of the handheld body 131 for the operator to hold.

[0042] In other words, in this embodiment of the present invention, the aforementioned handheld component 130 can be designed as a structure in which the handheld body 131 and the heat insulation layer 132 cooperate with each other. The handheld body 131 is the main body of the handheld component 130, and the heat insulation layer 132 is sleeved on the outside of the handheld body 131; that is, the outer side of the handheld body 131 is covered with the heat insulation layer 132. The heat insulation layer 132 can provide heat insulation, and can also provide heat insulation and anti-slip functions, preventing operators from getting burned or dropping films when placing or retrieving films in high-temperature environments.

[0043] It should be understood that, in this embodiment, the heat insulation layer 132 can be made of high-temperature resistant insulating material (such as high-temperature resistant insulating rubber). The heat insulation layer 132 mainly plays the role of heat insulation and anti-slip, which can further prevent operators from being burned by heat transfer when placing and taking out the quartz boat in a high-temperature environment, thus reducing production costs more effectively and significantly solving the problem of inconvenience for operators.

[0044] Optionally, in this embodiment of the invention, the handheld body 131 has a through hole 1311, which penetrates the opposite end faces of the handheld body 131. The through hole 1311 on the handheld body 131 reduces the material used and weight of the handheld body 131, thus reducing the overall weight of the quartz boat retriever 100 and making it easier for the operator to retrieve and place the quartz boat.

[0045] Optionally, in this embodiment, the through hole 1311 is circular, and the axis of the through hole 1311 is substantially aligned with the axis of the handheld body 131. Of course, this is not the only possibility; in other embodiments of this invention, the through hole 1311 may also be of other shapes, and this invention does not impose specific requirements or limitations on this.

[0046] Furthermore, in an optional embodiment, one end of the handheld body 131 is provided with a mounting hole 1312, the mounting hole 1312 is set at an angle to the axis of the handheld body 131, and the connector 120 is connected to the handheld body 131 through the mounting hole 1312.

[0047] It should be noted that the connector 120 can be connected to the handheld body 131 through the mounting hole 1312. The mounting hole 1312 allows bolts or screws to be inserted, thereby fixing the connector 120 and the handheld body 131 together. The connection between the connector 120 and the handheld body 131 is achieved through bolt or screw installation, which is simple in structure and easy to operate.

[0048] Optionally, in this embodiment, the number of mounting holes 1312 is two; of course, it is not limited to this. In other embodiments of this utility model, the number of mounting holes 1312 can also be other, such as three, five, etc. This utility model embodiment does not make specific requirements or limitations on the specific number of mounting holes 1312.

[0049] It should also be noted that the mounting hole 1312 is set at an angle to the axis of the handheld body 131 (e.g., Figure 2 As shown, after being connected to the handheld body 131 and the connector 120 through the mounting hole 1312, the extension direction of the handheld body 131 forms a certain angle with the connector 120, such as 60 degrees or 80 degrees. This angle between the handheld body 131 and the connector 120 makes it easier for the operator to hold the handheld body 131 and the heat insulation layer 132, and facilitates the loading and unloading of films. It should be understood that the angle between the mounting hole 1312 and the axis of the handheld body 131 is not specifically limited in this embodiment of the invention; the angle can be designed to be 45 degrees, 60 degrees, 75 degrees, 80 degrees, etc., and can be set according to actual needs.

[0050] Furthermore, it should be noted that, for the mounting hole 1312, the connector 120 is connected to the handheld body 131 through the mounting hole 1312. The connection method can be the bolt or screw mentioned above, or other connection methods can be used. When the bolt or screw connection method is used, the mounting hole 1312 is designed to be circular. When other connection methods are used, the mounting hole 1312 can also be designed to have other shapes and depths. This utility model embodiment does not make specific requirements or limitations in this regard.

[0051] like Figure 3 As shown, in this embodiment, the handheld component 130 is generally a cylindrical or strip-shaped component with a circular cross-section. That is, the handheld body 131 has a generally circular cross-section and a cylindrical or strip-shaped structure, and the heat insulation layer 132 covers the outer surface of the handheld body 131.

[0052] like Figure 4 As shown, in an optional embodiment of this utility model, the connector 120 is provided with a first connecting part 121 and a second connecting part 122. The first connecting part 121 is connected to the handheld part 130, and the second connecting part 122 is connected to the boat retriever body 110. That is, the connector 120 is connected to the handheld part 130 through the first connecting part 121 and to the boat retriever body 110 through the second connecting part 122. The handheld part 130 is connected to the boat retriever body 110 through the first connecting part 121 and the second connecting part 122, so that the boat retriever body 110 can be operated through the handheld part 130, so as to more conveniently retrieve and place the quartz boat.

[0053] Furthermore, in this embodiment, the first connecting portion 121 is provided with a first connecting hole, and the handheld component 130 is connected to the connecting component 120 through the first connecting hole. That is, the first connecting hole enables the connection between the handheld component 130 and the connecting component 120. As mentioned above, the handheld body 131 of the handheld component 130 is designed with a mounting hole 1312, which can cooperate with the first connecting hole to achieve a fixed connection between the handheld component 130 and the connecting component 120. In this embodiment, the first connecting hole and the mounting hole 1312 can be connected by a bolt or screw, or of course, a rivet or other fastener can also be used to achieve a fixed connection through the first connecting hole and the mounting hole 1312. This embodiment of the present invention does not make specific requirements or limitations in this regard.

[0054] Optionally, in this embodiment, the first connecting hole is designed as two through holes 1311 penetrating the connector 120. During assembly, screws are connected through the first connecting hole to the mounting hole 1312 to achieve a fixed connection between the connector 120 and the handheld part 130.

[0055] It should be noted that the connector 120 and the handheld component 130 can be detachably connected or integrated. For example, the connector 120 and the handheld component 130 can be connected by welding or bonding. The above-described structural form of the first connecting hole and mounting hole 1312 is only one possible connection method between the connector 120 and the handheld component 130, and is for reference only, not a limitation on the connection method between the connector 120 and the handheld component 130.

[0056] Further, in an optional embodiment, the second connecting portion 122 is provided with a second connecting hole, through which the boat retriever body 110 is connected to the connector 120. That is, the second connecting hole enables the connection between the boat retriever body 110 and the connector 120. The boat retriever body 110 may be designed with a corresponding hole that mates with the second connecting hole, thereby achieving a fixed connection between the boat retriever body 110 and the connector 120. In this embodiment, the first connecting hole and the corresponding hole on the boat retriever body 110 can be connected by bolts or screws, or alternatively, rivets or other fasteners can be used to achieve a fixed connection through the second connecting hole and the corresponding hole on the boat retriever body 110. This embodiment of the invention does not impose specific requirements or limitations on this.

[0057] Optionally, in this embodiment, the second connecting hole is designed as three through holes 1311 penetrating the connector 120. During assembly, screws are connected by engaging the corresponding holes on the boat retriever body 110 through the second connecting hole to achieve a fixed connection between the connector 120 and the boat retriever body 110.

[0058] It should be noted that the connector 120 and the boat retriever body 110 can be detachably connected or integrally connected. For example, the connector 120 and the boat retriever body 110 can be connected by welding or bonding. The above-described structural form of the second connecting hole and the opening in the boat retriever body 110 is only one possible connection method between the connector 120 and the boat retriever body 110, and is for reference only, not a limitation on the connection method between the connector 120 and the boat retriever body 110.

[0059] Furthermore, it should be noted that in this embodiment of the utility model, the connector 120 is separately molded and interconnected with the boat taker body 110 and the handheld component 130, which makes the design and manufacturing of each component simpler and the connection method is convenient, making it easy to assemble.

[0060] Furthermore, in an optional embodiment, the connector 120 is provided with a weight-reducing hole 123, which is located between the first connecting portion 121 and the second connecting portion 122. It should be understood that the weight-reducing hole 123 is mainly used to reduce the weight of the connector 120 itself and does not affect the structural strength requirements of the connector 120. By designing the weight-reducing hole 123, the structural strength requirements of the connector 120 can be met while also reducing the weight of the connector 120, which helps to reduce the weight of the entire quartz boat retriever 100, thereby reducing the weight for the operator when retrieving and placing the quartz boat.

[0061] Optionally, in this embodiment, the weight-reducing hole 123 on the connector 120 is generally rectangular, and the four corners of the rectangle are rounded. Of course, this is not the only possibility. In other embodiments of this invention, other shapes of weight-reducing holes 123, such as circular, trapezoidal, or rhomboid, can also be formed on the connector 120. This embodiment of the invention does not impose specific requirements or limitations on the shape of the weight-reducing hole 123. The weight-reducing hole 123 is mainly used to reduce the weight of the connector 120 itself without affecting the structural strength requirements of the connector 120.

[0062] Optionally, such as Figure 1 and Figure 4 As shown, in this embodiment, the connector 120 is generally a sheet-like or block-like structure. However, it is not limited to this; in other embodiments of this invention, the connector 120 can also have other structural forms. Furthermore, one end of the connector 120 is designed as an arc shape, and the other end is designed as a rectangle. The arc-shaped end is closer to the handheld component 130. This means that the arc shape reduces the possibility of injury to the operator, making the quartz boat retriever 100 more user-friendly.

[0063] like Figure 1As shown, further, in an optional embodiment, the boat retriever body 110 includes a boat-retrieval part 112 and a boat-retrieval connecting part 113 connected to each other. The boat-retrieval part 112 is used to cooperate with the quartz boat, and the boat-retrieval connecting part 113 is connected to the connector 120. That is, the part on the boat-retrieval body 110 used to cooperate with the quartz boat is the boat-retrieval part 112, while the part used to connect is the boat-retrieval connecting part 113.

[0064] like Figure 4 and Figure 5 As shown, further, in an optional embodiment, the boat retriever connecting part 113 is provided with a boat retriever connecting hole 1131 and an assembly hole 1132. The boat retriever connecting hole 1131 is connected to the boat retrieval part 112, and the assembly hole 1132 is connected to the connector 120. That is, corresponding to the second connecting hole mentioned above, the connection between the boat retriever body 110 and the connector 120 is realized through the assembly hole 1132 and the second connecting hole.

[0065] Please refer to the following: Figures 1 to 6This utility model provides a quartz boat retrieval device 100, which includes a retrieval device body 110, a connector 120, and a handheld component 130. The connector 120 is connected to both the retrieval device body 110 and the handheld component 130. The retrieval device body 110 is used to cooperate with the quartz boat, and the handheld component 130 is used by the operator to hold and retrieve the quartz boat through the retrieval device body 110. The retrieval device body 110 refers to the component used to cooperate with the quartz boat, the connector 120 refers to the component used to connect the retrieval device body 110 and the handheld component 130, and the handheld component 130 refers to the component connected to the retrieval device body 110 through the connector 120, which facilitates the operator's grip and effectively reduces or avoids collision damage and fragmentation of the quartz boat caused by improper operation during retrieval. In this embodiment of the utility model, the connector 120 is used to connect the handheld component 130 to the boat retriever body 110, thereby enabling the handheld component 130 to pick up and place the boat retriever body 110. In the prior art, quartz boats are generally used in high-temperature environments and are made of fragile materials. Currently, boat retrievers made of bent steel wire are used to pick up and place quartz boats. However, operators using existing boat retrievers are at risk of burns due to high temperatures. Furthermore, slight mishandling during the placement and retrieval process can cause collisions with the quartz boat, damaging it and wasting costs. After a collision, the chips on the quartz boat are easily broken, causing contamination of the shovel and furnace tube, affecting chip quality, yield, and production time. The process of using the quartz boat retriever 100 provided in this embodiment is as follows: First, the operator holds the handheld part of the quartz boat retriever 100; then, the operator holds the handheld part and moves the quartz boat retriever 100 to the position of the quartz boat; the operator mates the retriever body 110 with the quartz boat to place and retrieve the quartz pieces. In the prior art, using a retriever made of bent steel wire to place and retrieve the quartz boat poses a risk of burns due to high temperatures for the operator. When the quartz boat retriever 100 provided in this embodiment of the utility model is used, the operator can operate the retriever body 110 by holding the handheld part 130. The handheld part 130 is more ergonomic, which makes it easier for the operator to hold and exert force. It can significantly reduce or avoid improper operation during the wafer placement and retrieval process, and reduce or avoid damage to the quartz boat itself. Therefore, it reduces or avoids the chips on the quartz boat being easily broken after collision, which can easily cause the large shovel and furnace tube to be contaminated, affecting the chip quality. It is beneficial to improve the yield and ensure production time.

[0066] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0067] The above descriptions are merely various embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A quartz boat retrieval device for retrieving and placing quartz boats, characterized in that, The quartz boat retrieval device (100) includes a retrieval device body (110), a connector (120), and a handheld component (130). The connector (120) is connected to the retrieval device body (110) and the handheld component (130) respectively. The retrieval device body (110) is used to cooperate with the quartz boat, and the handheld component (130) is used for the operator to hold and retrieve the quartz boat through the retrieval device body (110).

2. The quartz boat retriever according to claim 1, characterized in that, The handheld component (130) includes a handheld body (131) and a heat insulation layer (132). The handheld body (131) is connected to the connector (120). The heat insulation layer (132) is sleeved on the outside of the handheld body (131) for the operator to hold.

3. The quartz boat retriever according to claim 2, characterized in that, The handheld body (131) has a through hole (1311) that passes through the opposite end faces of the handheld body (131).

4. The quartz boat retriever according to claim 2, characterized in that, One end of the handheld body (131) is provided with a mounting hole (1312), the mounting hole (1312) is set at an angle to the axis of the handheld body (131), and the connector (120) is connected to the handheld body (131) through the mounting hole (1312).

5. The quartz boat retriever according to claim 1, characterized in that, The connector (120) is provided with a first connecting part (121) and a second connecting part (122). The first connecting part (121) is connected to the handheld part (130), and the second connecting part (122) is connected to the boat retrieval body (110).

6. The quartz boat retriever according to claim 5, characterized in that, The first connecting part (121) is provided with a first connecting hole, and the handheld part (130) is connected to the connecting part (120) through the first connecting hole.

7. The quartz boat retriever according to claim 6, characterized in that, The second connecting part (122) is provided with a second connecting hole, and the boat taker body (110) is connected to the connecting member (120) through the second connecting hole.

8. The quartz boat retriever according to claim 5, characterized in that, The connector (120) has a weight-reducing hole (123) located between the first connecting part (121) and the second connecting part (122).

9. The quartz boat retriever according to claim 1, characterized in that, The boat retrieval device body (110) includes a boat retrieval part (112) and a boat retrieval device connecting part (113) connected to each other. The boat retrieval part (112) is used to cooperate with the boat retrieval device, and the boat retrieval device connecting part (113) is connected to the connecting member (120).

10. The quartz boat retriever according to claim 9, characterized in that, The boat retrieval device connecting part (113) is provided with a boat retrieval device connecting hole (1131) and an assembly hole (1132). The boat retrieval device connecting hole (1131) is connected to the boat retrieval part (112), and the assembly hole (1132) is connected to the connector (120).

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