A shower head height direction stepless adjustment mechanism for a thin film deposition apparatus

Abstract

The utility model discloses a kind of shower head height direction stepless adjustment mechanism for thin film deposition equipment, it is related to the technical field for thin film deposition equipment, the utility model aims at solving how to adjust the problem of shower head in not opening cavity, the utility model includes vacuum cavity and shower head, the shower head is installed in the inside top of vacuum cavity, insulating ceramic is sleeved on the outer wall of the shower head, annular protrusion is arranged on the inner wall top of the insulating ceramic, the outer wall top of the shower head is formed into the boss that can be clamped below annular protrusion. Shower head height direction can be adjusted within a certain range, by adjusting, an optimal height can be determined, so that plasma field density increases, thin film uniformity is better, improves thin film deposition efficiency and film formation cleanliness, by directly adjusting shower head height outside cavity, reduce opening cavity process, can make maintenance time shorten, improve equipment open rate, cavity particle pollution caused by opening cavity is also reduced simultaneously.

Description

Technical Field

[0001] This utility model relates to the technical field of thin film deposition equipment, specifically a stepless height adjustment mechanism for a spray head in a thin film deposition equipment. Background Technology

[0002] In thin film deposition, the height of the spray head has a significant impact on plasma field density, film uniformity, and deposition efficiency. Traditional spray heads are generally fixed, and even if the spray head is adjustable, the adjustment often requires manual adjustment after the cavity is opened. This not only increases maintenance time and reduces equipment uptime, but may also introduce particulate contamination during the cavity opening process, affecting the cleanliness of the film. Utility Model Content

[0003] To address the aforementioned problems, specifically those raised in the background section, this invention proposes a stepless height adjustment mechanism for a spray head in a thin film deposition apparatus. The mechanism includes a vacuum chamber and a spray head. The spray head is installed inside the upper part of the vacuum chamber. An insulating ceramic is sleeved on the outer wall of the spray head. An annular protrusion is provided on the upper part of the inner wall of the insulating ceramic. A boss is provided on the upper part of the outer wall of the spray head, capable of engaging below the annular protrusion. A spray head mounting component is bolted to the upper part of the outer wall of the spray head. A boss is provided below the spray head mounting component, capable of engaging on the annular protrusion. A three-bolt adjustment assembly is mounted on the outer wall of the insulating ceramic via the insulating ceramic mounting component, and the three-bolt adjustment assembly is mounted above the vacuum chamber via mounting bolts.

[0004] The gap between the spray head and the insulating ceramic is filled by a sealing ring.

[0005] A further feature of this invention is that the three-bolt adjustment assembly includes a corrugated pipe upper mounting component, a corrugated pipe, a corrugated pipe lower mounting component, and three bolt adjustment mechanisms sequentially sleeved on the outer wall of the insulating ceramic. The upper and lower ends of the corrugated pipe are respectively mounted on the corrugated pipe upper mounting component and the corrugated pipe lower mounting component, and the upper and lower ends of the three bolt adjustment mechanisms are respectively mounted on the corrugated pipe upper mounting component and the corrugated pipe lower mounting component.

[0006] The insulating ceramic mounting component is used to install the insulating ceramic to the upper mounting component of the bellows using bolts. The lower mounting component of the bellows is installed on the vacuum chamber using bolts. The gaps between the insulating ceramic and the upper mounting component of the bellows, and between the insulating ceramic and the lower mounting component of the bellows, are filled by sealing rings.

[0007] A further feature of this invention is that the bolt adjusting mechanism includes a nut, a spherical washer, and a long bolt. The lower end of the long bolt is threaded onto the lower mounting part of the bellows, and the upper end of the long bolt passes through the upper mounting part of the bellows. The nut and the spherical washer are stacked vertically, and the stacked nut and spherical washer are symmetrically arranged on the upper and lower sides of the upper mounting part of the bellows. The spherical washer is movably sleeved on the long bolt, and the nut is threaded onto the long bolt.

[0008] A further feature of this invention is that a boss limiting structure is provided below the outer wall of the long bolt, and the bottom end of the boss limiting mechanism is in contact with the lower mounting part of the corrugated pipe.

[0009] A further feature of this invention is that the inner wall of the lower corrugated pipe mounting component is configured as a conical surface with an inner diameter that gradually increases from bottom to top.

[0010] The beneficial technical effects of this utility model are as follows: the height of the spray head can be adjusted within a certain range. By adjusting, an optimal height can be determined, which increases the plasma field density, improves the uniformity of the film, and enhances the film deposition efficiency and film cleanliness. By directly adjusting the height of the spray head outside the cavity, the cavity opening process is reduced, which can shorten the maintenance time, improve the equipment uptime, and reduce cavity particle contamination caused by cavity opening. Attached Figure Description

[0011] Figure 1 A schematic diagram of the overall structure of this solution is shown.

[0012] Figure 2 A top view of the structure of this design is shown.

[0013] Figure 3 An enlarged view of the bolt adjustment mechanism is shown.

[0014] The attached diagram includes the following reference numerals: 1. Vacuum chamber; 2. Spray head; 3. Spray head mounting component; 4. Insulating ceramic mounting component; 5. Insulating ceramic; 6. Upper mounting component of bellows; 7. Bellows; 8. Lower mounting component of bellows; 9. Nut; 10. Spherical washer; 11. Long bolt. Detailed Implementation

[0015] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0016] This invention proposes a stepless height adjustment mechanism for a spray head in a thin film deposition equipment. During assembly, an insulating ceramic 5 is fitted over the spray head 2, with the boss on top of the spray head 2 tightly against the lower annular protrusion on the inner wall of the insulating ceramic 5, the gap filled with a sealing ring. Then, the spray head mounting piece 3 is fitted over the spray head 2 from above, securing it above the annular protrusion on the inner wall of the insulating ceramic 5. Bolts are then passed through the spray head mounting piece 3 and tightened onto the spray head 2 for fixation. Next, a three-bolt adjustment assembly is fitted over the outer wall of the insulating ceramic 5. The upper and lower ends of the corrugated pipe 7 are respectively mounted on the upper corrugated pipe mounting piece 6 and the lower corrugated pipe mounting piece 8. The upper inner wall of the upper corrugated pipe mounting piece 6 is secured against the outer wall of the insulating ceramic 5, the gap filled with a sealing ring. Finally, the insulating ceramic mounting piece 4 is placed over the corrugated pipe. On mounting component 6, bolts are passed through insulating ceramic mounting component 4 and tightened onto insulating ceramic 5. Then, the lower mounting component 8 of the bellows is installed on the vacuum chamber 1 using bolts. At this point, insulating ceramic 5 and spray head 2 are inserted above the vacuum chamber 1. Insulating ceramic 5 can drive spray head 2 to move up and down inside the vacuum chamber 1. Bellows 7 can extend and retract with the movement of spray head 2. The height position of spray head 2 is controlled by three-point bolt adjustment mechanism (three-point plane principle) and manual adjustment in the height direction within a certain range, improving the quality of the film formation process. Bellows 7 can be selected with different compression amounts according to the adjustable range, and can also be made of appropriate materials according to different processes, such as 316L, Hastelloy, etc. The resistivity of ceramic is extremely high, which is suitable for insulation requirements between the spray head and the chamber. If the RF power is increased, a ceramic with a suitable thickness can also be selected for insulation.

[0017] The bolt adjustment mechanism consists of a long bolt 11, a nut 9, and a spherical washer 10. The long bolt 11 passes through the mounting lugs on the edge of the bellows mounting component 6. Nuts and spherical washers are provided on both the upper and lower sides of the mounting lugs, and both the nuts and spherical washers are fitted onto the long bolts. The flat side of the spherical washer is in contact with the mounting lug, and the spherical surface is in contact with the nut. The long bolt 11 is tightened onto the bellows mounting component 8 below. The height and angle of the bellows mounting component 6 are adjusted by adjusting the two nuts on each long bolt 11. The spherical surface of the spherical washer contacts the nut to ensure good contact and evenness after leveling. A slightly larger diameter boss is provided on the lower outer wall of the long bolt 11 to limit the length of each long bolt when screwed in. Scale markings are made on the outer wall of the long bolt to accurately determine the height position of each bolt-nut connection point.

[0018] Although the present invention has been described with reference to preferred embodiments, various modifications can be made to it and components can be replaced with equivalents without departing from the scope of the present invention. In particular, the technical features mentioned in the various embodiments can be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0019] In the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0020] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0021] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0022] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A stepless height adjustment mechanism for a spray head in a thin film deposition apparatus, comprising a vacuum chamber (1) and a spray head (2), wherein the spray head (2) is installed above the interior of the vacuum chamber (1), characterized in that: An insulating ceramic (5) is sleeved on the outer wall of the spray head (2). An annular protrusion is provided on the upper part of the inner wall of the insulating ceramic (5). A boss is provided on the upper part of the outer wall of the spray head (2) so that it can be locked under the annular protrusion. A spray head mounting part (3) is installed on the upper part of the outer wall of the spray head (2) by bolts. A boss is provided on the lower part of the spray head mounting part (3) so that it can be locked on the annular protrusion. A three-bolt adjustment assembly is installed on the outer wall of the insulating ceramic (5) by the insulating ceramic mounting part (4). The three-bolt adjustment assembly is installed on the upper part of the vacuum chamber (1) by mounting bolts. The gap between the spray head (2) and the insulating ceramic (5) is filled by a sealing ring.

2. The stepless height adjustment mechanism for a spray head in a thin film deposition equipment according to claim 1, characterized in that: The three-bolt adjustment assembly includes a corrugated pipe upper mounting part (6), a corrugated pipe (7), a corrugated pipe lower mounting part (8) and three bolt adjustment mechanisms, which are sequentially sleeved on the outer wall of the insulating ceramic (5). The upper and lower ends of the corrugated pipe (7) are respectively mounted on the corrugated pipe upper mounting part (6) and the corrugated pipe lower mounting part (8), and the upper and lower ends of the three bolt adjustment mechanisms are respectively mounted on the corrugated pipe upper mounting part (6) and the corrugated pipe lower mounting part (8). The insulating ceramic mounting part (4) is used to install the insulating ceramic (5) together with the upper mounting part (6) of the bellows by bolts. The lower mounting part (8) of the bellows is installed on the vacuum chamber (1) by bolts. The gap between the insulating ceramic (5) and the upper mounting part (6) of the bellows and the gap between the insulating ceramic (5) and the lower mounting part (8) of the bellows are filled by sealing rings.

3. The stepless height adjustment mechanism for a spray head in a thin film deposition equipment according to claim 2, characterized in that: The bolt adjustment mechanism includes a nut (9), a spherical washer (10), and a long bolt (11). The lower end of the long bolt (11) is installed on the lower mounting part (8) of the bellows through an external thread. The upper end of the long bolt (11) passes through the upper mounting part (6) of the bellows. The nut (9) and the spherical washer (10) are arranged overlapping each other. The overlapping nut (9) and the spherical washer (10) are symmetrically arranged on the upper and lower sides of the upper mounting part (6) of the bellows. The spherical washer (10) is movably sleeved on the long bolt (11). The nut (9) is installed on the long bolt (11) through a thread.

4. The stepless height adjustment mechanism for a spray head in a thin film deposition equipment according to claim 3, characterized in that: The outer wall of the long bolt (11) is provided with a boss limiting structure, and the bottom end of the boss limiting mechanism is in contact with the corrugated pipe lower mounting part (8).

5. The stepless height adjustment mechanism for a spray head in a thin film deposition equipment according to claim 4, characterized in that: The inner wall of the corrugated pipe lower mounting component (8) is configured as a conical surface with an inner diameter that gradually increases from bottom to top.

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