A vertical back sealing furnace diffusion tube mounting tool

Abstract

A kind of vertical back sealing furnace dispersion pipe installation frock, it is related to the field of semiconductor material production technology, including dispersion pipe, first flange, second flange, the inner circumferential surface of the first flange is equipped with fixing frame, a plurality of independent through holes are arranged in the fixing frame, fixed pipe is fixedly installed on the fixing frame corresponding to each through hole, the second flange is equipped with the same number of through holes as the through hole of the first flange and the same as the inner diameter of dispersion pipe gas inlet circular through hole, the dispersion pipe gas inlet end passes through fixed pipe, fixing frame through hole in sequence and is in close contact with the circular through hole of the second flange one-to-one correspondence and coaxial, the utility model discloses by adopting the dispersion pipe is inserted into fixed pipe, and fixed pipe is fixed on flange, dispersion pipe can still keep stable under the action of external force, so that the joint is not gas leakage, ensure product yield.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material production technology, specifically to a vertical back-sealing furnace dispersion tube installation fixture. Background Technology

[0002] A crucial process in the production of semiconductor silicon wafers is the back-sealing process. One primary method for back-sealing involves using low-pressure chemical vapor deposition (LPCVD) to grow a thin film of silicon dioxide or polycrystalline silicon on the back of the wafer. A common piece of equipment for this process is the low-pressure vertical back-sealing furnace. The working principle involves placing the silicon wafer inside a quartz tube, creating a vacuum environment by evacuating the furnace tube, and then introducing silane gas through a diffusion tube. Under appropriate conditions of temperature and pressure, the gas reacts to form a thin polycrystalline silicon film on the back of the wafer. During production, silane enters the furnace tube through the diffusion tube. While the diffusion tube is currently secured, it is prone to loosening under external force, leading to silane leakage. This makes it difficult to control the film thickness and affects product yield. Utility Model Content

[0003] Based on the technical problems existing in the prior art, the purpose of this utility model is to propose an installation tooling for a vertical back-sealing furnace dispersion tube.

[0004] The technical solution adopted by this utility model is: a vertical back-sealing furnace dispersion tube installation fixture, including: a dispersion tube, a first flange, and a second flange. A fixing frame is provided on the inner circumference of the first flange. Several independent through holes are provided in the fixing frame. A fixing tube is fixedly installed on the fixing frame corresponding to each through hole. The second flange is provided with circular through holes with the same number of through holes as the first flange and the same inner diameter as the air inlet of the dispersion tube. The air inlet end of the dispersion tube passes through the fixing tube and the through holes on the fixing frame in sequence and corresponds one-to-one with the circular through holes provided on the second flange and is coaxially and tightly fitted.

[0005] As a preferred embodiment, the lower end of the circular through hole of the second flange is provided with a connecting pipe, and the other end of the connecting pipe passes through the side wall of the second flange.

[0006] As a preferred embodiment, the circular through hole of the second flange is provided on the connecting plate, the lower end of the circular through hole on the connecting plate is connected to one end of the connecting pipe, and the other end of the connecting pipe passes through the side wall of the second flange.

[0007] As a preferred embodiment, the fixing tube is provided with a base, and the base is provided with two fixing holes, through which the fixing tube is installed on the fixing frame.

[0008] As a preferred embodiment, the fixing tube is provided with a base, and the base is provided with two fixing holes, through which the fixing tube is installed on the fixing frame.

[0009] As a preferred embodiment, the base has a circular through hole at its center, and a cylindrical hollow sleeve is coaxially connected to one end of the circular through hole. The cylindrical hollow sleeve has the same inner diameter as the circular through hole, forming a continuous through channel.

[0010] As a preferred embodiment, the top of the cylindrical hollow sleeve is provided with an outwardly extending protrusion.

[0011] As a preferred embodiment, the air inlet end of the diffusion tube is a circular pipe, and the outer circumferential surface of the circular pipe away from the air inlet is provided with a groove that matches the protrusion.

[0012] As a preferred embodiment, a V-shaped sealing ring is installed between the air inlet of the diffusion tube and the circular through hole of the second flange.

[0013] The beneficial effects of this utility model are:

[0014] This utility model provides a vertical back-sealing furnace dispersion tube installation fixture. By inserting the dispersion tube into a fixed tube and fixing the fixed tube to the flange, the dispersion tube can remain stable under external force, preventing air leakage at the joint and ensuring product yield. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of this embodiment or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0017] Reference numerals in the attached drawings: 1. Dispersion tube, 2. First flange, 3. Second flange, 4. Fixed tube, 5. Protrusion, 6. Groove, 7. Fixing bracket, 8. Connecting plate, 9. Connecting tube. Detailed Implementation

[0018] The present invention will now be described in detail through exemplary embodiments. However, it should be understood that, without further description, elements, structures and features in one embodiment may be advantageously incorporated into other embodiments.

[0019] It should be noted that, unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by a person skilled in the art to which this utility model pertains. The words “a,” “an,” or “the” and similar terms used in the specification and claims of this utility model patent application do not express a quantity limitation, but rather indicate the presence of at least one. The words “comprising” or “including” and similar terms indicate that the elements or objects preceding “comprising” or “including” encompass the elements or objects listed after “comprising” or “including”, but do not exclude other elements or objects having the same function.

[0020] To more clearly describe an installation fixture for a vertical back-sealing furnace dispersion tube, combined with the attached... Figure 1 Detailed description is as follows:

[0021] This embodiment uses a fixed pipe 4 as an example for illustration. As shown in the figure, a vertical back-sealing furnace dispersion pipe installation fixture includes: a dispersion pipe 1, a first flange 2, a second flange 3, a fixed pipe 4 provided on the first flange 2, a base provided on the fixed pipe 4, two fixing holes provided on both sides of the base, and the fixed pipe 4 is installed on the first flange 2 by screws passing through the fixing holes. A circular through hole is provided in the center of the base, and a cylindrical hollow sleeve is coaxially connected to one end of the circular through hole. The inner diameter of the cylindrical hollow sleeve and the circular through hole are the same, forming a continuous through channel. The through channel allows one end of the air inlet of the dispersion pipe 1 to pass through.

[0022] In this embodiment, the air inlet end of the diffusion tube 1 is a circular pipe. The outer diameter of the end of the circular pipe away from the air inlet is larger than the outer diameter of the other parts of the circular pipe, forming a stepped structure at the connection. The outer diameter of this end is also larger than the outer diameter of the cylindrical hollow sleeve of the fixed pipe 4. When the diffusion tube 1 passes through the fixed pipe 4 and reaches the stepped structure of the diffusion tube 1, the stepped structure acts as a limit to prevent the diffusion tube 1 from continuing to move downward. The outer circumferential surface of the circular pipe of the diffusion tube 1 away from the air inlet is provided with a groove 6.

[0023] Furthermore, the top of the cylindrical hollow sleeve of the fixed tube 4 is provided with an outwardly extending protrusion 5. The protrusion 5 has the same curvature as the inner wall of the cylindrical hollow sleeve and cooperates with the groove 6 on the diffusion tube 1. When the diffusion tube 1 passes through the fixed tube 4 and reaches the stepped structure of the circular pipe of the diffusion tube 1, the protrusion 5 at the top of the cylindrical hollow sleeve is inserted into the groove 6 on the diffusion tube 1. The protrusion 5 and the groove 6 cooperate to limit the diffusion tube 1 and ensure that it does not displace under the action of external force.

[0024] In this embodiment, a fixing frame 7 is provided on the inner circumference of the first flange 2. The fixing frame 7 is provided with two threaded holes corresponding to the two fixing holes of the base of the fixing pipe 4. The screw passes through the fixing hole and connects with the threaded hole to install the fixing pipe 4 on the fixing frame 7. The fixing frame 7 is also provided with through holes corresponding to the cylindrical hollow sleeve and circular through hole of the fixing pipe 4. The circular pipe end of the diffusion pipe 1 passes through the through hole on the fixing pipe 4 and the fixing frame (7) in sequence, and exposes part of the circular pipe.

[0025] In this embodiment, the second flange 3 includes a connecting plate 8 and a connecting pipe 9. The connecting plate 8 is disposed inside the second flange 3, and has a circular through hole with the same inner diameter as the air inlet of the dispersion pipe 1. The connecting pipe 9 is located at the lower end of the circular through hole, and the other end of the connecting pipe 9 passes radially through the side wall of the second flange 3. The connecting pipe 9 is made of rigid material and is used to transport silane from the outside, while also providing support for the connecting plate 8. The circular pipe end of the dispersion pipe 1 passes through the through hole on the fixed pipe 4 and the fixed bracket 7. The circular pipe inlet of the dispersion pipe 1 is connected to... The upper end of the circular through hole on the connecting plate 8 of the second flange 3 is coaxially and tightly fitted. A V-shaped sealing ring is provided between the circular pipe inlet of the dispersion tube 1 and the circular through hole on the connecting plate 8 of the second flange 3. The sealing lip of the V-shaped sealing ring faces the circular through hole of the connecting plate 8. The circular pipe inlet end of the dispersion tube 1 presses the V-shaped sealing ring tightly onto the circular through hole of the connecting plate 8 to further ensure the sealing performance. During operation, silane enters the dispersion tube 1 through the connecting pipe 9 and the connecting plate 8 provided on the second flange 3, effectively preventing leakage, and then enters the furnace tube for reaction.

[0026] The parts not described in detail in this embodiment are existing technologies.

[0027] It should be noted that although the present invention has been described through the above embodiments, the present invention may have other various embodiments. Without departing from the spirit and scope of the present invention, those skilled in the art can obviously make various corresponding changes and modifications to the present invention, but these changes and modifications should all fall within the scope of protection of the appended claims and their equivalents.

Claims

1. A fixture for installing a dispersion tube in a vertical back-sealing furnace, comprising: The first flange (2) and the second flange (3) are characterized in that: a fixing frame (7) is provided on the inner circumferential surface of the first flange (2), and a number of independent through holes are provided in the fixing frame (7). A fixing pipe (4) is fixedly installed on the fixing frame (7) corresponding to each through hole. The second flange (3) is provided with a circular through hole with the same number of through holes as the first flange (2) and the same inner diameter as the air inlet of the diffusion tube (1). The air inlet end of the diffusion tube (1) passes through the through holes on the fixing pipe (4) and the fixing frame (7) in sequence and corresponds one-to-one with the circular through holes provided on the second flange (3) and is coaxially and tightly fitted.

2. The installation fixture for the vertical back-sealing furnace dispersion tube according to claim 1, characterized in that: The lower end of the circular through hole of the second flange (3) is provided with a connecting pipe (9), and the other end of the connecting pipe (9) passes through the side wall of the second flange (3).

3. The installation fixture for the vertical back-sealing furnace dispersion tube according to claim 2, characterized in that: The circular through hole of the second flange (3) is provided on the connecting plate (8). The lower end of the circular through hole on the connecting plate (8) is connected to one end of the connecting pipe (9), and the other end of the connecting pipe (9) passes through the side wall of the second flange (3).

4. The installation fixture for the vertical back-sealing furnace dispersion tube according to claim 1, characterized in that: The fixing tube (4) is provided with a base, and the base is provided with two fixing holes. The fixing tube (4) is installed on the fixing frame (7) through the fixing holes.

5. The installation fixture for the vertical back-sealing furnace dispersion tube according to claim 4, characterized in that: The fixing frame (7) is provided with two threaded holes corresponding to the two fixing holes of the base of the fixing tube (4), and the screw passes through the fixing hole and connects with the threaded hole.

6. The installation fixture for the vertical back-sealing furnace dispersion tube according to claim 5, characterized in that: The base has a circular through hole at its center, and a cylindrical hollow sleeve is coaxially connected to one end of the circular through hole. The cylindrical hollow sleeve has the same inner diameter as the circular through hole, forming a continuous through channel.

7. The installation fixture for the vertical back-sealing furnace dispersion tube according to claim 6, characterized in that: The cylindrical hollow sleeve has an outwardly extending protrusion (5) at its top.

8. The installation fixture for the vertical back-sealing furnace dispersion tube according to claim 7, characterized in that: The diffuser (1) has a circular pipe at the air inlet end, and a groove (6) that matches the protrusion (5) is provided on the outer circumference of the circular pipe at the end away from the air inlet.

9. The installation fixture for the vertical back-sealing furnace dispersion tube according to any one of claims 1-8, characterized in that: A V-shaped sealing ring is installed between the air inlet of the diffusion tube (1) and the circular through hole of the second flange (3).

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