Furnace door opening and closing device and semiconductor process equipment
By employing a lifting shaft and rotating component structure with a first and second channel in semiconductor process equipment, combined with specific bearings and sensing components, the problem of poor sealing effect caused by furnace door sagging was solved, achieving stable opening and closing of the furnace door and improved sealing effect.
CN224415727UActive Publication Date: 2026-06-26GU RUI SEMICONDUCTOR EQUIPMENT (GUANGZHOU) CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- GU RUI SEMICONDUCTOR EQUIPMENT (GUANGZHOU) CO LTD
- Filing Date
- 2025-06-09
- Publication Date
- 2026-06-26
AI Technical Summary
Technical Problem
In existing technologies, the furnace door of semiconductor process equipment sags due to bearing deformation, affecting the sealing effect of the furnace opening, and the problem is more serious in large-size equipment.
Method used
The structure employs a lifting shaft and rotating components with first and second channels to reduce heat transfer to the bearings. Crossed roller bearings or deep groove ball bearings are used, combined with microswitches and proximity switches to achieve stable opening and closing of the furnace door.
Benefits of technology
It improves the positional stability of the furnace door, enhances the sealing effect of the furnace opening, reduces the escape of high-temperature gas from the process chamber, and lowers heat loss.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN224415727U_ABST
Abstract
The application relates to the technical field of semiconductor processing, and particularly discloses a furnace door opening and closing device and a semiconductor process equipment. The furnace door opening and closing device comprises a first driving element, a moving assembly, a first bearing and a rotating assembly. The output end of the first driving element can reciprocate along the axis direction of the first driving element; the moving assembly is connected to the output end of the first driving element, wherein the moving assembly comprises a lifting shaft, and the lifting shaft has a first channel penetrating along the axis of the lifting shaft; the first bearing has a first connecting part and a second connecting part capable of relative rotation, and the first connecting part is fixedly connected with the lifting shaft; the rotating assembly comprises a rotating element, the rotating element has a second channel penetrating along the axis of the rotating element, and the rotating element is connected with the second connecting part; wherein the end face of the rotating element away from the output end of the first driving element forms a connecting part used for connecting a furnace door assembly. The above arrangement reduces the heat transferred from the furnace door assembly to the first bearing, reduces the deformation probability of the first bearing, and improves the sealing effect on the furnace port.
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