A burst disc detection device

Abstract

The utility model discloses a kind of disc burst detection devices, including supporting mechanism, detection mechanism on the supporting mechanism;Detection mechanism, including swing link being movably connected on the supporting mechanism, first detection assembly and second detection assembly being respectively arranged at the both ends of the swing link, the first detection assembly is arranged on the disc surface with polishing pad;The swing link is arranged on the supporting mechanism, when disc surface is scattered crystal fragments on disc surface due to disc burst, crystal fragments impact first detection assembly and drive first detection assembly to move, and then drive the swing link to rotate, to make the second detection assembly move, and stop equipment.The utility model rotates through the second detection assembly of the other end of swing link, and then emergency stop equipment, indicate that disc surface appears disc burst phenomenon, avoid that protruding polishing pad is involved in equipment, lead to polishing pad to appear breakage and equipment to appear fault, reduce loss, save cost.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing, specifically to a device for detecting semiconductor burnout. Background Technology

[0002] Sapphire substrates are a core material in fields such as semiconductor lighting, power electronics, and optoelectronic devices, and their technological development is closely related to the third-generation semiconductor industry.

[0003] The polishing process in sapphire substrate production is usually completed under high-pressure friction under alkaline conditions. The sapphire wafer is placed on a polishing pad that is moving in a high-speed circular motion. At the same time, a polishing head with pressure adjustment rotates relative to the wafer, pressing it firmly against the polishing pad for rotary polishing. Alkaline polishing fluid is added during the high-speed polishing process to achieve the best polishing effect.

[0004] However, during the above process, the polishing slurry crystallizes, and broken wafers can easily cause the polishing pad to break or tear, leading to the pad bursting. This results in a large amount of wear and tear on the ceramic pad and sapphire wafer, causing significant losses and a great deal of waste for the company. Utility Model Content

[0005] Based on this, the purpose of this utility model is to provide a device for detecting sapphire substrate breakage, which aims to solve the problem that during the polishing process of sapphire substrate production, the polishing pad is easily damaged or torn due to the crystallization of polishing fluid and broken wafers, resulting in breakage of the ceramic pad and a large amount of wear and scrap of the ceramic pad and sapphire wafer, causing significant losses.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a disc bursting detection device, comprising a support mechanism and a detection mechanism disposed on the support mechanism;

[0007] The testing mechanism includes a swing arm movably connected to the support mechanism, a first testing component and a second testing component respectively disposed at both ends of the swing arm, and the second testing component is disposed on a disc surface with a polishing pad attached;

[0008] The swing arm is mounted on the support mechanism. When crystal fragments are scattered on the disk due to a disk explosion, the crystal fragments hit the first detection component and drive the first detection component to move, which in turn drives the swing arm to rotate, so that the second detection component moves and stops the device.

[0009] In summary, the disc bursting detection device proposed in this utility model comprises a first detection component and a second detection component respectively set at both ends of a swing arm. The first detection component is placed on the disc surface with the polishing pad attached. After the disc bursts, the scattered crystal fragments are driven by the circular motion of the disc surface to impact the first detection component, thereby causing the swing arm to rotate on the support mechanism. This causes the second detection component at the other end of the swing arm to rotate, thus stopping the equipment immediately. This indicates that the disc has burst, preventing the protruding polishing pad from being caught in the equipment, which could lead to damage to the polishing pad and equipment malfunction, thereby reducing losses and saving costs.

[0010] According to one aspect of the above technical solution, the first detection component includes a fixed plate connected to the swing arm, a cylinder disposed on the fixed plate, a mounting plate disposed on the cylinder, and a stop bar disposed on the mounting plate, wherein the cylinder is used to adjust the height of the stop bar on the disc surface.

[0011] According to one aspect of the above technical solution, the baffle is an L-shaped bracket, the baffle is located on the edge of the disc surface, and the baffle and the disc surface are spaced apart.

[0012] According to one aspect of the above technical solution, the support mechanism includes a device cover guide rail, a first support component for connecting the swing arm, and a switch bracket for supporting the second detection component, wherein the end of the swing arm away from the stop bar is located on one side of the switch bracket.

[0013] According to one aspect of the above technical solution, the first support component includes a connecting seat disposed on the guide rail of the equipment cover, a support disposed at one end of the connecting seat away from the guide rail of the equipment cover, and a rotating shaft disposed at one end of the support away from the connecting seat, the rotating shaft passing through the swing rod.

[0014] According to one aspect of the above technical solution, the support is provided with a groove, and a fixing plate is provided in the groove, and the fixing plate is fixedly connected to the rotating shaft.

[0015] According to one aspect of the above technical solution, the switch bracket is a U-shaped component, one side of the switch bracket is fixedly connected to the equipment cover guide rail, and the second detection component is disposed on the side of the switch bracket away from the equipment cover guide rail.

[0016] According to one aspect of the above technical solution, the second detection component includes a first micro switch and a second micro switch disposed on both sides of the side wall of the switch bracket away from the equipment cover guide rail, wherein the first micro switch and the second micro switch are respectively disposed on both sides of the swing arm.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the disc burst detection device in one embodiment of the present invention;

[0019] Figure 2 This is a front view of the disc burst detection device in one embodiment of the present invention;

[0020] Figure 3 for Figure 1 Enlarged view of point A in the middle;

[0021] Figure 4 This is a schematic diagram of the assembly of the mounting plate and the stop bar in one embodiment of the present invention.

[0022] Component symbol explanation in the attached diagram:

[0023] Equipment cover guide rail 1, connecting seat 2, support 3, fixed plate 4, rotating shaft 5, swing rod 6, stop block 7, fixed plate 8, first bolt 9, cylinder 10, mounting plate 11, stop bar 12, switch bracket 13, first micro switch 14, second micro switch 15, groove 16, second bolt 17, third bolt 18, threaded hole 19, fixing hole 20, mounting hole 21. Detailed Implementation

[0024] To make the objectives, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model are described in detail below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of this utility model more thorough and complete.

[0025] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," "upper," "lower," and similar expressions used herein are for illustrative purposes only and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

[0026] In this utility model, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. The term "and / or" as used herein includes any and all combinations of one or more of the related listed items.

[0027] Please see Figures 1-4 The diagram shows a structural schematic of a disc burst detection device according to an embodiment of the present invention. The disc burst detection device includes a support mechanism and a detection mechanism disposed on the support mechanism, wherein:

[0028] To detect disc bursts, the detection mechanism includes a swing arm 6 movably connected to a support mechanism, and a first detection component and a second detection component respectively located at both ends of the swing arm 6. The first detection component is mounted on the disc surface covered with a polishing pad. The swing arm 6, mounted on the support mechanism, allows crystal fragments to scatter across the disc surface due to a disc burst. These fragments impact the first detection component, causing it to move, which in turn rotates the swing arm 6, thus moving the second detection component and stopping the device.

[0029] Furthermore, the first detection component includes a fixing plate 8 connected to the swing arm 6, a cylinder 10 disposed on the fixing plate 8, a mounting plate 11 disposed on the cylinder 10, and a stop bar 12 disposed on the mounting plate 11. The cylinder 10 is used to adjust the height of the stop bar 12 on the disk surface. The stop bar 12 is an L-shaped bracket, disposed at the edge of the disk surface, and spaced apart from the disk surface. The second detection component includes a first micro switch 14 and a second micro switch 15 disposed on both sides of the side wall of the switch bracket 13 away from the equipment cover guide rail 1. The first micro switch 14 and the second micro switch 15 are respectively disposed on both sides of the swing arm 6.

[0030] Furthermore, to provide support for the testing mechanism, the support mechanism includes an equipment cover guide rail 1, a first support assembly for connecting the swing arm 6, and a switch bracket 13 for supporting the second testing assembly. The end of the swing arm 6 away from the stop bar 12 is located on one side of the switch bracket 13. The first support assembly includes a connecting seat 2 on the equipment cover guide rail 1, a support 3 at the end of the connecting seat 2 away from the equipment cover guide rail 1, and a rotating shaft 5 at the end of the support 3 away from the connecting seat 2. The rotating shaft 5 passes through the swing arm 6. The support 3 has a groove 16, and a fixing plate 4 is provided in the groove 16. The fixing plate 4 is fixedly connected to the rotating shaft 5. The switch bracket 13 is a U-shaped piece, and one side of the switch bracket 13 is fixedly connected to the equipment cover guide rail 1. The second testing assembly is located on the side of the switch bracket 13 away from the equipment cover guide rail 1.

[0031] Specifically, the connecting seat 2 is installed on the end face of the equipment cover guide rail 1 through its four fixing holes, and the switch bracket 13 is installed on its four mounting holes, so that the stop bar 12 is placed above the plate surface, and the contacts of the first micro switch 14 and the second micro switch 15 are respectively placed on both sides of the swing arm 6, which facilitates the detection of two opposite movements. When an object moving in the circumferential direction on the plate surface hits the stop bar 12, the stop bar 12, the cylinder 10 and the swing arm 6 will swing around the axis 5. The top of the swing arm 6 will hit one of the micro switches, and the corresponding micro switch will send a signal to stop the emergency stop, indicating that the plate surface has exploded, so as to prevent the raised polishing pad from being rolled into the equipment, causing damage to the polishing pad and equipment failure.

[0032] A stop block 7 is provided on the side of the swing arm 6 away from the rotating shaft 5. The first micro switch 14 and the second micro switch 15 are both provided corresponding to the swing arm 6. Several second bolts 17 are threaded at the connection between the fixed plate 4 and the groove 16. Several first bolts 9 are threaded at the connection between the swing arm 6 and the fixed plate 8.

[0033] In use, by placing the contacts of the first micro switch 14 and the second micro switch 15 on both sides of the swing arm 6, two movements in opposite directions can be detected. The setting of several second bolts 17 facilitates the fixing of the fixed plate 4, and the setting of several first bolts 9 facilitates the fixing of the fixed plate 8 on the swing arm 6.

[0034] Both sides of the top of the mounting plate 11 are threaded with third bolts 18. The connection between the stop bar 12 and the mounting plate 11 is provided with two threaded holes 19. The two third bolts 18 are threadedly connected to the two threaded holes 19 respectively. The connecting seat 2 and the support 3 are integral structures. The connection between the connecting seat 2 and the equipment cover guide rail 1 is provided with four fixing holes 20. The connection between the switch bracket 13 and the equipment cover guide rail 1 is provided with four mounting holes 21.

[0035] In use, by loosening the two third bolts 18, they are separated from the two threaded holes 19, and the stop bar 12 is no longer fixed, thus facilitating the disassembly and maintenance of the stop bar 12. The setting of the connecting seat 2 and the four fixing holes 20 facilitates the fixing of the support 3 and other structures to the large surface of the equipment cover guide rail 1. The setting of the four mounting holes 21 facilitates the fixing of the switch bracket 13 to the large surface of the equipment cover guide rail 1.

[0036] In summary, the disc bursting detection device proposed in this utility model comprises a first detection component and a second detection component respectively set at both ends of a swing arm. The first detection component is placed on the disc surface with the polishing pad attached. After the disc bursts, the scattered crystal fragments are driven by the circular motion of the disc surface to impact the first detection component, thereby causing the swing arm to rotate on the support mechanism. This causes the second detection component at the other end of the swing arm to rotate, thus stopping the equipment immediately. This indicates that the disc has burst, preventing the protruding polishing pad from being caught in the equipment, which could lead to damage to the polishing pad and equipment malfunction, thereby reducing losses and saving costs.

[0037] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0038] The above-described embodiments are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A disc burst detection device, characterized in that, The disc burst detection device includes a support mechanism and a detection mechanism disposed on the support mechanism; The testing mechanism includes a swing arm movably connected to the support mechanism, a first testing component and a second testing component respectively disposed at both ends of the swing arm, wherein the first testing component is disposed on a disc surface covered with a polishing pad; The swing arm is mounted on the support mechanism. When crystal fragments are scattered on the disk due to a disk explosion, the crystal fragments hit the first detection component and drive the first detection component to move, which in turn drives the swing arm to rotate, so that the second detection component moves and stops the device.

2. The disc burst detection device according to claim 1, characterized in that, The first detection component includes a fixed plate connected to the swing arm, a cylinder disposed on the fixed plate, a mounting plate disposed on the cylinder, and a stop bar disposed on the mounting plate. The cylinder is used to adjust the height of the stop bar on the disc surface.

3. The disc burst detection device according to claim 2, characterized in that, The baffle is an L-shaped bracket, which is located on the edge of the disc surface and is spaced apart from the disc surface.

4. The disc burst detection device according to claim 1, characterized in that, The support mechanism includes a device cover guide rail, a first support assembly for connecting the swing arm, and a switch bracket for supporting the second detection assembly. The end of the swing arm away from the stop bar is located on one side of the switch bracket.

5. The disc burst detection device according to claim 4, characterized in that, The first support component includes a connecting seat on the guide rail of the equipment cover, a support at the end of the connecting seat away from the guide rail of the equipment cover, and a rotating shaft at the end of the support away from the connecting seat, the rotating shaft passing through the swing rod.

6. The disc burst detection device according to claim 5, characterized in that, The support has a groove, and a fixing plate is provided in the groove. The fixing plate is fixedly connected to the rotating shaft.

7. The disc burst detection device according to claim 4, characterized in that, The switch bracket is a U-shaped component, with one side of the switch bracket fixedly connected to the guide rail of the equipment cover, and the second detection component is located on the side of the switch bracket away from the guide rail of the equipment cover.

8. The disc burst detection device according to claim 1, characterized in that, The second detection component includes a first micro switch and a second micro switch located on both sides of the side wall of the switch bracket away from the equipment cover guide rail, with the first micro switch and the second micro switch respectively located on both sides of the swing arm.

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