A clamp pusher device

Abstract

The utility model discloses a clamp push -over device, including carrying assembly, carrying board, hook plate elevating gear and clamp hook plate, the carrying assembly includes support frame device, transmission shaft, power output device and two opposite transmission unit, transmission shaft rotatablely installed on support frame device, power output device installs on support frame device to be used for driving transmission shaft rotation, the two opposite transmission unit are used in common for driving carrying board translation, hook plate elevating gear installs on carrying board, and hook plate elevating gear is used for driving clamp hook plate elevating, this clamp push -over device still includes two -dimensional code reader, the utility model discloses through clamp hook plate push -over wafer aging test fixture can improve wafer aging test fixture's stability and smoothness of moving, and, through adopting two -dimensional code reader, the management of wafer aging test fixture is convenient.

Description

Technical Field

[0001] This utility model relates to the field of wafer loading and unloading alignment equipment, specifically to a clamping and pushing device. Background Technology

[0002] Silicon carbide (SiC), a typical representative of third-generation wide-bandgap semiconductor materials, possesses characteristics such as high critical breakdown field strength, high thermal conductivity, high electron saturation drift velocity, large bandgap, and strong radiation resistance. It has found widespread application in the new energy field. However, the yield of SiC wafers is generally low due to current manufacturing processes. Screening is often done solely through traditional wafer testing probes for electrical performance testing, which is insufficient to effectively eliminate early device failures. SiC wafers must undergo high-temperature, electrical stress aging before they can be effectively rejected; therefore, wafers are often mounted in wafer aging test fixtures for aging tests.

[0003] In processes such as wafer alignment, a fixture pushing device is often used to push the wafer aging test fixture to the corresponding component or position, so that the operator does not need to manually move the wafer aging test fixture, which can reduce the labor intensity of the operator. However, the pushing end of the existing fixture pushing device is prone to unstable translation, which affects the stability and smoothness of pushing the wafer aging test fixture. Moreover, it is also inconvenient to manage the wafer aging test fixture. Utility Model Content

[0004] In order to overcome the shortcomings of the prior art, the purpose of this utility model is to provide a clamp pushing device, which combines a transport component, a transport plate, a hook plate lifting device and a clamp hook plate, and improves the stability of the clamp hook plate translation by using a support frame device, a transmission shaft, a power output device and two relative transmission units for the transport component.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A clamp moving device includes a transport assembly, a transport plate, a hook plate lifting device, and a clamp hook plate. The transport assembly includes a support frame assembly, a drive shaft, a power output device, and two opposing transmission units. The drive shaft is rotatably mounted on the support frame assembly, and the power output device is mounted on the support frame assembly and used to drive the drive shaft to rotate. The two opposing transmission units are used together to drive the transport plate to translate. Each transmission unit includes a first driving wheel, a first driven wheel, and a first transmission belt. The first driving wheel is fixed on the drive shaft, the first driven wheel is rotatably mounted on the support frame assembly, and the first transmission belt is wound around the first driving wheel and the first driven wheel of the transmission unit. One end of the transport plate is connected to the first transmission belt of one of the transmission units, and the other end of the transport plate is connected to the first transmission belt of the other transmission unit. The hook plate lifting device is mounted on the transport plate and is used to drive the clamp hook plate to lift. The clamp moving device also includes a QR code reader.

[0007] The QR code reader is mounted on the carrier board.

[0008] The clamp pushing device includes two hook plate lifting devices and two clamp hook plates. The QR code reader is located between the two hook plate lifting devices. The two clamp hook plates correspond one-to-one with the two hook plate lifting devices. The hook plate lifting devices are used to drive the corresponding clamp hook plates to lift.

[0009] The hook plate lifting device includes a hook plate driving cylinder, the cylinder body of which is mounted on the transport plate, and the clamp hook plate is connected to the piston rod of the hook plate driving cylinder.

[0010] The power output device includes a power component, a second driving wheel, a second driven wheel, and a second transmission belt. The power component is used to drive the second driving wheel to rotate. The second driven wheel is fixed on the transmission shaft, and the second transmission belt is wound around the second driving wheel and the second driven wheel.

[0011] The power component includes a motor, and the second drive wheel is fixed on the output shaft of the motor.

[0012] The central axis of the second driving wheel is parallel to the central axis of the second driven wheel, and the second driving wheel and the second driven wheel are arranged sequentially in the vertical direction.

[0013] The second driving wheel is located above the second driven wheel.

[0014] The central axis of the first driving wheel is parallel to the central axis of the first driven wheel, and the first driving wheel and the first driven wheel in the same transmission unit are arranged sequentially along the horizontal direction.

[0015] The clamping and pushing device also includes a first guide rail and a second guide rail. One end of the carrier plate is provided with a first slider that slides in cooperation with the first guide rail, and the other end of the carrier plate is provided with a second slider that slides in cooperation with the second guide rail.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] This utility model provides a fixture pushing device, which, based on a carrier component, a carrier plate, a hook plate lifting device, and a fixture hook plate, improves the stability of the carrier plate's translation by combining the carrier component with a support frame device, a transmission shaft, a power output device, and two opposing transmission units. Furthermore, the translation of the fixture hook plate, driven by the carrier plate, further enhances the stability of the hook plate's translation. This, in turn, improves the smoothness and stability of the wafer aging test fixture's movement by pushing it with the hook plate. Moreover, by employing a QR code reader, information about the wafer aging test fixture can be obtained by recognizing the QR code label on the fixture, facilitating its management. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a schematic diagram of another direction of the present invention;

[0020] Figure 3 This is an exploded view of the power output device and drive shaft;

[0021] Among them, 10 is the main shaft; 20 is the first connecting shaft; 30 is the second connecting shaft; 40 is the first mounting shaft; 50 is the second mounting shaft; 652 is the hook plate lifting device; 653 is the clamp hook plate; 654 is the QR code reader; 71 is the first guide rail; 72 is the first slider; 81 is the second guide rail; 82 is the second slider; 83 is the first bearing; 84 is the second bearing; 90 is the transport component; 91 is the power component; 92 is the drive shaft; 93 is the transmission unit; 94 is the first driving wheel; 95 is the first driven wheel; 96 is the first transmission belt; 97 is the transport plate; 98 is the power output device; 99 is the support frame device; 100 is the second driving wheel; 101 is the second driven wheel; 102 is the second transmission belt. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0023] like Figure 1-3As shown, a clamping device includes a transport assembly 90, a transport plate 97, a hook lifting device 652, and a clamp hook plate 653. The transport assembly 90 includes a support frame assembly 99, a drive shaft 92, a power output device 98, and two opposing transmission units 93. The drive shaft 92 is rotatably mounted on the support frame assembly 99, and the power output device 98 is mounted on the support frame assembly 99 and is used to drive the drive shaft 92 to rotate. The two opposing transmission units 93 are used together to drive the transport plate 97 to translate. Each transmission unit 93 includes a first driving wheel 94, a first driven wheel 95, and a first transmission belt 96. The first driving wheel 94... Fixed on the drive shaft 92, the first driven wheel 95 is rotatably mounted on the support frame device 99, the first drive belt 96 is wound around the first drive wheel 94 and the first driven wheel 95 of the transmission unit 93, one end of the carrier plate 97 is connected to the first drive belt 96 of one of the transmission units 93, and the other end of the carrier plate 97 is connected to the first drive belt 96 of another transmission unit 93, the hook plate lifting device 652 is mounted on the carrier plate 97, and the hook plate lifting device 652 is used to drive the clamp hook plate 653 to rise and fall, and the clamp pushing device also includes a QR code reader 654.

[0024] In use, the hook plate lifting device 652 drives the clamp hook plate 653 to descend, and the power output device 98 drives the transmission shaft 92 to rotate in the forward direction. At this time, the first drive wheel 94 of the two transmission units 93 can be driven to rotate, thereby driving the first transmission belt 96 of the two transmission units 93 to drive the carrier plate 97 forward. At this time, the clamp hook plate 653, together with the clamp hook plate 653, moves forward with the carrier plate 97, and the clamp hook plate 653 can be used to move the carrier plate 97 forward. The wafer aging test fixture is pushed forward, causing it to move forward. Therefore, the fixture pushing device provided by this utility model, based on the carrier component 90, carrier plate 97, hook plate lifting device 652, and fixture hook plate 653, combines the carrier component 90 with a support frame device 99, drive shaft 92, power output device 98, and two opposing transmission units 93. Simultaneously, one end of the carrier plate 97 is connected to the first transmission belt 96 of one transmission unit 93, and the other end is connected to the first transmission belt 96 of the other transmission unit 93. This allows the first drive wheels 94 of the two transmission units 93 to rotate synchronously with the drive shaft 92, driving the first transmission belts 96 of the two transmission units 93 to drive synchronously. Thus, both ends of the carrier plate 97 are synchronously driven by the first transmission belts 96 of the two transmission units 93. Since the transmission of the first transmission belt 96 is relatively smooth, and both ends of the carrier plate 97 are driven by the first transmission belts 96 of the two transmission units 93, the forces at both ends are... The balanced movement of the carrier plate 97 improves the stability of its translation, and the translation of the fixture hook plate 653 driven by the carrier plate 97 also improves the stability of the translation of the fixture hook plate 653. Thus, the smooth and stable movement of the wafer aging test fixture is improved by pushing it with the fixture hook plate 653. Moreover, by using a QR code reader 654, the information of the wafer aging test fixture can be obtained by recognizing the QR code label of the wafer aging test fixture, which facilitates the management of the wafer aging test fixture.

[0025] Preferably, the central axis of the first driving wheel 94 is parallel to the central axis of the first driven wheel 95, and the first driving wheel 94 and the first driven wheel 95 in the same transmission unit 93 are arranged sequentially in the horizontal direction.

[0026] Preferably, the QR code reader 654 is mounted on the carrier board 97, so that the QR code reader 654 can move with the carrier board 97. The QR code reader 654 can identify the QR code label of the wafer aging test fixture to obtain the specific information of the wafer aging test fixture for wafer aging test fixture life management. At the same time, it can realize the recording and management of the number of times and duration of use of key components of the wafer aging test fixture, such as probes, locking screws, pin clamps, and thermocouple sensors, to facilitate the timely replacement of key components.

[0027] Specifically, the transport plate 97 is equipped with two hook plate lifting devices 652 and two clamp hook plates 653.

[0028] The QR code reader 654 is located between the two hook plate lifting devices 652. The two clamp hook plates 653 correspond one-to-one with the two hook plate lifting devices 652. The hook plate lifting device 652 is used to drive the corresponding clamp hook plate 653 to rise and fall.

[0029] The hook plate lifting device 652 includes a hook plate driving cylinder. The cylinder body of the hook plate driving cylinder is mounted on the carrier plate 97, and the clamp hook plate 653 is connected to the piston rod of the hook plate driving cylinder. By adopting the above structure, the clamp hook plate 653 can be lifted and lowered at the same time, and installation is convenient.

[0030] The power output device 98 includes a power component 91, a second driving wheel 100, a second driven wheel 101, and a second transmission belt 102. The second driving wheel 100 is fixed on the output shaft of the power component 91, and the second driven wheel 101 is fixed on the transmission shaft 92. The second transmission belt 102 is wound around the second driving wheel 100 and the second driven wheel 101. In use, the power component 91 drives the second driving wheel 100 to rotate, which in turn drives the second driven wheel 101 to rotate via the second transmission belt 102, thereby driving the transmission shaft 92 to rotate. By adopting the above structure, it is convenient to drive the transmission shaft 92 to rotate, and it is also convenient to install and reasonably set the installation position of the transmission shaft 92.

[0031] The central axis of the second driving wheel 100 is parallel to the central axis of the second driven wheel 101, and the second driving wheel 100 and the second driven wheel 101 are arranged sequentially in the vertical direction. Specifically, the second driving wheel 100 is located above the second driven wheel 101.

[0032] Specifically, the clamping and pushing device also includes a first guide rail 71 and a second guide rail 81. One end of the carrier plate 97 is provided with a first slider 72 that slides in cooperation with the first guide rail 71, and the other end of the carrier plate 97 is provided with a second slider 82 that slides in cooperation with the second guide rail 81. During the translation of the carrier plate 97, the first slider 72 slides along the first guide rail 71, and the second slider 82 slides along the second guide rail 81. The first guide rail 71 and the second guide rail 81 can be used to guide the translation of the carrier plate 97, which can improve the smoothness of the sliding of the carrier plate 97 and further improve the stability of the translation of the carrier plate 97.

[0033] The transmission shaft 92 includes a main shaft body 10, a first connecting shaft body 20, and a second connecting shaft body 30. The main shaft body 10 is disposed between the first connecting shaft body 20 and the second connecting shaft body 30. The second driven wheel 101 is fixed on the main shaft body 10. The first driving wheel 94 of one transmission unit 93 is fixed on the first connecting shaft body 20, and the first driving wheel 94 of another transmission unit 93 is fixed on the second connecting shaft body 30. The diameter of the first connecting shaft body 20 is the same as the diameter of the second connecting shaft body 30, and the diameter of the first connecting shaft body 20 is smaller than the diameter of the main shaft body 10.

[0034] The drive shaft 92 further includes a first mounting shaft 40 and a second mounting shaft 50. The first connecting shaft 20 is disposed between the first mounting shaft 40 and the main shaft 10, and the second connecting shaft 30 is disposed between the second mounting shaft 50 and the main shaft 10. The first mounting shaft 40 is rotatably mounted on the support frame device 99, and the second mounting shaft 50 is rotatably mounted on the support frame device 99. Specifically, the support frame device 99 is provided with a first bearing 83 and a second bearing 84. The first mounting shaft 40 is fixedly inserted into the inner ring of the first bearing 83, and the second mounting shaft 50 is fixedly inserted into the inner ring of the second bearing 84. By adopting the above structure, the smoothness of the installation of the drive shaft 92 can be improved, and the manufacturing of the drive shaft 92 can be facilitated.

[0035] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A clamp moving device, characterized in that: The system includes a transport assembly (90), a transport plate (97), a hook lifting device (652), and a clamp hook plate (653); the transport assembly (90) includes a support frame device (99), a drive shaft (92), a power output device (98), and two opposing transmission units (93); the drive shaft (92) is rotatably mounted on the support frame device (99), and the power output device (98) is mounted on the support frame device (99) and used to drive the drive shaft (92) to rotate; the two opposing transmission units (93) are used together to drive the transport plate (97) to translate; each transmission unit (93) includes a first driving wheel (94), a first driven wheel (95), and a first transmission belt (96), the first driving wheel (94) 94) Fixed on the drive shaft (92), the first driven wheel (95) is rotatably mounted on the support frame device (99), the first drive belt (96) is wound around the first drive wheel (94) and the first driven wheel (95) of the drive unit (93), one end of the carrier plate (97) is connected to the first drive belt (96) of one of the drive units (93), and the other end of the carrier plate (97) is connected to the first drive belt (96) of another drive unit (93), the hook plate lifting device (652) is mounted on the carrier plate (97), and the hook plate lifting device (652) is used to drive the clamp hook plate (653) to lift; the clamp pushing device also includes a QR code reader (654).

2. The clamp moving device as described in claim 1, characterized in that: The QR code reader (654) is mounted on the carrier plate (97).

3. The clamp moving device as described in claim 2, characterized in that: The clamp pushing device includes two hook plate lifting devices (652) and two clamp hook plates (653). The QR code reader (654) is located between the two hook plate lifting devices (652). The two clamp hook plates (653) correspond one-to-one with the two hook plate lifting devices (652). The hook plate lifting devices (652) are used to drive the corresponding clamp hook plates (653) to rise and fall.

4. The clamp moving device as described in claim 1, characterized in that: The hook plate lifting device (652) includes a hook plate driving cylinder, the cylinder body of which is mounted on the carrier plate (97), and the clamp hook plate (653) is connected to the piston rod of the hook plate driving cylinder.

5. The clamp moving device as described in claim 1, characterized in that: The power output device (98) includes a power component (91), a second driving wheel (100), a second driven wheel (101), and a second transmission belt (102). The power component (91) is used to drive the second driving wheel (100) to rotate. The second driven wheel (101) is fixed on the transmission shaft (92), and the second transmission belt (102) is wound around the second driving wheel (100) and the second driven wheel (101).

6. The clamp moving device as described in claim 5, characterized in that: The power unit (91) includes a motor, and the second drive wheel (100) is fixed on the output shaft of the motor.

7. The clamp moving device as described in claim 6, characterized in that: The central axis of the second driving wheel (100) is parallel to the central axis of the second driven wheel (101), and the second driving wheel (100) and the second driven wheel (101) are arranged sequentially in the vertical direction.

8. The clamp moving device as described in claim 7, characterized in that: The second driving wheel (100) is located above the second driven wheel (101).

9. The clamp moving device as described in claim 1, characterized in that: The central axis of the first driving wheel (94) is parallel to the central axis of the first driven wheel (95), and the first driving wheel (94) and the first driven wheel (95) in the same transmission unit (93) are arranged sequentially in the horizontal direction.

10. The clamp moving device as described in claim 1, characterized in that: The clamping device also includes a first guide rail (71) and a second guide rail (81). One end of the carrier plate (97) is provided with a first slider (72) that slides in cooperation with the first guide rail (71), and the other end of the carrier plate (97) is provided with a second slider (82) that slides in cooperation with the second guide rail (81).

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