A gas control box component cleaning device

Abstract

This utility model provides a cleaning device for gas control box components, including a base, a mounting bracket fixedly mounted on the base, a telescopic device with a piston rod inserted into the mounting bracket, a lifting assembly mounted on the piston rod, a cleaning assembly mounted on the lifting assembly, and a tray for mounting components mounted on the mounting bracket, the tray being located below the cleaning assembly. This cleaning device improves cleaning efficiency and cleanliness.

Description

Technical Field

[0001] This utility model relates to the technical field of gas control box components, and specifically to a gas control box component cleaning device. Background Technology

[0002] In semiconductor manufacturing, the Gas Box is a critical subsystem primarily used for the precise and safe management and delivery of process gases.

[0003] A disc-shaped component exists within a gas control box. It has a central annular vertical channel and radial flow channels at its lower interior, connected to the vertical channel. An upper flow channel surrounds the vertical channel, and side flow channels are located on the component's surface, connected to the upper flow channel. During production, the vertical channel, radial flow channels, side flow channels, and upper flow channel require cleaning. Currently, workers directly use hand hoses for cleaning, which is ineffective, leaving dirt residue inside the channels, making cleaning inconvenient and inefficient. Therefore, a new technical solution is urgently needed to address at least one of these technical problems. Summary of the Invention

[0004] The purpose of this invention is to provide a cleaning device for gas control box components, which can improve cleaning efficiency and cleanliness.

[0005] To achieve the above technical objectives and meet the above technical requirements, the technical solution adopted by this utility model is: a gas control box component cleaning device, characterized in that it includes a base, a mounting bracket fixedly disposed on the base, a telescopic device with a piston rod inserted into the mounting bracket, a lifting assembly disposed on the piston rod, a cleaning assembly disposed on the lifting assembly, and a tray for mounting components disposed on the mounting bracket, the tray being located below the cleaning assembly.

[0006] As a preferred technical solution, the lifting assembly includes a lifting plate fixedly disposed at the lower end of the piston rod, at least one pressure tube inserted into the lifting plate, a guide post movably inserted into the pressure tube, a connecting plate disposed at the lower end of the guide post, and an elastic member sleeved on the guide post. One end of the elastic member is connected to the pressure tube, and the other end is connected to the connecting plate.

[0007] As a preferred technical solution, the cleaning assembly includes a distribution box, a central water inlet pipe and a side water inlet pipe disposed on the lower side of the distribution box, and a water supply pipe disposed on one side of the distribution box. The central water inlet pipe and the side water inlet pipe pass through the connecting plate and are fixedly connected to the connecting plate. The central water inlet pipe and the side water inlet pipe are connected to the distribution box, and the water supply pipe is connected to the distribution box.

[0008] As a preferred technical solution, the upper side of the pallet is provided with multiple limiting rods, the outer periphery of the component is provided with multiple ear plates, the ear plates are provided with mounting holes that pass through along the axial direction, and the limiting rods can be detachably inserted into the mounting holes.

[0009] As a preferred technical solution, the mounting bracket is fixedly provided with a fixing plate, the fixing plate is provided with at least one axially penetrating guide hole, the pressure tube is movably inserted into the guide hole, and the fixing plate is located above the distribution box.

[0010] As a preferred technical solution, a plurality of bearing blocks are provided on the upper side of the pallet, and the limiting rod is disposed on the bearing blocks.

[0011] As a preferred technical solution, the water supply pipe passes through the mounting bracket.

[0012] As a preferred technical solution, the tray is circular.

[0013] As a preferred technical solution, the water supply pipe is a flexible hose.

[0014] As a preferred technical solution, the mounting bracket is inverted L-shaped.

[0015] The beneficial effects of this utility model are:

[0016] 1) The telescopic device drives the cleaning component to rise and fall through the lifting component. The pallet supports the parts. When cleaning is required, the telescopic device drives the cleaning component to fall and meet the parts, and then cleans the parts, which can improve cleaning efficiency and cleanliness.

[0017] 2) The telescopic device drives the lifting plate to realize the automatic lifting and lowering of the pressure tube. Combined with the sliding guidance function of the guide column, it simplifies the manual operation process. The buffering effect of the elastic element prevents the pressure tube from being pressed down too hard and damaging the parts and cleaning components, thus improving the safety and reliability of the cleaning process. In addition, the elastic element can make the pressure tube return to its original position without manual adjustment.

[0018] 3) The central water inlet pipe and the side water inlet pipes correspond to different flow channels, thus cleaning different flow channels;

[0019] 4) The bearing block and the limiting rod enable the components to be quickly positioned during installation through the cooperation of the mounting holes and the limiting rod, reducing manual adjustment errors;

[0020] 5) The circular support plate can avoid protruding structures of parts, reducing the overall weight;

[0021] 6) The water supply pipe passes through the mounting bracket to facilitate its secure fixing;

[0022] 7) The water supply pipe is a flexible hose, which is easy to bend and not easy to break. Attached Figure Description

[0023] Figure 1 This is a structural diagram of a cleaning device provided in one embodiment of the present invention;

[0024] Figure 2 This is a working diagram of a cleaning device provided in one embodiment of the present invention;

[0025] Figure 3 yes Figure 2 A view from another direction;

[0026] Figure 4 This is a cross-sectional view of a dispensing box provided in one embodiment of the present invention;

[0027] Figure 5 This is a structural diagram of a component provided in one embodiment of the present invention;

[0028] Figure 6 This is a perspective sectional view of a component provided in one embodiment of the present utility model;

[0029] Figure 7 This is a perspective sectional view of a component provided in one embodiment of the present invention.

[0030] exist Figures 1-7 In the middle, 1. Base; 2. Mounting bracket; 201. Fixing plate; 3. Telescopic device; 301. Piston rod; 4. Support plate; 401. Limiting rod; 402. Bearing block; 5. Lifting plate; 6. Pressure pipe; 7. Guide column; 8. Connecting plate; 9. Elastic element; 10. Distribution box; 1001. Water channel; 1002. Through hole; 11. Central water inlet pipe; 12. Side water inlet pipe; 13. Water supply pipe; 14. Central column; 15. Components; 1501. Vertical flow channel; 1502. Radial flow channel; 1503. Upper flow channel; 1504. Side flow channel; 1505. Drain hole; 1506. Central pipe; 1507. Ear plate; 1508. Mounting hole. Detailed Implementation

[0031] The present invention will now be further described with reference to the accompanying drawings.

[0032] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "head," "tail," "top," "bottom," "left," "right," "front," "rear," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0033] Please see Figures 1-7 One embodiment of this utility model provides a cleaning device for gas control box components 15, including a base 1, a mounting bracket 2 fixedly mounted on the base 1, a telescopic device 3 with a piston rod 301 inserted into the mounting bracket 2, a lifting assembly mounted on the piston rod 301, a cleaning assembly mounted on the lifting assembly, and a support plate 4 for mounting components 15 mounted on the mounting bracket 2. The support plate 4 is located below the cleaning assembly. The telescopic device 3 drives the cleaning assembly to rise and fall through the lifting assembly. The support plate 4 supports the components 15. When cleaning is required, the telescopic device 3 drives the cleaning assembly to descend and abut against the components 15, and then cleans the components 15, which can improve cleaning efficiency and cleanliness.

[0034] like Figures 1-7 As shown, the lifting assembly includes a lifting plate 5 fixedly disposed at the lower end of the piston rod 301, at least one pressure tube 6 inserted into the lifting plate 5, a guide post 7 movably inserted into the pressure tube 6, a connecting plate 8 disposed at the lower end of the guide post 7, and an elastic element 9 sleeved on the guide post 7. One end of the elastic element 9 is connected to the pressure tube 6, and the other end is connected to the connecting plate 8. The telescopic device 3 drives the lifting plate 5 to realize the automatic lifting and lowering of the pressure tube 6. With the sliding guiding function of the guide post 7, the manual operation process is simplified. The buffering effect of the elastic element 9 prevents the pressure tube 6 from pressing down too hard and damaging the parts 15 and the cleaning assembly, thereby improving the safety and reliability of the cleaning process. In addition, the elastic element 9 can make the pressure tube 6 return to its original position without manual adjustment.

[0035] Specifically, the telescopic device 3 is a telescopic air cylinder or a telescopic hydraulic cylinder, and the elastic element 9 is a spring.

[0036] like Figures 1-7As shown, the cleaning assembly includes a distribution box 10, a central water inlet pipe 11 and a side water inlet pipe 12 disposed on the lower side of the distribution box 10, and a water supply pipe 13 disposed on one side of the distribution box 10. The central water inlet pipe 11 and the side water inlet pipe 12 pass through the connecting plate 8 and are fixedly connected to the connecting plate 8. The central water inlet pipe 11 and the side water inlet pipe 12 are connected to the distribution box 10, and the water supply pipe 13 is connected to the distribution box 10. The component 15 is disc-shaped, with an annular vertical channel 1501 in its middle and radial radial flow channels 1502 in its lower part. The radial flow channels 1502 are connected to the vertical channel 1501. An upper flow channel 1503 is disposed around the vertical channel 1501. The component 15 is provided with a side flow channel 1504, which is connected to the upper flow channel 1503 through a drainage hole 1505. The inlet pipe 11 and the side inlet pipe 12 are made of rigid PVC pipes. The telescopic device 3 drives the central inlet pipe 11 and the side inlet pipe 12 to descend and abut against the component 15. In this way, the central inlet pipe 11 and the side inlet pipe 12 form a certain seal with the component 15. Then, the elastic deformation of the elastic element 9 ensures that the central inlet pipe 11 and the side inlet pipe 12 are tightly attached to the upper surface of the component 15, forming a dynamic seal. This avoids the problem of incomplete cleaning caused by liquid leakage or insufficient pressure during the cleaning process. At this time, the central inlet pipe 11 is connected to the vertical flow channel 1501, and the side inlet pipe 12 is connected to the side flow channel 1504. The distribution box 10 centrally controls the water supply path and then distributes it to the central inlet pipe 11 and the side inlet pipe 12. In this way, the vertical channel 1501, the radial flow channel 1502, the side flow channel 1504 and the upper flow channel 1503 can all be cleaned, realizing efficient and precise cleaning of complex flow channels while taking into account the ease of operation.

[0037] Specifically, such as Figures 1-7 As shown, the central water inlet pipe 11 and the side water inlet pipe 12 are connected to the distribution box 10 by means of bonding or special welding. A central pipe 1506 is coaxially arranged in the center of the vertical flow channel 1501. A central column 14 is coaxially arranged in the central water supply pipe 13. The central column 14 corresponds to the central pipe 1506 and covers the central pipe 1506. The central column 14 is fixedly connected to the distribution box 10, thus ensuring that the water flow enters the vertical flow channel 1501. The distribution box 10 is provided with corresponding arc-shaped water passage grooves 1001 or through holes 1002 corresponding to the central water inlet pipe 11 and the side water inlet pipe 12, so that the water flow enters the central water inlet pipe 11 and the side water inlet pipe 12. Alternatively, the distribution box 10 can be isolated into two cavities by a partition, which will not be described in detail here.

[0038] like Figures 1-7As shown, the upper side of the support plate 4 is provided with multiple limiting rods 401, and the outer periphery of the component 15 is provided with multiple ear plates 1507. The ear plates 1507 are provided with mounting holes 1508 that pass through along the axial direction. The limiting rods 401 can be detachably inserted into the mounting holes 1508. The diameter of the limiting rods 401 is smaller than that of the mounting holes 1508. Furthermore, the upper side of the support plate 4 is provided with multiple bearing blocks 402. The limiting rods 401 are disposed on the bearing blocks 402. The diameter of the bearing blocks 402 is larger than that of the mounting holes 1508. The bearing blocks 402 and the limiting rods 401 enable the component 15 to achieve rapid positioning during installation through the cooperation of the mounting holes 1508 and the limiting rods 401, reducing manual adjustment errors.

[0039] like Figures 1-7 As shown, the mounting bracket 2 is fixedly provided with a fixing plate 201, and the fixing plate 201 is provided with at least one axially penetrating guide hole (not shown). The pressure tube 6 is movably inserted into the guide hole. The fixing plate 201 is located above the distribution box 10. Specifically, there are two pressure tubes 6, guide holes and guide posts 7.

[0040] like Figures 1-7 As shown, the water supply pipe 13 passes through the mounting frame 2, and the water supply pipe 13 passes through the mounting frame 2 to facilitate fixing the water supply pipe 13.

[0041] like Figures 1-7 As shown, the tray 4 is circular, and the circular tray 4 can avoid the protruding structure of the component 15, thus reducing the overall weight.

[0042] like Figures 1-7 As shown, the water supply pipe 13 is a flexible hose, and the water supply pipe 13 passes through the mounting bracket 2 to facilitate fixing the water supply pipe 13.

[0043] like Figures 1-7 As shown, the mounting bracket 2 is inverted L-shaped, with a simple and practical structure and light weight.

[0044] The above embodiments are merely descriptions for clearly illustrating the present utility model, and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all implementations here, and the obvious variations or modifications derived therefrom are still within the protection scope of the present utility model.

Claims

1. A gas control box component cleaning apparatus, characterized by, The device includes a base, a mounting bracket fixedly mounted on the base, a telescopic device with a piston rod inserted into the mounting bracket, a lifting assembly mounted on the piston rod, a cleaning assembly mounted on the lifting assembly, and a tray for mounting components mounted on the mounting bracket, the tray being located below the cleaning assembly.

2. A gas control box component cleaning apparatus according to claim 1, wherein, The lifting assembly includes a lifting plate fixedly disposed at the lower end of the piston rod, at least one pressure tube inserted into the lifting plate, a guide post movably inserted into the pressure tube, a connecting plate disposed at the lower end of the guide post, and an elastic element sleeved on the guide post. One end of the elastic element is connected to the pressure tube, and the other end is connected to the connecting plate.

3. A gas control box component cleaning apparatus according to claim 2, wherein, The cleaning assembly includes a distribution box, a central water inlet pipe and a side water inlet pipe disposed on the lower side of the distribution box, and a water supply pipe disposed on one side of the distribution box. The central water inlet pipe and the side water inlet pipe pass through the connecting plate and are fixedly connected to the connecting plate. The central water inlet pipe and the side water inlet pipe are connected to the distribution box, and the water supply pipe is connected to the distribution box.

4. The gas control box component cleaning device according to claim 1, characterized in that, The upper side of the pallet is provided with multiple limiting rods, and the outer periphery of the component is provided with multiple ear plates. The ear plates are provided with mounting holes that pass through along the axial direction, and the limiting rods can be detachably inserted into the mounting holes.

5. A gas control box component cleaning device according to claim 2, characterized in that, The mounting bracket is fixedly provided with a fixing plate, the fixing plate is provided with at least one axially penetrating guide hole, the pressure tube is movably inserted into the guide hole, and the fixing plate is located above the distribution box.

6. A gas control box component cleaning device according to claim 4, characterized in that, The upper side of the pallet is provided with multiple bearing blocks, and the limiting rod is disposed on the bearing blocks.

7. A gas control box component cleaning device according to claim 3, characterized in that, The water supply pipe passes through the mounting bracket.

8. A gas control box component cleaning device according to claim 1, characterized in that, The tray is circular.

9. A gas control box component cleaning device according to claim 3, characterized in that, The water supply pipe is a flexible hose.

10. A gas control box component cleaning device according to claim 1, characterized in that, The mounting bracket is in the shape of an inverted L.

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