A water-cooled structure for a vacuum pump

Abstract

This utility model provides a water-cooled structure for a vacuum pump, comprising a pump body, a first water-cooling component, and a reinforced water-cooling component. The pump body includes an inlet and an outlet that are internally interconnected. The first water-cooling component includes a cooling pool and a first water supply pipe. Cooling water is stored in the cooling pool, and one end of the first water supply pipe is connected to the outlet, with at least a portion of the first water supply pipe submerged in the pool water. The reinforced water-cooling component includes a cooling element, a first three-way valve, a second water supply pipe, and a third water supply pipe. The first three-way valve connects to the first, second, and third water supply pipes respectively. The ends of the second and third water supply pipes furthest from the first three-way valve are both connected to the inlet. The cooling element contacts the outer wall of the second water supply pipe to cool the water flow inside the second water supply pipe. Using the water-cooled structure for the vacuum pump provided in this application, cooling can be achieved solely through the pool water when the ambient temperature is low, while further cooling of the cooling water can be achieved with the aid of a cooling element when the ambient temperature is high.

Description

Technical Field

[0001] This utility model relates to the field of equipment cooling, specifically to a water-cooled structure for a vacuum pump. Background Technology

[0002] Vacuum pumps feature an oil-free working chamber, enabling the generation of a clean vacuum. They are suitable for processes requiring an oil-free, clean vacuum environment, such as those in the semiconductor, chemical, pharmaceutical, and food industries. When high-temperature gas enters the pump body, it transfers some of its heat to the pump. Simultaneously, the pump itself continuously compresses the gas, generating a significant amount of heat, much of which is also conducted to the pump body.

[0003] Therefore, a suitable water cooling system is needed to cool the vacuum pump. Existing systems, such as the patent application number CN200810013020.7, use circulating cooling water to cool the vacuum pump casing. However, the cooling water needs to be cooled during circulation. Typically, the water-cooling pipes are immersed in a cooling tank for cooling, and the cooled water is then returned to the vacuum pump for further cooling. However, when the ambient temperature is high, simply immersing the water in a cooling tank is insufficient to lower the cooling water to the required temperature.

[0004] Therefore, how to enhance the cooling capacity of water cooling systems when the ambient temperature is high is a technical problem that urgently needs to be solved. Utility Model Content

[0005] The purpose of this invention is to overcome the above-mentioned technical deficiencies and propose a vacuum pump water-cooling structure to solve the technical problem of how to enhance the cooling capacity of the water-cooling system when the ambient temperature is high.

[0006] To achieve the above-mentioned technical objectives, the present invention adopts the following technical solution:

[0007] This utility model provides a water-cooled structure for a vacuum pump, which includes:

[0008] The pump body includes an inlet and an outlet that are internally interconnected.

[0009] A first water-cooling assembly includes a cooling pool and a first water supply pipe. The cooling pool stores cooling water, and one end of the first water supply pipe is connected to the water outlet. The first water supply pipe is at least partially submerged in the water within the cooling pool.

[0010] An enhanced water-cooling assembly includes a cooling element, a first three-way valve, a second water supply pipe, and a third water supply pipe. The first three-way valve is connected to the first water supply pipe, the second water supply pipe, and the third water supply pipe respectively. The first three-way valve has a first state of closing the third water supply pipe and connecting the first water supply pipe and the second water supply pipe, and a second state of closing the second water supply pipe and connecting the first water supply pipe and the third water supply pipe. The ends of the second water supply pipe and the third water supply pipe away from the first three-way valve are both connected to the water inlet. The cooling element contacts the outer wall of the second water supply pipe to cool the water flow inside the second water supply pipe.

[0011] In some embodiments, the refrigeration component includes a water chiller, a water-cooled circulation pipe, and a heat exchanger. The two ends of the water-cooled circulation pipe are respectively connected to the water inlet and water outlet of the water chiller, and the two ends of the heat exchanger are respectively sleeved on the outside of the third water supply pipe and the water-cooled circulation pipe.

[0012] In some embodiments, the heat exchanger includes a housing and a plurality of first heat-conducting fins. The housing has a receiving cavity, and the plurality of first heat-conducting fins are spaced apart within the housing. The third water supply pipe and the water-cooled circulation pipe both pass through the plurality of first heat-conducting fins.

[0013] In some embodiments, the first water cooling assembly further includes a first thermometer, which is installed at one end of the first water supply pipe near the first three-way valve and is used to detect the water temperature in the first water supply pipe.

[0014] In some embodiments, the enhanced water cooling assembly further includes a second thermometer installed at one end of the third water supply pipe near the inlet, which is used to detect the water temperature in the third water supply pipe.

[0015] In some embodiments, the first water pipe is arranged in a tortuous manner within the cooling pool.

[0016] In some embodiments, a plurality of second heat-conducting plates are sleeved on the outer periphery of the first water pipe.

[0017] In some embodiments, the cooling pool is provided with an inlet and an outlet at both ends.

[0018] In some embodiments, the first water-cooling assembly further includes a shut-off valve, which is installed on the first water supply pipe and controls the opening and closing of the first water supply pipe.

[0019] In some embodiments, the enhanced water cooling assembly further includes a second three-way valve, which is connected to the water inlet, the second water supply pipe and the third water supply pipe respectively.

[0020] The water-cooled structure for the vacuum pump provided by this invention has the following advantages:

[0021] The inlet is used to introduce cooling water, while the outlet is used to export cooling water. The cooling water exported from the outlet enters the first water supply pipe, which is partially submerged in the pool water within the cooling tank. This allows the pool water to cool the cooling water in the first water supply pipe. When the ambient temperature is low, cooling by the pool water alone is sufficient. In this case, the first three-way valve is switched to its first position, connecting the first and second water supply pipes. The cooling water cooled by the pool water flows back to the inlet through the second water supply pipe. When the ambient temperature is high, cooling by the pool water alone is insufficient. In this case, the first three-way valve is adjusted to its second position, connecting the first and third water supply pipes. The cooling water cooled by the pool water is then cooled again by the refrigeration components and finally exported to the inlet after two cooling cycles. Using the vacuum pump water-cooling structure provided in this application, cooling can be achieved using only the pool water in the cooling tank when the ambient temperature is low, while further cooling by the refrigeration components is possible when the ambient temperature is high. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the vacuum pump water-cooling structure provided in this embodiment of the utility model;

[0023] Explanation of reference numerals in the attached drawings: Pump body 100, Inlet 110, Outlet 120, First water-cooling assembly 200, Cooling pool 210, Inlet 211, Outlet 212, First water supply pipe 220, First thermometer 230, Second heat-conducting fin 240, Shut-off valve 250, Enhanced water-cooling assembly 300, Refrigeration component 310, Water chiller 311, Water-cooled circulation pipe 312, Heat exchanger 313, Outer shell 3131, First heat-conducting fin 3132, First three-way valve 320, Second water supply pipe 330, Third water supply pipe 340, Second thermometer 350, Second three-way valve 360. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0025] To address the technical problem of enhancing the cooling capacity of a water-cooling system when the ambient temperature is high, this utility model provides a vacuum pump water-cooling structure. The vacuum pump water-cooling structure provided in this application can cool the water in the cooling pool 210 when the ambient temperature is low, and further cool the cooling water with the help of the cooling component 310 when the ambient temperature is high.

[0026] It should be noted that the vacuum pump water cooling structure of this utility model is used for vacuum pump cooling, etc. For ease of explanation, this utility model only uses the application of the vacuum pump water cooling structure to vacuum pump cooling as an example. The principle of the vacuum pump water cooling structure applied to other types of equipment is essentially the same as the principle applied to vacuum pump cooling, and will not be described in detail here.

[0027] Please see Figure 1 , Figure 1 This is a schematic diagram of the vacuum pump water-cooling structure in one embodiment of the present invention. The vacuum pump water-cooling structure includes a pump body 100, a first water-cooling component 200, and an enhanced water-cooling component 300. The pump body 100 includes an inlet 110 and an outlet 120 that are internally connected to each other. The first water-cooling component 200 includes a cooling pool 210 and a first water supply pipe 220. Cooling water is stored in the cooling pool 210. One end of the first water supply pipe 220 is connected to the outlet 120, and the first water supply pipe 220 is at least partially submerged in the pool water in the cooling pool 210. The enhanced water-cooling assembly 300 includes a cooling element 310, a first three-way valve 320, a second water supply pipe 330, and a third water supply pipe 340. The first three-way valve 320 is connected to the first water supply pipe 220, the second water supply pipe 330, and the third water supply pipe 340 respectively. The first three-way valve 320 has a first state of closing the third water supply pipe 340 and connecting the first water supply pipe 220 and the second water supply pipe 330, and a second state of closing the second water supply pipe 330 and connecting the first water supply pipe 220 and the third water supply pipe 340. The ends of the second water supply pipe 330 and the third water supply pipe 340 away from the first three-way valve 320 are both connected to the water inlet 110. The cooling element 310 contacts the outer wall of the second water supply pipe 330 to cool the water flow inside the second water supply pipe 330.

[0028] The inlet 110 is used to introduce cooling water, while the outlet 120 is used to export cooling water. The cooling water exported from the outlet 120 enters the first water supply pipe 220, which is partially submerged in the pool water of the cooling tank 210, thus allowing the pool water to cool the cooling water in the first water supply pipe 220. When the ambient temperature is low, cooling by the pool water alone is sufficient. In this case, the first three-way valve 320 is adjusted to the first state, connecting the first water supply pipe 220 and the second water supply pipe 330. The cooling water cooled by the pool water flows back to the inlet 110 through the second water supply pipe 330. When the ambient temperature is high, cooling by the pool water alone is insufficient. In this case, the first three-way valve 320 is adjusted to the second state, connecting the first water supply pipe 220 and the third water supply pipe 340. The cooling water cooled by the pool water passes through the refrigeration unit 310 for further cooling, and finally, the cooling water that has undergone two cooling processes is introduced into the inlet 110. The vacuum pump water-cooling structure provided in this application can cool the water in the cooling pool 210 when the ambient temperature is low, and further cool the cooling water with the help of the refrigeration component 310 when the ambient temperature is high.

[0029] In some embodiments, the refrigeration component 310 includes a water chiller 311, a water-cooled circulation pipe 312, and a heat exchanger 313. The two ends of the water-cooled circulation pipe 312 are respectively connected to the inlet and outlet of the water chiller 311. The two ends of the heat exchanger 313 are respectively sleeved on the outside of the third water supply pipe 340 and the water-cooled circulation pipe 312. The water chiller 311 is a common refrigeration device. The water chiller 311 can cool the circulating water introduced at the inlet and discharge the cooled circulating water from the outlet, thereby cooling the circulating water in the water-cooled circulation pipe 312. The water-cooled circulation pipe 312 cools the third water supply pipe 340 through the heat exchanger 313, thereby cooling the cooling water in the third water supply pipe 340.

[0030] In some embodiments, the heat exchanger 313 includes a housing 3131 and a plurality of first heat-conducting fins 3132. The housing 3131 has a cavity, and the plurality of first heat-conducting fins 3132 are spaced apart within the housing 3131. The third water supply pipe 340 and the water-cooled circulation pipe 312 both pass through the plurality of first heat-conducting fins 3132. Each of the first heat-conducting fins 3132 can conduct heat, thereby accelerating the heat exchange efficiency between the third water supply pipe 340 and the water-cooled circulation pipe 312.

[0031] In some embodiments, the first water-cooling assembly 200 further includes a first thermometer 230, which is installed at one end of the first water supply pipe 220 near the first three-way valve 320. The first thermometer 230 is used to detect the water temperature within the first water supply pipe 220. If the temperature of the first water supply pipe 220 is low, cooling by the cooling component 310 is unnecessary. Conversely, if the temperature of the first water supply pipe 220 is high, cooling by the cooling component 310 is required to ensure that the cooling water temperature introduced into the inlet 110 meets the requirements.

[0032] In some embodiments, the enhanced water-cooling assembly 300 further includes a second thermometer 350, which is installed at the end of the third water supply pipe 340 near the inlet 110 and is used to detect the water temperature within the third water supply pipe 340. Since the second thermometer 350 can detect the water temperature within the third water supply pipe 340, it can determine whether the water temperature entering the inlet 110 meets the requirements. If the temperature within the third water supply pipe 340 is too high, the power of the cooling component 310 needs to be appropriately increased to lower the temperature within the third water supply pipe 340.

[0033] In some embodiments, the first water supply pipe 220 is partially tortuous within the cooling pool 210. Because the first water supply pipe 220 is tortuously positioned within the cooling pool 210, its length within the cooling pool 210 is extended, ensuring that the cooling water within the first water supply pipe 220 can fully exchange heat with the external pool water.

[0034] In some embodiments, a plurality of second heat-conducting plates 240 are provided around the outer periphery of the first water supply pipe 220. The heat exchange efficiency between the first water supply pipe 220 and the pool water can be improved by utilizing each second heat-conducting plate 240, thereby enabling the cooling water in the first water supply pipe 220 to cool down rapidly.

[0035] In some embodiments, the cooling pool 210 has an inlet 211 and an outlet 212 at both ends. Pool water is introduced into the cooling pool 210 through the inlet 211 and then discharged from the cooling pool 210 through the outlet 212. The pool water temperature in the cooling pool 210 is prevented from becoming too high by replacing the pool water.

[0036] In some embodiments, the first water-cooling assembly 200 further includes a shut-off valve 250, which is installed in the first water supply pipe 220 and controls the opening and closing of the first water supply pipe 220. If the ambient temperature is low enough, there is no need to use the first water-cooling assembly 200 and the enhanced water-cooling assembly 300 for cooling. In this case, the shut-off valve 250 is used to block the first water supply pipe 220, thereby stopping the use of the first water-cooling assembly 200 and the enhanced water-cooling assembly 300.

[0037] In some embodiments, the enhanced water-cooling assembly 300 further includes a second three-way valve 360, which is connected to the water inlet 110, the second water supply pipe 330, and the third water supply pipe 340, respectively. This allows the second water supply pipe 330 and the third water supply pipe 340 to be connected to the water inlet 110 via the second three-way valve 360.

[0038] To better understand this utility model, the following is combined with... Figure 1 The technical solution of this utility model is described in detail below:

[0039] The inlet 110 is used to introduce cooling water, while the outlet 120 is used to discharge cooling water. The cooling water discharged from the outlet 120 enters the first water supply pipe 220, which is partially submerged in the pool water in the cooling tank 210. The pool water can then be used to cool the cooling water in the first water supply pipe 220. When the ambient temperature is low, cooling by the pool water alone is sufficient. In this case, the first three-way valve 320 connects the first water supply pipe 220 and the second water supply pipe 330. The cooling water cooled by the pool water flows back to the inlet 110 through the second water supply pipe 330. When the ambient temperature is high, cooling by pool water alone is insufficient to meet the demand. In this case, the first three-way valve 320 connects the first water supply pipe 220 and the third water supply pipe 340. The water chiller 311 cools the circulating water introduced at the inlet and discharges the cooled circulating water from the outlet, thereby cooling the circulating water in the water-cooled circulation pipe 312. The water-cooled circulation pipe 312 then cools the third water supply pipe 340 through the heat exchanger 313, thus cooling the cooling water in the third water supply pipe 340. Using the vacuum pump water-cooling structure provided in this application, cooling can be achieved by relying solely on the pool water in the cooling pool 210 when the ambient temperature is low, while the cooling water can be further cooled by the cooling component 310 when the ambient temperature is high.

[0040] In the description of this application, it should be noted that the terms "upper" and "lower," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0041] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0042] The specific embodiments of this utility model described above do not constitute a limitation on the scope of protection of this utility model. Any other corresponding changes and modifications made based on the technical concept of this utility model should be included within the scope of protection of the claims of this utility model.

Claims

1. A water-cooled structure for a vacuum pump, characterized in that, include: The pump body includes an inlet and an outlet that are internally interconnected. The first water-cooling component includes a cooling pool and a first water supply pipe. The cooling pool stores cooling water, and one end of the first water supply pipe is connected to the water outlet. The first water supply pipe is at least partially submerged in the pool water in the cooling pool. as well as An enhanced water-cooling assembly includes a cooling element, a first three-way valve, a second water supply pipe, and a third water supply pipe. The first three-way valve is connected to the first water supply pipe, the second water supply pipe, and the third water supply pipe respectively. The first three-way valve has a first state of closing the third water supply pipe and connecting the first water supply pipe and the second water supply pipe, and a second state of closing the second water supply pipe and connecting the first water supply pipe and the third water supply pipe. The ends of the second water supply pipe and the third water supply pipe away from the first three-way valve are both connected to the water inlet. The cooling element contacts the outer wall of the second water supply pipe to cool the water flow inside the second water supply pipe.

2. The vacuum pump water-cooling structure according to claim 1, characterized in that, The refrigeration component includes a water chiller, a water-cooled circulation pipe, and a heat exchanger. The two ends of the water-cooled circulation pipe are respectively connected to the water inlet and water outlet of the water chiller. The two ends of the heat exchanger are respectively sleeved on the outside of the third water supply pipe and the water-cooled circulation pipe.

3. The vacuum pump water-cooling structure according to claim 2, characterized in that, The heat exchanger includes a shell and a plurality of first heat-conducting fins. The shell has a cavity, and the plurality of first heat-conducting fins are spaced apart inside the shell. The third water supply pipe and the water-cooled circulation pipe both pass through the plurality of first heat-conducting fins.

4. The vacuum pump water-cooling structure according to claim 1, characterized in that, The first water cooling component also includes a first thermometer, which is installed at one end of the first water supply pipe near the first three-way valve and is used to detect the water temperature in the first water supply pipe.

5. The vacuum pump water-cooling structure according to claim 4, characterized in that, The enhanced water cooling assembly also includes a second thermometer, which is installed at one end of the third water supply pipe near the inlet and is used to detect the water temperature in the third water supply pipe.

6. The vacuum pump water-cooling structure according to claim 1, characterized in that, The first water pipe is arranged in a tortuous manner within the cooling pool.

7. The water-cooled structure for a vacuum pump according to claim 6, characterized in that, The first water pipe is fitted with several second heat-conducting plates on its outer periphery.

8. The vacuum pump water-cooling structure according to claim 1, characterized in that, The cooling pool has an inlet and an outlet at each end.

9. The water-cooled structure of the vacuum pump according to claim 1, characterized in that, The first water-cooling component also includes a shut-off valve, which is installed on the first water supply pipe and controls the opening and closing of the first water supply pipe.

10. The water-cooled structure of the vacuum pump according to claim 1, characterized in that, The enhanced water-cooling assembly also includes a second three-way valve, which is connected to the water inlet, the second water supply pipe and the third water supply pipe respectively.

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