A semiconductor heat exchange system delivery pipe

Abstract

This utility model relates to the field of pipelines, specifically a semiconductor heat exchange system conveying pipeline, including a conveying pipeline a, a connecting rod, a threaded hole, a fixing structure, a fixing ring, a spring, and a limiting ring. The utility model features a set of connecting rings connected to the conveying pipeline a, with the size of the connecting rings matching the limiting ring. When it is necessary to disassemble the conveying pipeline a or the conveying pipeline b, simply twist the fixing plate. The connecting rod, driven by the fixing plate, will release the fixing of the first and second sealing rings and the conveying pipeline b. The fixing cylinder threaded onto the connecting rod will also be released. After unscrewing the connecting rod, the fixing structure can be removed to replace the conveying pipeline a or the conveying pipeline b. This allows for quick disassembly and replacement of the conveying pipeline a or the conveying pipeline b, improving work efficiency and reducing unnecessary losses.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor heat exchange, and in particular to a semiconductor heat exchange system delivery pipe. Background Technology

[0002] Semiconductor heat exchange pipelines are an indispensable part of the semiconductor industry. They are used to transport gases and liquids, as well as handle chemicals and wastewater during semiconductor manufacturing. These pipelines must be highly pure and corrosion-resistant to ensure the quality and efficiency of the semiconductor manufacturing process.

[0003] While traditional semiconductor heat exchanger pipelines can transport both gas and liquid, the pipelines used inside equipment for manufacturing semiconductor components need to be redirected. This requires connecting two pipelines, which are often welded together. If one of the pipelines is damaged after welding, the entire pipeline needs to be replaced. This not only affects the production efficiency of semiconductor components but also increases production costs. Utility Model Content

[0004] In order to solve the problems existing in the background art, the present invention provides a semiconductor heat exchange conveying pipe that is easy to disassemble and replace and has good sealing performance.

[0005] To address the problems in the prior art, this utility model provides a semiconductor heat exchange system delivery pipe, including a delivery pipe a, multiple sets of connecting rods threadedly connected inside the delivery pipe a, each connecting rod having a thread extending half its total length from top to bottom, and threaded holes formed inside the delivery pipe a, a fixing structure threadedly connected to the connecting rods, the fixing structure including a fixing ring, a spring, and a limiting ring, the fixing ring being installed at the connection between the delivery pipe a and the delivery pipe b, one end of the spring being fixedly connected to the inside of the fixing ring, and the outer wall of the limiting ring being fixedly connected to the other end of the spring, with a gap between the limiting ring and the connecting ring.

[0006] Specifically, a set of connecting rings is fixedly connected to one end of the conveying pipe a, a set of fixed cylinders is fixedly installed at one end of the connecting rings, a set of limiting rings exists between the connecting rings and the fixed cylinders, and multiple sets of threaded holes are opened on both the connecting rings and the fixed cylinders.

[0007] Specifically, a set of sealing structures is fixedly installed at one end of the fixed cylinder. The sealing structure includes a first sealing ring, a connecting block, a rubber ring, a second sealing ring, a snap-fit ​​groove, and a circular groove. One side of the first sealing ring is fixedly connected to one side of the fixed cylinder. Multiple sets of connecting blocks are fixedly installed on the first sealing ring. The two sides of the connecting blocks are streamlined. A set of rubber rings is fixedly connected to the first sealing ring. The multiple sets of connecting blocks are located on the periphery of the rubber rings. Multiple sets of threaded holes are opened on the first sealing ring.

[0008] Specifically, the connecting block and the snap-fit ​​groove are engaged and connected. The snap-fit ​​groove is fixedly opened on the second sealing ring. The second sealing ring is provided with a set of circular grooves. The circular grooves and the rubber ring are engaged and connected. The second sealing ring is provided with multiple sets of threaded holes.

[0009] Specifically, one side of the second sealing ring is fixedly connected to one side of the conveying pipe b, and the conveying pipe b also has multiple sets of threaded holes. The inside of the conveying pipe b is threadedly connected to the top of the connecting rod. A set of fixing discs is fixedly installed at the bottom of the connecting rod. There is a gap between the fixing discs and the bottom of the conveying pipe a. The connecting rod is threadedly connected to the first sealing ring and the second sealing ring.

[0010] The beneficial effects of this utility model are as follows: A semiconductor heat exchange system conveying pipe of this utility model has a set of connecting rings connected to conveying pipe a. The size of the connecting rings and the limiting rings are mutually compatible. When it is necessary to disassemble conveying pipe a or conveying pipe b, simply twist the fixing plate. At this time, the connecting rod will be driven by the fixing plate to release the fixing of the first sealing ring, the second sealing ring, and conveying pipe b. The fixing cylinder threaded onto the connecting rod is also released. After unscrewing the connecting rod, the fixing structure can be removed to replace conveying pipe a or conveying pipe b. This allows for quick disassembly and replacement of conveying pipe a or conveying pipe b, improving work efficiency and reducing unnecessary losses. Attached Figure Description

[0011] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0013] Figure 2 This is an exploded view of the connection structure of the first sealing ring, the second sealing ring, and other parts in this utility model.

[0014] Figure 3 This is a front view of the first and second sealing rings in this utility model;

[0015] Figure 4This is an exploded view of the connection structure of the fixing ring and spring in this utility model;

[0016] Figure 5 for Figure 2 Enlarged view of point A in the middle;

[0017] Figure 6 for Figure 4 Enlarged view of section B in the middle.

[0018] In the diagram: 1. Conveying pipe a; 110. Conveying pipe b; 111. Fixed plate; 112. Connecting rod; 113. Threaded hole; 114. Connecting ring; 115. Fixed cylinder; 2. Sealing structure; 210. First sealing ring; 211. Connecting block; 212. Rubber ring; 213. Second sealing ring; 214. Snap-fit ​​groove; 215. Circular groove; 3. Fixing structure; 310. Fixed ring; 311. Spring; 312. Limiting ring. Detailed Implementation

[0019] To make the technical methods, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0020] like Figure 1-6 The diagram illustrates a semiconductor heat exchange system delivery pipeline, comprising a delivery pipeline a1, with multiple sets of connecting rods 112 threadedly connected inside the delivery pipeline a1. Each connecting rod 112 has a thread extending half its total length from top to bottom, and a threaded hole 113 is formed inside the delivery pipeline a1. A fixing structure 3 is threadedly connected to the connecting rods 112. The fixing structure 3 includes a fixing ring 310, a spring 311, and a limiting ring 312. The fixing ring 310 is installed at the connection between the delivery pipeline a1 and the delivery pipeline b110. One end of the spring 311 is fixedly connected to the inside of the fixing ring 310, and the outer wall of the limiting ring 312 is fixedly connected to the other end of the spring 311, with a gap between the limiting ring 312 and the connecting ring 114. This allows for quick disassembly and replacement of either the delivery pipeline a1 or the delivery pipeline b110, improving work efficiency and reducing unnecessary losses.

[0021] Preferably, a set of connecting rings 114 are fixedly connected to one end of the conveying pipe a1, and a set of fixing cylinders 115 are fixedly installed at one end of the connecting rings 114 and the fixing cylinders 115. A set of limiting rings 312 exists between the connecting rings 114 and the fixing cylinders 115. Multiple sets of threaded holes 113 are provided on both the connecting rings 114 and the fixing cylinders 115. A set of sealing structures 2 are fixedly installed at one end of the fixing cylinders 115. The sealing structure 2 includes a first sealing ring 210, a connecting block 211, a rubber ring 212, and a second sealing ring. The first sealing ring 210 has a ring 213, a snap-fit ​​groove 214, and a circular groove 215. One side of the first sealing ring 210 is fixedly connected to one side of the fixed cylinder 115. Multiple sets of connecting blocks 211 are fixedly installed on the first sealing ring 210. The two sides of the connecting blocks 211 are streamlined. A set of rubber rings 212 are fixedly connected to the first sealing ring 210. The multiple sets of connecting blocks 211 are located on the periphery of the rubber rings 212. Multiple sets of threaded holes 113 are opened on the first sealing ring 210, which effectively improves the overall sealing performance of the equipment.

[0022] Preferably, the connecting block 211 and the snap-fit ​​groove 214 are snap-fit ​​connected. The snap-fit ​​groove 214 is fixedly opened on the second sealing ring 213. The second sealing ring 213 is provided with a set of circular grooves 215. The circular grooves 215 and the rubber ring 212 are snap-fit ​​connected. The second sealing ring 213 is provided with multiple sets of threaded holes 113. One side of the second sealing ring 213 is fixedly connected to one side of the conveying pipe b110. The conveying pipe b110 is also provided with multiple sets of threaded holes 113. The inside of the conveying pipe b110 is threadedly connected to the top of the connecting rod 112. A set of fixing discs 111 is fixedly installed at the bottom of the connecting rod 112. There is a gap between the fixing discs 111 and the bottom of the conveying pipe a1. The connecting rod 112 is threadedly connected to the first sealing ring 210 and the second sealing ring 213.

[0023] (1) This utility model has a set of connecting rings 114 connected to the conveying pipe a1, and the size of the connecting rings 114 and the limiting rings 312 are compatible. When it is necessary to disassemble the conveying pipe a1 or the conveying pipe b110, it is only necessary to turn the fixing plate 111. At this time, the connecting rod 112 will be driven by the fixing plate 111 to cancel the fixing of the first sealing ring 210, the second sealing ring 213 and the conveying pipe b110. The fixing cylinder 115 threaded on the connecting rod 112 is also canceled. After the connecting rod 112 is unscrewed, the fixing structure 3 can be removed to replace the conveying pipe a1 or the conveying pipe b110. The conveying pipe a1 or the conveying pipe b110 can be quickly disassembled and replaced, which improves work efficiency and reduces unnecessary losses.

[0024] (2) A set of first sealing rings 210 are fixedly connected to one end of the fixed cylinder 115. Multiple sets of connecting blocks 211 and a set of rubber rings 212 are fixedly installed on the first sealing rings 210. Each set of connecting blocks 211 corresponds to a set of snap-fit ​​grooves 214 and they are snap-fitted together. The rubber rings 212 and the circular grooves 215 are adapted to each other. Threaded holes 113 are opened on the first sealing rings 210 and the second sealing rings 213. They are not only snap-fitted together, but also fixed and limited by the connecting rods 112, which effectively improves the overall sealing performance of the equipment.

[0025] Working principle: This utility model has a set of connecting rings 114 connected to the conveying pipe a1, and the size of the connecting rings 114 is compatible with the limiting ring 312. When it is necessary to disassemble the conveying pipe a1 or the conveying pipe b110, simply turn the fixing plate 111. At this time, the connecting rod 112 will be driven by the fixing plate 111 to release the fixation of the first sealing ring 210, the second sealing ring 213, and the conveying pipe b110. The fixing cylinder 115 threaded to the connecting rod 112 is also released. After unscrewing the connecting rod 112, the fixing structure 3 can be removed to replace the conveying pipe a1 or the conveying pipe b110, which can quickly replace the pipe. Disassembling and replacing conveying pipe a1 or conveying pipe b110 improves work efficiency and reduces unnecessary losses. A set of first sealing rings 210 is fixedly connected to one end of the fixed cylinder 115. Multiple sets of connecting blocks 211 and a set of rubber rings 212 are fixedly installed on the first sealing rings 210. Each set of connecting blocks 211 corresponds to a set of snap-fit ​​grooves 214 and they are snap-fitted together. The rubber rings 212 and the circular grooves 215 are compatible with each other. Threaded holes 113 are opened on the first sealing rings 210 and the second sealing rings 213. They are not only snap-fitted together, but also fixed and limited by the connecting rods 112, which effectively improves the overall sealing performance of the equipment.

[0026] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The descriptions of the above embodiments and specifications are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of protection claimed by this utility model. Scope of Protection of this Utility Model.

Claims

1. A conveying pipe for a semiconductor heat exchange system, characterized in that: Including the transport pipeline a(1); Connecting rod (112), multiple sets of the connecting rod (112) are threaded inside the conveying pipe a (1), and the connecting rod (112) has a thread from top to bottom for half the total length; A threaded hole (113) is formed inside the conveying pipe a (1); A fixing structure (3) is threadedly connected to a connecting rod (112). The fixing structure (3) includes a fixing ring (310), a spring (311), and a limiting ring (312). A retaining ring (310) is installed at the connection between the conveying pipe a (1) and the conveying pipe b (110); A spring (311), one end of which is fixedly connected to the inside of a retaining ring (310); The limiting ring (312) is fixedly connected to the other end of the spring (311) on its outer wall, and there is a gap between the limiting ring (312) and the connecting ring (114).

2. A semiconductor heat exchange system delivery conduit as claimed in claim 1, wherein: One end of the conveying pipe a (1) is fixedly connected to a set of connecting rings (114), and one end of the connecting rings (114) is fixedly installed with a set of fixing cylinders (115). There is a set of limiting rings (312) between the connecting rings (114) and the fixing cylinders (115). Multiple sets of threaded holes (113) are opened on both the connecting rings (114) and the fixing cylinders (115).

3. A semiconductor heat exchange system delivery conduit as claimed in claim 2, wherein: A set of sealing structures (2) is fixedly installed at one end of the fixed cylinder (115). The sealing structure (2) includes a first sealing ring (210), a connecting block (211), a rubber ring (212), a second sealing ring (213), a snap-fit ​​groove (214), and a circular groove (215). One side of the first sealing ring (210) is fixedly connected to one side of the fixed cylinder (115).

4. A semiconductor heat exchange system delivery conduit as claimed in claim 3, wherein: Multiple sets of connecting blocks (211) are fixedly installed on the first sealing ring (210). The two sides of the connecting blocks (211) are streamlined. A set of rubber rings (212) is fixedly connected to the first sealing ring (210). The multiple sets of connecting blocks (211) are located on the periphery of the rubber rings (212). Multiple sets of threaded holes (113) are opened on the first sealing ring (210).

5. A semiconductor heat exchange system delivery conduit as claimed in claim 4, wherein: The connecting block (211) and the snap-fit ​​groove (214) are engaged and connected. The snap-fit ​​groove (214) is fixedly opened on the second sealing ring (213). The second sealing ring (213) is provided with a set of circular grooves (215). The circular grooves (215) and the rubber ring (212) are engaged and connected. The second sealing ring (213) is provided with multiple sets of threaded holes (113).

6. A semiconductor heat exchange system delivery conduit as claimed in claim 5, wherein: One side of the second sealing ring (213) is fixedly connected to one side of the conveying pipe b (110), and multiple sets of threaded holes (113) are also opened on the conveying pipe b (110). The inside of the conveying pipe b (110) is threadedly connected to the top of the connecting rod (112).

7. A semiconductor heat exchange system delivery conduit as claimed in claim 6, wherein: A set of fixing discs (111) are fixedly installed at the bottom of the connecting rod (112). There is a gap between the fixing discs (111) and the bottom of the conveying pipe a (1). The connecting rod (112) is threadedly connected to the first sealing ring (210) and the second sealing ring (213).

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