A measuring device

Abstract

A measuring device includes a base, a first driving component, a second driving component, a first laser head and a second laser head opposite each other along the Z-axis, a movable support mounted on the base, a calibration component, and a third driving component. The third driving component drives the movable support to move. The calibration component is located between the first and second laser heads along the Z-axis and is used to calibrate the coaxiality of the two laser heads. The first driving component is mounted on the movable support and drives the first laser head to move along the X-axis. The second driving component is mounted on the movable support and drives the second laser head to move along the Y-axis. By integrating the calibration component into the measuring device, and using the first and second driving components to drive the corresponding laser heads to move, the coaxiality of the two laser heads can be calibrated automatically and in a timely manner, maintaining coaxiality during the measurement phase. This effectively improves the device's anti-interference capability, ensures normal operation, and enhances measurement efficiency.

Description

Technical Field

[0001] This application relates to the field of detection technology, specifically to a measuring device. Background Technology

[0002] Taking lithium batteries as an example, the thickness of lithium batteries needs to be measured during the production process. The accuracy and reliability of the measurement results have a crucial impact on the quality and safety of lithium batteries. Laser thickness measurement equipment typically uses a triangulation method with upper and lower lasers facing each other to measure the thickness of the object being measured. This method requires a high degree of coaxiality between the upper and lower lasers. Therefore, during the initial setup of the equipment, a coaxiality calibration device is usually used to manually calibrate the coaxiality of the upper and lower lasers. However, due to factors such as temperature changes, humidity changes, and mechanical vibration, the coaxiality of the upper and lower lasers is often difficult to maintain. This not only requires a significant amount of time and effort to recalibrate the coaxiality but also affects the measurement efficiency of the equipment. Utility Model Content

[0003] The main technical problem addressed by this application is to provide a measuring device that can automatically calibrate coaxiality in a timely manner.

[0004] One embodiment provides a measuring device, including:

[0005] Base;

[0006] The movable bracket is slidably connected to the base;

[0007] A first driving element and a first laser head; the first driving element is disposed on the movable bracket and is used to drive the first laser head to move relative to the movable bracket along the X-axis direction;

[0008] A second driving member and a second laser head, the second laser head being opposite to the first laser head along the Z-axis; the second driving member being disposed on the movable bracket and used to drive the second laser head to move relative to the movable bracket along the Y-axis.

[0009] A calibration component is disposed on the base; the calibration component is located between the first laser head and the second laser head in the Z-axis direction, and is used to calibrate the coaxiality of the first laser head and the second laser head; and

[0010] A third driving component is disposed on the base; the third driving component is used to drive the movable support to move.

[0011] In one embodiment, the measuring device further includes a control device electrically connected to the first driving element, the second driving element, the first laser head, and the second laser head; the control device is capable of controlling the first driving element and / or the second driving element based on information acquired by the first laser head and the second laser head.

[0012] In one embodiment, the control device includes an industrial computer, the first driving component includes a first electric slide connected to the first laser head, and the second driving component includes a second electric slide connected to the second laser head.

[0013] In one embodiment, the measuring device further includes a first support, and the calibration assembly includes a first mounting base and a first calibration plate, a second calibration plate, a third calibration plate, and a fourth calibration plate disposed on the first mounting base; wherein:

[0014] The first calibration plate is deflected by α±1 degrees relative to the XY plane around the X-axis, the second calibration plate is deflected by -α±1 degrees relative to the XY plane around the X-axis, the third calibration plate is deflected by β±1 degrees relative to the XY plane around the Y-axis, and the fourth calibration plate is deflected by -β±1 degrees relative to the XY plane around the Y-axis.

[0015] The first bracket is connected between the first fixing base and the base, positioning the calibration component in a position that avoids the first laser head and the second laser head.

[0016] In one embodiment, the calibration assembly further includes a fifth calibration plate disposed on the first fixture, the fifth calibration plate being parallel to the XY axis plane.

[0017] In one embodiment, the measuring device further includes an air-bearing guide rail and an air-bearing slider. The air-bearing guide rail is disposed on the base, and the air-bearing slider is disposed on the air-bearing guide rail. The movable bracket is connected to the air-bearing slider. The power end of the third driving member is coupled to the air-bearing slider to drive the air-bearing slider to move the movable bracket along the air-bearing guide rail.

[0018] Alternatively, the measuring device may also include a transmission screw and a sliding guide rail and a guide slider, wherein the guide rail is disposed on the base, the movable bracket is connected to the guide slider, and the transmission screw is screwed to the guide slider; the power end of the third driving member is coupled to the transmission screw to drive the transmission screw to rotate, thereby causing the guide slider to drive the movable bracket to move along the guide rail.

[0019] In one embodiment, the movable support is an open annular structure, with the first laser head and the second laser head arranged opposite each other at both ends of the movable support; or the movable support is a closed annular structure, with the first laser head and the second laser head arranged opposite each other on both sides of the hollow region of the movable support.

[0020] In one embodiment, the measuring device further includes a calibration component disposed on the base; the calibration component is used to cooperate with the first laser head and the second laser head to calibrate the measurement information of the measuring device.

[0021] In one embodiment, the measuring device further includes a second bracket, and the calibration component includes a second fixed base and a calibration plate, the calibration plate being disposed on the second fixed base; the second bracket is connected between the second fixed base and the base, positioning the calibration component at a position that can avoid the first laser head and the second laser head.

[0022] In one embodiment, the verification component and the calibration component are arranged along the moving direction of the movable support.

[0023] The measuring device according to the above embodiment includes a base, a first driving member, a second driving member, a first laser head and a second laser head opposite each other along the Z-axis, a movable support disposed on the base, a calibration component, and a third driving member. The third driving member drives the movable support to move. The calibration component is located between the first and second laser heads along the Z-axis and is used to calibrate the coaxiality of the two laser heads. The first driving member is disposed on the movable support and drives the first laser head to move along the X-axis. The second driving member is disposed on the movable support and drives the second laser head to move along the Y-axis. By integrating the calibration component into the measuring device, and using the first and second driving members to drive the corresponding laser heads to move, the coaxiality of the two laser heads can be calibrated automatically and in a timely manner, maintaining coaxiality during the measurement phase. This effectively improves the device's anti-interference capability, ensures normal operation, and enhances measurement efficiency. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the planar structure of a measuring device according to one embodiment.

[0025] Figure 2 This is a three-dimensional structural schematic diagram of a measuring device according to one embodiment.

[0026] Figure 3 This is a partial structural schematic diagram of a measuring device according to one embodiment.

[0027] Figure 4 This is a schematic diagram of the system architecture of a measuring device according to one embodiment.

[0028] Figure 5 This is a three-dimensional structural diagram of a calibration component in a measuring device according to one embodiment.

[0029] Figure 6 This is a schematic diagram of the planar structure of a calibration component in a measuring device according to one embodiment.

[0030] Figure 7 This is a schematic diagram of the structure of a calibration component in a measurement device according to one embodiment.

[0031] In the picture:

[0032] 10. Load-bearing component; 11. Base; 12. Movable bracket; 13. Third drive component; 14. Transmission screw; 15. Guide rail; 16. Guide slider; 17. First bracket; 18. Second bracket;

[0033] 20. Measuring assembly; 21. First laser head; 22. Second laser head; 23. First driving component; 24. Second driving component;

[0034] 30. Calibration assembly; 31. First calibration piece; 32. Second calibration piece; 33. Third calibration piece; 34. Fourth calibration piece; 35. Fifth calibration piece; 36. First mounting base;

[0035] 40. Control device; 50. Verification component; 51. Second mounting base; 52. Verification plate. Detailed Implementation

[0036] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0037] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0038] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0039] Please see Figures 1 to 7 The present application provides a measuring device that can be used to measure the thickness of products with high precision requirements, such as lithium battery electrodes, metal foils, films, and tapes. The measuring device includes a carrier component 10, a measuring component 20, a calibration component 30, and other functional components (such as a control device 40) as needed. The measuring component 20 includes a first laser head 21 and a second laser head 22 arranged opposite to each other.

[0040] To describe the measuring device more clearly and in detail, the arrangement direction of the first laser head 21 and the second laser head 22 is defined as the Z-axis direction in this paper, that is, the first laser head 21 and the second laser head 22 are arranged relative to each other along the Z-axis direction. At the same time, the X-axis direction and the Y-axis direction are also defined in this paper. In some scenarios, the X-axis direction, the Y-axis direction and the Z-axis direction can form a spatial rectangular coordinate system with the measuring device as the reference.

[0041] The following mainly refers to the Z-axis direction. Figures 1 to 3 The vertical or up-down direction and the X-axis direction of the measuring device shown refer to... Figures 1 to 3 The front-back direction and Y-axis direction of the measuring device shown refer to Figures 1 to 3 Taking the left and right directions of the measuring device as an example, the structural architecture and working principle of the measuring device are explained.

[0042] However, it should be noted that, depending on the design of the measuring equipment's structural layout and application scenarios, the Z-axis direction can also be other directions. For example, when the first laser head 21 and the second laser head 22 are arranged opposite each other in the horizontal direction, the Z-axis direction can be the front-back direction, the left-right direction, etc.; in this case, the X-axis direction and the Y-axis direction are the corresponding directions.

[0043] Please see Figures 1 to 3The supporting component 10 includes a base 11, a movable support 12, and a third driving component 13; wherein, the movable support 12 is slidably connected to the first base 11, and a linear sliding connection is established between the movable support 12 and the base 11, for example, through a guide component such as a linear module; the third driving component 13 is disposed on the base 11 and connected to the movable support 12, and the third driving component 13 may be a power device or a collection of related components capable of driving the movable support 12 to move (e.g., linear reciprocating movement).

[0044] The measuring component 20 is mounted on the movable support 12. For example, please refer to... Figures 1 to 3 The movable support 12 adopts an open annular structure, such as a C-shaped frame or a U-shaped frame. The first laser head 21 and the second laser head 22 are arranged opposite each other at both ends of the movable support 12 along the Z-axis direction (it can be understood that these two ends form an opening in the movable support 12, and the opening communicates with the hollow area of ​​the movable support 12). Alternatively, the movable support 12 may adopt a closed annular structure, such as an O-shaped frame, with the first laser head 21 and the second laser head 22 arranged opposite each other on both sides of the hollow area of ​​the movable support 12 along the Z-axis direction.

[0045] The third driving component 13 drives the moving bracket 12 to move, so that the measuring component 20 (specifically, the first laser head 21 and the second laser head 22) moves synchronously with the moving bracket 12, so as to complete the scanning measurement of the object under test (e.g., lithium battery electrode) through the first laser head 21 and the second laser head 22, thereby obtaining the thickness information of the object under test.

[0046] For example, please combine Figure 4 The first laser head 21, the second laser head 22, and the third driving component 13 are electrically connected to the control device 40. The moving bracket 12 is slidably connected to the base 11 along the Y-axis direction, while the object to be measured passes through the hollow area of ​​the moving bracket 12 along the X-axis direction. During the scanning measurement, when the control device 40 controls the third driving component 13 to drive the moving bracket 12 to move linearly back and forth along the Y-axis direction, the first laser head 21 and the second laser head 22 can scan and measure the object to be measured. The control device 40 can obtain the thickness information of the object to be measured based on the information obtained by the first laser head 21 and the second laser head 22, and finally realize the thickness measurement of the object to be measured.

[0047] In some embodiments, please refer to Figure 1 and Figure 3 The measurement component 20 also includes a first driving member 23 and a second driving member 24. The first driving member 23 and the second driving member 24 are mainly used to adjust the relative position between the first laser head 21 and the second laser head 22, so as to calibrate the coaxiality of the first laser head 21 and the second laser head 22 in cooperation with the calibration component 30.

[0048] Specifically, the first driving component 23 is disposed on the movable bracket 12 and connected to the first laser head 21, for example, the first driving component 23 is connected between the movable bracket 12 and the first laser head 21; the second driving component 24 is disposed on the movable bracket 12 and connected to the second laser head 22, for example, the second driving component 24 is connected between the movable bracket 12 and the second laser head 22; wherein, the first driving component 23 and the second driving component 24 may be a power device or a collection of related components electrically connected to the control device 40; the first driving component 23 can drive the first laser head 21 to move relative to the movable bracket 12 along the X-axis direction under the control of the control device 40; the second driving component 24 can drive the second laser head 22 to move relative to the movable bracket 12 along the Y-axis direction under the control of the control device 40.

[0049] The calibration component 30 is disposed on the base 11 and located between the first laser head 21 and the second laser head 22 in the Z-axis direction; for example, the moving bracket 12 adopts an open ring structure, and the calibration component 30 is arranged on one side close to the opening end of the moving bracket 12 along the moving direction of the moving bracket 12; or, for example, the moving bracket 12 adopts a closed ring structure, and the calibration component 30 is arranged across the hollow area of ​​the moving bracket 12 along the moving direction perpendicular to the moving direction of the moving bracket 12.

[0050] When the moving support 12 carrying the measuring component 20 moves to a position where the first laser head 21 and the second laser head 22 are located on both sides of the calibration component 30, the calibration component 30 can be measured by the first laser head 21 and the second laser head 22 to obtain calibration information about coaxiality. The control device 40 can then control at least one of the first driving member 23 and the second driving member 24 to output movement according to the calibration information, so as to adjust or correct the relative position of the first laser head 21 and the second laser head 22, thereby calibrating or correcting the coaxiality between the first laser head 21 and the second laser head 22.

[0051] It is understandable that after coaxiality calibration or correction, the optical axis of the laser beam emitted by the first laser head 21 and the optical axis of the laser beam emitted by the second laser head 22 are usually located on the same Z-axis.

[0052] Based on this, by integrating the calibration component 30 into the structural system of the measuring device, and by using the first driving component 23 and the second driving component 24 to drive the first laser head 21 and the second laser head 22 to move respectively, the measuring device can be endowed with functions such as automatic scanning measurement, automatic calibration or correction of coaxiality. During the measurement operation phase, by timely and automatically calibrating or correcting the coaxiality of the two laser heads, it can be protected from the influence of factors such as temperature and humidity changes and mechanical vibration, so that the two laser heads can always maintain a high degree of coaxiality, thereby effectively improving the anti-interference ability of the measuring device and ensuring the accuracy and reliability of the measurement results. At the same time, without interrupting the scanning measurement process of the measuring device, the calibration and correction of the coaxiality of the laser heads also helps to improve the measurement efficiency of the device.

[0053] It should be noted that the control device 40 can be understood as a collection of related devices that manage and regulate the relevant functional components of the measuring equipment; for example, the control device 40 may include an industrial computer (i.e., an industrial control computer). By utilizing the data processing, information communication, and centralized monitoring features of the industrial computer, it can not only accurately regulate the relevant functional components, but also effectively analyze the relevant measurement data to ensure the accuracy and reliability of the measurement results.

[0054] The description of the control device 40 in this document is only for the purpose of understanding the structure and working principle of the measuring device, and does not mean that the control device 40 is necessarily a component of the measuring device. That is to say, in some embodiments, the control device 40 may be a component of the measuring device; in other embodiments, the control device 40 is not a component of the measuring device, but a functional component used in conjunction with the measuring device. For example, when the measuring device is used, the control device 40 is electrically connected to the laser head, drive components, etc. of the measuring device to realize the management and control of the relevant functional components.

[0055] In some embodiments, please refer to Figure 3 and Figure 4 The first driving component 23 includes a first electric slide (also called an electric cylinder, electric cylinder, etc.) connected between the first laser head 21 and the moving bracket 12. The second driving component 24 includes a second electric slide connected between the second laser head 22 and the moving bracket 12. The first and second electric slides are electrically connected to the control device 40. Utilizing the characteristics of the electric slides, such as strong controllability of movement speed and acceleration and the ability to stop at any position within its stroke range, the relative position between the first laser head 21 and the second laser head 22 can be precisely adjusted and controlled, thereby achieving precise calibration or correction of the coaxiality between the two laser heads.

[0056] In other embodiments, the first driving member 23 and the second driving member 24 may also adopt other suitable power devices, as long as the purpose is to realize the relative movement of the first laser head 21 and the second laser head 22; for example, the first driving member 23 and the second driving member 24 may include cylinders. Cylinders have the characteristics of low and controllable pneumatic pressure and short stroke, which are conducive to realizing fine adjustment of the relative position between the two laser heads, thereby realizing the calibration of coaxiality.

[0057] In some embodiments, please refer to Figure 1 and Figure 2 The measuring device or load-bearing component 10 also includes a transmission screw 14, a guide rail 15, and a guide slider 16; wherein, the transmission screw 14 is rotatably mounted on the base 11 and extends along the Y-axis direction, the guide rail 15 is fixedly mounted on the base 11 and arranged in parallel with the transmission screw 14, and the guide slider 16 is threadedly sleeved on the transmission screw 14 and slidably connected to the guide rail 15; the moving bracket 12 is fixedly connected to the guide slider 16, and the third driving component 13 may include a motor (e.g., a servo motor), the power end of the third driving component 13 being coupled to the transmission screw 14.

[0058] Thus, by driving the transmission screw 14 to rotate through the third driving component 13, the guide slider 16 can cause the moving bracket 12 to move linearly back and forth along the guide rail 15, thereby using the cooperation of the first laser head 21 and the second laser head 22 to scan and measure the object under test. The method of using the transmission screw 14 in conjunction with the linear module (i.e., the guide rail 15 and the guide slider 16) can achieve precise control over the movement or displacement of the moving bracket 12 and the measuring components 20 (i.e., the first laser head 21 and the second laser head 22), and effectively enhance the stability of the movement of the moving bracket 12 and the measuring components 20, thereby ensuring measurement accuracy and maintaining a high degree of coaxiality.

[0059] In other embodiments, the measuring device or support assembly 10 includes an air-bearing guide rail and an air-bearing slider; wherein, the air-bearing guide rail is fixedly mounted on the base 11, for example, the air-bearing guide rail extends along the Y-axis direction and is mounted on the base 11; the air-bearing slider is mounted on the air-bearing guide rail and connected to the moving bracket 12, and the third drive unit 13 may include a power device capable of outputting linear motion, such as a linear motor, and the power end of the third drive unit 13 is coupled to the air-bearing slider. Thus, by driving the air-bearing slider through the third drive unit 13 to move the moving bracket 12 (along with the measuring assembly 20) along the air-bearing guide rail, the scanning measurement of the object under test can also be completed based on the cooperation of the first laser head 21 and the second laser head 22.

[0060] Since the air-bearing guide rail and the air-bearing slider achieve frictionless and vibration-free translational sliding based on the gas static pressure effect, the air-bearing guide rail structure establishes a sliding connection between the moving bracket 12 and the base 11. This not only enables precise control of the movement or displacement of the moving bracket 12 and the measuring component 20, but also effectively reduces the impact of mechanical vibration on measurement accuracy and coaxiality.

[0061] In some embodiments, please refer to 1 to Figure 3 and Figure 5 and Figure 6 The calibration assembly 30 includes a first calibration piece 31, a second calibration piece 32, a third calibration piece 33, a fourth calibration piece 34, a fifth calibration piece 35, and a first fixing base 36. The first fixing base 36 is fixedly mounted on the base 11 by a first bracket 17. Multiple calibration pieces are arranged side by side on the first fixing base 36 along the moving direction of the moving bracket 12, for example, multiple calibration pieces are arranged side by side on the first fixing base 36 along the Y-axis direction.

[0062] For more specific details, please refer to Figure 5 and Figure 6 The first calibration plate 31 is deflected by α ± 1 degree relative to the XY-axis plane around the X-axis; the second calibration plate 32 is deflected by -α ± 1 degree relative to the XY-axis plane around the X-axis; the third calibration plate 33 is deflected by β ± 1 degree relative to the XY-axis plane around the Y-axis; the fourth calibration plate 34 is deflected by -β ± 1 degree relative to the XY-axis plane around the Y-axis; and the fifth calibration plate 35 is parallel to the XY-axis plane. The values ​​of α and β can be set according to actual needs, such as 5 degrees or 6 degrees, and the values ​​of α and β can be equal or unequal.

[0063] On the one hand, by mounting each calibration piece on the first fixed base 36, the calibration component 30 is constructed as an integral structure relatively independent of the measurement component 20, and the calibration component 30 is fixed on the base 11 with the help of the first bracket 17, so that the calibration component 30 can be easily and quickly assembled and disassembled; at the same time, the first bracket 17 can also be used to position the calibration component 30 in a position that can avoid the first laser head 21 and the second laser head 22, so that the calibration component 30 is always kept in the position between the first laser head 21 and the second laser head 22 in the Z-axis direction, so as to avoid structural interference between the calibration component 30 and the laser head, the moving bracket 12 and other components during the movement of the measurement component 20 carried by the moving bracket 12.

[0064] For example, when the movable support 12 adopts an O-frame, the first support 17 can adopt an L-frame or gantry structure, and the calibration component 30 is fixed on the top arm or the horizontal arm of the first support 17, so that the calibration component 30 can be arranged through or across the hollow area of ​​the movable support 12 along the moving direction perpendicular to the movable support 12, so that when the first laser head 21 and the second laser head 22 move to both sides of the calibration component 30, the coaxiality calibration or correction can be completed.

[0065] On the other hand, based on the coordinated management and control of the first laser head 21, the second laser head 22, the first driving component 23, and the second driving component 24 by the control device 40, the first laser head 21 and the second laser head 22 can be calibrated in the X-axis direction by measuring the first calibration plate 31 and the second calibration plate 32; the first laser head 21 and the second laser head 22 can be calibrated in the Y-axis direction by measuring the third calibration plate 33 and the fourth calibration plate 34, thereby ultimately achieving the calibration or correction of coaxiality; and the coaxiality can be verified by measuring the fifth calibration plate 35.

[0066] It should be noted that the coordinated management and control of the first laser head 21, the second laser head 22, and the third driving component 13 by the control device 40 to realize the scanning measurement function of the measuring device is existing technology or can be referred to existing technology. The specific process of calibrating the coaxiality of the first laser head 21 and the second laser head 22 by the calibration component 30 is existing technology or can be referred to existing technology, for example, Chinese patent application CN113834429A. That is to say, this application does not improve the scanning measurement method, coaxiality calibration method, etc. The improvement of this application is reflected in the structural architecture of the measuring device, the structural arrangement relationship and cooperation relationship between related functional components.

[0067] In other embodiments, the calibration component 30 may also adopt other suitable structures, such as omitting the fifth calibration piece 25, and achieving coaxiality calibration or correction by measuring the first calibration piece 31, the second calibration piece 32, the third calibration piece 33 and the fourth calibration piece 34.

[0068] In some embodiments, please refer to Figures 1 to 3 The measuring device also includes a calibration component 50, which is disposed on the base 11 and located between the first laser head 21 and the second laser head 22 in the Z-axis direction. It is mainly used to cooperate with the first laser head 21 and the second laser head 22 to verify the measurement information or measurement results of the measuring device, so as to ensure the accuracy and reliability of the measurement results.

[0069] For example, please refer to Figure 7The verification component 50 includes a second fixed base 51 and a verification piece 52 with a preset thickness. The verification piece 52 is fixedly mounted on the second fixed base 51, and the second fixed base 51 is fixedly connected to the base 11 by a second bracket 18. The second bracket 18 is used to position and limit the verification component 50 to a position that can avoid the first laser head 21 and the second laser head 22. For example, the verification component 50 is arranged across the hollow area of ​​the moving bracket 12 in a direction perpendicular to the movement of the moving bracket 12.

[0070] On the one hand, when the moving bracket 12 carrying the measuring component 20 moves to a position where the first laser head 21 and the second laser head 22 are located on both sides of the calibration component 50 (specifically, the calibration piece 52), the calibration piece 52 can be measured by the first laser head 21 and the second laser head 22 to obtain the measurement information of the calibration piece 52. Then, by comparing the measurement information of the calibration piece 52 with the preset thickness information, the accuracy of the device measurement can be verified. For example, if the measurement information is consistent with the preset thickness information, it indicates that the measurement result is accurate; if the measurement information is inconsistent with the preset thickness information, it indicates that the coaxiality of the first laser head 21 and the second laser head 22 may have decreased, and the coaxiality can be recalibrated or corrected accordingly.

[0071] On the other hand, by integrating the calibration component 50 and the verification component 30 into the measuring device, the structural space of the measuring device can be fully utilized, which helps to optimize the structural system and operation process of the measuring device. For example, the calibration component 50 and the verification component 30 can be arranged along the moving direction of the moving bracket 12. In this way, within the moving stroke of the measuring component 20, coaxiality calibration, measurement accuracy verification, scanning measurement and other operations can be automatically performed as needed, thereby improving the efficiency of the measuring device and enriching its practical functions.

[0072] It should be noted that, Figure 4 The bold dashed lines in the text represent the structural or kinematic connections between related components, while the bold solid lines represent the electrical connections (i.e., signal connections) between related components.

[0073] The above examples illustrate this application only to aid understanding and are not intended to limit its scope. Those skilled in the art to which this application pertains can make various simple deductions, modifications, or substitutions based on the ideas presented.

Claims

1. A measuring device, characterized in that include: Base; The movable support is slidably connected to the base; First driving component and first laser head; The first driving member is disposed on the movable bracket and is used to drive the first laser head to move relative to the movable bracket along the X-axis direction; A second driving member and a second laser head, the second laser head being opposite to the first laser head along the Z-axis; the second driving member being disposed on the movable bracket and used to drive the second laser head to move relative to the movable bracket along the Y-axis. A calibration component is disposed on the base; the calibration component is located between the first laser head and the second laser head in the Z-axis direction, and is used to calibrate the coaxiality of the first laser head and the second laser head; as well as A third driving component is disposed on the base; the third driving component is used to drive the movable support to move.

2. The measuring device of claim 1, wherein, The measuring device further includes a control device, which is electrically connected to the first driving element, the second driving element, the first laser head, and the second laser head; the control device can control the first driving element and / or the second driving element based on the information obtained by the first laser head and the second laser head.

3. The measuring device of claim 2, wherein, The control device includes an industrial computer, the first driving component includes a first electric slide connected to the first laser head, and the second driving component includes a second electric slide connected to the second laser head.

4. The measuring device of claim 1, wherein, The measuring device further includes a first support, and the calibration assembly includes a first fixed base and a first calibration plate, a second calibration plate, a third calibration plate, and a fourth calibration plate disposed on the first fixed base; wherein: The first calibration plate is deflected by α±1 degrees relative to the XY plane around the X-axis, the second calibration plate is deflected by -α±1 degrees relative to the XY plane around the X-axis, the third calibration plate is deflected by β±1 degrees relative to the XY plane around the Y-axis, and the fourth calibration plate is deflected by -β±1 degrees relative to the XY plane around the Y-axis. The first bracket is connected between the first fixing base and the base, positioning the calibration component in a position that avoids the first laser head and the second laser head.

5. The measuring device of claim 4, wherein, The calibration assembly further includes a fifth calibration plate disposed on the first fixed base, the fifth calibration plate being parallel to the XY axis plane.

6. The measuring device as described in claim 1, characterized in that, The measuring device also includes an air-bearing guide rail and an air-bearing slider. The air-bearing guide rail is disposed on the base, and the air-bearing slider is disposed on the air-bearing guide rail. The movable bracket is connected to the air-bearing slider. The power end of the third driving member is coupled to the air-bearing slider to drive the air-bearing slider to move the movable bracket along the air-bearing guide rail. Alternatively, the measuring device may also include a transmission screw and a sliding guide rail and a guide slider, wherein the guide rail is disposed on the base, the movable bracket is connected to the guide slider, and the transmission screw is screwed to the guide slider; the power end of the third driving member is coupled to the transmission screw to drive the transmission screw to rotate, thereby causing the guide slider to drive the movable bracket to move along the guide rail.

7. The measuring device as described in claim 1, characterized in that, The movable support is an open annular structure, with the first laser head and the second laser head arranged opposite each other at both ends of the movable support; or the movable support is a closed annular structure, with the first laser head and the second laser head arranged opposite each other on both sides of the hollow area of ​​the movable support.

8. The measuring device as described in any one of claims 1-7, characterized in that, The measuring device further includes a calibration component, which is disposed on the base; the calibration component is used to cooperate with the first laser head and the second laser head to calibrate the measurement information of the measuring device.

9. The measuring device as described in claim 8, characterized in that, The measuring device further includes a second bracket, and the calibration component includes a second fixed base and a calibration plate, with the calibration plate disposed on the second fixed base; the second bracket is connected between the second fixed base and the base, positioning the calibration component at a position that can avoid the first laser head and the second laser head.

10. The measuring device as described in claim 8, characterized in that, The verification component and the calibration component are arranged along the moving direction of the movable support.

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