Displacement sensor calibration device

Abstract

This invention belongs to the field of sensor calibration technology and discloses a displacement sensor calibration device. The device includes a first stage, a second stage, an adjustment mechanism, and a moving mechanism. The first and second stages are used to hold a sensing element and a sensing chip, respectively. The adjustment mechanism includes an angle adjustment module and a spacing adjustment module. The moving mechanism is configured to drive the first stage to move relative to the second stage. This invention adjusts the relative angle between the sensing element and the sensing chip using the angle adjustment module and adjusts the spacing between them using the spacing adjustment module. This allows for calibration of the displacement sensor's analytical data when the sensing element and chip are in an ideal assembly state, and for testing the analytical data when there are deviations in spacing and angle between the sensing element and the sensing chip. Combining these two methods enables precise calibration of the error range of the displacement sensor's analytical data.

Description

Technical Field

[0001] This utility model relates to the field of sensor calibration technology, and in particular to a displacement sensor calibration device. Background Technology

[0002] Currently, devices such as automotive steering systems rely on displacement sensors to accurately detect the displacement of linearly moving components. Taking an automotive steering system as an example, this system includes a tie rod, which moves linearly along its axis during steering. To provide precise steering feedback and control, ensuring driving safety and stability, the automotive steering system is equipped with a displacement sensor. This sensor detects the displacement of the tie rod along its axis, enabling precise control of the steering process.

[0003] Specifically, a displacement sensor typically consists of two parts: a sensing element and a sensing chip. The sensing element is mounted on the tie rod and moves with it; while the sensing chip is fixed to another relatively stationary component in the steering system. When the tie rod moves, the sensing element moves accordingly, and the sensing chip accurately determines the displacement of the tie rod along its axis by detecting the displacement change of the sensing element.

[0004] In actual production, automobiles undergo road tests before mass production. During these tests, the detection accuracy of displacement sensors is tested to determine their qualification. However, due to factors such as component machining tolerances and assembly errors, gaps and angular deviations often occur between the assembled sensor element and the sensor chip, leading to errors in the data parsed by the sensor chip. Therefore, to accurately test the detection accuracy of displacement sensors, the error range of their parsed data must be calibrated beforehand. In actual testing, if the data output by the displacement sensor is within the error range, it is considered qualified; if it exceeds the error range, it is considered unqualified.

[0005] Therefore, there is an urgent need for a displacement sensor calibration device to accurately calibrate the error range of displacement sensor analytical data. Utility Model Content

[0006] The purpose of this invention is to provide a displacement sensor calibration device to achieve accurate calibration of the error range of displacement sensor analytical data.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] A displacement sensor calibration device, wherein the displacement sensor includes a sensing sheet and a sensing chip, and the displacement sensor calibration device includes:

[0009] The first stage and the second stage are respectively configured to hold the sensing sheet and the sensing chip, and the sensing sheet and the sensing chip are arranged opposite to each other along the Z-axis.

[0010] The adjustment mechanism includes an angle adjustment module and a spacing adjustment module. The angle adjustment module is configured to adjust the angle of the sensing sheet relative to the sensing chip around the X-axis and / or Y-axis. The spacing adjustment module is configured to adjust the spacing between the sensing sheet and the sensing chip along the Z-axis.

[0011] The moving mechanism is configured to drive the first stage to move relative to the second stage along the X-axis.

[0012] Preferably, the angle adjustment module includes a first adjustment platform and a second adjustment platform, wherein the first adjustment platform and the second adjustment platform are arranged and connected along the Z-axis direction.

[0013] Preferably, both the first adjustment platform and the second adjustment platform are manually adjustable slides. The first platform is located on top of the angle adjustment module. The first adjustment platform is configured to adjust the angle of rotation of the first platform around the X-axis, and the second adjustment platform is configured to adjust the angle of rotation of the first platform around the Y-axis.

[0014] Preferably, the spacing adjustment module includes a moving stage and a first driving member, the second platform is connected to the side of the moving stage facing the first platform, and the first driving member is configured to drive the moving stage to move along the Z-axis direction.

[0015] Preferably, the spacing adjustment module further includes a mounting base, the first driving component includes a lead screw and a handwheel, the lead screw extends along the Z-axis and is rotatably connected to the mounting base, the movable stage is sleeved on the outer periphery of the lead screw and screwed to the lead screw, and the handwheel is configured to drive the lead screw to rotate around the Z-axis.

[0016] Preferably, the spacing adjustment module further includes at least one guide rod extending along the Z-axis direction, and the moving stage is sleeved on the outer periphery of the guide rod.

[0017] Preferably, the second platform is detachably connected to the mobile platform.

[0018] Preferably, the displacement sensor calibration device further includes a machine base, and the moving mechanism includes a second driving member, a slide rail, a slider, and a base. The slide rail is fixedly connected to the machine base and extends along the X-axis direction. The base is slidably connected to the slide rail through the slider. The angle adjustment module is connected to the base and the first platform on both sides along the Z-axis direction, respectively. The second driving member is configured to drive the base to slide along the slide rail.

[0019] Preferably, the sensing sheet is disposed on the top end face of the first stage, the sensing chip is disposed on the top end face of the second stage, and the sensing sheet is disposed below the sensing chip.

[0020] Preferably, the second platform has a through hole extending along the Z-axis direction, the through hole extends along the X-axis direction, the first platform is partially inserted into the through hole, and the sensing chip covers the through hole.

[0021] The beneficial effects of this utility model are:

[0022] This invention adjusts the relative angle between the sensing sheet and the sensing chip using an angle adjustment module, and adjusts the spacing between the sensing sheet and the sensing chip using a spacing adjustment module. This allows for the calibration of the displacement sensor's analytical data when the sensing sheet and the sensing chip are in an ideal assembly state, and also allows for the testing of the displacement sensor's analytical data when there are spacing and angle deviations between the sensing sheet and the sensing chip. By combining these two methods, the error range of the displacement sensor's analytical data can be accurately calibrated. Attached Figure Description

[0023] Figure 1 This is one of the structural schematic diagrams of the displacement sensor calibration device excluding the second driving component in this utility model embodiment;

[0024] Figure 2 This is the second schematic diagram of the displacement sensor calibration device excluding the second driving component in this embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the structure of the displacement sensor calibration device without a sensing chip in this embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the displacement sensor calibration device in an embodiment of this utility model.

[0027] In the picture:

[0028] 110. Sensor sheet; 120. Sensor chip;

[0029] 1. First platform; 2. Second platform; 21. Through hole; 31. Angle adjustment module; 311. First adjustment platform; 312. Second adjustment platform; 32. Spacing adjustment module; 321. Moving platform; 322. First driving component; 3221. Lead screw; 3222. Handwheel; 323. Guide rod; 324. Mounting base; 3241. Strip hole; 4. Moving mechanism; 41. Second driving component; 42. Slide rail; 421. Slider; 43. Base; 5. Machine base. Detailed Implementation

[0030] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0031] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0034] Based on the above description, this embodiment uses a car steering system as an example for explanation. The car steering system is equipped with a displacement sensor, which includes a sensing plate and a sensing chip. The sensing plate is set on the tie rod of the car steering system and can move together with the tie rod, while the sensing chip is set on other relatively fixed components in the steering system. The sensing chip accurately measures the displacement of the tie rod along the axis by detecting the displacement change of the sensing plate.

[0035] As mentioned above, in an ideal state, the sensor sheet and the sensor chip are set in parallel, that is, the angle between the sensor sheet and the sensor chip is 0°, and the distance between the two is equal to the theoretical value. However, due to factors such as the processing tolerance of parts and assembly errors, there are often deviations in the distance and angle between the sensor sheet and the sensor chip after actual assembly.

[0036] Taking a theoretical value of 1mm as an example, after actual assembly, the distance between the sensing sheet and the sensing chip fluctuates within the range of 0.8-1.5mm. Moreover, there will be an angular deviation between the sensing sheet and the sensing chip. Specifically, in the circumferential direction around the X-axis parallel to the sensing chip, the angle between the sensing sheet and the sensing chip fluctuates within the range of ±3°, and in the circumferential direction around the Y-axis parallel to the sensing chip, the angle between the sensing sheet and the sensing chip fluctuates within the range of ±3°.

[0037] As shown above, due to the spacing and angle deviation between the sensing sheet and the sensing chip, the analytical data of the sensing chip will have errors. In order to accurately test the detection accuracy of the displacement sensor, the error range of its analytical data needs to be calibrated in advance.

[0038] For this purpose, please refer to Figures 1 to 4 This embodiment provides a displacement sensor calibration device, which includes a first stage 1, a second stage 2, and an adjustment mechanism. The first stage 1 and the second stage 2 are respectively configured to hold a sensing sheet 110 and a sensing chip 120, and the sensing sheet 110 and the sensing chip 120 are arranged opposite to each other along the Z-axis. The adjustment mechanism includes an angle adjustment module 31 and a spacing adjustment module 32. The angle adjustment module 31 is configured to adjust the angle of the sensing sheet 110 relative to the sensing chip 120 around the X-axis and / or Y-axis. It can be understood that the Z-axis, X-axis, and Y-axis are perpendicular to each other. The spacing adjustment module 32 is configured to adjust the spacing between the sensing sheet 110 and the sensing chip 120 along the Z-axis.

[0039] In this embodiment, the angle adjustment module 31 adjusts the angular deviation of the sensing sheet 110 relative to the sensing chip 120 around the X-axis and / or Y-axis, thereby simulating the angle difference between the sensing sheet 110 and the sensing chip 120 after assembly. The spacing adjustment module 32 adjusts the spacing between the sensing sheet 110 and the sensing chip 120, thereby simulating the spacing between the sensing sheet 110 and the sensing chip 120 after assembly.

[0040] In addition to the first stage 1, the second stage 2, and the adjustment mechanism, the displacement sensor calibration device also includes a moving mechanism 4. The moving mechanism 4 is configured to drive the first stage 1 to move relative to the second stage 2 along the X-axis direction, so that the sensing plate 110 moves relative to the sensing chip 120 along the X-axis direction, thereby enabling the sensing chip 120 to detect the displacement change of the sensing plate 110.

[0041] As described above, this embodiment adjusts the relative angle between the sensing sheet 110 and the sensing chip 120 using the angle adjustment module 31, and adjusts the spacing between the sensing sheet 110 and the sensing chip 120 using the spacing adjustment module 32. This allows for the calibration of the displacement sensor's analytical data when the sensing sheet 110 and the sensing chip 120 are in an ideal assembly state, and the testing of the displacement sensor's analytical data when there are spacing and angle deviations between the sensing sheet 110 and the sensing chip 120. By combining these two methods, the error range of the displacement sensor's analytical data can be accurately calibrated.

[0042] Specifically, in this embodiment, the angle adjustment module 31 is used to adjust the parallelism between the sensing sheet 110 and the sensing chip 120, and the spacing adjustment module 32 is used to adjust the spacing between the sensing sheet 110 and the sensing chip 120 to be equal to the theoretical value, so as to simulate the relative position of the sensing sheet 110 and the sensing chip 120 in the ideal assembly state, thereby calibrating the analytical data of the displacement sensor when the sensing sheet 110 and the sensing chip 120 are in the ideal assembly state. In addition, in this embodiment, the spacing between the sensing sheet 110 and the sensing chip 120 is adjusted to be greater than or less than the theoretical value by the spacing adjustment module 32, and the sensing sheet 110 is rotated around the X-axis by a certain angle and around the Y-axis by the angle adjustment module 31 to simulate the actual relative position when there is a spacing and angle deviation between the sensing sheet 110 and the sensing chip 120. This allows for testing of the displacement sensor's analytical data when there is a spacing and angle deviation between the sensing sheet 110 and the sensing chip 120. By combining the analytical data of the displacement sensor calibrated when the sensing sheet 110 and the sensing chip 120 are in an ideal assembly state, this embodiment can accurately calibrate the error range of the displacement sensor's analytical data.

[0043] For example, when the sensing sheet 110 is parallel to the sensing chip 120 and the distance between the sensing sheet 110 and the sensing chip 120 is equal to 1mm, the moving mechanism 4 drives the first stage 1 to move 10mm along the X-axis direction. At this time, the detection data output by the sensing chip 120 is also 10mm. The spacing adjustment module 32 adjusts the spacing between the sensing sheet 110 and the sensing chip 120 to be 1.5mm. The angle adjustment module 31 adjusts the sensing sheet 110 to rotate 3° around the X-axis and 3° around the Y-axis. That is, the actual spacing between the sensing sheet 110 and the sensing chip 120 is 0.5mm larger. When the angle of the sensing sheet 110 relative to the sensing chip 120 deviates clockwise by 3° around the X-axis parallel to the sensing chip 120 and the angle of the sensing sheet 110 relative to the sensing chip 120 deviates clockwise by 3° around the Y-axis parallel to the sensing chip 120, the moving mechanism 4 drives the first stage 1 to move 10mm along the X-axis. At this time, the detection data output by the sensing chip 120 is 12mm.

[0044] Similarly, in this embodiment, the angle adjustment module 31 adjusts the deviation angle of the sensing sheet 110 relative to the sensing chip 120, and the spacing adjustment module 32 adjusts the spacing between the sensing sheet 110 and the sensing chip 120. It can be understood that, based on the above description, the angle adjustment module 31 adjusts the rotation angle of the sensing sheet 110 within the range of ±3°, and the spacing adjustment module 32 adjusts the spacing between the sensing sheet 110 and the sensing chip 120 within the range of 0.8-1.5mm. After each adjustment, the moving mechanism 4 drives the first stage 1 to move 10mm along the X-axis direction, and records the detection data output by the sensing chip 120, thereby calibrating the analytical data of the displacement sensor.

[0045] As exemplified above, in this embodiment, the error range of the displacement sensor's analytical data is calibrated within ±2mm. Therefore, during actual road testing, if the error of the data output by the displacement sensor is within ±2mm, the displacement sensor is deemed qualified; if it exceeds the error range, it is deemed unqualified.

[0046] Based on the above, in this embodiment, the angle adjustment module 31 includes a first adjustment platform 311 and a second adjustment platform 312. The first adjustment platform 311 and the second adjustment platform 312 are arranged and connected along the Z-axis direction. The first adjustment platform 311 and the second adjustment platform 312 cooperate to adjust the angle of the sensing sheet 110 relative to the sensing chip 120 around the X-axis and / or Y-axis.

[0047] The first adjustment platform 311 is configured to adjust the angle of rotation of the first stage 1 around the X-axis, and the second adjustment platform 312 is configured to adjust the angle of rotation of the first stage 1 around the Y-axis, thereby adjusting the angle deviation of the sensing sheet 110 relative to the sensing chip 120.

[0048] For example, in this embodiment, the first adjustment platform 311 and the second adjustment platform 312 are both manually adjustable slides. Specifically, the first adjustment platform 311 and the second adjustment platform 312 are fixedly connected and arranged along the Z-axis to form the angle adjustment module 31. The first platform 1 is set on the top of the angle adjustment module 31. The moving mechanism 4 drives the angle adjustment module 31 and moves the first platform 1 along the X-axis.

[0049] Of course, in other optional embodiments, the first adjustment platform 311 and the second adjustment platform 312 may also be other R-axis adjustment platforms, and this embodiment does not impose specific limitations on this.

[0050] It is worth noting that since the specific structures of the first adjustment platform 311 and the second adjustment platform 312 are both existing technologies, this embodiment will not elaborate on them.

[0051] The spacing adjustment module 32 includes a moving stage 321 and a first driving member 322. The second platform 2 is mounted on the moving stage 321. Specifically, the second platform 2 is connected to the side of the moving stage 321 facing the first platform 1. That is, the second platform 2 is connected to the side of the moving stage 321 facing the first platform 1. The first driving member 322 is configured to drive the moving stage 321 to move along the Z-axis direction, thereby adjusting the spacing between the sensing sheet 110 and the sensing chip 120 in the Z-axis direction.

[0052] Furthermore, the sensing plate 110 is disposed on the top end face of the first stage 1, and the sensing chip 120 is disposed on the top end face of the second stage 2. The sensing plate 110 is disposed below the sensing chip 120, thereby facilitating the sensing chip 120 to detect the displacement of the sensing plate 110 in the X-axis direction.

[0053] As described above, the second stage 2 has a through hole 21 extending along the Z-axis and extending along the X-axis. The first stage 1 is partially inserted into the through hole 21, and the sensing chip 120 covers the through hole 21. Thus, in this embodiment, the sensing chip 120 is placed on one side of the second stage 2 along the Z-axis and covers the through hole 21. The end of the first stage 1 used to hold the sensing piece 110 extends into the through hole 21 from the other side of the second stage 2 along the Z-axis, thereby enabling the sensing chip 120 to accurately sense the position of the sensing piece 110.

[0054] Specifically, in this embodiment, by extending the sensing sheet 110 into the through hole 21, the sensing chip 120 is protected from external factors, thereby enabling the sensing chip 120 to more accurately sense the position of the sensing sheet 110.

[0055] Furthermore, the through hole 21 extends along the X-axis direction, and the length of the through hole 21 along the X-axis direction is the maximum travel distance of the sensing plate 110 along the X-axis direction, so that the second platform 2 does not affect the moving mechanism 4 from driving the first platform 1 and causing the sensing plate 110 to move along the X-axis direction.

[0056] Furthermore, in this embodiment, the second stage 2 is detachably mounted on the moving stage 321. Thus, this embodiment can be adapted to test and calibrate different types of displacement sensors by replacing the second stage 2.

[0057] Specifically, for different displacement sensors, the size and / or shape of the sensing chip 120 are different. Accordingly, a second stage 2 of different size and / or shape is required to place it. In this embodiment, the second stage 2 is replaceable, so that it can be adapted to test and calibrate different types of displacement sensors.

[0058] For example, in this embodiment, the second platform 2 is installed on the mobile platform 321 by means of bolt connection. Of course, in other optional embodiments, the second platform 2 can also be installed on the mobile platform 321 by other detachable connection methods. This embodiment does not make specific limitations on this.

[0059] Furthermore, the spacing adjustment module 32 also includes a mounting base 324. The first driving component 322 includes a lead screw 3221 and a handwheel 3222. The lead screw 3221 extends along the Z-axis and is rotatably connected to the mounting base 324. Specifically, the lead screw 3221 is rotatably connected to the mounting base 324 around its axis. The moving platform 321 is sleeved on the outer periphery of the lead screw 3221 and screwed to the lead screw 3221. The handwheel 3222 is configured to drive the lead screw 3221 to rotate around the Z-axis. Specifically, the operator can rotate the lead screw 3221 by hand-cranking the handwheel 3222, thereby causing the moving platform 321 to move along the Z-axis.

[0060] As shown above, the spacing adjustment module 32 in this embodiment has a simple structure, low manufacturing cost, and high precision in controlling the movement of the second platform 2.

[0061] Of course, in other alternative embodiments, the lead screw 3221 can also be driven to rotate by a stepper motor or servo motor, etc., and this embodiment does not impose specific limitations on this.

[0062] In addition, the spacing adjustment module 32 also includes a guide rod 323 extending along the Z-axis direction. The moving stage 321 is sleeved on the outer periphery of the guide rod 323. The guide rod 323 guides the movement of the moving stage 321, thereby ensuring that the moving stage 321 can drive the sensing chip 120 to move accurately along the Z-axis direction.

[0063] It is understood that the number of guide rods 323 can be set to one or more, and this embodiment does not impose a specific limitation on this.

[0064] Furthermore, the displacement sensor calibration device also includes a machine base 5, with a mounting base 324 fixedly connected to the machine base 5. The moving mechanism 4 includes a second drive member 41, a slide rail 42, a slider 421, and a base 43. The slide rail 42 is fixedly connected to the machine base 5 and extends along the X-axis. The base 43 is slidably connected to the slide rail 42 via the slider 421. The angle adjustment module 31 is connected to the base 43 and the first platform 1 on both sides along the Z-axis, respectively. The second drive member 41 is configured to drive the base 43 to slide along the slide rail 42, thereby driving the first platform 1 to move along the X-axis. The slide rail 42 can provide guidance for the movement of the first platform 1, thereby ensuring that the first platform 1 can drive the sensing element 110 to move accurately along the X-axis.

[0065] Specifically, the angle adjustment module 31 is fixedly connected to the top of the base 43, the base 43 is fixedly connected to the slider 421, and the base 43 is installed on the movable end of the second drive member 41.

[0066] For example, the second driving member 41 may be a linear drive structure such as a cylinder or an electric cylinder, and this embodiment does not impose specific limitations on it.

[0067] Furthermore, in this embodiment, the mounting base 324 is provided with a strip-shaped hole 3241 extending along the Y-axis direction. The machine base 5 is provided with a connecting hole (not shown in the figure), with the strip-shaped hole 3241 facing the connecting hole. The mounting base 324 is fixedly connected to the machine base 5 by bolts (not shown in the figure) passing through the strip-shaped hole 3241 and the connecting hole. Thus, this embodiment allows for adjustment of the mounting position of the mounting base 324 along the Y-axis direction by removing and installing the bolts and adjusting the position of the strip-shaped hole 3241 facing the connecting hole, thereby ensuring accurate alignment between the sensing chip 110 placed on the first platform 1 and the sensing chip 120 placed on the second platform 2.

[0068] It is understood that in other alternative embodiments, the strip hole 3241 may also be provided on the machine base 5, and correspondingly, the connecting hole may be provided on the mounting base 324. This embodiment does not impose specific limitations on this.

[0069] Additionally, it should be noted that in this embodiment, the first stage 1 is made of engineering plastic, which is insulating, thereby preventing the first stage 1 from affecting the displacement change of the sensing chip 120 detecting the sensing sheet 110.

[0070] Of course, the first platform 1 can also be made of rubber or other insulating materials, and this embodiment does not impose any specific restrictions on this.

[0071] Additionally, for example, the second platform 2 is made of 6061 aluminum.

[0072] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A displacement sensor calibration apparatus, the displacement sensor comprising an inductive plate and an inductive core, characterized by, The displacement sensor calibration device includes: The first stage and the second stage are respectively configured to hold the sensing sheet and the sensing chip, and the sensing sheet and the sensing chip are arranged opposite to each other along the Z-axis. The adjustment mechanism includes an angle adjustment module and a spacing adjustment module. The angle adjustment module is configured to adjust the angle of the sensing sheet relative to the sensing chip around the X-axis and / or Y-axis. The spacing adjustment module is configured to adjust the spacing between the sensing sheet and the sensing chip along the Z-axis. The moving mechanism is configured to drive the first stage to move relative to the second stage along the X-axis direction.

2. The displacement sensor calibration device of claim 1, wherein, The angle adjustment module includes a first adjustment platform and a second adjustment platform, which are arranged and connected along the Z-axis.

3. The displacement sensor calibration device according to claim 2, characterized in that, Both the first adjustment platform and the second adjustment platform are manually adjustable slides. The first platform is located on top of the angle adjustment module. The first adjustment platform is configured to adjust the angle of rotation of the first platform around the X-axis, and the second adjustment platform is configured to adjust the angle of rotation of the first platform around the Y-axis.

4. The displacement sensor calibration device according to claim 1, characterized in that, The spacing adjustment module includes a moving stage and a first driving member. The second platform is connected to the side of the moving stage facing the first platform. The first driving member is configured to drive the moving stage to move along the Z-axis direction.

5. The displacement sensor calibration device according to claim 4, characterized in that, The spacing adjustment module further includes a mounting base. The first driving component includes a lead screw and a handwheel. The lead screw extends along the Z-axis and is rotatably connected to the mounting base. The movable platform is sleeved on the outer periphery of the lead screw and screwed to the lead screw. The handwheel is configured to drive the lead screw to rotate around the Z-axis.

6. The displacement sensor calibration device according to claim 5, characterized in that, The spacing adjustment module further includes at least one guide rod extending along the Z-axis direction, and the moving stage is sleeved on the outer periphery of the guide rod.

7. The displacement sensor calibration device according to claim 4, characterized in that, The second platform is detachably connected to the mobile platform.

8. The displacement sensor calibration device according to claim 1, characterized in that, The displacement sensor calibration device further includes a machine base. The moving mechanism includes a second driving component, a slide rail, a slider, and a base. The slide rail is fixedly connected to the machine base and extends along the X-axis direction. The base is slidably connected to the slide rail via the slider. The angle adjustment module is connected to the base and the first platform on both sides along the Z-axis direction, respectively. The second driving component is configured to drive the base to slide along the slide rail.

9. The displacement sensor calibration device according to any one of claims 1-8, characterized in that, The sensing sheet is disposed on the top end face of the first stage, the sensing chip is disposed on the top end face of the second stage, and the sensing sheet is disposed below the sensing chip.

10. The displacement sensor calibration device according to claim 9, characterized in that, The second platform has a through hole extending along the Z-axis direction and the through hole extends along the X-axis direction. The first platform is partially inserted into the through hole, and the sensing chip covers the through hole.

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