A pre-dispensing device with multi-laser positioning

CN224435409UActive Publication Date: 2026-06-30HEFEI JIUFU SEMICON TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
HEFEI JIUFU SEMICON TECH CO LTD
Filing Date
2025-09-25
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

In the current semiconductor equipment assembly process, the accuracy is inaccurate and the assembly efficiency is low. In particular, a lot of time is spent calibrating the laser level and using a tape measure for rough positioning during the pre-assembly of the tubing, which affects the assembly accuracy of the rigid tubing.

Method used

The pre-assembly device employing multi-laser positioning includes a pre-assembly table, X-axis guide rail, Y-axis guide rail, Z-axis seat, and laser assembly. It achieves rapid calibration of X, Y, and Z coordinates through X-axis sliders, Y-axis sliders, and positioning height gauges, thereby improving assembly accuracy and efficiency.

Benefits of technology

It achieves rapid and accurate multi-laser positioning, improves the accuracy and efficiency of semiconductor equipment installation, reduces installation time, and enhances the assembly accuracy of rigid pipes.

✦ Generated by Eureka AI based on patent content.

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Abstract

This utility model relates to the field of semiconductor equipment assembly technology, and more particularly to a pre-assembly device for multi-laser positioning. It includes a pre-assembly platform, on which a laser level for monitoring the origin is fixedly mounted. An X-axis guide rail and a Y-axis guide rail are also fixedly mounted on the pre-assembly platform. Uniformly distributed X-axis sliders are slidably mounted on the X-axis guide rail, and uniformly distributed Y-axis sliders are slidably mounted on the Y-axis guide rail. This utility model allows for convenient and rapid positioning of the X and Y coordinates of multiple pipe fittings using the X and Y axis guide rails, which is much faster than aligning each one individually with a laser level. The X and Y axis guide rails contain scales, and the X and Y axis sliders contain coordinate pointers, which conveniently indicate the current coordinates of the sliders. By creating reticles on the base plates of positioning height scale one and positioning height scale two, the X and Y axis laser beams can be easily aligned with the reticles to determine the coordinates. This device offers good versatility for pre-assembling pipes for different semiconductor devices.
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