A low-frequency vibration isolation platform testing device

Abstract

This utility model relates to the field of vibration isolation testing technology, specifically disclosing a low-frequency vibration isolation platform testing device. It includes a ground fixing plate, a vertical guide rail fixing plate fixed to the top of the ground fixing plate, and guide rail fixing plate stiffeners symmetrically arranged on both sides of the ground fixing plate. The other end of each guide rail fixing plate stiffener is connected to the vertical guide rail fixing plate. An upper fixing member is fixed to one side of the top of the vertical guide rail fixing plate, and a lower fixing member is provided on the side of the vertical guide rail fixing plate away from the upper fixing member. Two linear guide rails are installed on one side of the vertical guide rail fixing plate. Two pneumatic springs and a displacement sensor are arranged between the upper and lower fixing members. This device ensures the vertical movement of the bearing plate, allowing for reciprocating expansion and contraction in the vertical direction. It also ensures that the air spring is not excessively compressed and deformed during loading, accurately analyzes specific displacement changes, and provides reliable measurement data.

Description

Technical Field

[0001] This utility model relates to the field of vibration isolation testing technology, specifically to a low-frequency vibration isolation platform testing device. Background Technology

[0002] Vibration, a ubiquitous physical phenomenon, describes the reciprocating motion of an object around its equilibrium point. Whether in industry or daily life, unintended vibrations can cause varying degrees of impact or even harm.

[0003] With the development of science and technology and high-precision industries, precision product processing and high-precision experiments have become core areas of high-tech industries. For example, working platforms such as laser equipment, electron microscopes, and lithography machines have extremely high requirements for the stability of their working environment. Especially in experimental settings, the suppression of low-frequency vibrations is crucial, as low-frequency vibrations have a significant impact on ultra-precision machining equipment and high-precision measuring instruments. The stability of the experimental platform plays a decisive role in the accuracy of experimental results.

[0004] However, various vibration sources inevitably exist in the experimental environment, including the slight swaying of buildings, the vibration of surrounding equipment, and interference caused by personnel activities. These vibrations, especially low-frequency vibrations, have longer wavelengths and higher energy, and can easily propagate to the experimental platform, leading to displacement, tilting, or vibration of the experimental equipment, thereby affecting the accuracy and repeatability of the experiment.

[0005] Existing vibration isolation technologies are extensively researched, mainly including passive and active vibration isolation. Among them, active vibration isolation technology is considered an effective method for solving low-frequency vibration isolation problems. However, in the research process of active vibration isolation technology, how to simulate low-frequency vibrations and verify the effectiveness of the vibration isolation technology has become one of the reasons limiting the rapid development of active vibration isolation technology. Utility Model Content

[0006] In view of the shortcomings of the prior art mentioned above, the purpose of this utility model is to design a dual pneumatic muscle stretching platform to generate low-frequency vibration signals, which can provide a suitable testing environment for the vibration isolation platform, and can ensure that the air spring vibration isolation system will not be excessively squeezed and deformed during loading, and can accurately analyze specific displacement changes and provide reliable measurement data.

[0007] To achieve the above objectives, the technical solution of this utility model is as follows:

[0008] A low-frequency vibration isolation platform testing device includes a ground fixing plate, a vertical guide rail fixing plate fixed to the top of the ground fixing plate, guide rail fixing plate stiffeners symmetrically arranged on both sides of the ground fixing plate, the other end of the guide rail fixing plate stiffeners connected to the vertical guide rail fixing plate, an upper fixing member fixed to one side of the top of the vertical guide rail fixing plate, a lower fixing member fixed to one side of the vertical guide rail fixing plate away from the upper fixing member, two linear guide rails installed on one side of the vertical guide rail fixing plate, the two linear guide rails respectively located on both sides of the upper and lower fixing members, two pneumatic muscles and a displacement sensor arranged between the upper and lower fixing members, the displacement sensor located between the two pneumatic muscles, multiple linear guide rail sliders slidably arranged on the linear guide rails, a slider fixing plate fixed to the side of the multiple linear guide rail sliders away from the vertical guide rail fixing plate, the lower fixing member fixed to the slider fixing plate, a bearing plate fixed to one side of the bottom of the slider fixing plate, and a vibration isolation mechanism installed on the bearing plate.

[0009] As a further embodiment of this utility model, the number of linear guide sliders is four, and every two linear guide sliders are slidably disposed on a linear guide.

[0010] As a further embodiment of this utility model, two bearing plate stiffeners are fixed on both sides of the slider fixing plate. The two bearing plate stiffeners are symmetrically arranged, and the other end of each of the two bearing plate stiffeners is fixed to the bearing plate.

[0011] As a further embodiment of this utility model, the vibration isolation mechanism includes a lower base plate disposed on the bearing plate, an air spring disposed at the center of the top of the lower base plate, a loading plate disposed at the other end of the air spring, and four bearing cylindrical optical shafts disposed at the bottom of the loading plate. Each bearing cylindrical optical shaft is equipped with a height limiter at its bottom, and a linear bearing is disposed at the bottom of the height limiter.

[0012] As a further embodiment of this utility model, an air pipe elbow is provided at the bottom of the lower base plate.

[0013] As a further embodiment of this invention, a limit screw is provided at the lower end of the linear bearing.

[0014] As a further embodiment of this utility model, a laser reflector is provided on one side of the bottom of the carrier plate.

[0015] As a further embodiment of this utility model, a displacement sensor support plate is provided on the top of the lower base plate corresponding to one side of the laser reflector, and a laser displacement sensor is provided on one side of the displacement sensor support plate.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] (1) When in use, gas is introduced into the pneumatic muscle through external equipment, which will cause it to contract. This will drive the slider fixing plate to move vertically along the linear guide rail. The setting of multiple linear guide rail sliders on the linear guide rail ensures the vertical movement of the bearing plate and ensures that the bearing plate can reciprocate in the vertical direction. Through the setting of displacement sensors, the displacement change of the pneumatic muscle can be detected in real time and the data can be fed back to the external control system to achieve closed-loop control and generate low-frequency controllable vibration signals. Vibration isolation mechanisms or other micro-vibration systems can be placed on the bearing plate. The setting of guide rail fixing plate stiffeners and bearing plate stiffeners improves the overall stability of the device.

[0018] (2) The vibration isolation mechanism installed on the bearing plate supports different loads by adjusting the internal air pressure of the air spring and provides the damping and rigidity required for vibration isolation. Multiple linear bearings ensure that the load supported by the air spring moves smoothly in the vertical direction. The height limiter added to the linear bearing can ensure that the air spring will not be excessively squeezed and deformed during loading. The limit screw added to the lower end of the linear bearing can ensure that the air spring will not be excessively expanded and deformed during inflation. The laser displacement sensor and laser reflector are set up. The laser reflector is used to reflect the laser signal back to the sensor. The laser displacement sensor analyzes the specific displacement changes and provides reliable measurement data. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is an exploded view of part of the structure of this utility model;

[0021] Figure 3 This is a schematic diagram of the vibration isolation mechanism of this utility model;

[0022] Figure 4 This is a schematic diagram of the bottom of the vibration isolation mechanism of this utility model.

[0023] In the diagram: 10-Ground fixing plate; 11-Guide rail fixing plate stiffener; 12-Vertical guide rail fixing plate; 13-Linear guide rail; 14-Upper fixing component; 15-Pneumatic muscle; 16-Displacement sensor; 17-Linear guide rail slider; 18-Lower fixing component; 20-Slider fixing plate; 21-Bearing plate stiffener; 22-Bearing plate; 30-Vibration isolation mechanism; 31-Load plate; 32-Bearing cylindrical optical axis; 33-Air spring; 34-Height limiter; 35-Linear bearing; 36-Lower base plate; 37-Displacement sensor bearing plate; 38-Laser reflector; 39-Laser displacement sensor; 40-Limit screw; 41-Air pipe elbow. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0027] Please see the appendix Figure 1-4A low-frequency vibration isolation platform testing device includes a ground fixing plate 10. A vertical guide rail fixing plate 12 is fixed to the top of the ground fixing plate 10. Guide rail fixing plate stiffeners 11 are symmetrically arranged on both sides of the ground fixing plate 10. The other end of the guide rail fixing plate stiffeners 11 is connected to the vertical guide rail fixing plate 12. An upper fixing member 14 is fixed to one side of the top of the vertical guide rail fixing plate 12. A lower fixing member 18 is arranged on one side of the vertical guide rail fixing plate 12 away from the upper fixing member 14. Two linear guide rails 13 are installed on one side of the vertical guide rail fixing plate 12, and the two linear guide rails 13 are respectively located on both sides of the upper fixing member 14 and the lower fixing member 18. Two pneumatic muscles 15 and a displacement sensor 16 are disposed between the upper fixing member 14 and the lower fixing member 18. The displacement sensor 16 is located between the two pneumatic muscles 15. Multiple linear guide sliders 17 are slidably disposed on the linear guide rail 13. A slider fixing plate 20 is fixed to the side of the multiple linear guide sliders 17 away from the vertical guide rail fixing plate 12. The lower fixing member 18 is fixed to the slider fixing plate 20. A bearing plate 22 is fixed to one side of the bottom of the slider fixing plate 20. A vibration isolation mechanism 30 is installed on the bearing plate 22. The pneumatic muscles 15 and the displacement sensor 16 are existing technologies and can be purchased on the market, and will not be described in detail here.

[0028] There are four linear guide sliders 17, and every two linear guide sliders 17 are slidably mounted on a linear guide rail 13.

[0029] Two bearing plate stiffeners 21 are fixed on both sides of the slider fixing plate 20. The two bearing plate stiffeners 21 are symmetrically arranged, and the other end of each of the two bearing plate stiffeners 21 is fixed to the bearing plate 22.

[0030] Specifically, during use, gas is introduced into the pneumatic muscle 15 through external equipment, causing it to contract. This drives the slider fixing plate 20 to move vertically along the linear guide rail 13. The arrangement of multiple linear guide rail sliders 17 on the linear guide rail 13 ensures the vertical movement of the support plate 22, allowing it to reciprocate and extend vertically. The displacement sensor 16 can detect the displacement changes of the pneumatic muscle 15 in real time and feed the data back to the external control system to achieve closed-loop control and generate a low-frequency controllable vibration signal.

[0031] The vibration isolation mechanism 30 includes a lower base plate 36 mounted on a support plate 22. An air spring 33 is located at the center of the top of the lower base plate 36, and a load plate 31 is located at the other end of the air spring 33. Four cylindrical bearing shafts 32 are mounted on the bottom of the load plate 31, and a height limiter 34 is installed at the bottom of each cylindrical bearing shaft 32. A linear bearing 35 is located at the bottom of each height limiter 34. A laser reflector 38 reflects the laser signal back to the sensor, and a laser displacement sensor 39 analyzes the specific displacement changes to provide reliable measurement data. The linear bearings 35 ensure that the load supported by the air spring 33 moves smoothly in the vertical direction.

[0032] The bottom of the lower base plate 36 is provided with an air pipe elbow 41. The air pipe elbow 41 can reduce the resistance generated by the airflow when turning, and is commercially available. The lower end of the linear bearing 35 is provided with a limit screw 40. The setting of the limit screw 40 and the height limiter 34 can ensure that the air spring 33 will not be deformed or damaged by excessive expansion and compression during inflation and loading. A laser reflector 38 is provided on one side of the bottom of the loading plate 31. A displacement sensor support plate 37 is provided on the top of the lower base plate 36 on the side corresponding to the laser reflector 38, and a laser displacement sensor 39 is provided on one side of the displacement sensor support plate 37.

[0033] Working principle:

[0034] In use, gas is introduced into the pneumatic muscle 15 through an external device, causing it to contract. This drives the slider fixing plate 20 to move vertically along the linear guide rail 13. The arrangement of multiple linear guide rail sliders 17 on the linear guide rail 13 ensures the vertical movement of the support plate 22, allowing it to reciprocate and extend vertically. The displacement sensor 16 can detect the displacement changes of the pneumatic muscle 15 in real time and feed the data back to the external control system to achieve closed-loop control.

[0035] The vibration isolation mechanism 30, mounted on the bearing plate 22, supports different loads by adjusting the internal air pressure of the air spring 33 and provides the damping and rigidity required for vibration isolation. Multiple linear bearings 35 ensure that the load supported by the air spring 33 moves smoothly in the vertical direction. The height limiter 34 and the limit screw 40 added to the linear bearing 35 can ensure that the air spring 33 will not be excessively squeezed and deformed during loading. The limit screw 40 added to the lower end of the linear bearing 35 can ensure that the air spring 33 will not be excessively expanded and deformed during inflation. The laser displacement sensor 39 and the laser reflector 38 are set up so that the laser reflector 38 is used to reflect the laser signal back to the sensor and the laser displacement sensor 39 analyzes the specific displacement changes and provides reliable measurement data.

[0036] Finally, it should be noted that the pneumatic muscles and other components involved in this utility model are all general standard parts or parts known to those skilled in the art. Their structure and principle can be known to those skilled in the art through technical manuals or conventional experimental methods. In the idle space of this device, all the above-mentioned electrical components, which refer to power elements, electrical components and matching controllers and power supplies, are connected by wires. The specific connection method should refer to the working principle of this utility model. The electrical connections between each electrical component are completed in the order of operation. The detailed connection methods are all technologies known in the art.

[0037] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A low-frequency vibration isolation platform testing device, comprising a ground fixing plate (10), characterized in that, A vertical guide rail fixing plate (12) is fixed to the top of the ground fixing plate (10). Guide rail fixing plate stiffeners (11) are symmetrically arranged on both sides of the ground fixing plate (10). The other end of the guide rail fixing plate stiffeners (11) is connected to the vertical guide rail fixing plate (12). An upper fixing member (14) is fixed to one side of the top of the vertical guide rail fixing plate (12). A lower fixing member (18) is arranged on one side of the vertical guide rail fixing plate (12) away from the upper fixing member (14). Two linear guide rails (13) are installed on one side of the vertical guide rail fixing plate (12). The two linear guide rails (13) are located on both sides of the upper fixing member (14) and the lower fixing member (18), respectively. Two pneumatic muscles (15) and a displacement sensor (16) are arranged between the upper fixing member (14) and the lower fixing member (18). The displacement sensor (16) is located between the two pneumatic muscles (15). Multiple linear guide sliders (17) are slidably arranged on the linear guide rail (13). A slider fixing plate (20) is fixed on the side of the multiple linear guide sliders (17) away from the vertical guide rail fixing plate (12). The lower fixing member (18) is fixed to the slider fixing plate (20). A bearing plate (22) is fixed on one side of the bottom end of the slider fixing plate (20). A vibration isolation mechanism (30) is installed on the bearing plate (22).

2. The low-frequency vibration isolation platform testing device according to claim 1, characterized in that, There are four linear guide sliders (17), and every two linear guide sliders (17) are slidably disposed on a linear guide (13).

3. The low-frequency vibration isolation platform testing device according to claim 1, characterized in that, The slider fixing plate (20) has two bearing plate stiffeners (21) fixed on both sides. The two bearing plate stiffeners (21) are symmetrically arranged, and the other end of each of the two bearing plate stiffeners (21) is fixed to the bearing plate (22).

4. The low-frequency vibration isolation platform testing device according to claim 1, characterized in that, The vibration isolation mechanism (30) includes a lower base plate (36) mounted on a support plate (22). An air spring (33) is mounted at the center of the top of the lower base plate (36). A loading plate (31) is mounted at the other end of the air spring (33). Four bearing cylindrical optical shafts (32) are mounted at the bottom of the loading plate (31). A height limiter (34) is mounted at the bottom of each bearing cylindrical optical shaft (32). A linear bearing (35) is mounted at the bottom of the height limiter (34).

5. The low-frequency vibration isolation platform testing device according to claim 4, characterized in that, The bottom of the lower base plate (36) is provided with an air pipe elbow (41).

6. The low-frequency vibration isolation platform testing device according to claim 4, characterized in that, The lower end of the linear bearing (35) is provided with a limit screw (40).

7. The low-frequency vibration isolation platform testing device according to claim 4, characterized in that, A laser reflector (38) is provided on one side of the bottom of the carrier plate (31).

8. The low-frequency vibration isolation platform testing device according to claim 7, characterized in that, A displacement sensor support plate (37) is provided on the top of the bottom plate (36) on one side corresponding to the laser reflector plate (38), and a laser displacement sensor (39) is provided on one side of the displacement sensor support plate (37).

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