Graphite boat cleaning device and graphite boat cleaning apparatus

Abstract

This utility model relates to a graphite boat cleaning device and equipment. The graphite boat cleaning device includes a shell assembly, a rotating assembly, a spraying assembly, and a draining assembly. The shell assembly includes an upper shell, a lower shell, and a cleaning chamber. The lower shell includes a conical bottom surface and a first side surface. The rotating assembly is rotatably disposed in the cleaning chamber relative to the shell assembly. The spraying assembly faces the rotating assembly. The draining assembly is connected to the apex of the bottom surface. By incorporating the rotating assembly, centrifugal force can be used to eject residual cleaning fluid from the graphite boat during the cleaning process, preventing cleaning fluid from remaining inside the graphite boat and improving the cleaning effect. Furthermore, by making the bottom surface conical, the inclined surface of the cone allows for timely drainage of cleaning fluid from the cleaning chamber, preventing residual cleaning fluid from corroding the cleaning device or causing secondary contamination of the graphite boat, further improving the cleaning effect of the graphite boat.

Description

Technical Field

[0001] This utility model relates to the field of solar cell production, and in particular to a graphite boat cleaning device and graphite boat cleaning equipment. Background Technology

[0002] In the production of solar cells, graphite boats are used to fix and arrange silicon wafers, ensuring a stable and uniform spacing between them. During actual production, silicon nitride deposits on the surface of the graphite boat, and this accumulation with repeated use can affect the uniformity of the silicon wafer coating. Therefore, timely cleaning of the graphite boat is necessary; however, existing graphite boat cleaning devices have poor cleaning effectiveness. Utility Model Content

[0003] Therefore, it is necessary to provide a graphite boat cleaning device and equipment that improves upon the aforementioned defects, addressing the problem of poor cleaning effect in existing graphite boat cleaning devices.

[0004] This application provides a graphite boat cleaning device, comprising:

[0005] The housing assembly includes an upper housing, a lower housing, and a cleaning chamber. The upper housing and the lower housing are fitted together to form a closed cleaning chamber. The lower housing includes a conical bottom surface and a first side surface, with the first side surface surrounding the bottom surface.

[0006] A rotating assembly is rotatably disposed in the cleaning chamber relative to the housing assembly;

[0007] The spray assembly is positioned toward the rotating assembly; and

[0008] A drainage assembly is configured to communicate with the apex of the bottom surface to drain the liquid from the cleaning chamber.

[0009] By incorporating a rotating assembly, the graphite boat is placed within it. During the cleaning process, centrifugal force forces residual cleaning fluid and other liquids to be ejected from the graphite boat, preventing residue and improving cleaning effectiveness. Furthermore, by designing the bottom surface as a cone, the inclined surface allows for timely drainage of cleaning fluid from the housing assembly, preventing residue from corroding the cleaning device or causing secondary contamination of the graphite boat.

[0010] In some embodiments, the upper housing includes a top surface and a second side surface surrounding the top surface, the top surface being a conical surface, and the outer side surface of the second side surface abutting against the inner side surface of the first side surface, or the inner side surface of the second side surface abutting against the outer side surface of the first side surface.

[0011] In some embodiments, the outer side of the second side abuts against the inner side of the first side.

[0012] In some embodiments, the spray assembly includes a first pipe and a second pipe that are interconnected, the first pipe passing through the upper housing, the second pipe extending circumferentially into the cleaning chamber, and the spray assembly further includes a plurality of spray nozzles spaced apart from each other in the second pipe.

[0013] In some embodiments, the graphite boat cleaning device further includes an air inlet and an exhaust outlet disposed on the top surface.

[0014] In some embodiments, the rotating assembly further includes:

[0015] A slewing bearing is fixedly mounted on the bottom surface;

[0016] A turntable, wherein the turntable is connected to the slewing bearing; and

[0017] A fixing member is provided on the side of the turntable opposite to the slewing support member.

[0018] In some embodiments, the rotating assembly further includes:

[0019] A drive motor, connected to the turntable drive, drives the turntable to rotate; and

[0020] The motor housing contains the drive motor and the slewing bearing.

[0021] In some embodiments, the turntable is provided with a hollow structure, and / or the size of the turntable is smaller than the size of the cleaning chamber, so as to form a drainage passage between the turntable and the housing assembly.

[0022] In some embodiments, the drainage assembly includes:

[0023] The drainage system includes a first drainage pipe, a second drainage pipe, and a third drainage pipe. One end of the first drainage pipe is connected to the apex of the bottom surface, and the other end is connected to the second and third drainage pipes.

[0024] A valve is provided at one end of the first drain pipe away from the bottom surface, and is used to control the connection between the first drain pipe and the second drain pipe or the third drain pipe.

[0025] In another aspect, this application provides a graphite boat cleaning device, comprising:

[0026] The aforementioned graphite boat cleaning device; and

[0027] The graphite boat acid washing device is located upstream of the graphite boat cleaning device. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the graphite boat cleaning device from one angle in an embodiment of this utility model;

[0029] Figure 2 for Figure 1 A sectional view along the vertical center plane;

[0030] Figure 3 for Figure 1 This is a schematic diagram of the graphite boat cleaning device after removing the upper shell and turntable in this embodiment of the utility model.

[0031] Figure 4 for Figure 3 A magnified view of a portion of position A in the middle;

[0032] Figure 5 This is a schematic diagram of the motor compartment and lower housing according to an embodiment of the present invention;

[0033] Figure 6 This is a schematic diagram of the upper shell and spray assembly in an embodiment of the present invention;

[0034] Explanation of reference numerals in the attached figures:

[0035] 1. Graphite boat cleaning device; 11. Shell assembly, 111 upper shell, 1111 top surface, 1112 second side surface, 112 lower shell, 1121 bottom surface, 1122 first side surface, 113 cleaning chamber; 12. Rotating assembly, 121 slewing bearing, 122 turntable, 123 fixing component, 124 drive motor, 125 motor compartment, 126 hollow structure, 127 drainage passage; 13. Spray assembly, 131 first pipe, 132 second pipe, 133 spray nozzle; 14. Drainage assembly, 141 drainage pipe, 1411 first drainage pipe, 1412 second drainage pipe, 1413 third drainage passage, 142 valve; 15. Air inlet; 16. Exhaust outlet. Detailed Implementation

[0036] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0037] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0039] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0040] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0041] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0042] To better understand the embodiments of this application, the following is combined with... Figures 1 to 6 The embodiments of this application will be described in detail.

[0043] like Figures 1 to 6 As shown, this application provides a graphite boat cleaning device 1, including a housing assembly 11, a rotating assembly 12, a spraying assembly 13, and a draining assembly 14. The housing assembly 11 includes an upper housing 111, a lower housing 112, and a cleaning chamber 113. The upper housing 111 and the lower housing 112 are mutually capped to form a closed cleaning chamber 113. The lower housing 112 includes a conical bottom surface 1121 and a first side surface 1122, with the first side surface 1122 surrounding the bottom surface 1121. The rotating assembly 12 is rotatably disposed in the cleaning chamber 113 relative to the housing assembly 11. The spraying assembly 13 is disposed facing the rotating assembly 12. The draining assembly 14 is connected to the apex of the bottom surface 1121 to drain liquid from the cleaning chamber 113.

[0044] The upper shell 111 and the lower shell 112 are fitted together to form a closed cleaning chamber 113, thereby ensuring that the cleaning process of the graphite boat is carried out within the closed cleaning chamber 113, preventing the overflow of cleaning fluid and other waste liquids that could pollute the environment. The lower shell 112 includes a conical bottom surface 1121 and a first side surface 1122. Specifically, the bottom surface 1121 can be a regular cone or an oblique cone; this embodiment does not impose any limitations on this. By setting the bottom surface 1121 to a conical shape, it is inclined, ensuring that the liquid in the cleaning chamber 113 can be discharged promptly along the conical bottom surface 1121 under the action of gravity.

[0045] The rotating assembly 12 is rotatably disposed within the cleaning chamber 113 relative to the housing assembly 11, meaning the rotating assembly is rotatably disposed within the cleaning chamber 113. By rotatably disposing the rotating assembly 12 within the cleaning chamber 113, the graphite boat placed within the rotating assembly 12 during the cleaning process can also rotate within the cleaning chamber 113. This centrifugal force generated by the rotation dislodges waste liquid and other impurities from the graphite boat, improving the cleaning effect.

[0046] The spray assembly 13 is positioned toward the rotating assembly 12, so that the spray assembly 13 can spray cleaning fluid toward the rotating assembly 12, thereby rinsing the graphite boat placed on the rotating assembly 12 and further improving the cleaning effect of the graphite boat.

[0047] The drainage assembly 14 is a component that drains the liquid from the cleaning chamber 113. Specifically, the drainage assembly 14 is connected to the apex of the bottom surface 1121, that is, the drainage assembly 14 is connected to the lowest point of the conical bottom surface 1121, so that the cleaning fluid and other waste liquids can flow into the drainage assembly 14 along the inclined conical bottom surface 1121, thus timely and efficiently draining the waste liquid from the cleaning chamber 113, keeping the cleaning chamber 113 clean, and facilitating the timely collection and treatment of the cleaning fluid and other waste liquids.

[0048] By setting up the rotating component 12, the graphite boat is placed inside. During the cleaning process, centrifugal force can be used to fling out any residual cleaning fluid inside the graphite boat, preventing cleaning fluid from remaining inside and improving the cleaning effect. In addition, by setting the bottom surface 1121 to a conical shape, the cleaning fluid in the cleaning chamber 113 can be discharged in a timely manner through the inclined surface of the cone, preventing cleaning fluid residue from corroding the shell component 11 or causing secondary contamination of the graphite boat, further improving the cleaning effect of the graphite boat.

[0049] like Figure 1 , 2 As shown in Figure 6, in some embodiments, the upper housing 111 includes a top surface 1111 and a second side surface 1112 surrounding the top surface 1111. The top surface 1111 is a conical surface. The outer side surface of the second side surface 1112 abuts against the inner side surface of the first side surface 1122, or the inner side surface of the second side surface 1112 abuts against the outer side surface of the first side surface 1122.

[0050] The upper housing 111 includes a top surface 1111 and a second side surface 1112 surrounding the top surface 1111. Specifically, the top surface 1111 can be a right circular cone or an oblique circular cone, and this embodiment does not limit this. By setting the top surface 1111 as a conical surface, the liquid remaining on the top surface 1111 can flow into the discharge assembly 14 of the bottom surface 1121 under the action of gravity, thus avoiding the residue of cleaning fluid and waste liquid on the top surface 1111, which would corrode the housing assembly 11 or drip into the graphite boat and cause secondary pollution.

[0051] The outer side of the second side 1112 abuts against the inner side of the first side 1122, or the inner side of the second side 1112 abuts against the outer side of the first side 1122. The abutting arrangement of the two ensures that the cleaning chamber 113 is in a closed state, which can prevent the cleaning liquid from splashing out and causing environmental pollution, and at the same time facilitates the unified collection and treatment of cleaning liquid and other liquids.

[0052] like Figure 2 As shown, in some embodiments, the outer side of the second side 1112 is abutted against the inner side of the first side 1122.

[0053] The outer side of the second side 1112 is abutted against the inner side of the first side 1122, that is, the lower housing 111 is sleeved on the outside of the upper housing 112. In this way, the end face of the second side 1112 in the lower housing 111 is located outside the cleaning chamber 113, which can prevent cleaning fluid and other liquids from remaining on the end face of the second side 1112 and ensure that the cleaning fluid is completely and effectively discharged to the outside of the cleaning chamber 113.

[0054] like Figure 6 As shown, in some embodiments, the spray assembly 13 includes a first pipe 131 and a second pipe 132 that are interconnected. The first pipe 131 passes through the upper housing 111, and the second pipe 132 extends circumferentially into the cleaning chamber 113. The spray assembly 13 also includes a plurality of spray nozzles 133 spaced apart from each other in the second pipe 132.

[0055] The spray assembly 13 includes a first pipe 131, a second pipe 132, and spray nozzles 133 that are interconnected. The first pipe 131 passes through the upper housing 111, allowing the spray assembly 13 to be fixedly installed within the upper housing 111 and also enabling the delivery of cleaning fluid to the cleaning chamber 113 from the outside. The second pipe 132 communicates with the first pipe 131 to receive the cleaning fluid delivered from the first pipe 131. Simultaneously, the second pipe 132 extends circumferentially into the cleaning chamber 113 to deliver the cleaning fluid circumferentially into the cleaning chamber 113. Multiple spray nozzles 133 are spaced apart from the second pipe 132, allowing the cleaning fluid within the second pipe 132 to be sprayed out from the spray nozzles 133, thus rinsing the graphite boat placed on the rotating assembly 12.

[0056] By setting up the first pipe 131, the second pipe 132, and the spray nozzle 133, the cleaning fluid can be transported circumferentially along the cleaning chamber 113 and sprayed out from the spray nozzle 133, thereby increasing the scouring area of ​​the cleaning fluid and improving the cleaning effect on the graphite boat.

[0057] In some embodiments, the spray assembly 13 includes a plurality of second pipes 132 arranged circumferentially along the cleaning chamber 133 to further increase the rinsing area of ​​the spray assembly 13 and further improve the cleaning effect of the graphite boat.

[0058] like Figure 1 and Figure 6 As shown, in some embodiments, the graphite boat cleaning device 1 further includes an air inlet 15 and an exhaust outlet 16 disposed on the top surface 1111.

[0059] The air inlet 15 and the exhaust outlet 16 are through holes that pass through the top surface 1111. Their cross-sectional shape can be a regular shape such as a square or a circle, or an irregular shape composed of straight lines and / or curved surfaces. This application embodiment does not limit this.

[0060] By providing an exhaust port 16, harmful gases generated during the graphite boat cleaning process can be discharged and collected, preventing them from being directly released into the environment and causing environmental pollution. By providing an air inlet 17, all harmful gases in the cleaning chamber 113 can be replaced by introducing gas into the cleaning chamber 113, further reducing the environmental pollution caused by the graphite boat cleaning process.

[0061] like Figures 1 to 5 As shown, in some embodiments, the rotating assembly 12 further includes a slewing bearing 121, a turntable 122, and a fixing member 123. The slewing bearing 121 is fixedly disposed on the bottom surface 1121; the turntable 122 is connected to the slewing bearing 121; and the fixing member 123 is disposed on the side of the turntable 122 opposite to the slewing bearing 121.

[0062] The slewing bearing 121 is fixedly mounted on the bottom surface 1121. Specifically, the fixed connection between the slewing bearing 121 and the bottom surface 1121 can be achieved by non-removable methods such as welding or bonding, or by detachable methods such as snap-fit ​​or bolt connection. This application embodiment does not limit this. The turntable 122 is connected to the slewing bearing 121, and the slewing bearing 121 enables the turntable 121 to rotate relative to the bottom surface 1121.

[0063] The fixing member 123 refers to a component used to fix the graphite boat to the rotating assembly 12. In some embodiments, the fixing member 123 can be a component such as a tray, used to fix and store multiple graphite boats, thereby improving the cleaning efficiency of the graphite boat cleaning device. The fixing member 123 is disposed on the side of the turntable 122 opposite to the slewing support 121, that is, one side of the turntable 122 is connected to the slewing support 121, and the other end is connected to the fixing member 123. In this way, the fixing member 123 can be rotatably disposed relative to the bottom surface 1121.

[0064] By setting a slewing bearing 121 to achieve a rotatable connection of the turntable 122, it can be ensured that the turntable 122 can still operate effectively under the condition of bearing a large load, thereby improving the service life of the graphite boat cleaning device 1.

[0065] like Figure 1As shown, in some embodiments, the graphite boat cleaning device 1 includes multiple fixing members 123, which are evenly distributed on the side of the turntable 122 opposite to the slewing support member 121. On one hand, by providing multiple fixing members 123, multiple graphite boats can be cleaned simultaneously, improving the cleaning efficiency of the graphite boat cleaning device 1. On the other hand, by evenly distributing the multiple fixing members 123 on the turntable 122, the load distribution on the turntable can be ensured to be uniform, preventing uneven loading that could cause the turntable 122 to tilt and reduce its service life.

[0066] like Figure 1 , 2 As shown in Figure 4, in some embodiments, the rotating assembly 12 further includes a drive motor 124 and a motor housing 125. The drive motor 124 is drivenly connected to the turntable 122 to drive the turntable 122 to rotate; the drive motor 124 and the slewing bearing 121 are housed in the motor housing 125.

[0067] By housing the drive motor 124 and the slewing bearing 121 in the motor compartment 125, the cleaning fluid and other liquids in the cleaning chamber 113 can be isolated, preventing them from causing corrosion damage to the drive motor 124 and the slewing bearing 121, thereby improving the service life of the graphite boat cleaning device 1.

[0068] like Figure 5 As shown, the motor compartment 125 is mounted on the bottom surface 1121, so that a flow channel for the cleaning fluid to be discharged is formed between the motor compartment 125 and the bottom surface 1121.

[0069] like Figure 1 and 2 As shown, in some embodiments, the turntable 122 is provided with a hollow structure 126, and / or the size of the turntable 122 is smaller than the size of the cleaning chamber 113, so as to form a drainage passage 127 between the turntable 122 and the housing assembly 11.

[0070] Specifically, such as Figure 1 As shown, in some embodiments, the turntable 122 is provided with a perforated structure 126, through which cleaning fluid and other liquids on the turntable 122 are drained into the lower housing 112, and then discharged out of the cleaning chamber 123 via the discharge assembly 14. Figure 2As shown, in some embodiments, the size of the turntable 122 is smaller than the size of the cleaning chamber 113, forming a drainage passage 127 between the turntable 122 and the side of the housing assembly 11. The drainage passage 127 connects the upper housing 111 and the lower housing 112, allowing cleaning fluid and other liquids to flow into the lower housing 112 and be discharged from the drainage assembly 14. In still other embodiments, the turntable 122 has a perforated structure 126, and the size of the turntable 122 is smaller than the size of the cleaning chamber 113, allowing cleaning fluid and other liquids to be discharged simultaneously through both the perforated structure 126 and the drainage passage 127, improving the discharge efficiency of the cleaning fluid.

[0071] like Figure 4 As shown, in some embodiments, the drainage assembly 14 includes a drainage pipe 141 and a valve 142. The drainage pipe 141 includes a first drainage pipe 1411, a second drainage pipe 1412, and a third drainage pipe 1413. One end of the first drainage pipe 1411 is connected to the apex of the bottom surface 1121, and the other end is connected to the second drainage pipe 1412 and the third drainage pipe 1413. The valve 142 is located at the end of the first drainage pipe 1411 facing away from the bottom surface 1121 and is used to control the connection between the first drainage pipe 1411 and the second drainage pipe 1412 or the third drainage pipe 1413.

[0072] One end of the first drain pipe 1411 is connected to the apex of the bottom surface 1121, that is, the first drain pipe 1411 is connected to the lowest point of the bottom surface 1121, which ensures that the cleaning fluid in the cleaning chamber 113 is completely and effectively discharged. The other end of the first drain pipe 1411 is connected to the second drain pipe 1412 and the third drain pipe 1413, that is, by setting the first drain pipe 1411, the cleaning fluid in the cleaning chamber 113 can be discharged through the second pipe 1412 or the third pipe 1413.

[0073] Valve 142 is located at the end of the first drain pipe 1411 away from the bottom surface 1121. By setting valve 142, the flow mode of the end of the first pipe 1411 away from the bottom surface 1121 can be switched, so that the first pipe 1411 can be connected to the second drain pipe 1412, or the first pipe 1411 can be connected to the third drain pipe 1413.

[0074] When the graphite boat is placed on the turntable 122, the turntable 122 is first activated to eject the residual waste liquid from the graphite boat. Then, the waste liquid is collected by connecting the other end of the first drain pipe 1411 to one of the second drain pipe 1412 or the third drain pipe 1413 via valve 142. Subsequently, the spray assembly 13 is activated to spray cleaning fluid to rinse the graphite boat, and the cleaning fluid is collected by connecting the other end of the first drain pipe 1411 to the other of the second drain pipe 1412 or the third drain pipe 1413. In other words, by setting up the drain pipe 141 and valve 142, the waste liquid and cleaning fluid can be collected separately for subsequent differentiated treatment.

[0075] Another aspect of this application provides a graphite boat cleaning device, comprising:

[0076] Graphite boat cleaning device 1 and graphite boat pickling device. The graphite boat pickling device is located upstream of the graphite boat cleaning device 1.

[0077] The graphite boat acid washing device is located upstream of the graphite boat cleaning device 1. That is, when cleaning the graphite boat, the graphite boat is first pre-cleaned in the graphite boat acid washing device to remove the residual polycrystalline silicon layer on the graphite boat; then the graphite boat is placed in the graphite boat cleaning device 1 to further wash away residual acidic waste liquid and other impurities.

[0078] By setting up a graphite boat cleaning device, the two processes of acid washing and cleaning of graphite boats are realized, ensuring the cleaning effect of graphite boats.

[0079] Specifically, such as Figures 1 to 6 As shown, during feeding, the graphite boat is fixedly installed in the fixing member 123, and the upper shell 111 is covered by the lower shell 112.

[0080] During cleaning, the turntable 122 is first activated, using the centrifugal force generated by its rotation to fling off any remaining acidic waste liquid from the graphite boat, which is then discharged through the drain assembly 14. Next, the spray assembly 13 is activated to rinse the graphite boat. Simultaneously, valve 142 switches the connection between the first pipe 1411 and the second and third pipes 1413, allowing the waste liquid and cleaning fluid to be discharged from different drain pipes 14. Finally, the spray assembly 13 is turned off while the turntable 122 continues to rotate, flinging off the cleaning fluid from the graphite boat.

[0081] After cleaning, the upper shell 111 is removed from the lower shell 112, the graphite boat is taken out from the cleaning chamber 113, and the next batch of graphite boats to be cleaned is loaded into the fixing part 123 for the next cleaning process.

[0082] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0083] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A graphite boat cleaning device, characterized in that, The graphite boat cleaning device includes: The housing assembly includes an upper housing, a lower housing, and a cleaning chamber. The upper housing and the lower housing are fitted together to form a closed cleaning chamber. The lower housing includes a conical bottom surface and a first side surface, with the first side surface surrounding the bottom surface. A rotating assembly is rotatably disposed in the cleaning chamber relative to the housing assembly; The spray assembly is positioned toward the rotating assembly; and A drainage assembly is configured to communicate with the apex of the bottom surface to drain the liquid from the cleaning chamber.

2. The graphite boat cleaning apparatus according to claim 1, wherein The upper housing includes a top surface and a second side surface surrounding the top surface. The top surface is a conical surface. The outer side surface of the second side surface abuts against the inner side surface of the first side surface, or the inner side surface of the second side surface abuts against the outer side surface of the first side surface.

3. The graphite boat cleaning apparatus of claim 1, wherein, The spray assembly includes a first pipe and a second pipe that are interconnected. The first pipe passes through the upper housing, and the second pipe extends circumferentially into the cleaning chamber. The spray assembly also includes a plurality of spray nozzles spaced apart from each other in the second pipe.

4. The graphite boat cleaning apparatus of claim 2, wherein The graphite boat cleaning device also includes an air inlet and an exhaust outlet disposed on the top surface.

5. The graphite boat cleaning apparatus according to any one of claims 1 to 4, characterized by The rotating assembly further includes: A slewing bearing is fixedly mounted on the bottom surface; A turntable, connected to the slewing bearing; and A fixing member is provided on the side of the turntable opposite to the slewing support member.

6. The graphite boat cleaning apparatus of claim 5, wherein, The rotating assembly further includes: A drive motor, connected to the turntable drive, drives the turntable to rotate; and The motor housing contains the drive motor and the slewing bearing.

7. The graphite boat cleaning apparatus of claim 5, wherein, The turntable has a hollow structure, and / or the size of the turntable is smaller than the size of the cleaning chamber, so as to form a drainage passage between the turntable and the housing assembly.

8. The graphite boat cleaning apparatus according to any one of claims 1 to 4, characterized by The drainage assembly includes: The drainage system includes a first drainage pipe, a second drainage pipe, and a third drainage pipe. One end of the first drainage pipe is connected to the apex of the bottom surface, and the other end is connected to the second and third drainage pipes. A valve is provided at one end of the first drain pipe away from the bottom surface, and is used to control the connection between the first drain pipe and the second drain pipe or the third drain pipe.

9. A graphite boat cleaning apparatus, characterized by, The graphite boat cleaning equipment includes: The graphite boat cleaning apparatus according to any one of claims 1 to 8; and The graphite boat acid washing device is located upstream of the graphite boat cleaning device.

Images