A multi-degree-of-freedom motion platform and optical detection system

Abstract

This utility model discloses a multi-degree-of-freedom motion platform and optical detection system, comprising: a base; a first moving component, which includes a first support platform, a first linear module, and a first air-bearing structure, wherein the first linear module is drivenly connected to the first support platform, and the first air-bearing structure blows air toward the base to create a gap between the first support platform and the base; and a second moving component, which includes a second support platform, a second linear module, and a second air-bearing structure, wherein the second linear module is mounted on the first support platform and drivenly connected to the second support platform, and the second air-bearing structure blows air toward the first support platform to form an air film between the first support platform and the second support platform. This utility model improves the motion accuracy and speed of the device by reducing the weight borne by the first linear module through the first air-bearing structure blowing air toward the base.

Description

Technical Field

[0001] This utility model belongs to the field of precision optical inspection semiconductor technology, specifically a multi-degree-of-freedom motion platform and optical inspection system. Background Technology

[0002] In the semiconductor field, there is often a need for precision optical processing and inspection of workpieces. This usually requires moving the semiconductor device and the processing head relative to each other in multiple directions to achieve overall scanning inspection or processing of the semiconductor device.

[0003] In related technologies, multiple motion modules (including linear modules and rotary platforms) and a carrier platform are superimposed. Multiple linear modules with different driving directions drive the carrier platform to move in different directions, and the rotary platform is used to realize the rotation of the carrier platform, thereby realizing the multi-degree-of-freedom motion of the carrier platform and the semiconductor devices on the carrier platform.

[0004] However, the superposition of multiple linear modules and rotary platforms will inevitably result in a heavier motion mechanism, which will increase the friction of each linear module during the motion process. The motion accuracy will decrease due to the increased friction, resulting in inconsistent motion accuracy of the motion module formed by the superposition of multiple motion modules, making it difficult to meet the precision requirements of precision testing and processing in the semiconductor field.

[0005] Therefore, there is a need for a motion platform that carries the detection equipment to achieve multi-degree-of-freedom motion in order to meet the optical scanning detection of semiconductors. It is also necessary to improve the accuracy of scanning detection imaging and achieve high-speed displacement motion requirements. This platform can be applied to various precision optical scanning detection semiconductor fields with different ranges, speeds, and accuracy requirements. Utility Model Content

[0006] The purpose of this invention is to provide a multi-degree-of-freedom motion platform and optical inspection system to solve the technical problem that the motion accuracy of the motion module formed by the superposition of multiple motion modules is inconsistent and difficult to meet the precision requirements of precision inspection and processing in the semiconductor field.

[0007] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0008] First aspect:

[0009] A multi-degree-of-freedom motion platform, comprising:

[0010] Base;

[0011] The first moving component includes a first support platform, a first linear module and a first air-bearing structure. The first linear module is driven to the first support platform to drive the first support platform to slide on the base. The first air-bearing structure is arranged on the first support platform and blows air toward the base to leave a gap between the first support platform and the base.

[0012] The second moving component includes a second support platform, a second linear module, and a second air-float structure. The second linear module is mounted on the first support platform and is driven to drive the second support platform to slide on the first support platform. The second air-float structure is arranged on the second support platform and blows air toward the first support platform to form an air film between the first support platform and the second support platform.

[0013] This invention achieves multiple degrees of freedom for the motion platform by setting up a first linear module and a second linear module. The first air-bearing structure blows air onto the base, thereby reducing the weight borne by the first linear module and also reducing the friction between the first support platform and the base. The second air-bearing structure forms an air film between the first support platform and the second support platform, further reducing the friction between them. By reducing the weight borne by the first linear module and reducing the friction between the first and second support platforms, this device improves the motion accuracy and speed.

[0014] Furthermore, it also includes two mounting seats, which are fixed to the base. The two ends of the first support platform are slidably disposed on the two mounting seats respectively. The mounting seats are used to install the first support platform. The first support platform is slidably connected to the mounting seats so that the first support platform can slide on the base. This can reduce the contact area between the first support platform and the base, thereby reducing the friction force of the first support platform sliding on the base.

[0015] Two first linear modules are provided, and the two first linear modules are installed on the two mounting bases. The two first linear modules are respectively driven connected to both ends of the first support platform. The first linear modules are used to realize the sliding connection between the first support platform and the mounting base, and drive the first support platform to slide on the mounting base. By setting two mounting bases and two first linear modules, the stability of the first support platform sliding on the mounting base is improved, and the load-bearing capacity of the first support platform is also improved.

[0016] Furthermore, the first air flotation structure includes a plurality of first air flotation blocks, all of which are arranged on the first support platform. The bottom surface of the first air flotation block is lower than the bottom surface of the first support platform, and a plurality of air holes are provided on the bottom surface of the first air flotation block.

[0017] In this process, air is blown from the bottom surface of the air-bearing block toward the base to form an air film between the first air-bearing block and the base. By using the air holes on the first air-bearing block, the first air-bearing structure blows air toward the base to create a gap between the first support platform and the base. The air holes blowing air toward the base can counteract the gravity of the first support platform and the structure mounted on the first support platform, reduce the load on the first linear module, and ensure motion accuracy.

[0018] Furthermore, an air hole is provided on the side of the first air float near the mounting base. Air is blown through the air hole toward the side of the mounting base to form an air film between the first air float and the mounting base, thereby reducing the friction between the first support platform and the mounting base and ensuring motion accuracy.

[0019] Furthermore, the second support platform is sleeved on the first support platform, and the second air flotation structure includes a plurality of first air outlets; by sleeved on the first support platform, the second support platform serves to provide support and limit the position.

[0020] The second linear module is disposed on the top surface of the first support platform, and a plurality of the first air outlets are disposed on the inner bottom surface of the second support platform. The first air outlets blow air toward the bottom surface of the first support platform to form an air film between the bottom surface of the first support platform and the inner bottom surface of the second support platform.

[0021] Alternatively, the second linear module is disposed on the bottom surface of the first support platform, and a plurality of the first air outlets are disposed on the inner top surface of the second support platform. The first air outlets blow air toward the top surface of the first support platform to form an air film between the top surface of the first support platform and the inner top surface of the second support platform. By blowing air between the first support platform and the second support platform to form an air film, the stability of the movement of the second support platform can be improved and the friction between the first support platform and the second support platform can be reduced.

[0022] Furthermore, the second air flotation structure also includes a plurality of second air outlets. The two inner sides of the second support platform are provided with a plurality of second air outlets. The second air outlets blow air toward the side of the first support platform to form an air film between the side of the first support platform and the inner side of the second support platform, thereby reducing the contact area between the inner side of the second support platform and the side of the first support platform, and thus reducing the friction between the second support platform and the first support platform.

[0023] Furthermore, the second air-bearing structure also includes multiple third air outlets. The bottom surface of the second support platform is provided with multiple third air outlets. The third air outlets blow air towards the base to form an air film between the second support platform and the base, and support the second support base, reduce the friction between the second support platform and the base, and also counteract the gravity of the second support platform, reduce the load on the second linear module, and ensure motion accuracy.

[0024] Furthermore, both the first linear module and the second linear module include a linear motor or a lead screw mechanism, which has high precision.

[0025] Furthermore, it also includes a rotary table, which is mounted on the second support platform, thereby increasing the degree of freedom of the device.

[0026] The second aspect:

[0027] An optical inspection system includes a multi-degree-of-freedom motion platform as described in the first aspect.

[0028] Compared with the prior art, the beneficial effects of this utility model are:

[0029] This invention achieves multiple degrees of freedom for the motion platform by setting up a first linear module and a second linear module. The first air-bearing structure blows air onto the base, thereby reducing the weight borne by the first linear module and also reducing the friction between the first support platform and the base. The second air-bearing structure forms an air film between the first support platform and the second support platform, further reducing the friction between them. By reducing the weight borne by the first linear module and reducing the friction between the first and second support platforms, this device improves the motion accuracy and speed. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of a multi-degree-of-freedom motion platform structure in this embodiment;

[0031] Figure 2 This is a diagram showing the positional relationship between the first support platform and the second support platform in this embodiment;

[0032] In the figure: 1. First linear module; 2. Second linear module; 3. Base; 4. Mounting seat; 5. First support platform; 6. Connecting block; 7. First air flotation block; 8. Mounting strip; 9. Rotary table; 10. Carrier plate; 11. Side plate; 12. Base plate. Detailed Implementation

[0033] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0034] like Figure 1-2 As shown, this embodiment provides a multi-degree-of-freedom motion platform, including:

[0035] Base 3; In this embodiment, base 3 can be made of marble;

[0036] The first moving component includes a first support platform 5, a first linear module 1 and a first air-bearing structure. The first linear module 1 is driven to the first support platform 5 to drive the first support platform 5 to slide on the base 3. The first air-bearing structure is arranged on the first support platform 5 and blows air toward the base 3 to leave a gap between the first support platform 5 and the base 3.

[0037] The second moving component includes a second support platform, a second linear module 2, and a second air-float structure. The second linear module 2 is mounted on the first support platform 5 and is driven to drive the second support platform to slide on the first support platform 5. The second air-float structure is arranged on the second support platform and blows air toward the first support platform 5 to form an air film between the first support platform 5 and the second support platform.

[0038] This invention achieves multiple degrees of freedom for the motion platform by setting up a first linear module 1 and a second linear module 2. By blowing air onto the base 3 through the first air-bearing structure, the weight borne by the first linear module 1 is reduced, and the friction between the first support platform 5 and the base 3 is also reduced. The second air-bearing structure forms an air film between the first support platform 5 and the second support platform, thereby reducing the friction between them. By reducing the weight borne by the first linear module 1 and reducing the friction between the first support platform 5 and the second support platform, this device improves the motion accuracy and speed.

[0039] Furthermore, it also includes two mounting seats 4, which are fixed to the base 3. The two ends of the first support platform 5 are slidably disposed on the two mounting seats 4 respectively. The mounting seats 4 are used to install the first support platform 5. The first support platform 5 is slidably connected to the mounting seats 4 so as to realize that the first support platform 5 can slide on the base 3, which can reduce the contact area between the first support platform 5 and the base 3, thereby reducing the friction force of the first support platform 5 sliding on the base 3.

[0040] Two first linear modules 1 are provided, each mounted on one of the two mounting bases 4. Each first linear module 1 is driven to one or both ends of the first support platform 5. The first linear modules 1 are used to achieve a sliding connection between the first support platform 5 and the mounting base 4, and to drive the first support platform 5 to slide on the mounting base 4. By providing two mounting bases 4 and two first linear modules 1, the stability of the first support platform 5 sliding on the mounting base 4 is improved, as is the load-bearing capacity of the first support platform 5. In this embodiment, the mounting base 4 can be marble. The material is such that two first linear modules 1 are respectively installed on the top surfaces of two mounting bases 4. The length direction of the first linear module 1 and its corresponding mounting base 4 are consistent. The two first linear modules 1 are arranged parallel to each other. The first support platform 5 is slidably mounted on the mounting base 4 through the first linear modules 1. Specifically, the two ends of the first support platform 5 are fixedly connected to the moving parts of the two first linear modules 1 respectively. The stator part of the first linear module 1 is installed on its corresponding mounting base 4. The moving part of the first linear module 1 is slidably connected to its stator part, so that the two ends of the first support platform 5 are slidably connected to the two sliding seats respectively.

[0041] Furthermore, the first air flotation structure includes a plurality of first air flotation blocks 7, all of which are arranged on the first support platform 5. The bottom surface of the first air flotation block 7 is lower than the bottom surface of the first support platform 5, and a plurality of air holes are opened on the bottom surface of the first air flotation block 7.

[0042] In this embodiment, air is blown from the bottom surface of the air-bearing block towards the base 3 to form an air film between the first air-bearing block 7 and the base 3. The first air-bearing block 7, in conjunction with the air holes on it, allows the first air-bearing structure to blow air towards the base 3, creating a gap between the first support platform 5 and the base 3. The air holes blowing air towards the base 3 can counteract the weight of the first support platform 5 and the structures mounted on it, reducing the load on the first linear module 1 and ensuring motion accuracy. In this embodiment, the bottom surface of the first support platform 5 is provided with two first air-bearing blocks 7, which are respectively located on both sides of the bottom surface of the first support platform 5. The first air-bearing blocks 7 are fixedly connected to the moving parts of their corresponding first linear modules 1, so that both ends of the first support platform 5 are connected to the moving parts of the two first linear modules 1 respectively. In this embodiment, the first air-bearing blocks 7 are fixedly connected to the moving parts of the first linear modules 1 through connecting blocks 6.

[0043] Furthermore, an air hole is provided on the side of the first air float 7 near the mounting base 4. Air is blown towards the side of the mounting base 4 through the air hole to form an air film between the first air float 7 and the mounting base 4, thereby reducing the friction between the first support platform 5 and the mounting base 4 and ensuring motion accuracy.

[0044] Furthermore, the second support platform is sleeved on the first support platform 5, and the second air flotation structure includes a plurality of first air outlets; by sleeved on the first support platform 5, the second support platform serves as a support and limiting function;

[0045] The second linear module 2 is disposed on the top surface of the first support platform 5, and a plurality of first air outlets are disposed on the inner bottom surface of the second support platform, and the first air outlets blow air toward the bottom surface of the first support platform 5 to form an air film between the bottom surface of the first support platform 5 and the inner bottom surface of the second support platform.

[0046] Alternatively, the second linear module 2 is disposed on the bottom surface of the first support platform 5, and a plurality of the first air outlets are disposed on the inner top surface of the second support platform, and the first air outlets blow air toward the top surface of the first support platform 5 to form an air film between the top surface of the first support platform 5 and the inner top surface of the second support platform. By blowing air between the first support platform 5 and the second support platform to form an air film, the stability of the movement of the second support platform can be improved and the friction between the first support platform 5 and the second support platform can be reduced.

[0047] In this embodiment, the second linear module 2 in the figure is disposed on the top surface of the first support platform 5, and the length direction of the second linear module 2 is consistent with the length direction of the first support platform 5, while the length direction of the first linear module 1 is perpendicular to the length direction of the second linear module 2.

[0048] In this embodiment, the second support platform includes a carrying plate 10, two side plates 11, and a base plate 12. The carrying plate 10 and the base plate 12 are arranged in parallel, and the two side plates 11 are arranged in parallel. The two sides of the carrying plate 10 are fixedly connected to the two sides of the base plate 12 through the two side plates 11. The carrying plate 10, the two side plates 11, and the base plate together form the second support platform. The first support platform 5 is located between the carrying plate 10 and the base plate 12, and also between the two side plates 11. The two side plates 11 are parallel to the side walls of the first support platform 5, and the base plate 12 is parallel to the bottom surface of the first support platform 5. The bottom surface of the carrying plate 10 is driven to be connected to the second linear module 2, so that the second linear module 2 can drive the second support platform to slide along the length direction of the second linear module 2.

[0049] Furthermore, the second air flotation structure also includes a plurality of second air outlets. The two inner sides of the second support platform are provided with a plurality of second air outlets. The second air outlets blow air toward the side of the first support platform 5 to form an air film between the side of the first support platform 5 and the inner side of the second support platform, thereby reducing the contact area between the inner side of the second support platform and the side of the first support platform 5, and thus reducing the friction between the second support platform and the first support platform 5.

[0050] Furthermore, the second air-bearing structure also includes multiple third air outlets. The bottom surface of the second support platform is provided with multiple third air outlets. The third air outlets blow air towards the base 3 to form an air film between the second support platform and the base 3, and support the second support base, reduce the friction between the second support platform and the base 3, and also counteract the gravity of the second support platform, reduce the load on the second linear module 2, and ensure motion accuracy.

[0051] In this embodiment, the air hole, the first air outlet, the second air outlet, and the third air outlet are all connected to an external air source so that the air hole, the first air outlet, the second air outlet, and the third air outlet can blow air outward.

[0052] Furthermore, both the first linear module 1 and the second linear module 2 include a linear motor or a lead screw mechanism, which has high precision. In this embodiment, the first linear module 1 and the second linear module 2 may also include an air-bearing guide rail.

[0053] Furthermore, it also includes a rotary table 9, which is mounted on the second support platform. The rotary table 9 improves the degree of freedom of this device. In this embodiment, the rotary table 9 can be a DD motor, which realizes the rotation function.

[0054] In this embodiment, an installation strip 8 can also be provided on the top surface of the first support platform 5. A grating ruler can be provided on the installation strip 8. The grating ruler can be used to detect the relative position between the second support platform and the first support platform 5. In this embodiment, since the grating ruler is existing technology, it is not drawn. The installation of the grating ruler is also existing technology. In this embodiment, it is only necessary to use the grating ruler to determine the relative position between the second support platform and the first support platform 5.

[0055] The second aspect:

[0056] An optical inspection system includes a multi-degree-of-freedom motion platform as described in the first aspect.

[0057] It should be noted that although the present invention has been disclosed above with specific embodiments, the above embodiments are not intended to limit the present invention. Those skilled in the art can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope defined in the claims.

Claims

1. A multi-degree of freedom motion platform, characterized in that, include: Base; The first moving component includes a first support platform, a first linear module and a first air-bearing structure. The first linear module is driven to the first support platform to drive the first support platform to slide on the base. The first air-bearing structure is arranged on the first support platform and blows air toward the base to leave a gap between the first support platform and the base. The second moving component includes a second support platform, a second linear module, and a second air-float structure. The second linear module is mounted on the first support platform and is driven to drive the second support platform to slide on the first support platform. The second air-float structure is arranged on the second support platform and blows air toward the first support platform to form an air film between the first support platform and the second support platform.

2. The multi-degree of freedom motion platform of claim 1, wherein, It also includes two mounting bases, which are fixed to the base, and the two ends of the first support platform are slidably disposed on the two mounting bases respectively; There are two first linear modules, which are mounted on two mounting bases and are respectively driven connected to both ends of the first support platform.

3. The multi-degree of freedom motion platform of claim 2, wherein, The first air flotation structure includes a plurality of first air flotation blocks, all of which are arranged on the first support platform. The bottom surface of the first air flotation block is lower than the bottom surface of the first support platform, and a plurality of air holes are provided on the bottom surface of the first air flotation block. In this process, air is blown from the bottom surface of the air flotation block toward the base to form an air film between the first air flotation block and the base.

4. The multi-degree of freedom motion platform of claim 3, wherein, An air hole is provided on the side of the first air flotation block near the mounting base. Air is blown through the air hole toward the side of the mounting base to form an air film between the first air flotation block and the mounting base.

5. The multi-degree of freedom motion platform of claim 1, wherein, The second support platform is sleeved on the first support platform, and the second air flotation structure includes a plurality of first air outlets; The second linear module is disposed on the top surface of the first support platform, and a plurality of the first air outlets are disposed on the inner bottom surface of the second support platform. The first air outlets blow air toward the bottom surface of the first support platform to form an air film between the bottom surface of the first support platform and the inner bottom surface of the second support platform. Alternatively, the second linear module is disposed on the bottom surface of the first support platform, and a plurality of the first air outlets are disposed on the inner top surface of the second support platform, and the first air outlets blow air toward the top surface of the first support platform to form an air film between the top surface of the first support platform and the inner top surface of the second support platform.

6. The multi-degree-of-freedom motion platform as described in claim 5, characterized in that, The second air flotation structure also includes a plurality of second air outlets. The two inner sides of the second support platform are provided with a plurality of second air outlets. The second air outlets blow air toward the side of the first support platform to form an air film between the side of the first support platform and the inner side of the second support platform.

7. The multi-degree of freedom motion platform of claim 5, wherein, The second air flotation structure also includes a plurality of third air outlets. The bottom surface of the second support platform is provided with a plurality of the third air outlets. The third air outlets blow air toward the base to form an air film between the second support platform and the base, and to support the second support base.

8. The multi-degree-of-freedom motion platform of any one of claims 1-7, wherein, Both the first linear module and the second linear module include a linear motor or a lead screw mechanism.

9. The multi-degree of freedom motion platform of claim 1, wherein, It also includes a rotary table, which is mounted on the second support platform.

10. An optical detection system, characterized in that Includes a multi-degree-of-freedom motion platform as described in any one of claims 1 to 9.

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