A coating apparatus

Abstract

This utility model discloses a coating equipment, relating to the technical field of coating equipment. The coating equipment includes: a target holder and a process cavity; the target holder includes multiple layers of target materials arranged longitudinally, and a partition plate disposed between each pair of adjacent target materials; the process cavity includes an open target material cavity for accommodating the target holder and a transmission part with multiple chambers arranged longitudinally, the target material cavity communicating with the multiple chambers, a partition plate disposed between each pair of adjacent chambers, and a first transmission component disposed in each chamber; the process cavity also includes multiple first conveying ports disposed on two opposite sides of the process cavity, the multiple first conveying ports on the two sides being symmetrically arranged, and each chamber corresponding to two symmetrical first conveying ports; after the target holder is placed into the target material cavity, the partition plate abuts against the partition plate, and each layer of target material corresponds to one chamber in the transmission part; this coating equipment can perform multi-threaded multi-target simultaneous coating, effectively improving coating efficiency.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a coating equipment. Background Technology

[0002] In existing coating equipment, only a single target material is placed in the target holder. Film layers are formed on different main surfaces of the substrate by conveying the substrate into the process cavity above or below the target material. Due to limitations in stability during the conveying process, the conveying speed of the substrate cannot be set too high, resulting in limited coating efficiency when multiple substrates need to be coated sequentially. Furthermore, existing coating equipment cannot simultaneously coat multiple targets of different materials; it can only coat different targets separately by replacing the target material in the target holder. Utility Model Content

[0003] In view of this, the present invention provides a coating apparatus. By arranging multiple layers of targets longitudinally in a target holder, setting partitions between each pair of adjacent target layers, and simultaneously setting a target cavity and a transmission unit in the process cavity, after the target holder is installed into the target cavity, the partitions abut against the isolation components, thereby dividing the target holder and the interior of the process cavity into multiple independent coating spaces. Independent coating can be achieved using the target material in each coating space. Simultaneously, by setting symmetrical first transfer ports on two sides of the process cavity, corresponding to the chambers, the first transfer ports can be used to input and output multiple cavities to be processed, thereby achieving multi-threaded, multi-target simultaneous coating of multiple cavities to be processed, effectively improving coating efficiency.

[0004] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0005] This utility model provides a coating apparatus, comprising: a target holder and a process cavity; wherein, the target holder includes multiple layers of target materials arranged longitudinally, and a partition plate disposed between each adjacent two layers of target materials; the process cavity includes an open target material cavity for accommodating the target holder and a transmission part having multiple chambers arranged longitudinally, wherein the target material cavity communicates with the multiple chambers, a partition is disposed between each adjacent two chambers, and a first transmission assembly is disposed in each chamber; the process cavity further includes multiple first conveying ports disposed on two opposite sides of the process cavity, and multiple... The first transfer ports are symmetrically arranged, and each chamber corresponds to two symmetrical first transfer ports; after the target holder is placed into the target material cavity, the partition plate abuts against the isolation member, and each layer of the target material corresponds to one chamber in the transmission part; the substrate to be processed is introduced into the process cavity from one side of the first transfer port, and the substrate to be processed is transported laterally by the first transmission assembly, so that the substrate to be processed passes above or below the target material, and after the target material forms a film layer on the substrate to be processed, the substrate to be processed with the film layer is transferred out from the first transfer port on the other side.

[0006] Optionally, there are multiple target material cavities, and the multiple target material cavities are arranged at intervals; a transmission part is provided between each two adjacent target material cavities; and a target seat is placed in each target material cavity.

[0007] Optionally, the lengths of the multiple target materials are consistent.

[0008] Optionally, it further includes: multiple non-process cavities; the non-process cavities are hollow structures with closed top and bottom, and the multiple non-process cavities are respectively arranged on both sides of the process cavity; multiple second transfer ports are arranged on two opposite sides of the non-process cavities, and the second transfer ports on the two sides are symmetrically arranged; wherein, the second transfer port corresponds one-to-one with the first transfer port on the adjacent process cavity.

[0009] Optionally, there are multiple process cavities, and the multiple process cavities and multiple non-process cavities are arranged in a straight line, with at least one non-process cavity provided between each two adjacent process cavities.

[0010] Optionally, a plurality of longitudinally arranged second transmission components are provided inside the non-process cavity; wherein each second transmission component is laterally corresponding to two symmetrical second transfer ports; the substrate to be processed is introduced into the non-process cavity from one side of the second transfer port, and the substrate to be processed is laterally transported by the second transmission components. After non-process processing, the processed substrate to be processed is transferred out from the other side of the non-process cavity from the second transfer port, so as to be introduced into the adjacent process cavity from the adjacent first transfer port or into another adjacent non-process cavity from the adjacent second transfer port.

[0011] Optionally, it further includes: lifting cavities disposed at both ends of the coating equipment; wherein the lifting cavities are arranged in a straight line with the process cavity and the non-process cavity; the lifting cavities are hollow structures; the lifting cavities include: a plurality of third conveying ports disposed on one side of the lifting cavities and a third transmission assembly disposed inside the hollow structure of the lifting cavities; wherein the side of the lifting cavities having the third conveying ports abuts against the side of the non-process cavity having the second conveying ports; each third conveying port is laterally corresponding to one of the third transmission assemblies, and each third conveying port is corresponding to one of the second conveying ports on the adjacent non-process cavity.

[0012] Optionally, the upper surface of the lifting cavity is an open structure, and the lifting cavity further includes a longitudinally moving lifting assembly; after the substrate to be processed is placed into the lifting assembly of the lifting cavity through the open structure, the lifting assembly controls the substrate to be processed to move in the longitudinal direction, and after moving to the position corresponding to the third conveying port, it is transmitted out of the lifting cavity in the lateral direction by the third transmission assembly, so as to be transmitted from the adjacent second conveying port into the adjacent non-processing cavity.

[0013] Optionally, it further includes: a carrier plate for placing the substrate to be processed; the carrier plate cooperates with the first transmission assembly, the second transmission assembly and the third transmission assembly to transport the substrate to be processed in the lateral direction.

[0014] Optionally, the second transmission port is the same size as the first transmission port.

[0015] Optionally, the third transmission port is the same size as the second transmission port.

[0016] The above-mentioned utility model has the following advantages or beneficial effects: By setting multiple layers of targets arranged longitudinally in the target holder, setting a partition between each pair of adjacent target layers, and simultaneously setting a target cavity and a transmission unit in the process cavity, after the target holder is installed into the target cavity, the partition abuts against the isolation component in the transmission unit, thereby dividing the process cavity into multiple independent coating spaces, which can be independently coated using the target material in each coating space. Simultaneously, by setting a first transmission component inside the process cavity and symmetrical first transfer ports corresponding to the chambers on two sides of the process cavity, the input and output of multiple cavities to be processed can be achieved using the first transmission component and the first transfer ports, thereby achieving the effect of multi-threaded, multi-target simultaneous coating of multiple cavities to be processed, effectively improving coating efficiency. Attached Figure Description

[0017] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0018] Figure 1 This is a schematic diagram showing the positional relationship between the target holder and the process cavity according to an embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of the specific structure of the target holder according to an embodiment of the present utility model;

[0020] Figure 3 This is a front view of the target holder after it has been inserted into the process cavity according to an embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the specific structure of the process cavity according to an embodiment of the present utility model;

[0022] Figure 5 This is a schematic diagram of the structure of the substrate to be processed moving in the process cavity according to an embodiment of the present invention;

[0023] Figure 6 This is a schematic diagram illustrating the positional relationship between a process cavity and a non-process cavity according to an embodiment of the present utility model;

[0024] Figure 7 This is a schematic diagram of the structure of the non-process cavity according to an embodiment of the present utility model;

[0025] Figure 8 This is a schematic diagram illustrating the positional relationship between a process cavity and a non-process cavity according to another embodiment of the present invention;

[0026] Figure 9 This is a schematic diagram showing the position of the second transmission component in the non-process cavity according to an embodiment of the present utility model;

[0027] Figure 10This is a schematic diagram of the lifting cavity according to an embodiment of the present utility model;

[0028] Figure 11 This is a cross-sectional structural schematic diagram of the process of the substrate to be treated moving laterally in the coating equipment according to an embodiment of the present utility model;

[0029] Figure 12 This is another cross-sectional structural schematic diagram of the process of the substrate to be treated moving laterally in the coating equipment according to an embodiment of the present utility model.

[0030] The attached figures are labeled as follows:

[0031] 1-Target mount; 11-Target material; 12-Separator;

[0032] 2-Process cavity; 21-Isolation component; 22-First transmission assembly; 23-First transfer port;

[0033] 3-Non-process cavity; 31-Second transfer port; 32-Second transmission assembly;

[0034] 4-Lifting cavity; 41-Third conveying port; 42-Third transmission assembly; 43-Lifting assembly;

[0035] 5-Carrier plate;

[0036] 100 - Target cavity; 200 - Transmission unit. Detailed Implementation

[0037] Figures 1 to 4 A schematic diagram of a coating apparatus provided in an embodiment of the present invention is shown, wherein, Figure 1 This illustrates the positional relationship between the target holder 1 and the process cavity 2 in an embodiment of the present invention. Figure 2 This diagram shows a specific structural schematic of the target holder 1 according to an embodiment of the present invention. Figure 3 This shows a front view of the target holder 1 after it is inserted into the process cavity 2 according to an embodiment of the present invention. Figure 4 A schematic diagram of the specific structure of the process cavity 2 is shown.

[0038] like Figures 1 to 4As shown, the coating equipment provided by this utility model includes: a target holder 1 and a process cavity 2; wherein, the target holder 1 includes multiple layers of target materials 11 arranged longitudinally, and a partition 12 disposed between each two adjacent layers of target materials 11; the process cavity 2 includes an open target material cavity 100 for accommodating the target holder 1 and a transmission part 200 having multiple chambers arranged longitudinally, wherein the target material cavity 100 communicates with the multiple chambers, a partition 21 is disposed between each two adjacent chambers, and a first transmission assembly 22 is disposed in each chamber; The process cavity 2 also includes a plurality of first transfer ports 23 disposed on two opposite sides of the process cavity 2. The plurality of first transfer ports 23 on the two sides are symmetrically arranged, and each chamber corresponds to two symmetrical first transfer ports 23. After the target holder 1 is placed into the target cavity 100, the partition 12 abuts against the isolation member 21, and each layer of target material 11 corresponds to one chamber of the transmission part 200. The substrate to be processed is introduced into the process cavity 2 through a first transfer port 23 on one side, and is transported laterally by the first transmission assembly 22, so that the substrate to be processed passes above or below the target material 11. After the target material 11 forms a film layer on the substrate to be processed, the substrate to be processed with the film layer is discharged from the first transfer port 23 on the other side. Figures 1 to 4 The number of target materials 11 is merely an exemplary limitation and does not imply that the target materials 11 in this embodiment of the present invention can only be set to two layers. In actual application, the number of target materials 11 can be set according to actual needs.

[0039] In order to clearly distinguish between the target cavity 100 and the transmission part 200 in the process cavity 2, in Figure 4 The areas corresponding to the target cavity 100 and the transmission unit 200 are marked in red and blue, respectively. Specifically, the red area shows the area of ​​the target cavity 100, and the blue area shows the area corresponding to the transmission unit 200. Figures 1 to 4 As can be seen, in this embodiment of the present invention, the upper end of the target holder 1 is a closed structure, and the lower end is a multi-layered target material 11 arranged longitudinally. Before using the coating equipment, the multi-layered target material 11 needs to be installed in the target holder 1, and the target holder 1 with the target material 11 installed is inserted from the opening of the process cavity 2 into the target cavity 100 of the process cavity 2, so that the target holder 1 and the process cavity 2 are combined to obtain Figure 3 The front view structure is shown.

[0040] Understandably, after the target holder 1 is placed into the target cavity 100, the first transfer port 23 corresponds precisely to the area above or below the target 11 and is aligned with the first transmission component 22. This allows the substrate to be processed to pass above or below the target 11 via the first transfer port 23 and, driven by the first transmission component 22, pass through the target 11. Under the synchronous action of the electric field, high-speed electrons continuously bombard the surface of the target 11, causing target atoms to be deposited during the transfer of the substrate, ultimately forming a film on the front or back of the substrate.

[0041] The partition 12 can be fixed to the frame structure of the target holder 1 by screws or other means. Since the partition 12 is provided between each pair of adjacent target material layers 11, and the partition 12 abuts against the isolation member 21 between the target holder 1 and the chamber after the target holder 1 is placed into the target cavity 100, each target material layer 11 is located in an independent space. This ensures that there is no interference between the multiple target materials 11 during the deposition process. When different materials are selected for each target material layer 11, multiple substrates to be treated can be introduced into the process cavity 2 through different first transfer ports 23 and can be placed in the spaces corresponding to different target materials 11. This achieves simultaneous deposition of films of different materials on multiple substrates to be treated, greatly improving the coating efficiency. Of course, when the same material is selected for each target material layer 11, different thicknesses of films can also be deposited on multiple substrates to be treated by controlling different process conditions. In addition, since the first transmission component 22 in each chamber is also relatively independent, the transmission direction of the substrate to be processed corresponding to different target materials 11 can also be different, and this utility model does not limit this.

[0042] In one optional embodiment, there are multiple target cavities 100, and the multiple target cavities 100 are arranged at intervals; a transmission part 200 is provided between every two adjacent target cavities 100; and each target cavity 100 corresponds to a target holder 1. Figure 1 , Figure 4 as well as Figure 5As shown, there are two target material cavities 100, and a transmission part 200 is provided between the two target material cavities 100. That is, by providing a transmission part 200, the substrate to be processed can pass through the target material cavity 100 twice in succession. That is, when different target material 1s are placed in different target material cavities 100, the effect of sequentially preparing multiple film layers can be achieved by entering and exiting the process cavity 2 once. For example, a target material 11 of material A is placed in one target material cavity 100, and a target material 11 of material B is placed in another target material cavity 100. When the substrate to be processed is introduced into the process cavity 2 from the first transfer port 23 corresponding to one side of the target material 11 of material A, it will first pass through the target material 11 of material A, thereby depositing a film layer A on the substrate to be processed. As the transmission unit 200 drives the substrate to be processed to move, it will continue to pass through the target material 11 of material B. At this time, a film layer B will be further deposited on the outside of the film layer A. Finally, after exiting the process cavity 2, a substrate to be processed with film layer A and film layer B stacked from the inside to the outside will be obtained.

[0043] In one optional embodiment, the length of the multilayer target 11 is consistent. Since the final effect of film deposition is related to both the process conditions and the length of the target 11, in this embodiment of the present invention, the length of the multilayer target 11 can be set to the optimal length so that the deposited film can cover the substrate to be treated and there will be no incomplete deposition.

[0044] In one optional embodiment, the first transmission component 22 can be a transmission wheel. After the substrate to be processed comes into contact with the transmission wheel, the friction between the transmission wheel and the substrate allows the substrate to move laterally as the transmission wheel rotates. Besides the transmission wheel, other transmission components such as a conveyor belt can also be used; this invention does not specifically limit the application of such components.

[0045] In further optional embodiments, such as Figure 6 and Figure 8 As shown, the coating equipment provided by this utility model also includes: multiple non-processing cavities 3; wherein, the non-processing cavities 3 are hollow structures with closed top and bottom, and the multiple non-processing cavities 3 are respectively arranged on both sides of the processing cavity 2; multiple second transfer ports 31 are arranged on the two opposite sides of the non-processing cavities 3, and the second transfer ports 31 on the two sides are symmetrically arranged; wherein, each second transfer port 31 corresponds one-to-one with the first transfer port 23 on the adjacent processing cavity 2.

[0046] In this context, the process chamber 2 can be understood as the chamber for preparing the deposited film, while the non-process chamber 3 can be understood as other functional chambers used before and after film preparation, such as chambers for heating / cooling, pressurizing / depressurizing, etc. For a single coating process, vacuuming, pressurizing, and heating are usually required before coating, followed by cooling and depressurization to obtain the substrate with the deposited film. Therefore, there are usually multiple non-process chambers 3 of equal number and opposite functions on both sides of the process chamber 2.

[0047] For example, with Figure 6 and Figure 7 Taking an example, the specific arrangement position and structure of the non-process cavity 3 in this embodiment of the present invention will be described in detail. Figure 6 The positional relationship between the process cavity 2 and the non-process cavity 3 in this embodiment of the present invention is shown. Figure 7 The specific structure of the non-process cavity 3 is shown. For example... Figure 6 As shown, there are six non-process cavities 3, symmetrically arranged on both sides of the process cavity 2 which has the first transfer port 23; that is, three non-process cavities 3 are arranged on each side of the process cavity 2. (This is in conjunction with...) Figure 6 as well as Figure 7 It can be seen that by setting second transfer ports 31 on two opposite sides of the non-processing cavity 3, and making each second transfer port 31 correspond to a first transfer port 23, the second transfer port 31 can dock with the first transfer port 23 after the side of the non-processing cavity 3 with the second transfer port 31 abuts against the side of the processing cavity 2 with the first transfer port 23. This allows the substrate to be processed to pass through the left non-processing cavity 3, the processing cavity 2, and the right non-processing cavity 3 in sequence, completing the deposition process. For example, with... Figure 6 Taking the arrow direction as an example, the substrate to be processed passes through the second transfer port 31 of the non-processing cavity 3 on the left and the first transfer port 23 located on the left side of the processing cavity 2, and is then laterally transferred from the non-processing cavity 3 into the processing cavity 2. Similarly, after film deposition is completed, it can also pass through the first transfer port 23 located on the right side of the processing cavity 2 and the second transfer port 31 of the right non-processing cavity 3 in sequence, and be laterally transferred from the processing cavity 2 into another non-processing cavity 3. Similarly, for multiple adjacent non-processing cavities 3, since each second transfer port 31 corresponds to a first transfer port 23, by abutting the second transfer ports 31 on two non-processing cavities 3, it is also possible to achieve docking of two corresponding second transfer ports 31 on two non-processing cavities 3, thereby enabling the substrate to be processed to pass through the two abutting second transfer ports 31 in sequence and be laterally transferred from one non-processing cavity 3 to another adjacent non-processing cavity 3.

[0048] In one optional embodiment, the second conveying port 31 is the same size and has the same outline as the first conveying port 23. Exemplarily, both the second conveying port 31 and the first conveying port 23 are rectangular structures, and the length, width, and height of the rectangular structures are the same.

[0049] In a further optional embodiment, there may be multiple process cavities 2, which are arranged in a straight line with multiple non-process cavities 3, and at least one non-process cavity 3 is provided between every two adjacent process cavities 2. For example, as shown... Figure 8 As shown, a non-processing cavity 3 is disposed between two process cavities 2, and three non-processing cavities 3 are disposed on each side of the two process cavities 2. The non-processing cavities 3 located between the two process cavities 2 can effectively avoid mutual interference between the two adjacent process cavities 2 during the film deposition process, ensuring that the substrate to be processed has an effective transition space as it passes through multiple process cavities 2 in sequence.

[0050] In an optional embodiment, such as Figure 9 As shown, multiple longitudinally arranged second transmission components 32 are arranged inside the non-process cavity 3; each second transmission component 32 is laterally corresponding to two symmetrical second transfer ports 31; the substrate to be processed is introduced into the non-process cavity 3 from one side of the second transfer port 31, and is laterally transported by the second transmission components 32. After non-process processing, the processed substrate is transferred out from the other side of the non-process cavity 3 from the second transfer port 31, so as to be transferred from the adjacent first transfer port 23 into the adjacent process cavity 2 or from the adjacent second transfer port 31 into another adjacent non-process cavity 3. Figure 9 The number of the second conveying components 32 is only for illustration. The number of the second transmission components 32, the second conveying port 31, the first transmission components 22, and the first conveying port 23 should be the same, and their positions should be aligned in a straight line so that the substrate to be processed can move smoothly between multiple non-processing cavities 3 and between non-processing cavities 3 and processing cavities 2. The second transmission components 32 can have the same structure as the first transmission components 22, such as transmission wheels or conveyor belts.

[0051] In further optional embodiments, such as Figure 6 , Figure 8 and Figure 10As shown, the coating equipment provided by this utility model further includes: lifting cavities 4 disposed at both ends of the coating equipment; wherein, the lifting cavities 4 are arranged in a straight line with the process cavity 2 and the non-process cavity 3; the lifting cavities 4 are hollow structures, including: a plurality of third conveying ports 41 disposed on one side of the lifting cavities 4 and a third transmission component 42 disposed inside the hollow structure of the lifting cavities 4; wherein, the side of the lifting cavities 4 with the third conveying ports 41 abuts against the side of the non-process cavity 3 with the second conveying ports 31; each third conveying port 41 is laterally corresponding to a third transmission component 42, and each third conveying port 41 is corresponding to a second conveying port 31 on the adjacent non-process cavity 3. Figure 6 and Figure 8 It can be seen that regardless of how many process cavities 2 and non-process cavities 3 are set, the lifting cavity 4 is always located at both ends of the coating equipment and abuts against the non-process cavity 3 at the very end. Furthermore, by setting multiple third transfer ports 41 on one side of the lifting cavity 4, which are respectively corresponding to the second transfer port 31, the process of transversely transferring the substrate to be processed from the lifting cavity 4 into the non-process cavity 3 can be realized after the side of the lifting cavity 4 with the third transfer port 41 abuts against the side of the non-process cavity 3 with the second transfer port 31.

[0052] In one optional embodiment, the third conveying port 41 and the second conveying port 31 are the same size and have the same outline. Exemplarily, both the third conveying port 41 and the second conveying port 31 are rectangular structures, and the length, width, and height of the rectangular structures are the same.

[0053] In further optional embodiments, such as Figure 10 As shown, the upper surface of the lifting cavity 4 is an open structure. The lifting cavity 4 also includes a longitudinally moving lifting assembly 43. After the substrate to be processed is placed into the lifting assembly 43 of the lifting cavity 4 through the open structure, the lifting assembly 43 controls the substrate to be processed to move in the longitudinal direction. After moving to the position corresponding to the third conveying port 41, the substrate is laterally transported out of the lifting cavity 4 by the third transmission assembly 42, so as to be transferred from the adjacent second conveying port 31 to the adjacent non-processing cavity 3. It can be understood that the lifting cavity 4, as the end structure of the coating equipment, not only has the function of moving the substrate to be processed laterally, but also has the function of moving the substrate to be processed longitudinally. When multiple substrates to be processed need to be deposited with different materials, the lifting assembly 43 can be used to move the substrates to be processed to the third conveying ports 41 at different heights, thereby realizing the lateral transfer of different substrates to be processed to the top or bottom of different film materials. The lifting assembly 43 can be a lifting cylinder or other structures with lifting functions, and this utility model does not specifically limit it.

[0054] Under normal circumstances, the lifting assembly 43 can only move one substrate to be processed at a time and transport one substrate to be processed to a third transfer port 41. When multiple substrates to be processed need to be coated, multiple substrates to be processed need to be transported to different third transfer ports 41 in sequence.

[0055] When the substrate to be processed is a solar cell, since solar cells of different specifications have different sizes, and directly conveying the solar cells may damage them, in an optional embodiment, the coating equipment further includes: a carrier plate 5 for placing the substrate to be processed; the carrier plate 5 cooperates with the first transmission assembly 22, the second transmission assembly 32, and the third transmission assembly 42 to convey the substrate to be processed laterally. Specifically, as Figure 5 As shown, by setting a carrier plate 5 that matches the first transfer port 23, the second transfer port 31 and the third transfer port 41, multiple solar cells placed on the carrier plate 5 can be deposited simultaneously, which greatly improves the deposition efficiency and can deposit films for solar cells of different sizes.

[0056] The following is based on Figures 11 to 12 The lateral movement process of the substrate to be treated in the coating equipment according to the embodiments of this utility model will be described in detail, wherein, Figure 11 This is a schematic cross-sectional view of the carrier plate 5 located in the non-process cavity 3. Figure 12 This is a schematic cross-sectional view of the carrier plate 5 located within the supporting cavity 2. Figure 11 and Figure 12 As shown, the coating equipment includes two process chambers 2. Three non-process chambers 3, labeled A, B, and C, are located to the left of the process chamber 2 on the left side. A lifting chamber 4 is located on the far left of the coating equipment. A carrier plate 5, containing the substrate to be processed, is first moved vertically downwards to the third conveyor 41 by the lifting assembly 43, and then laterally towards non-process chamber A under the transmission action of the third transmission assembly 42. After entering the non-process chamber 3, the carrier plate 5 disengages from the third transmission assembly 42 and comes into contact with the second transmission assembly 32. Therefore, under the continued driving action of the second transmission assembly 32, it passes sequentially through non-process chambers 3 marked A and B, and moves to non-process chamber 3 marked C. Figure 11 (Structure shown). Further, as the carrier plate 5 continues to move, it gradually detaches from the second transmission assembly 32 while simultaneously contacting the first transmission assembly 22, and under the drive of the first transmission assembly 22, moves into the interior of the process cavity 2 (…). Figure 12(as shown in the diagram), and film deposition is performed inside the process cavity 2. Similarly, after the first layer of film deposition is completed, driven by the first drive assembly 22, the second drive assembly 32, and the third drive assembly 42, the film moves laterally sequentially through the non-process cavity marked D, another process cavity 2, the non-process cavity marked E, the non-process cavity marked F, and the non-process cavity marked G, and finally arrives at the rightmost lifting cavity 4. Then, the lifting assembly 43 in the rightmost lifting cavity 4 moves the carrier plate 5 upward from the third transfer port 41, and the carrier plate 5 is removed through the open structure of the lifting cavity 4.

[0057] In summary, the coating equipment provided by this utility model embodiment, by setting multiple layers of target materials 11 arranged longitudinally in the target holder 1, setting a partition 12 between each two adjacent layers of target materials 11, and simultaneously setting a target material cavity 100 and a transmission part 200 in the process cavity 2, after the target holder 1 is installed into the target material cavity 100, the partition 12 abuts against the isolation member 21 in the transmission part 200, so that the process cavity 2 is divided into multiple independent coating spaces, and the target materials 11 in each coating space can be used to achieve independent coating. At the same time, by setting a first transmission component 22 inside the process cavity 2, and setting symmetrical first transfer ports 23 on two sides of the process cavity 2 that correspond to the cavity, the first transmission component 22 and the first transfer ports 23 can be used to realize the input and output of multiple cavities to be processed, thereby achieving the effect of multi-threaded multi-target simultaneous coating of multiple cavities to be processed, effectively improving the coating efficiency.

[0058] The above steps are provided only to help understand the structure, method, and core idea of ​​this utility model. For those skilled in the art, various improvements and modifications can be made to this utility model without departing from its principles, and these improvements and modifications also fall within the scope of protection of the claims of this utility model.

Claims

1. A coating apparatus, characterized by, include: Target (1) and process cavity (2); wherein, The target holder (1) includes multiple layers of target materials (11) arranged longitudinally, and a partition (12) disposed between each two adjacent layers of target materials (11). The process cavity (2) includes an open target cavity (100) for accommodating the target holder (1) and a transmission part (200) with multiple chambers arranged longitudinally. The target cavity (100) is connected to the multiple chambers. An isolation member (21) is provided between each two adjacent chambers, and a first transmission assembly (22) is provided in each chamber. The process cavity (2) further includes a plurality of first transfer ports (23) disposed on two opposite sides of the process cavity (2), the plurality of first transfer ports (23) on the two sides are symmetrically disposed, and each cavity corresponds to two symmetrical first transfer ports (23). After the target holder (1) is placed into the target cavity (100), the partition (12) abuts against the isolation member (21), and each layer of the target material (11) corresponds to a chamber in the transmission part (200); The substrate to be processed is introduced into the process cavity (2) through the first transfer port (23) on one side, and is transported laterally by the first transmission assembly (22) so that the substrate to be processed passes above or below the target material (11). After the target material (11) forms a film on the substrate to be processed, the substrate to be processed with the film formed is transferred out through the first transfer port (23) on the other side.

2. The coating apparatus according to claim 1, wherein There are multiple target material cavities (100), and the multiple target material cavities (100) are arranged at intervals; A transmission part (200) is provided between each two adjacent target material cavities (100); Each of the target cavity (100) is corresponding to a target holder (1).

3. The coating equipment according to claim 1, characterized in that, The lengths of the multilayered target material (11) are consistent.

4. The coating apparatus according to claim 3, wherein Also includes: Multiple non-process cavities (3); The non-process cavity (3) is a hollow structure with closed top and bottom, and multiple non-process cavities (3) are respectively arranged on both sides of the process cavity (2); Multiple second transfer ports (31) are provided on two opposite sides of the non-process cavity (3), and the second transfer ports (31) on the two sides are symmetrically arranged; the second transfer ports (31) correspond one-to-one with the first transfer ports (23) on the process cavity (2).

5. The coating equipment according to claim 4, characterized in that, There are multiple process cavities (2), and the multiple process cavities (2) and multiple non-process cavities (3) are arranged in a straight line, and at least one non-process cavity (3) is provided between each two adjacent process cavities (2).

6. The coating apparatus of claim 4, wherein, A plurality of longitudinally arranged second transmission components (32) are provided inside the non-process cavity (3); wherein each second transmission component (32) is laterally corresponding to two symmetrical second transmission ports (31); The substrate to be processed is introduced into the non-process cavity (3) through the second transfer port (31) on one side of the non-process cavity (3). The substrate to be processed is transferred laterally using the second transmission assembly (32). After non-process processing, the processed substrate to be processed is transferred out through the second transfer port (31) on the other side of the non-process cavity (3) so that it can be transferred from the adjacent first transfer port (23) into the adjacent process cavity (2) or from the adjacent second transfer port (31) into another adjacent non-process cavity (3).

7. The coating apparatus according to any one of claims 4 to 6, wherein Also includes: Lifting cavities (4) are located at both ends of the coating equipment; wherein... The lifting cavity (4) is arranged in a straight line with the process cavity (2) and the non-process cavity (3); The lifting cavity (4) has a hollow structure; The lifting cavity (4) includes: a plurality of third conveying ports (41) disposed on one side of the lifting cavity (4) and a third transmission assembly (42) disposed inside the hollow structure of the lifting cavity (4); wherein, the side of the lifting cavity (4) having the third conveying ports (41) abuts against the side of the non-process cavity (3) having the second conveying port (31); Each of the third transmission ports (41) is laterally corresponding to one of the third transmission components (42), and each of the third transmission ports (41) is corresponding to one of the second transmission ports (31) on the adjacent non-process cavity (3).

8. The coating equipment according to claim 7, characterized in that, The upper surface of the lifting cavity (4) is an open structure, and the lifting cavity (4) also includes a longitudinally moving lifting assembly (43). After the substrate to be processed is placed into the lifting assembly (43) of the lifting cavity (4) through the open structure, the lifting assembly (43) controls the substrate to be processed to move in the longitudinal direction, and after moving to the position corresponding to the third transmission port (41), the third transmission assembly (42) is used to transmit the substrate out of the lifting cavity (4) in the transverse direction, so as to transmit the substrate into the adjacent non-processing cavity (3) from the adjacent second transmission port (31).

9. The coating apparatus of claim 8, wherein, Also includes: A carrier plate (5) is placed on the substrate to be processed. The carrier plate (5) cooperates with the first transmission assembly (22), the second transmission assembly (32) and the third transmission assembly (42) to transport the substrate to be processed in the lateral direction; And / or, The third transmission port (41) is the same size as the second transmission port (31).

10. The coating equipment according to claim 6, characterized in that, The second transmission port (31) is the same size as the first transmission port (23).

Images