Thermocouple mounting structure

Abstract

This utility model belongs to the field of materials application testing technology and discloses a thermocouple mounting structure. This thermocouple mounting structure is used to mount a thermocouple to a base. Specifically, it includes a locking component, an isolating component, and a supporting component. The locking component is a metal part; the isolating component is insulating and is sleeved on the outer periphery of the locking component; the supporting component is located on the base, and the locking component passes sequentially through the thermocouple mounting part and the supporting component and connects to the base. The isolating component and the supporting component are used to clamp the mounting part, and the locking component can maintain insulation between itself and the thermocouple through the isolating component. This utility model ensures stable installation and insulation of the thermocouple while effectively solving the problem of locking component breakage during disassembly.

Description

Technical Field

[0001] This utility model relates to the field of materials application testing technology, and in particular to the installation structure of thermocouples. Background Technology

[0002] In the fields of small-size vapor deposition processes and material application testing, point source heating technology has become a core method for the fabrication of micro-devices due to its precise temperature control and space utilization. Existing point source heating sources typically use a heating wire as the core heating element, and its temperature monitoring requires closed-loop control via thermocouples. To ensure the measurement accuracy of the thermocouples, they must be isolated from the heating wire and surrounding conductive components using an insulating structure.

[0003] Currently, the industry commonly uses screws made of boron nitride ceramic, alumina ceramic, or composite ceramic as insulating fasteners. These ceramic screws, with their excellent electrical insulation and high-temperature resistance (capable of withstanding 800-1200℃ operating conditions), effectively prevent interference from the heating wire current on the thermocouple signal.

[0004] However, in practical applications, it has been found that the inherent brittleness of ceramic materials makes screws prone to thermal stress concentration in high-temperature environments: on the one hand, the periodic temperature fluctuations generated when the heating wire is working will cause micro-cracks to form inside the ceramic screw, and the strength will decrease significantly after long-term use; on the other hand, when disassembly and maintenance are required after the vapor deposition process, the thermal expansion and contraction effect during the high-temperature cooling process will cause mechanical seizing between the screw and the base hole. In addition, the hardness of ceramic materials is as high as HRA85 or above, and traditional tools are difficult to apply effective torque. Forced disassembly can easily cause the screw to break.

[0005] Broken ceramic screw fragments often become embedded in the threaded holes of the base, requiring costly removal methods such as electrical discharge machining or laser ablation, which severely impacts the maintenance efficiency and process continuity of the vapor deposition equipment. Furthermore, the brittle fracture characteristics of ceramic screws can cause thermocouple misalignment, leading to inaccurate temperature monitoring and consequently deterioration of the uniformity of the vapor-deposited material or a decrease in product yield. Utility Model Content

[0006] The purpose of this invention is to provide a thermocouple installation structure that, while ensuring stable installation and insulation of the thermocouple, can also effectively solve the problem of breakage of the locking component during disassembly.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] Thermocouple mounting structure, in which the thermocouple is mounted on a base, includes:

[0009] A locking component, wherein the locking component is a metal part;

[0010] An insulating spacer is fitted around the outer periphery of the locking member;

[0011] A support member is provided on the base. The locking member passes through the mounting part of the thermocouple and the support member in sequence and is connected to the base. The isolator and the support member are used to clamp the mounting part, and the locking member can maintain insulation from the thermocouple through the isolator.

[0012] As an alternative installation structure for a thermocouple, the locking element is screwed to the base.

[0013] As an alternative to the installation structure of a thermocouple, multiple locking elements are inserted through the same support member.

[0014] As an alternative installation structure for a thermocouple, the isolator has an abutment portion along its circumference, which cooperates with the support to clamp the installation part.

[0015] As an alternative installation structure for a thermocouple, the abutment portion is formed by an annular protrusion extending outward from the outer wall of the insulating member.

[0016] As an alternative to the mounting structure of a thermocouple, at least part of the abutment portion isolates the thermocouple.

[0017] As an alternative to the thermocouple mounting structure, the locking element is a titanium bolt.

[0018] As an alternative installation structure for a thermocouple, the insulating element is sleeve-shaped.

[0019] As an alternative installation structure for a thermocouple, the insulating element is made of ceramic.

[0020] As an alternative installation structure for thermocouples, the support member is made of ceramic.

[0021] Beneficial effects:

[0022] In this invention, the locking component not only achieves stable installation of the thermocouple and the base, but also, by using a metal locking component and cooperating with an isolation component, it can achieve insulation between the locking component and the thermocouple. Furthermore, during disassembly, the high strength and high toughness of the locking component prevent the locking component from breaking. Attached Figure Description

[0023] Figure 1 This is an exploded view of the thermocouple installation structure provided in this embodiment of the utility model;

[0024] Figure 2 This is an exploded view of the installation structure of the thermocouple with a hidden base provided in this embodiment of the utility model.

[0025] In the picture:

[0026] 100. Thermocouple; 110. Mounting location; 200. Base;

[0027] 1. Locking component; 2. Isolation component; 21. Abutment part; 3. Support component. Detailed Implementation

[0028] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0029] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0031] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0032] Please see the appendix Figure 1 and attached Figure 2This embodiment relates to an installation structure for a thermocouple 100 (hereinafter referred to as the "installation structure"). This installation structure is used to install the thermocouple 100 onto a base 200. Specifically, the installation structure includes a locking member 1, an isolating member 2, and a supporting member 3. The locking member 1 is a metal component; the isolating member 2 is insulating and is sleeved around the outer periphery of the locking member 1; the supporting member 3 is located on the base 200. The locking member 1 passes sequentially through the installation portion 110 of the thermocouple 100 and the supporting member 3 and is connected to the base 200. The isolating member 2 and the supporting member 3 are used to clamp the installation portion 110, and the locking member 1 can maintain insulation from the thermocouple 100 through the isolating member 2.

[0033] Specifically, the base 200 has a disc-shaped structure, and the mounting portion 110 of the thermocouple 100 refers to a strip-shaped plate extending from the thermocouple 100, with multiple through holes provided on the mounting portion 110. The locking element 1 is made of metal, such as stainless steel or titanium alloy, possessing high strength and toughness to prevent deformation and breakage under stress, making it particularly suitable for situations requiring disassembly and reassembly of this mounting structure. The isolating element 2 can be made of ceramic, which has excellent stability and insulation, preventing the metal locking element 1 from forming electrical or thermal connections with the thermocouple 100, thus affecting the measurement accuracy of the thermocouple 100. The support element 3 is a rectangular block structure made of ceramic, and through holes are also provided on the isolating element 2.

[0034] During installation, the locking member 1, which is fitted with the isolator 2, passes through the through hole in the mounting portion 110 of the thermocouple 100 and the through hole in the support member 3, and is connected to the base 200. This allows the isolator 2 and the support member 3 to clamp the mounting portion 110, achieving a stable connection. During disassembly, the connection between the locking member 1 and the base 200 can be released, and the locking member 1 and the isolator 2 can be removed, allowing the thermocouple 100 to be separated.

[0035] In this embodiment, the locking member 1 not only achieves stable installation of the thermocouple 100 and the base 200, but also, by using the metal material of the locking member 1 and cooperating with the isolator 2, it can achieve insulation between the locking member 1 and the thermocouple 100. Furthermore, during the disassembly process, the high strength and high toughness of the locking member 1 can prevent the locking member 1 from breaking.

[0036] In this embodiment, the locking member 1 is machined with external threads. Specifically, the locking member 1 can be a titanium bolt. The corresponding position of the base 200 is machined with internal threads. During installation, the locking member 1 is screwed to the base 200.

[0037] Optionally, multiple locking elements 1 are inserted into the same support element 3.

[0038] Specifically, to ensure installation stability, multiple locking components 1 can be used in conjunction with each other. In this embodiment, two locking components 1 are screwed together in parallel and locked onto the same support component 3. Compared to a split support component 3 (where one locking component 1 corresponds to one support component 3), the integrated support component 3 is more stable to install under the same space occupation conditions; and under the same installation strength conditions, the integrated support component 3 is more compact than the split support component 3.

[0039] Optionally, the isolation member 2 is provided with an abutment portion 21 along the circumferential direction, and the abutment portion 21 cooperates with the support member 3 to clamp the mounting portion 110.

[0040] Specifically, the isolator 2 is sleeve-shaped and is fitted onto the locking member 1. The annular protrusion extending outward from the outer wall of the isolator 2 forms an abutment portion 21. After the locking member 1 is screwed onto the base 200, the head of the locking member 1 will press down on the abutment portion 21 and make the abutment portion 21 and the support member 3 cooperate to press the mounting part 110 of the thermocouple 100.

[0041] In this embodiment, the isolation element 2 has a simple structure and is easy to install.

[0042] Optionally, at least part of the contact portion 21 isolates the thermocouple 100.

[0043] In this embodiment, the outer diameter of the abutment portion 21 can be greater than or equal to the head diameter of the locking member 1, so that the abutment portion 21 completely isolates the locking member 1 from the thermocouple 100, which is suitable for high-voltage scenarios. Of course, the outer diameter of the abutment portion 21 can be smaller than the head diameter of the locking member 1. Although the abutment portion 21 is not enough to completely cover the head area of ​​the locking member 1, the abutment portion 21 has a certain thickness, which can form a gap between the head of the locking member 1 and the thermocouple 100, thereby ensuring a certain degree of insulation, but with a certain creepage distance, which is suitable for low-voltage scenarios.

[0044] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A mounting structure of a thermocouple, the thermocouple (100) being mounted to a base (200), characterized by, include: Locking component (1), wherein the locking component (1) is a metal component; The isolation element (2), which is insulating, is sleeved on the outer periphery of the locking element (1); A support member (3) is provided on the base (200). The locking member (1) passes through the mounting part (110) of the thermocouple (100) and the support member (3) in sequence and is connected to the base (200). The isolation member (2) and the support member (3) are used to clamp the mounting part (110), and the locking member (1) can be kept insulated from the thermocouple (100) through the isolation member (2).

2. The mounting structure for thermocouples according to claim 1, wherein The locking member (1) is screwed to the base (200).

3. The mounting structure for thermocouples according to claim 1, wherein Multiple locking elements (1) are inserted into the same support element (3).

4. The mounting structure for thermocouples according to claim 1, wherein The isolating member (2) has an abutment portion (21) along its circumferential direction, and the abutment portion (21) cooperates with the support member (3) to clamp the mounting part (110).

5. The mounting structure for thermocouples according to claim 4, wherein The contact portion (21) is formed by an annular protrusion extending outward from the outer wall of the separator (2).

6. The mounting structure for thermocouples according to claim 4, wherein At least part of the contact portion (21) isolates the thermocouple (100).

7. The mounting structure for thermocouples according to any one of claims 1 to 6, characterized in that, The locking component (1) is a titanium bolt.

8. The mounting structure for thermocouples according to any one of claims 1 to 6, wherein The isolation element (2) is sleeve-shaped.

9. The mounting structure for thermocouples according to any one of claims 1 to 6, wherein The isolation component (2) is made of ceramic.

10. The mounting structure for thermocouples according to any one of claims 1 to 6, wherein The support member (3) is made of ceramic.

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