Atomic force microscope needle exchange device

Abstract

The utility model discloses an atomic force microscope needle changing device, including upper base and needle changing mechanical arm, upper base connects atomic force microscope, and needle changing mechanical arm sets up in atomic force microscope one side, still include the hanger, lower base and probe carrier, and the probe carrier swing setting is in the lower base, and the hanger is connected with the upper base, and the hanger, lower base and probe carrier between set up positioning mechanism and magnetic attraction needle changing mechanism, and the probe carrier realizes the switching between the lower base and the hanger through magnetic attraction needle changing mechanism and positioning mechanism. Advantage, the probe carrier realizes the needle up and down through the magnetic attraction mode, and the lower base and the upper base do not contact, avoid damaging the upper base in the process of needle changing, and the accurate positioning and adsorption of probe are realized through positioning mechanism and magnetic attraction needle changing mechanism when the needle up and down, reduce the mechanical arm precision performance index, reduce the use cost, and the probe is independent of the motion platform, reduces the development cost and the difficulty of motion platform, and also can according to the demand collocation any number of probes, convenient to use and low in cost.

Description

Technical Field

[0001] This utility model specifically relates to a needle-changing device for an atomic force microscope. Background Technology

[0002] Atomic force microscopy (AFM) is a high-resolution microscopy technique based on the interaction forces between a probe and the sample surface.

[0003] AFM probes typically consist of the following parts: a cantilever: a micrometer-scale elastic beam with a tip at the end, whose deformation is detected by laser reflection; a tip: a nanometer-scale sharp structure that interacts directly with the sample surface; and a coating (optional): depending on the requirements, the probe may be coated with metals (such as gold or aluminum) or magnetic materials to achieve special functions.

[0004] Atomic force microscope (AFM) probes detect the surface morphology of samples through physical contact or non-contact methods. The core principle of AFM is to detect the changes in microcantilever deflection or vibration caused by the interaction force between the probe and the sample surface. Regardless of whether it is contact or non-contact, the probe tip will gradually wear or become contaminated during use. In order to ensure resolution, a new probe needs to be replaced every once in a while.

[0005] Existing atomic force microscopes (AFMs) suffer from inconvenient probe installation and replacement due to the limited space available for the probe. Currently, probe replacement is typically performed using a robotic arm, which requires high precision in both the robotic arm and the positional relationship with the probe mount. This also results in a complex structure, increasing the cost of use. Furthermore, significant errors between the two can lead to improper probe installation, or even damage to the probe or probe mount, affecting normal operation. Therefore, a probe replacement device is needed that requires slightly lower precision from the robotic arm, has lower operating costs, and can guarantee accurate probe replacement. Utility Model Content

[0006] The technical problem to be solved by this utility model is that the existing needle changing device has a complex structure, high precision requirements, and high operating costs.

[0007] To address the aforementioned technical problems, an atomic force microscope (AFM) stylus changing device is proposed. This device is achieved through the following technical solution: An AFM stylus changing device includes an upper base and a stylus changing robotic arm. The upper base is connected to the AFM. The robotic arm, used to hold the base for easy probe replacement, is located on one side of the AFM. The device further includes a hanger, a lower base, and a probe carrier. The lower base is located on one side of the AFM's motion platform. The probe to be replaced and the replaced probe are stored on the lower base. The probe carrier, used to support the probe, is detachably placed on the lower base. The hanger is located on the upper base, and the probe carrier is detachably connected to the hanger. A positioning mechanism and a magnetic stylus changing mechanism are provided between the hanger, the lower base, and the probe carrier. The probe carrier is switched between the lower base and the hanger via the magnetic stylus changing mechanism, and positioned during the replacement process by the positioning mechanism to ensure the accuracy of the probe installation position.

[0008] In a preferred embodiment of the present invention, the mounting bracket includes a mounting bracket body, which is fixed on an upper base. The mounting bracket body is provided with a positioning groove for positioning the probe carrier and an adsorption port for adsorbing and fixing the probe carrier. A first permanent magnet is provided in the adsorption port. The mounting bracket facilitates the magnetic connection and alignment of the probe carrier, ensuring the accuracy and stability of probe assembly and disassembly.

[0009] In a preferred embodiment of the present invention, the probe carrier includes a probe body, a connecting carrier, and a patch. The probe body is connected to the patch via the connecting carrier. The patch is designed to facilitate magnetic connection and alignment between the probe carrier and the mounting base via a positioning ball and a third permanent magnet, thus ensuring the accuracy and stability of probe assembly and disassembly.

[0010] In a preferred embodiment of the present invention, the lower base includes a base body and a patch placement groove. The patch in the probe carrier is placed in the patch placement groove. The lower base cooperates with the probe carrier through the patch placement groove. This arrangement facilitates the stable placement of the probe carrier on the lower base and makes it convenient for the probe to be assembled and disassembled.

[0011] In a preferred embodiment of the present invention, the positioning mechanism includes a positioning groove and a positioning ball. The positioning groove is disposed on the main body of the hanger in the hanger, and the positioning ball is disposed on the patch in the probe carrier. The probe carrier cooperates with the positioning groove on the hanger through the positioning ball. The positioning mechanism improves the accuracy during the probe replacement process and ensures the accuracy after the probe is disassembled and assembled.

[0012] In a preferred embodiment of the present invention, multiple positioning grooves are evenly arranged at the same center on the bracket, which improves the accuracy of probe assembly and disassembly.

[0013] In a preferred embodiment of the present invention, the magnetic needle-changing mechanism includes an electromagnet, a second permanent magnet, and a third permanent magnet. The electromagnet and the second permanent magnet are disposed on a lower base, and the probe carrier is attracted to the lower base by the electromagnet and the second permanent magnet. The third permanent magnet is disposed on a patch in the probe carrier, spaced apart from the positioning balls on the patch. The probe carrier can be attracted to the adsorption port in the holder by the third permanent magnet. The magnetic needle-changing mechanism facilitates automatic replacement of probes and enables rapid replacement of probes through magnetic attraction, making it simple and convenient to use.

[0014] In a preferred embodiment of the present invention, the attraction force between the third permanent magnet and the mounting base is greater than that between the second permanent magnet and the probe carrier, and the attraction force of the electromagnet is greater than that between the third permanent magnet and the mounting base. This arrangement facilitates the control of probe assembly and disassembly by switching the electromagnet on and off, making it simple and convenient to use.

[0015] The advantages of this utility model compared with the prior art are:

[0016] The technical solution of this utility model is that the probe carrier realizes the insertion and removal of the probe by magnetic attraction, so that the lower base does not need to contact the upper base, effectively avoiding the problem of damage to the upper base during the needle replacement process. When inserting and removing the probe, the positioning mechanism and the magnetic needle replacement mechanism realize the accurate positioning and adsorption of the probe, which reduces the performance indicators of the robotic arm in terms of accuracy to a certain extent and reduces the cost of use.

[0017] Furthermore, this solution places the electromagnet in the lower base, reducing the development cost and difficulty of the equipment. At the same time, this solution separates the probe from the motion platform, which not only reduces the development cost and difficulty of the motion platform, but also allows for the combination of any number of probes as needed, making it convenient and cost-effective. Attached Figure Description

[0018] Figure 1 This is a three-dimensional schematic diagram of the mounting bracket and the upper base after they are assembled.

[0019] Figure 2 This is a 3D schematic diagram of the mounting bracket;

[0020] Figure 3 This is a three-dimensional schematic diagram of the lower base;

[0021] Figure 4 This is a three-dimensional schematic diagram of the probe slide;

[0022] Figure 5 This is a cross-sectional view of the probe slide after it has been fitted with the mount.

[0023] Figure 6 This is a schematic diagram showing the probe carrier after it is fitted with the lower base;

[0024] Figure 7This is a schematic diagram showing the lower base moving below the hanger during needle replacement.

[0025] Figure 8 This is an exploded view of the present invention;

[0026] Explanation of reference numerals in the attached drawings: 1-Upper base, 2-Hanging seat, 21-Positioning groove, 22-Adsorption port, 23-First permanent magnet, 3-Lower base, 31-Base body, 32-Electromagnet, 33-Patch placement slot, 34-Second permanent magnet, 4-Probe carrier, 41-Probe body, 42-Connecting carrier, 43-Patch, 44-Third permanent magnet, 45-Positioning ball. Detailed Implementation

[0027] The following will refer to the appendix in the embodiments of this utility model. Figure 1-8 The technical solutions in the embodiments of this utility model will be described in detail below. Example

[0028] like Figure 1 , 6 As shown in Figures 7 and 8, an atomic force microscope (AFM) stylus changing device includes an upper base 1, a stylus changing robotic arm, a mounting base 2, a lower base 3, and a probe carrier 4. The upper base 1 and the stylus changing robotic arm are existing devices. The upper base 1 is an existing mounting base that is connected to the AFM for probe mounting and can be used directly. The stylus changing robotic arm is an existing robotic arm with a control system and can be used directly. The stylus changing robotic arm can hold the lower base 3 and move the lower base 3 below the upper base 1. The stylus changing robotic arm is installed on one side of the AFM.

[0029] The bracket 2 is connected to the upper base 1. The main function of the bracket 2 is to connect with the probe carrier 4, and to position and fix the probe carrier 4, so as to facilitate quick and accurate replacement of the probe.

[0030] The main function of the lower base 3 is to store probes. Probes to be replaced or after replacement can be placed on the lower base 3. An electromagnet 32 ​​is also provided in the lower base 3. By turning on the switch of the electromagnet 32, the probe carrier 4 can be sucked down from the hanger 2, thus completing the disassembly of the probe carrier 4.

[0031] The probe carrier 4 serves as a carrier for probe installation. By installing the probe carrier 4 onto the hanger 2 or the lower base 3, the probe can be disassembled and replaced.

[0032] A positioning mechanism and a magnetic needle-changing mechanism are provided between the hanger 2, the lower base 3 and the probe carrier 4. The probe carrier 4 can switch between the lower base 3 and the hanger 2 through the magnetic needle-changing mechanism. During the position switching process, the positioning mechanism is used to position the probe carrier 4 to ensure the accuracy of the installation position.

[0033] like Figure 1 , 2 As shown in Figures 5 and 8, the mounting bracket 2 includes a mounting bracket body, which is an aluminum block with a "convex" cross-section. The mounting bracket body is fixed on the upper base 1.

[0034] Regarding the connection between the main body of the mounting bracket and the upper base 1, it can be fixed by glue or by screws. In this embodiment, glue is preferred. When fixing the mounting bracket 2, it is necessary to ensure that after the probe carrier 4 is adsorbed on the mounting bracket 2, the probe body 41 on the probe carrier 4 can fall exactly at the probe mounting position on the upper base 1.

[0035] To facilitate accurate mounting of the probe carrier 4 onto the mount 2, multiple circular grooves are formed concentrically on the lower end face of the mount 2. In this embodiment, three grooves are preferably formed, and these grooves are named adsorption ports 22. In addition, three rectangular grooves are recessed perpendicular to the end face on the lower end face of the mount 2, and these grooves are named positioning grooves 21. The positioning grooves 21 and adsorption ports 22 are evenly distributed concentrically, and the positioning grooves 21 and adsorption ports 22 are intersected in pairs. Regarding the shape of the cross-section of the positioning grooves 21, it can be hemispherical or rectangular. In this embodiment, a rectangular cross-section is preferred.

[0036] Definition: In this embodiment, the atomic force microscope is used as a reference. The direction in which the upper base 1 is installed is defined as upward, and the direction in which the lower base 3 is installed is defined as downward. The upper base 1 and the lower base 3 are vertically corresponding.

[0037] The main function of the positioning groove 21 is to cooperate with the positioning ball 45 on the probe carrier 4. Through the guidance and cooperation of the positioning ball 45, the accuracy of the connection between the probe carrier 4 and the hanger 2 is ensured. In addition, in order to facilitate the adsorption and cooperation between the positioning groove 21 and the positioning ball 45, the width of the positioning groove 21 and the diameter of the positioning ball 45 are the same. This setting makes it easy for the positioning ball 45 to be stably locked in the positioning groove 21.

[0038] The main function of the adsorption port 22 is to cooperate with the third permanent magnet 44 on the probe carrier 4 to fix the probe carrier 4 on the hanger 2.

[0039] To ensure the stability of the probe carrier 4 on the mounting base 2, a magnet is glued into each adsorption port 22. This magnet is named the first permanent magnet 23. The first permanent magnet 23 can be attracted to the third permanent magnet 44 on the probe carrier 4, so as to achieve stable fixation of the probe carrier 4 on the mounting base 2.

[0040] like Figure 3 , 6As shown in Figure 8, the lower base 3 includes a base body 31, which is a circular platform made of engineering plastic. A rectangular groove is provided on the upper surface of the base body 31, which is named the patch placement groove 33. The patch 43 in the probe carrier 4 can be placed in this patch placement groove 33.

[0041] To facilitate the fixing of the probe carrier 4 onto the lower base 3, a through hole is provided perpendicular to the patch placement slot 33. This through hole is named the electromagnet mounting hole. An electromagnet 32 ​​is fixed in the electromagnet mounting hole using screws. The electromagnet 32 ​​is an existing 12V suction cup type electromagnet. After the probe carrier 4 is placed on the patch placement slot 33, the probe carrier 4 can be stably attracted to the lower base 3 by energizing the electromagnet 32.

[0042] When the electromagnet 32 ​​is de-energized, in order to prevent the probe carrier 4 from falling out of the patch placement slot 33 and to ensure the stability of the probe carrier 4 in the patch placement slot 33, six circular blind holes are made along the electromagnet mounting hole in the patch placement slot 33. These blind holes are named permanent magnet mounting holes. A permanent magnet is fixed in the permanent magnet mounting hole with screws. This permanent magnet is named the second permanent magnet 34.

[0043] The upper surface of the second permanent magnet 34 is flush with the upper surface of the electromagnet 32. This arrangement allows the probe carrier 4 to be attracted to the patch placement slot 33 by the second permanent magnet 34 after the electromagnet 32 ​​is de-energized, preventing the probe carrier 4 from falling off due to vibration or movement of the needle replacement robot arm.

[0044] Regarding the wiring of the electromagnet 32 ​​in the lower base 3, a clearance hole is made on the side wall of the lower base 3. The power supply line of the electromagnet 32 ​​extends through this clearance hole and connects to the external control board, which facilitates the control of the on and off of the electromagnet 32.

[0045] Regarding the determination of the position of the lower base 3 on the atomic force microscope, the lower base 3 is placed on the side of the motion platform in the atomic force microscope, so as not to affect the normal movement of the motion platform. The position is recorded in the control system of the needle changing robot arm. At the same time, a magnet is glued to the lower end surface of the lower base 3. The lower base 3 is attracted to the side of the motion platform in the atomic force microscope by the magnet. When it is necessary to change the needle, the lower base 3 can be clamped by the needle changing robot arm.

[0046] Regarding the number of lower bases 3 placed in the atomic force microscope, multiple lower bases 3 can be placed on the side of the atomic force microscope's motion platform according to usage requirements. The corresponding positions can be entered into the control system of the stylus changing robotic arm.

[0047] like Figure 4 , 5As shown in Figures 6 and 8, the probe carrier 4 includes a probe body 41, a connecting carrier 42, and a patch 43. The probe body 41 and the patch 43 are connected by the connecting carrier 42.

[0048] The patch 43 is a rectangular iron sheet. To prevent rust and improve the service life of the patch 43, a layer of plastic is wrapped around the patch 43. This ensures that the patch 43 can adhere to the lower base 3 and also prevents the patch 43 from rusting.

[0049] To facilitate the connection between the carrier 42 and the hanger 2, three protruding permanent magnets are fixed on the upper surface of the patch 43. These permanent magnets are named the third permanent magnets 44. The three third permanent magnets 44 are evenly distributed with the same center. The third permanent magnets 44 can be inserted into the adsorption port 22 on the hanger 2 and are attracted to the first permanent magnet 23 in the adsorption port 22, thereby fixing the patch 43 on the hanger 2.

[0050] To facilitate the insertion of the third permanent magnet 44 into the adsorption port 22, three hemispherical positioning balls 45 are fixed on the patch 43. The diameter of the positioning balls 45 is the same as the width of the positioning groove 21 on the hanger 2, and they can cooperate with each other. The positioning balls 45 and the third permanent magnet 44 are distributed in the same circle, and the positioning balls 45 and the third permanent magnet 44 are distributed in an intersecting manner.

[0051] To facilitate the insertion of the third permanent magnet 44 into the adsorption port 22 via the positioning ball 45, the radius of the positioning ball 45 is greater than the depth to which the third permanent magnet 44 is inserted into the adsorption port 22.

[0052] Regarding the process of the positioning ball 45 guiding the third permanent magnet 44 into the adsorption port 22, when the patch 43 is located below the hanger 2, the electromagnet 32 ​​releases the adsorption of the patch 43. At this time, the third permanent magnet 44 attracts the second permanent magnet 34, and the patch 43 moves upward under the action of magnetic force. At this time, the positioning ball 45 will first contact the positioning groove 21. At this time, the third permanent magnet 44 has not yet been inserted into the adsorption port 22. After the positioning ball 45 and the positioning groove 21 are engaged, the third permanent magnet 44 is inserted into the adsorption port 22 under its guidance, realizing the connection between the probe carrier 4 and the hanger 2.

[0053] The connecting carrier 42 is a rectangular piece made of rigid engineering plastic. Its main function is to connect the probe body 41 and the patch 43. One end of the connecting carrier 42 is fixed to the patch 43 by thermal connection, and the probe body 41 is fixed to the other end of the connecting carrier 42.

[0054] To ensure the ease of probe replacement and the accuracy of the probe's installation position after replacement, the probe replacement device also includes a positioning mechanism and a magnetic probe replacement mechanism. The positioning mechanism ensures the accuracy of the probe's installation position during the probe replacement process, while the magnetic probe replacement mechanism enables convenient probe replacement.

[0055] The positioning mechanism includes a positioning groove 21 on the mount 2 and a positioning ball 45 on the probe carrier 4. The positioning ball 45 and the positioning groove 21 can guide and position the probe carrier 4 during the needle loading process.

[0056] The magnetic needle replacement mechanism includes an electromagnet 32, a second permanent magnet 34, and a third permanent magnet 44, all mounted on the lower base 3. The electromagnet 32 ​​and the second permanent magnet 34 can attract the probe carrier 4 to the lower base 3 when needed, and the third permanent magnet 44 can attract the probe carrier 4 to the hanger 2 when needed, thus completing the replacement of the probe.

[0057] To ensure a smooth and stable needle replacement, after the third permanent magnet 44 on the probe carrier 4 is attracted to the first permanent magnet 23 in the holder 2, the attraction force between the two is greater than the attraction force between the second permanent magnet 34 and the probe carrier 4. Furthermore, the attraction force of the electromagnet 32 ​​is greater than the attraction force between the third permanent magnet 44 and the first permanent magnet 23.

[0058] Regarding the probe installation process via the magnetic needle-changing mechanism, when a needle needs to be installed, the lower base 3 is first moved below the upper base 1, and a certain distance is left between the probe carrier 4 and the hanger 2 (this distance is determined by the attraction force between the third permanent magnet 44 and the first permanent magnet 23 and the second permanent magnet 34, ensuring that after the electromagnet 32 ​​is de-energized, the attraction force between the third permanent magnet 44 and the first permanent magnet 23 can resist the attraction between the probe carrier 4 and the second permanent magnet 34 and lift the probe carrier 4), so that the two do not contact each other. Then the electromagnet 32 ​​is de-energized. At this time, under the attraction of the third permanent magnet 44 and the first permanent magnet 23, the probe carrier 4 moves upward and is attracted to the hanger 2, completing the probe installation. This attraction process is positioned by a positioning mechanism to ensure the accuracy of the probe installation.

[0059] To control the needle changing process of the needle changing device, the device also includes a control section, which includes a PCB control board. The PCB control board is connected to the electromagnet 32 ​​on the lower base 3 via wires to control the power supply and on / off state of the electromagnet 32. In addition, the PCB control board is also connected to the needle changing robotic arm and the atomic force microscope. After the needle changing robotic arm moves the lower base 3 below the upper base 1, the PCB control board controls the electromagnet 32 ​​to switch on and off to replace the probe. When the atomic force microscope detects that the probe is installed in an incorrect position, the PCB control board controls the electromagnet 32 ​​to be energized to disassemble and reinstall the probe. The PCB control board in this control section is a conventional PCB control board, which is known to those skilled in the art and can be used directly.

[0060] Regarding the needle changing process using the atomic force microscope's needle changing device:

[0061] When loading needles

[0062] A1: The robotic arm grips the lower base 3 with the probe carrier 4 and moves the lower base 3 to the upper base 1;

[0063] A2: The robotic arm moves the lower base 3 below the upper base 1, and the lower base 3 and the upper base 1 are separated by a certain distance and do not contact each other;

[0064] A3: Electromagnet 32 ​​in lower base 3 is de-energized;

[0065] A4: The probe carrier 4 is attracted to the upper base 1 under the action of the second permanent magnet 34 and the third permanent magnet 44. During this process, the positioning ball 45 on the probe carrier 4 cooperates with the positioning groove 21 on the hanger 2 to ensure the accuracy of the installation position.

[0066] A5: The robotic arm drives the lower base 3 to reset, completing the probe installation.

[0067] When removing the needle

[0068] B1: The robotic arm grips the blank lower base 3 without the probe carrier 4 and moves the lower base 3 to the upper base 1;

[0069] B2: The robotic arm moves the lower base 3 below the upper base 1, with a certain gap between the lower base 3 and the upper base 1, and the two do not contact each other;

[0070] B3: Electromagnet 32 ​​in lower base 3 is energized;

[0071] B4: The probe carrier 4 is attracted to the lower base 3 under the action of the electromagnet 32;

[0072] B5: The robotic arm drives the lower base 3 to reset, completing the disassembly of the probe.

[0073] To ensure the correct installation of the probe, after step A4, the atomic force microscope automatically checks whether the probe is installed in the correct position (the atomic force microscope has this function). If the installation is correct, proceed to step A5. If incorrect, the lower base 3 proceeds to step B3, removes the probe, and then re-executes commands A3 and A4.

[0074] Advantages of this solution: This atomic force microscope stylus changing device has a simple structure. It uses a probe carrier 4 with the probe installed to achieve the insertion and removal of the probe by magnetic attraction. This allows the lower base 3 to replace the probe without having to make direct contact with the upper base 1 beforehand. This effectively avoids the problem of damage to the upper base 1 caused by inaccurate positioning during the stylus changing process. The positioning mechanism and the magnetic stylus changing mechanism achieve accurate positioning and adsorption of the probe during insertion and removal, which reduces the performance indicators of the robotic arm related to accuracy to a certain extent and reduces the cost of use.

[0075] Furthermore, this solution places the electromagnet 32 ​​in the lower base 3, which reduces the development cost and difficulty of the equipment. At the same time, this solution also separates the probe from the motion platform of the atomic force microscope. This setting not only reduces the development cost and difficulty of the motion platform, but also allows for the placement of different numbers of lower bases 3 as needed, thereby achieving the combination of any number of probes. This makes it convenient to use and also reduces the cost of use.

[0076] The above embodiments are only for illustrating the technical concept of this utility model and should not be construed as limiting the scope of protection of this utility model. Any modifications made to the technical solution based on the technical concept proposed by this utility model shall fall within the scope of protection of this utility model.

Claims

1. An atomic force microscope needle changing device, comprising an upper base (1) connected with an atomic force microscope and a needle changing mechanical arm, the needle changing mechanical arm is arranged on one side of the atomic force microscope for clamping the base to facilitate the replacement of the probe, characterized in that: It also includes a hanger (2), a lower base (3) and a probe carrier (4). The lower base (3) is set on one side of the motion platform in the atomic force microscope. The probe to be replaced and the replaced probe are stored on the lower base (3). The probe carrier (4) used to carry the probe is detachably placed on the lower base (3). The hanger (2) is set on the upper base (1). The probe carrier (4) is detachably connected to the hanger (2). A positioning mechanism and a magnetic needle-changing mechanism are provided between the hanger (2), the lower base (3) and the probe carrier (4). The probe carrier (4) is switched between the lower base (3) and the hanger (2) through the magnetic needle-changing mechanism, and is positioned during the replacement process through the positioning mechanism to ensure the accuracy of the probe installation position.

2. The atomic force microscope tip changer device according to claim 1, characterized in that: The mounting bracket (2) includes a mounting bracket body, which is fixed on the upper base (1). The mounting bracket body is provided with a positioning groove (21) for positioning the probe carrier (4) and an adsorption port (22) for adsorbing and fixing the probe carrier (4). A first permanent magnet (23) is provided in the adsorption port (22).

3. The atomic force microscope tip changer device of claim 1, wherein: The probe carrier (4) includes a probe body (41), a connecting carrier (42) and a patch (43), with the probe body (41) connected to the patch (43) via the connecting carrier (42).

4. The atomic force microscope tip changer device of claim 1, wherein: The lower base (3) includes a base body (31) and a patch placement groove (33). The patch (43) in the probe carrier (4) is placed in the patch placement groove (33). The lower base (3) cooperates with the probe carrier (4) through the patch placement groove (33).

5. The atomic force microscope tip changer device of claim 1, wherein: The positioning mechanism includes a positioning groove (21) and a positioning ball (45). The positioning groove (21) is set on the main body of the hanger (2), and the positioning ball (45) is set on the patch (43) in the probe carrier (4). The probe carrier (4) cooperates with the positioning groove (21) on the hanger (2) through the positioning ball (45).

6. The atomic force microscope tip changer device according to claim 5, characterized in that: The positioning grooves (21) are evenly arranged at the center on the bracket (2).

7. The atomic force microscope tip changer device of claim 1, wherein: The magnetic needle-changing mechanism includes an electromagnet (32), a second permanent magnet (34), and a third permanent magnet (44). The electromagnet (32) and the second permanent magnet (34) are disposed on the lower base (3). The probe carrier (4) is attracted to the lower base (3) by the electromagnet (32) and the second permanent magnet (34). The third permanent magnet (44) is disposed on the patch (43) in the probe carrier (4) and is distributed at intervals with the positioning ball (45) on the patch (43). The probe carrier (4) can be attracted to the adsorption port (22) in the hanger (2) by the third permanent magnet (44).

8. The atomic force microscope stylus changing device according to claim 7, characterized in that: The attraction force between the third permanent magnet (44) and the mount (2) is greater than that between the second permanent magnet (34) and the probe carrier (4), and the attraction force of the electromagnet (32) is greater than that between the third permanent magnet (44) and the mount (2).

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