A plasma generator and a microwave remote plasma source system

Abstract

This invention discloses a plasma generator and a microwave remote plasma source system. The plasma generator includes a reaction housing and at least one microwave radiation component located within the cavity of the reaction housing. The microwave radiation component includes a metal rod and a heat dissipation insulating tube, the heat dissipation insulating tube completely surrounding the entire outer surface of the metal rod within the cavity of the reaction housing. The metal rod is used to receive microwave energy to ionize process gas within the cavity of the reaction housing. This invention provides a plasma generator and a microwave remote plasma source system that can improve the ionization effect of process gas and the plasma density within the cavity of the reaction housing, as well as improve plasma purity and heat dissipation efficiency of the metal rod.

Description

Technical Field

[0001] This utility model relates to the field of plasma technology, and in particular to a plasma generator and a microwave remote plasma source system. Background Technology

[0002] Existing microwave plasma generation devices all operate on the principle of using high-frequency oscillating electromagnetic waves to excite process gases into plasma. Industrial production often requires plasma sources with high density, good uniformity, and strong stability.

[0003] Existing microwave plasma generating devices produce low plasma quantities, poor uniformity, insufficient stability, and contain some impurities, making them unable to meet industrial production requirements in fields such as thin film material deposition and surface treatment. Utility Model Content

[0004] This invention provides a plasma generator and a microwave remote plasma source system, which can improve the ionization effect of process gases and the plasma density in the inner cavity of the reaction shell, as well as improve the purity of the plasma and the heat dissipation efficiency of the metal rod.

[0005] According to one aspect of the present invention, a plasma generator is provided, comprising: a reaction housing and at least one microwave radiation component located in the inner cavity of the reaction housing;

[0006] The microwave radiation assembly includes a metal rod and a heat dissipation insulating tube, the heat dissipation insulating tube completely surrounding the entire outer surface of the metal rod in the inner cavity portion of the reaction shell;

[0007] The metal rod is used to receive microwave energy to ionize the process gas in the inner cavity of the reaction shell.

[0008] Optionally, the metal rod is provided with an axially extending through hole for introducing a cooling medium.

[0009] Optionally, the microwave radiation assembly further includes a thermally conductive adhesive layer;

[0010] The thermally conductive adhesive layer is located between the metal rod and the heat dissipation insulating tube, and the thermally conductive adhesive layer is used to fill the gap between the metal rod and the heat dissipation insulating tube.

[0011] Optionally, the plasma generator includes a plurality of microwave radiation components located within the interior cavity of the reaction housing;

[0012] The shape of the reaction shell includes a cuboid;

[0013] Multiple microwave radiation components are arranged along the length of the reaction shell.

[0014] Optionally, the top surface of the reaction shell is provided with multiple air inlets;

[0015] Each of the microwave radiation components has at least two air inlets.

[0016] Optionally, the reaction shell includes a first sidewall and a second sidewall;

[0017] The first sidewall is provided with an observation window, and the second sidewall is provided with an air outlet.

[0018] Optionally, the shape of the metal rod includes a hollow cylinder;

[0019] The heat dissipation insulating tube has the shape of a hollow cylinder.

[0020] Optionally, the material of the heat dissipation insulating tube includes optical glass, borosilicate glass, quartz, or sodium calcium glass.

[0021] According to another aspect of the present invention, a microwave remote plasma source system is provided, which includes a plasma generator, a plurality of microwave impedance matching devices and at least one microwave power supply module provided in any embodiment of the present invention.

[0022] The number of microwave power modules is equal to the number of microwave radiation components, and there is a one-to-one correspondence between the microwave power modules and the microwave radiation components.

[0023] The number of microwave impedance matching devices is twice the number of microwave radiation components;

[0024] The metal rod in the microwave radiation assembly includes a first input terminal and a second input terminal.

[0025] The first and second input terminals of each of the metal rods are electrically connected to a microwave impedance matching device.

[0026] The microwave impedance matching device corresponding to the metal rod is electrically connected to the same microwave power supply module.

[0027] Optionally, the microwave power module includes a first microwave power unit and a second microwave power unit.

[0028] The first microwave power supply unit is electrically connected to the first input terminal of the metal rod through the microwave impedance matching device, and the second microwave power supply unit is electrically connected to the second input terminal of the metal rod through the microwave impedance matching device.

[0029] This invention provides a plasma generator with a microwave radiation component located within the inner cavity of a reaction chamber. This allows microwave energy to act more effectively on the process gas, significantly improving the ionization effect of the process gas and thus increasing the plasma density within the reaction chamber. A metal rod located within the reaction chamber is completely surrounded by a heat-dissipating insulating tube, enabling the tube to quickly dissipate heat from the metal rod. Furthermore, the heat-dissipating insulating tube surrounds the entire outer surface of the metal rod within the reaction chamber, ensuring no exposed areas of the metal rod. This prevents corrosion of the metal rod during the ionization of the process gas, thus avoiding the generation of metal impurity ions that could contaminate the plasma purity. In summary, the plasma generator provided by this invention improves the ionization effect of the process gas and the plasma density within the reaction chamber, enhances plasma purity, and increases the heat dissipation efficiency of the metal rod.

[0030] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a cross-sectional structural schematic diagram of a plasma generator according to an embodiment of the present utility model;

[0033] Figure 2 This is a schematic diagram of a reaction shell according to an embodiment of the present invention;

[0034] Figure 3 This is a cross-sectional structural schematic diagram of another plasma generator provided according to an embodiment of the present utility model;

[0035] Figure 4 This is a cross-sectional structural schematic diagram of another plasma generator provided according to an embodiment of the present utility model;

[0036] Figure 5 This is a schematic diagram of the structure of a microwave remote plasma source system according to an embodiment of the present invention;

[0037] Figure 6This is a schematic diagram of the structure of another microwave remote plasma source system provided according to an embodiment of the present utility model. Detailed Implementation

[0038] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0039] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0040] Figure 1 This is a cross-sectional structural schematic diagram of a plasma generator according to an embodiment of the present invention. Figure 2 This is a schematic diagram of a reaction shell according to an embodiment of the present invention, with reference to... Figure 1 and Figure 2 The plasma generator provided in this embodiment includes: a reaction housing 110 and at least one microwave radiation component 120 located in the inner cavity of the reaction housing 110; the microwave radiation component 120 includes a metal rod 121 and a heat dissipation insulating tube 122, the heat dissipation insulating tube 122 completely surrounds the entire outer surface of the metal rod 121 in the inner cavity portion of the reaction housing 110; the metal rod 121 is used to receive microwave energy to ionize the process gas in the inner cavity of the reaction housing 110.

[0041] Specifically, the reaction shell 110 has an inner cavity for containing process gases. The shape of the reaction shell 110 can be cuboid, cylinder, or cube, etc. The length of the metal rod 121 located in the inner cavity of the reaction shell 110 can be 0.3m to 2m. For example, the length of the metal rod 121 located in the inner cavity of the reaction shell 110 can be 0.3m, 0.4m, 0.5m, or 1m, etc.

[0042] The reaction housing 110 includes a third sidewall S1 and a fourth sidewall disposed opposite to each other. The third sidewall S1 may include a first through hole 111 equal in number to the microwave radiation assembly 120, and the fourth sidewall may also include a second through hole equal in number to the microwave radiation assembly 120. Figure 2 (The second through hole is not shown, but its specific structure is arranged opposite to the first through hole 111). The first end of the microwave radiation component 120 can be inserted into and fixed in the first through hole 111, and the second end of the microwave radiation component 120 can be inserted into and fixed in the second through hole. The shapes of the first through hole 111 and the second through hole are both matched with the cross-sectional shape of the microwave radiation component 120.

[0043] The plasma generator may include one microwave radiation component 120, or two or more microwave radiation components 120. The metal rod 121 in the microwave radiation component 120 can receive microwave energy to ionize the process gas inside the reaction housing 110 to generate plasma. In this embodiment, the microwave radiation component 120 is located inside the reaction housing 110, which improves the ionization effect of the process gas and helps to increase the plasma density inside the reaction housing 110.

[0044] The metal rod 121 can be solid or hollow. When the metal rod 121 is hollow, a cooling medium can be introduced into the metal rod 121 to reduce the temperature of the metal rod 121 when receiving microwave energy and improve the heat dissipation efficiency of the metal rod 121.

[0045] The heat dissipation insulating tube 122 can be made of quartz. The heat dissipation insulating tube 122 has good heat dissipation characteristics and can quickly reduce the temperature of the metal rod 121. The heat dissipation insulating tube 122 can be attached to the outer surface of the metal rod 121, or it can be spaced apart from the outer surface of the metal rod 121. The heat dissipation insulating tube 122 completely surrounds the entire outer surface of the metal rod 121 within the reaction shell 110 cavity; that is, the metal rod 121 is not exposed within the reaction shell 110 cavity and is entirely surrounded by the heat dissipation insulating tube 122. This arrangement can prevent the metal rod 121 from being corroded by the process gases and plasma within the reaction shell 110 cavity, thus avoiding the generation of metal impurity ions and affecting the purity of the plasma.

[0046] This embodiment provides a plasma generator in which a microwave radiation component is located within the inner cavity of a reaction chamber. This allows microwave energy to act more effectively on the process gas, significantly improving the ionization effect of the process gas and thus increasing the plasma density within the reaction chamber. A metal rod located within the reaction chamber is completely surrounded by a heat-dissipating insulating tube, allowing the tube to quickly dissipate heat from the metal rod. Furthermore, the heat-dissipating insulating tube surrounds the entire outer surface of the metal rod within the reaction chamber, ensuring no exposed areas of the metal rod. This prevents corrosion of the metal rod during the ionization of the process gas, thus avoiding the generation of metal impurity ions that could contaminate the plasma purity. In summary, the plasma generator provided in this embodiment can improve the ionization effect of the process gas and the plasma density within the reaction chamber, as well as increase plasma purity and improve the heat dissipation efficiency of the metal rod.

[0047] Optional, Figure 3 This is a cross-sectional structural schematic diagram of another plasma generator according to an embodiment of the present invention, with reference to... Figure 3 The metal rod 121 is provided with an axially extending axial through hole 123, which is used to introduce a cooling medium.

[0048] Specifically, the cooling medium can be water, oil, or gases with cooling functions such as compressed air and nitrogen. An axial through hole 123 is provided in the metal rod 121, through which the cooling medium can be introduced, thereby rapidly reducing the temperature of the metal rod 121 and improving its working efficiency.

[0049] Optional, Figure 4 This is a cross-sectional structural schematic diagram of another plasma generator according to an embodiment of the present invention, with reference to... Figure 4 The microwave radiation assembly 120 also includes a thermally conductive adhesive layer 124; the thermally conductive adhesive layer 124 is located between the metal rod 121 and the heat dissipation insulating tube 122, and the thermally conductive adhesive layer 124 is used to fill the gap between the metal rod 121 and the heat dissipation insulating tube 122.

[0050] Specifically, the thermally conductive adhesive layer 124 is in direct and close contact with the outer surface of the metal rod 121 and the inner surface of the heat dissipation insulating tube 122. The thermally conductive adhesive layer 124 is preferably made of an adhesive material with high thermal conductivity and excellent electrical insulation properties, such as, but not limited to, silicone thermally conductive adhesive or epoxy thermally conductive adhesive filled with thermally conductive ceramic particles such as alumina (Al2O3), boron nitride (BN) or magnesium oxide (MgO).

[0051] The thermally conductive adhesive layer 124 efficiently fills any microscopic gaps or voids that may exist between the metal rod 121 and the heat dissipation insulating tube 122, establishing a continuous, low-thermal-resistance thermal conductive channel between them. This greatly promotes the transfer rate of heat generated by the metal rod 121 to the heat dissipation insulating tube 122, significantly improving the overall heat dissipation efficiency.

[0052] The thermally conductive adhesive layer 124 firmly bonds and fixes the metal rod 121 and the heat dissipation insulating tube 122 together, effectively preventing relative displacement or loosening of the two during the operation of the plasma generator (such as vibration), and ensuring the long-term reliability and positional accuracy of the microwave radiation component 120.

[0053] The thermally conductive adhesive layer 124 is suitable for structures where there is a gap between the heat dissipation insulating tube 122 and the metal rod 121. The thermally conductive adhesive layer 124 fills the gap, ensuring insulation protection while solving the problem of relatively low heat conduction efficiency in non-contact structures.

[0054] Optional, continue to refer to Figure 1 and Figure 2 The plasma generator includes multiple microwave radiation components 120 located in the inner cavity of the reaction housing 110; the reaction housing 110 has a cuboid shape; the multiple microwave radiation components 120 are arranged along the length of the reaction housing 110.

[0055] Specifically, multiple microwave radiation components 120 are arranged in the inner cavity of the reaction shell 110 to fully ionize the process gas in the inner cavity of the reaction shell 110 and improve the ionization effect of the process gas. The multiple microwave radiation components 120 can be arranged at equal intervals along the length of the reaction shell 110, thereby further improving the ionization effect of the process gas.

[0056] Multiple microwave radiation components 120 form a dense and controllable electromagnetic field source array within the cavity of the reaction housing 110. Compared to a single component, this significantly increases the effective interaction area and intensity of microwave energy with the process gas, thereby greatly enhancing the overall ionization capability of large-volume process gases. Multiple radiation sources arranged along the length direction (especially at equal intervals) can generate a more uniformly distributed electromagnetic field in this dimension, further promoting the uniformity of plasma density along the length direction within the cavity of the reaction housing 110. This effectively avoids or reduces ionization dead zones, significantly improving plasma generation efficiency per unit volume and overall process performance.

[0057] Optional, continue to refer to Figure 1 and Figure 2 The top surface S2 of the reaction housing 110 is provided with multiple air inlets 112, and each microwave radiation component 120 has at least two air inlets 112.

[0058] Specifically, multiple air inlets 112 are provided on the top surface S2 of the reaction housing 110, which can realize the precise and uniform supply of process gas near the microwave radiation component 120. The top surface S2 can be a long and wide surface of the reaction housing 110.

[0059] Multiple gas inlets 112 corresponding to the microwave radiation component 120 can be arranged at equal intervals along the width direction of the reaction shell 110. This arrangement ensures that the process gas is directly and uniformly delivered to the near-field region around each microwave radiation component 120. This near-end gas injection method significantly improves the contact efficiency and mixing uniformity between microwave energy and fresh process gas, thereby greatly enhancing the ionization efficiency of the process gas and the plasma generation rate of the microwave radiation component 120.

[0060] Optional, continue to refer to Figure 2 The reaction shell 110 includes a first sidewall S3 and a second sidewall; the first sidewall S3 is provided with an observation window 113, and the second sidewall is provided with an air outlet.

[0061] Specifically, the observation window 113 is made of a transparent material (such as quartz glass or high-temperature resistant sight glass). Through the observation window 113, the ionization state, plasma morphology and distribution of the process gas inside the reaction shell 110 can be monitored in real time and intuitively, which is convenient for process debugging and process control.

[0062] The plasma (or processed gaseous products) generated inside the reaction shell 110 is stably output through the gas outlet and connected to the downstream processing chamber or process equipment to realize a continuous plasma processing process.

[0063] Optional, continue to refer to Figure 3 The shape of the metal rod 121 includes a hollow cylinder; the shape of the heat dissipation insulating tube 122 includes a hollow cylinder.

[0064] Specifically, the metal rod 121 and the heat dissipation insulating tube 122 can be coaxially arranged. This coaxial hollow cylindrical configuration facilitates precise fitting and assembly between the metal rod 121 and the heat dissipation insulating tube 122. The hollow structure itself also helps to reduce the overall weight and potential material costs.

[0065] Optional materials for the heat dissipation insulating tube include optical glass, borosilicate glass, quartz, or sodium silicate glass.

[0066] Specifically, quartz is silicon dioxide. Quartz exhibits extremely low microwave energy loss, ensuring efficient microwave penetration of the heat dissipation insulation tube and its effect on the process gas. Quartz also possesses extremely high melting point and thermal stability, capable of withstanding the high temperatures generated by the plasma environment, and remains undeformed and undecomposed even after long-term use. Furthermore, quartz completely prevents the metal rod 121 from contacting the plasma and process gas within the reaction chamber, fundamentally eliminating metal contamination. Quartz's thermal conductivity is sufficient to effectively conduct the heat generated by the metal rod 121, meeting heat dissipation requirements. Quartz exhibits excellent chemical stability against most process gases and plasmas, is corrosion-resistant, and does not participate in the reaction.

[0067] Figure 5 This is a schematic diagram of a microwave remote plasma source system according to an embodiment of the present invention, with reference to... Figure 5 The microwave remote plasma source system provided in this embodiment includes a plasma generator, multiple microwave impedance matching devices 200, and at least one microwave power supply module 300, as provided in any embodiment of this utility model. The number of microwave power supply modules 300 is equal to the number of microwave radiation components 120, and each microwave power supply module 300 corresponds to one microwave radiation component 120. The number of microwave impedance matching devices 200 is twice the number of microwave radiation components 120. The metal rod 121 in the microwave radiation component 120 includes a first input terminal and a second input terminal. The first input terminal and the second input terminal of each metal rod 121 are electrically connected to a microwave impedance matching device 200. The microwave impedance matching device 200 corresponding to the metal rod 121 is electrically connected to the same microwave power supply module 300.

[0068] Specifically, the microwave power module 300 is used to send microwave energy to the plasma generator through the microwave impedance matching device 200. After receiving the microwave energy, the plasma generator can ionize the process gas inside the plasma generator into plasma. The microwave impedance matching device 200 is used to achieve impedance matching between the microwave power module 300 and the plasma generator.

[0069] When the system includes multiple microwave power modules 300, each microwave power module 300 works independently and does not affect the others.

[0070] The first input end of the metal rod 121 can be located in the first through hole of the third sidewall, and the second input end of the metal rod 121 can be located in the second through hole of the fourth sidewall. Both the first and second input ends of the metal rod 121 are electrically connected to the microwave power module 300. Microwave energy can be input from both the first and second input ends of the metal rod 121 simultaneously, avoiding the problem that the process gas at the end cannot be ionized due to microwave energy being input from only one end of the metal rod 121. Therefore, this embodiment can improve the ionization effect of the process gas in the cavity of the reaction shell 110 and ensure the uniformity of the plasma.

[0071] This embodiment provides a microwave remote plasma source system. By configuring the first and second input terminals of the metal rod in each microwave radiation component to receive microwave energy, the ionization effect of the process gas can be improved. Furthermore, by assigning a microwave power module to each microwave radiation component, the problem of process gas ionization failing when the power module is damaged, which would be avoided if all microwave radiation components were connected to a single power module.

[0072] Optional, Figure 6 This is a schematic diagram of another microwave remote plasma source system provided according to an embodiment of the present invention, with reference to... Figure 6 The microwave power module 300 includes a first microwave power unit 301 and a second microwave power unit 302; the first microwave power unit 301 is electrically connected to the first input terminal of the metal rod 121 through a microwave impedance matching device 200, and the second microwave power unit 302 is electrically connected to the second input terminal of the metal rod 121 through a microwave impedance matching device 200.

[0073] Specifically, the first microwave power supply unit 301 and the second microwave power supply unit 302 operate independently of each other. The microwave power supply module 300 includes the independent first microwave power supply unit 301 and the second microwave power supply unit 302. It can independently control the amount of microwave energy received by the first input terminal and the second input terminal of the metal rod 121. It can also ensure that the metal rod 131 can still work normally if one of the first microwave power supply unit 301 and the second microwave power supply unit 302 is damaged.

[0074] The microwave remote plasma source system provided in this embodiment includes the plasma generator provided in any embodiment of this utility model. Therefore, the microwave remote plasma source system provided in this embodiment has the beneficial effects of the plasma generator provided in any embodiment of this utility model, which will not be elaborated here.

[0075] It should be understood that the various forms of the process shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this utility model can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this utility model can be achieved, and this is not limited herein.

[0076] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A plasma generator, characterized by, include: The reaction housing and at least one microwave radiation component located in the cavity of the reaction housing; The microwave radiation assembly includes a metal rod and a heat dissipation insulating tube, the heat dissipation insulating tube completely surrounding the entire outer surface of the metal rod in the inner cavity portion of the reaction shell; The metal rod is used to receive microwave energy to ionize the process gas in the inner cavity of the reaction shell.

2. The plasma generator of claim 1, wherein, The metal rod is provided with an axially extending through hole for introducing a cooling medium.

3. The plasma generator of claim 2, wherein, The microwave radiation component also includes a thermally conductive adhesive layer; The thermally conductive adhesive layer is located between the metal rod and the heat dissipation insulating tube, and the thermally conductive adhesive layer is used to fill the gap between the metal rod and the heat dissipation insulating tube.

4. The plasma generator of claim 1, wherein, The plasma generator includes a plurality of microwave radiation components located in the inner cavity of the reaction housing; The shape of the reaction shell includes a cuboid; Multiple microwave radiation components are arranged along the length of the reaction shell.

5. The plasma generator of claim 4, wherein, The top surface of the reaction shell is provided with multiple air inlets; Each of the microwave radiation components has at least two air inlets.

6. The plasma generator of claim 5, wherein, The reaction shell includes a first sidewall and a second sidewall; The first sidewall is provided with an observation window, and the second sidewall is provided with an air outlet.

7. The plasma generator according to claim 1, characterized in that, The shape of the metal rod includes a hollow cylinder; The heat dissipation insulating tube has the shape of a hollow cylinder.

8. The plasma generator of any one of claims 1-7, wherein, The materials of the heat dissipation and insulation tube include optical glass, borosilicate glass, quartz, or sodium calcium glass.

9. A microwave remote plasma source system characterized by, Includes the plasma generator as described in any one of claims 1-8, a plurality of microwave impedance matching devices, and at least one microwave power supply module; The number of microwave power modules is equal to the number of microwave radiation components, and there is a one-to-one correspondence between the microwave power modules and the microwave radiation components. The number of microwave impedance matching devices is twice the number of microwave radiation components; The metal rod in the microwave radiation assembly includes a first input terminal and a second input terminal. The first and second input terminals of each of the metal rods are electrically connected to a microwave impedance matching device. The microwave impedance matching device corresponding to the metal rod is electrically connected to the same microwave power supply module.

10. The microwave remote plasma source system of claim 9, wherein, The microwave power module includes a first microwave power unit and a second microwave power unit. The first microwave power supply unit is electrically connected to the first input terminal of the metal rod through the microwave impedance matching device, and the second microwave power supply unit is electrically connected to the second input terminal of the metal rod through the microwave impedance matching device.

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