A combined jig frame
The flexible contact design of the modular clamping frame solves the problems of dirt and breakage in the silicon wafer frame during clamping and support, achieving efficient and low-damage processing of silicon wafers and improving yield and production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TZTEK TECHNOLOGY CO LTD
- Filing Date
- 2025-04-15
- Publication Date
- 2026-07-03
AI Technical Summary
Existing silicon wafer frames are prone to contamination and breakage during clamping and support, and the unfixing structure is complex, affecting the yield of silicon wafers and production efficiency.
It adopts a modular clamping frame, including an upper support and a feeding frame. It uses a positioning support module and a flexible clamp to contact the silicon wafer, supports flexible contact of the silicon wafer, and can be unlocked independently or as a whole, and is compatible with silicon wafers of different specifications.
It avoids the problems of dirt and breakage caused by hard contact, has a simple structure, facilitates silicon wafer processing, reduces breakage rate, and improves yield and production efficiency.
Smart Images
Figure CN224460501U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of silicon wafer processing, and specifically relates to a combined clamp frame. Background Technology
[0002] In the silicon wafer manufacturing process, the debinding and rinsing processes all involve the material frame structure. Therefore, the structure of the material frame is related to the silicon wafer yield and processing efficiency.
[0003] Existing feed frames are structures that fix the silicon wafer as a whole or in part, and then release it as a whole. When clamping or supporting the silicon wafer, these feed frame structures often use rigid contact, which can easily lead to dirt or even breakage at the contact points. Utility Model Content
[0004] In order to overcome the shortcomings of the prior art, this utility model provides a combined clamp frame, which can solve the above problems.
[0005] A modular clamping frame includes an upper support body and a lowering frame. The joint between the upper support body and the lowering frame is provided by a positioning support module. The split flexible clamp and composite pad of the lowering frame are in direct contact with the silicon wafer. The split flexible clamp can unlock any group of supported silicon wafers as a whole or individually.
[0006] Furthermore, the upper support body includes an upper end plate, side upper support beams, upper lifting columns, a lower limit plate for the crystal tray, multiple upper limit blocks for the crystal tray, and an upper positioning support block with an upper positioning part at the bottom. Two side upper support beams are arranged parallel and spaced between the two upper end plates, thereby forming an upper support frame. Four columnar upper positioning support blocks are arranged at both ends of the two side upper support beams. The lower limit plate for the crystal tray is arranged across the two side upper support beams, and multiple upper limit blocks for the crystal tray are arranged on the lower limit plate for the crystal tray.
[0007] Furthermore, the feeding frame includes a top-opening frame body, two rows of split flexible clamps, a composite pad, a lower lifting column, and a lower positioning support block with a lower positioning part on the top; two rows of the split flexible clamps are correspondingly arranged on both sides of the top of the frame body, the composite pad is arranged at the bottom of the frame body, and the lower positioning support block is arranged at the top of the frame body.
[0008] Furthermore, the composite pad includes a lower rigid pad, an upper flexible block, and a flexible block pressure plate. The upper flexible block abuts against the upper surface of the lower rigid pad, and the two flexible block pressure plates are disposed on the outside of the lower rigid pad and the upper flexible block, with the upper edge of the flexible block pressure plate installed at a lower height than the upper edge of the upper flexible block.
[0009] Furthermore, a lower positioning component is provided below the lower rigid pad to position and support the material frame and the lower rigid pad.
[0010] Furthermore, each row of the split flexible clamps includes multiple clamping blocks with connecting parts, flexible abutment members, clamping pivots, flipping seats, flipping fixing plates, and anti-collision strips; the flexible abutment members are embedded in the notches at the front end of the clamping blocks, the rear end of the clamping blocks is mounted to the flipping seats via the clamping pivots, the front end of the flipping seats is fixedly connected to the rear end face of the flipping fixing plates, the anti-collision strips are connected to the front end face of the flipping fixing plates, and the rear end face of the flipping seats is connected to the top surface of the material frame via the fixing blocks.
[0011] Compared with the prior art, the beneficial effects of this utility model are as follows: This application adopts a combined clamp frame of upper support and unloading frame. The part of the unloading frame that abuts against the silicon wafer adopts flexible contact, avoiding the problem of damage from hard contact. It can be unlocked independently, step by step or as a whole. The structure is simple and can be compatible with silicon wafers in the range of 166mm-230mm (of course, it can also be extended to larger or smaller sizes). It is convenient to use, has a low breakage rate, and is easy to promote and apply in the field of silicon wafer processing. Attached Figure Description
[0012] Figure 1 This is a schematic diagram of a combined clamp frame according to the present invention;
[0013] Figure 2 This is a schematic diagram of the upper support structure;
[0014] Figure 3 This is a schematic diagram of the material feeding frame structure;
[0015] Figure 4 This is a schematic diagram of the composite pad block structure;
[0016] Figure 5 This is a schematic diagram of a split-type flexible chuck.
[0017] Figure 6 This is a partial structural diagram of a split-type flexible chuck.
[0018] Figure 7 This is a structural schematic diagram of a modular clamp frame.
[0019] In the picture,
[0020] 100. Upper support body; 101. Upper end plate; 102. Side upper support beam; 103. Upper hoisting column; 104. Crystal tray lower limit plate; 105. Crystal tray upper limit block; 106. Upper positioning support block; 107. Upper positioning part;
[0021] 200. Feeding frame; 210. Frame body; 220. Split-type flexible clamp; 221. Clamping block; 222. Flexible abutment; 223. Clamping pivot; 224. Tilting seat; 225. Tilting fixing plate; 226. Anti-collision strip; 227. Fixing block; 230. Composite pad; 231. Lower rigid pad; 232. Upper flexible block; 233. Flexible block pressure plate; 234. Lower positioning component of pad; 240. Lower lifting column; 250. Lower positioning support block; 251. Lower positioning part. Detailed Implementation
[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0023] A modular clamping frame, see Figures 1-7 The combined clamp frame includes an upper support body 100 and a feeding frame 200. The docking point of the upper support body 100 and the feeding frame 200 adopts a positioning support module. The split flexible clamp and composite pad of the feeding frame 200 are in direct contact with the silicon wafer. The split flexible clamp can unlock any group of supported silicon wafers as a whole or individually.
[0024] The contact portion between the upper support 100 and the crystal tray is a rigid support, while the contact portion between the feeding frame 200 and the silicon wafer is a flexible support.
[0025] See Figure 2 The upper support body 100 includes an upper end plate 101, a side upper support beam 102, an upper hoisting column 103, a crystal tray lower limit plate 104, multiple crystal tray upper limit blocks 105, and an upper positioning support block 106 with an upper positioning part 107 at the bottom.
[0026] Arrangement: Two side upper support beams 102 are arranged in parallel and spaced between two upper end plates 101, thus forming an upper support frame. Four columnar upper positioning support blocks 106 are arranged at both ends of the two side upper support beams 102. The crystal tray lower limiting plate 104 is arranged across the two side upper support beams 102. Multiple crystal tray upper limiting blocks 105 are arranged on the crystal tray lower limiting plate 104.
[0027] The upper hoisting column 103 is installed on the outer end face or outer side face of the upper end plate 101 or the side support beam 102.
[0028] The upper positioning support block 106 can be cylindrical or square in cross-section, but square cross-section is preferred here. The upper positioning portions 107 at the bottom of the two upper positioning support blocks 106 on the same side have different positioning directions.
[0029] In specific examples, the upper positioning part 107 can take the form of a concave section of a sine function curve for half a cycle, a semi-circular concave section, or an equilateral triangular concave section.
[0030] See Figures 3-6 The feeding frame 200 includes a top-opening frame body 210, two rows of split flexible clamps 220, a composite pad 230, a lower lifting column 240, and a lower positioning support block 250 with a lower positioning part 251 on the top.
[0031] Arrangement: Two rows of split flexible clamps 220 are arranged on the top two sides of the material frame 210, the composite pad 230 is arranged at the bottom of the material frame 210, and the lower positioning support block 250 is arranged at the top of the material frame 210.
[0032] The lower lifting column 240 is set on the outer end face or outer side face of the material frame 210, and the installation positions of the upper lifting column 103 and the lower lifting column 240 are corresponding vertically to facilitate the operation of the lifting device.
[0033] The composite pad 230 includes a lower rigid pad 231, an upper flexible block 232, and a flexible block pressure plate 233. The upper flexible block 232 abuts against the upper surface of the lower rigid pad 231. The two flexible block pressure plates 233 are disposed on the outer side of the lower rigid pad 231 and the upper flexible block 232, and the upper edge of the flexible block pressure plate 233 is installed at a lower height than the upper edge of the upper flexible block 232.
[0034] A lower positioning member 234 is also provided below the lower rigid pad 231 for positioning and supporting the material frame 210 and the lower rigid pad 231.
[0035] Each row of split flexible clamps 220 includes multiple clamping blocks 221 with connecting parts, flexible abutment members 222, clamping pivots 223, flip seats 224, flip fixing plates 225, and anti-collision strips 226.
[0036] The flexible abutment 222 is embedded in the notch at the front end of the clamping block 221. The rear end of the clamping block 221 is mounted on the flipping seat 224 via the clamping pivot 223. The front end of the flipping seat 224 is fixedly connected to the rear end face of the flipping fixing plate 225. The anti-collision strip 226 is connected to the front end face of the flipping fixing plate 225. The rear end face of the flipping seat 224 is connected to the top surface of the material frame 210 via the fixing block 227.
[0037] In a specific example, the flexible abutment 222 is a flexible pressure block, such as a pressing sponge block, rubber block, or silicone block. In this case, the connecting part at the front end of the pressing block 221 is a notch, and the flexible pressure block is embedded in the notch.
[0038] The flexible abutment 222 can also be in the form of a flexible roller. In this case, the connecting part at the front end of the clamping block 221 becomes a pivot mounting part, and the flexible roller is mounted via the roller pivot.
[0039] Since the clamping block 221 and the flexible abutment 222 are mounted on the flipping seat 224 via the clamping pivot 223, the rear end of the clamping block 221 can be unlocked and locked individually, in groups, or in multiple groups via the unlocking mechanism. Of course, all clamping blocks 221 can also be unlocked simultaneously. The unlocking mechanism can be any existing mechanism in the field, such as an unlocking mechanism consisting of an unlocking plate, an unlocking pressure plate, and an unlocking bearing. It can also be a pull-out pressure plate unlocking mechanism that unlocks step by step from one end to the other, or a side-driven unlocking structure, as long as it can drive or release the clamping block 221 to rotate and release the silicon wafer interface held inside.
[0040] In a specific example, the top of the material frame 210 of the feeding frame 200 is open, and its ends can also be designed as openings to serve as discharge ports. Of course, a removable baffle can also be used for sealing.
[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.
Claims
1. A modular fixture frame, characterized by: The combined clamp frame includes an upper support body (100) and a feeding frame (200). The docking point of the upper support body (100) and the feeding frame (200) adopts a positioning support module. The split flexible clamp and composite pad of the feeding frame (200) are in direct contact with the silicon wafer. The split flexible clamp can unlock any group of supported silicon wafers as a whole or individually.
2. The modular fixture frame of claim 1, wherein: The upper support body (100) includes an upper end plate (101), a side upper support beam (102), an upper hoisting column (103), a crystal tray lower limit plate (104), multiple crystal tray upper limit blocks (105), and an upper positioning support block (106) with an upper positioning part (107) at the bottom. Two side upper support beams (102) are arranged parallel to each other between two upper end plates (101), four columnar upper positioning support blocks (106) are arranged at both ends of the two side upper support beams (102), a crystal tray lower limiting plate (104) is arranged across the two side upper support beams (102), and multiple crystal tray upper limiting blocks (105) are arranged on the crystal tray lower limiting plate (104).
3. The modular fixture frame of claim 1, wherein: The feeding frame (200) includes a top-opening frame body (210), two rows of split flexible clamps (220), a composite pad (230), a lower lifting column (240), and a lower positioning support block (250) with a lower positioning part (251) on the top. Two rows of the split flexible clamps (220) are arranged on the top sides of the frame body (210), the composite pad (230) is arranged at the bottom of the frame body (210), and the lower positioning support block (250) is arranged at the top of the frame body (210).
4. The modular fixture frame of claim 3, wherein: The composite pad (230) includes a lower rigid pad (231), an upper flexible block (232), and a flexible block pressure plate (233). The upper flexible block (232) abuts against the upper surface of the lower rigid pad (231). The two flexible block pressure plates (233) are disposed on the outside of the lower rigid pad (231) and the upper flexible block (232), and the upper edge of the flexible block pressure plate (233) is installed at a lower height than the upper edge of the upper flexible block (232).
5. The modular fixture frame of claim 4, wherein: A lower positioning element (234) is also provided below the lower rigid pad (231).
6. The modular fixture frame of claim 3 or 4, wherein: Each row of the split flexible clamps (220) includes multiple clamping blocks (221) with connecting parts, flexible abutment members (222), clamping pivots (223), flip seats (224), flip fixing plates (225), and anti-collision strips (226); the flexible abutment members (222) are embedded in the notch at the front end of the clamping block (221), the rear end of the clamping block (221) is installed on the flip seat (224) through the clamping pivot (223), the front end of the flip seat (224) is fixedly connected to the rear end face of the flip fixing plate (225), the anti-collision strips (226) are connected to the front end face of the flip fixing plate (225), and the rear end face of the flip seat (224) is connected to the top surface of the material frame (210) through the fixing block (227).