Compatibility basket fixture

Abstract

This utility model belongs to the field of semiconductor equipment technology, specifically relating to a compatible basket jig, including a jig body. The outer dimensions of the jig body are the same as those of a first-sized basket. The basket support space formed by the connection of two opposite sidewalls of the jig body is a support space for a second-sized basket, where the first size is larger than the second size. This utility model enables the cleaning of silicon wafers of different sizes on the same cleaning machine by switching compatible basket jigs, reducing costs.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment technology, specifically relating to a compatible flower basket fixture. Background Technology

[0002] A silicon wafer is a silicon chip used in the fabrication of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. Silicon wafers are the carrier used in the production of integrated circuits, and generally refer to monocrystalline silicon wafers. Monocrystalline silicon wafers are made by drawing and refining ordinary silicon sand, followed by a series of processes including dissolution, purification, and distillation to produce monocrystalline silicon rods. After polishing and slicing, the monocrystalline silicon rods become silicon wafers. During the silicon wafer manufacturing process, cleaning and drying are usually required. In cleaning and drying silicon wafers, the wafers are first placed in a basket, then immersed in a cleaning solution according to the process ratio for cleaning, and finally placed in an oven to bake and dry.

[0003] In existing technologies, silicon wafers come in various sizes, such as 5 inches, 6 inches, 8 inches, and 12 inches. Different sizes of silicon wafers are placed in corresponding sized baskets. Therefore, cleaning and drying different sizes of silicon wafers requires different sized baskets to hold the wafers and placing them on cleaning machines of the corresponding sizes. In other words, one cleaning machine can only clean one type of silicon wafer. For example, an 8-inch silicon wafer needs to be placed in an 8-inch basket, and only a cleaning machine that can hold 8-inch baskets can clean that 8-inch wafer; while a 6-inch silicon wafer can only be placed in a 6-inch basket, requiring a separate cleaning machine that holds 6-inch baskets. In short, different sizes of silicon wafers require different baskets and cleaning machines, resulting in high costs and low efficiency. Utility Model Content

[0004] This invention addresses the technical problem in the prior art where a flower basket of a certain specification can only hold one type of silicon wafer of the same specification, resulting in the need for different cleaning machines and high costs when cleaning different silicon wafers. The purpose is to provide a compatible flower basket fixture.

[0005] To solve the aforementioned technical problems, this utility model provides a compatible flower basket fixture, which includes a fixture body. The external dimensions of the fixture body are the same as those of a first-sized flower basket. The flower basket support space formed by the connection of two opposite sidewalls of the fixture body is a support space for a second-sized flower basket. The first size is larger than the second size.

[0006] Optionally, in the compatibility basket fixture described above, the first size is selected from one of 6 inches, 8 inches, 12 inches and 18 inches, the second size is selected from one of 5 inches, 6 inches, 8 inches and 12 inches, and the first size is greater than the second size;

[0007] Preferably, the first size is 8 inches and the second size is 6 inches.

[0008] Optionally, in the compatibility basket fixture described above, two opposite sidewalls of the fixture body are support walls and the other two opposite sidewalls are connecting walls.

[0009] The supporting wall includes a supporting rod, the two ends of which are respectively connected to the two connecting walls, and each end of the supporting rod is provided with a supporting ring for abutting against the side wall of the second-sized flower basket.

[0010] Optionally, in the compatibility basket fixture described above, a limiting ring is provided at each end of the support rod. The limiting ring is located on the side of the support ring and close to the end of the support rod. The outer diameter of the limiting ring is larger than the outer diameter of the support ring, and the limiting ring and the support ring are smoothly connected.

[0011] The first directional spacing between the two oppositely arranged support rings limits the spacing of the second-sized flower basket in the first direction. The second directional spacing between the two limiting rings on the same support rod limits the spacing of the second-sized flower basket in the second direction. The second direction intersects with the first direction.

[0012] Optionally, in the compatibility basket fixture described above, the second direction is perpendicular to the first direction.

[0013] Optionally, in the compatibility basket fixture described above, the two ends of the support rod are detachably connected to the connecting wall.

[0014] Optionally, in the compatibility basket fixture described above, the support wall further includes a clamping block, the two ends of which are respectively connected to the two connecting walls. The clamping block is located on the outer side above the support rod, and the support wall between the clamping block and the support rod has a hollow structure.

[0015] Optionally, in the compatibility basket fixture described above, the two ends of the clamping block are detachably connected to the connecting wall, and the inner side of the clamping block is provided with a positioning protrusion for insertion into the side wall of the second-sized basket.

[0016] Optionally, in the compatibility basket fixture described above, the top surface of the clamping block is an inclined surface that slopes from the upper inner side to the lower outer side.

[0017] Optionally, in the compatibility basket fixture described above, at least one hollowed-out groove with internal and external communication is provided on the connecting wall.

[0018] Optionally, in the compatibility basket fixture described above, the wall of the hollow groove adopts an inner and outer chamfer structure, causing the wall of the hollow groove to form a shape with a central protrusion and inclined inner and outer sides.

[0019] Optionally, in the compatibility basket fixture described above, the top and bottom surfaces of the connecting wall have inner and outer chamfer structures, resulting in the top and bottom surfaces of the connecting wall having a central protrusion and an inclined shape on both the inner and outer sides.

[0020] Optionally, in the compatibility basket fixture described above, the fixture body further includes four fixing rods, each of which is integrally connected to the bottom ends of each of the connecting walls.

[0021] Optionally, in the compatibility basket fixture described above, the compatibility basket fixture further includes a stop bar, the length direction of which is the arrangement direction of the silicon wafers in the second-sized basket, the stop bar is detachably connected to the fixture body, and the stop bar is disposed above the basket support space.

[0022] Optionally, in the compatibility basket fixture described above, one end of the stop bar is rotatably connected to one of the connecting walls, and the other end of the stop bar is inserted into or snapped into another of the connecting walls.

[0023] Optionally, in the compatibility basket fixture described above, the top of the connecting wall is provided with connecting ears, and the two connecting ears are respectively a first connecting ear and a second connecting ear arranged opposite to each other.

[0024] The first connecting lug is provided with a clearance opening and a rotating shaft. One end of the stop rod extends into the clearance opening and is rotatably connected to the first connecting lug through the rotating shaft.

[0025] The second connecting ear is provided with a limiting port, the top of the limiting port is an opening, the diameter of the opening is smaller than the outer diameter of the stop rod, and the other end of the stop rod passes through the opening and is confined within the limiting port.

[0026] Optionally, in the compatibility basket jig described above, the compatibility basket jig is a jig made of PTFE material.

[0027] Optionally, in the compatibility basket jig described above, the compatibility basket jig is a jig formed by machine tool processing.

[0028] The positive and progressive effects of this utility model are as follows:

[0029] 1. The fixture body of this utility model has the same external dimensions as the first-size basket that carries the first-size silicon wafer in the prior art, while supporting a smaller second-size basket. The second-size basket can be used to carry the second-size silicon wafer, thereby enabling the same cleaning machine to directly clean the first-size basket and also clean the second-size basket supported by this utility model. Ultimately, it is possible to clean silicon wafers of different sizes on the same cleaning machine by switching compatible basket fixtures, thereby reducing costs.

[0030] 2. This utility model, through the design of the baffle, can prevent the silicon wafer from floating and confine the silicon wafer in the second-sized basket, greatly reducing the possibility of fragmentation. Attached Figure Description

[0031] The disclosure of this utility model will become more apparent with reference to the accompanying drawings. It should be understood that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. In the drawings:

[0032] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0033] Figure 2 for Figure 1 The main view;

[0034] Figure 3 for Figure 1 Side view;

[0035] Figure 4 for Figure 1 Top view;

[0036] Figure 5 for Figure 1 A schematic diagram of a structure after placing a second-sized flower basket inside;

[0037] Figure 6 for Figure 5 Another perspective diagram. Detailed Implementation

[0038] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0039] It should be noted that, unless otherwise specified, the following embodiments and features can be combined with each other.

[0040] In the description of this utility model, it should be noted that the directional terms such as "outer side", "middle section", "inner", "outer" indicate the orientation and positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. They should not be construed as limiting the specific protection scope of this utility model.

[0041] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. Thus, the use of "first" and "second" to define a feature may explicitly or implicitly include one or more of that feature. In the description of this utility model, "several" or "a number" means two or more, unless otherwise explicitly specified.

[0042] Reference Figures 1 to 6 This utility model provides a compatible flower basket fixture, which includes a fixture body 10. The external dimensions of the fixture body 10 are the same as those of a first-size flower basket. It should be noted that the external dimensions here refer to the overall outline, so that the fixture body 10 can be applied to a cleaning machine corresponding to the first-size flower basket for cleaning silicon wafers. Here, the first-size flower basket refers to a flower basket in the prior art that can only hold silicon wafers of the first size. In the prior art, a 6-inch flower basket can only hold 6-inch silicon wafers, and an 8-inch flower basket can only hold 8-inch silicon wafers. The external dimensions of the 8-inch fixture body 10 of this utility model are the same as the external dimensions of an 8-inch flower basket in the prior art that holds 8-inch silicon wafers.

[0043] The support space formed by the connection of the two opposite sidewalls of the fixture body 10 of this invention is a support space for a second-sized flower basket, where the first size is larger than the second size. That is, while the external dimensions of the fixture body 10 of this invention are the same as those of the first-sized flower basket in the prior art that carries a first-sized silicon wafer, it can accommodate and support a second-sized flower basket, which carries a smaller second-sized silicon wafer.

[0044] For example, the 8-inch fixture body 10 of this invention has the same external dimensions as the 8-inch basket that carries 8-inch silicon wafers. It can accommodate and support a 6-inch basket 50, which carries a 6-inch silicon wafer 60. This allows the 6-inch silicon wafer to be cleaned using only this invention on the cleaning machine used to clean 8-inch silicon wafers, avoiding the need to switch to different cleaning machines when cleaning silicon wafers of different sizes, thus reducing costs.

[0045] In some embodiments, the first size is selected from 6 inches, 8 inches, 12 inches and 18 inches, the second size is selected from 5 inches, 6 inches, 8 inches and 12 inches, and the first size is greater than the second size; preferably, the first size is 8 inches and the second size is 6 inches.

[0046] In some embodiments, refer to Figures 1 to 6 Two opposite sidewalls of the fixture body 10 are support walls 20 and the other two opposite sidewalls are connecting walls 30. The support wall 20 includes a support rod 21, the two ends of which are respectively connected to the two connecting walls 30. Each end of the support rod 21 is provided with a support ring 211 for abutting against the sidewall of the second-sized flower basket.

[0047] In this embodiment, support rings 211 are respectively set at both ends of the two support rods 21, so that the two side walls of the second-sized flower basket abut against the four support rings 211 to support the second-sized flower basket.

[0048] In some embodiments, refer to Figures 1 to 6 Each end of the support rod 21 is provided with a limiting ring 212. The limiting ring 212 is located on the side of the support ring 211 and close to the end of the support rod 21. The outer diameter of the limiting ring 212 is larger than the outer diameter of the support ring 211, and the limiting ring 212 and the support ring 211 are smoothly connected. The first direction distance between the two oppositely arranged support rings 211 is the distance in the first direction that limits the second-sized flower basket. The second direction distance between the two limiting rings 212 on the same support rod 21 is the distance in the second direction that limits the second-sized flower basket. The second direction intersects with the first direction.

[0049] like Figure 4 As shown, the first directional distance between the two opposing support rings 211 is L1, and the second directional distance between the two limiting rings 212 on the same support rod 21 is L2. The second-sized flower basket is restricted within a space with length and width L1 and L2. Except for the two side walls in the first direction which abut against the four support rings 211 respectively, the second-sized flower basket is suspended in the support space of the fixture body 1.

[0050] In this embodiment, by setting limiting rings 212 and smooth transitions at both ends of the support ring 211, the problem of deviation when manually placing the second-sized flower basket is prevented, and the second-sized flower basket slides into the limiting size under the effect of the smooth transition.

[0051] In some embodiments, the second direction is perpendicular to the first direction.

[0052] In some embodiments, the two ends of the support rod 21 are detachably connected to the connecting wall 30.

[0053] If the fixture body 1 needs to accommodate and support a second-size flower basket of different sizes, when the support ring 211 of the support rod 21 cannot abut against the side wall of the second-size flower basket or the limiting ring 212 cannot restrict the second direction of the limiting ring 212, simply replace the support rod 21 with a suitable one.

[0054] In practice, the end of the support rod 21 can be locked from the outside of the connecting wall 30 in the second direction inward using fasteners such as tapered screws or bolts.

[0055] In some embodiments, refer to Figures 1 to 6 The support wall 20 also includes a clamping block 22, with both ends of the clamping block 22 connected to two connecting walls 30 respectively. The clamping block 22 is located on the outer side above the support rod 21, and the support wall 20 between the clamping block 22 and the support rod 21 adopts a hollow structure.

[0056] The clamping block 22 is used to cooperate with the external gripper. In the cleaning or transfer process, the external gripper can use the clamping block 22 to grip the fixture body 10 for cleaning or transfer.

[0057] In this embodiment, except for the support rod 21 and the clamping block 22, the support wall 20 adopts a hollow design with internal and external connections. In other words, the support wall 20 is actually composed of the support rod 21 and the clamping block 22. The small covering area can reduce the adsorption of the medicine and better clean the second-sized silicon wafer in the second-sized flower basket supported inside.

[0058] In some embodiments, refer to Figure 1 and Figure 4 The clamping block 22 is detachably connected to the connecting wall 30 at both ends, and the inner side of the clamping block 22 is provided with a positioning protrusion 221 for insertion into the side wall of the second-sized flower basket.

[0059] In order to further position / limit the second-sized flower basket inside the fixture body 10, this embodiment adds a positioning protrusion 221 to the inside of the clamping block 22, so that the positioning protrusion 221 can be inserted into the side wall of the second-sized flower basket during use, further preventing the second-sized flower basket from shaking in the support space.

[0060] In practice, slots can be made from the outside to the inside on the two opposite side walls of the original second-size flower basket in the first direction, which is a simple and convenient modification.

[0061] In practice, fasteners such as tapered screws or bolts can be used to lock the clamping block 22 from the outside in the first direction to the connecting wall 30.

[0062] The positioning protrusion 221 is preferably integrally disposed in the middle of the inner side of the clamping block 22.

[0063] In some embodiments, refer to Figure 3The top surface of the clamping block 22 adopts an inclined surface 22a that slopes from the upper inner side to the lower outer side.

[0064] When cleaning the second-size silicon wafer, the cleaning fluid on the top of the fixture body 10 can flow outward from the inclined surface 22a, avoiding the residue of cleaning fluid on the fixture body 10.

[0065] In some embodiments, refer to Figure 1 and Figure 3 At least one hollowed-out groove 31 with internal and external communication is provided on the connecting wall 30.

[0066] In this embodiment, the two connecting walls 30 are designed with at least one hollow groove 31 that is connected internally and externally. The connecting wall 30 has a small covering area, which can reduce the adsorption of the medicine and better clean the second-size silicon wafer in the second-size flower basket supported inside. This can greatly improve the drying effect of both rotary dryer and IPA.

[0067] The second ends of the support rod 21 and the clamping block 22 are detachably connected to two oppositely arranged connecting walls 30. The two support rods 21, the two clamping blocks 22 and the two connecting walls 30 together form a fixture body 10. The bottom of the fixture body 10 is hollow to facilitate the outflow of cleaning fluid.

[0068] In some embodiments, refer to Figure 1 and Figure 3 The groove wall 31a of the hollow groove 31 adopts an inner and outer chamfer structure, which makes the groove wall 31a of the hollow groove 31 form a shape with a convex middle and inclined inner and outer sides.

[0069] The hollow groove 31 adopts an inner and outer chamfer structure. When cleaning with medicine and removing the fixture body 10, the medicine can flow out along the inner and outer chamfer structure to prevent the medicine from remaining.

[0070] In some embodiments, refer to Figure 1 and Figure 4 The top surface 30a and bottom surface 30b of the connecting wall 30 have inner and outer chamfer structures, which makes the top surface 30a and bottom surface 30b of the connecting wall 30 have a shape with a central protrusion and inclined inner and outer sides.

[0071] In some embodiments, refer to Figures 1 to 6 The fixture body 10 also includes four fixing rods 11, each fixing rod 11 being integrally connected to the bottom ends of each connecting wall 30, thus the four fixing rods 11 are distributed around the bottom of the fixture body 10.

[0072] The fixing rod 11 is used to fix the fixture body 10 on the cleaning machine to clean the second-size silicon wafer.

[0073] In some embodiments, refer to Figures 1 to 6The compatibility basket fixture also includes a stop bar 40. The length direction of the stop bar 40 is the arrangement direction of the silicon wafers inside the second-sized basket. The stop bar 40 is detachably connected to the fixture body 10 and is positioned above the basket support space.

[0074] This invention, through the design of the baffle 40 component, can prevent silicon wafers from floating and confine them within the second-sized basket, greatly reducing the possibility of breakage.

[0075] In some embodiments, refer to Figure 1 One end of the stop lever 40 is rotatably connected to a connecting wall 30, and the other end of the stop lever 40 is inserted into or snapped into another connecting wall 30.

[0076] When it is necessary to insert or remove the second-sized flower basket from the fixture body 10, simply detach the other end of the stop bar 40 from the other connecting wall 30 to prevent the stop bar 40 from blocking the second-sized flower basket. After the second-sized flower basket is inserted into the fixture body 10, the other end of the stop bar 40 can be inserted or snapped into the other connecting wall 30 to achieve the purpose of blocking the second-sized silicon wafer in the second-sized flower basket.

[0077] In some embodiments, refer to Figure 1 The top of the connecting wall 30 is provided with connecting ears, and two connecting ears 32 are respectively the first connecting ear 32 and the second connecting ear 33 arranged opposite to each other. The first connecting ear 32 is provided with a clearance opening and a rotating shaft. One end of the stop rod 40 extends into the clearance opening and is rotatably connected to the first connecting ear 32 through the rotating shaft. The second connecting ear 33 is provided with a limiting opening. The top of the limiting opening is open, and the diameter of the opening is smaller than the outer diameter of the stop rod 40. The other end of the stop rod 40 passes through the opening and is confined within the limiting opening.

[0078] In some embodiments, the compatibility basket jig is a jig made of PTFE material.

[0079] In some embodiments, the compatibility basket jig is a jig formed by machine tool processing.

[0080] Because PTFE material is harder than traditional PFA material for flower baskets, PTFE jigs can be machined into individual components and then assembled to form a compatible flower basket jig. Compared to injection molding of traditional PFA flower baskets, machine machining is a lower-cost manufacturing method.

[0081] For example, the connecting wall 30 of the fixture body 10, the fixing rod 11, the hollow groove 31, the first connecting ear 32, and the second connecting ear 33 are all integrally machined. The support rod 21 and its support ring 211, limiting ring 212, and smooth transition structure are all integrally machined. The clamping block 22 is integrally machined. The positioning protrusion 221 is integrally machined. The stop rod 40 is integrally machined. The support rod 21 is detachably connected to the connecting wall 30. One end of the stop rod 40 is rotatably connected to the first connecting ear 32. After placing the second-sized flower basket inside the fixture body 10, the two clamping blocks 22 are detachably connected to the two connecting walls 30 respectively. At the same time, the positioning protrusion 221 installed on the clamping block 22 is inserted into the side wall of the second-sized flower basket. The other end of the stop rod 40 is inserted into the limiting opening of the second connecting ear 33.

[0082] The present invention has been described in detail above with reference to the accompanying drawings and embodiments. Those skilled in the art can make various modifications to the present invention based on the above description. Therefore, certain details in the embodiments should not be construed as limiting the present invention, and the scope of protection of the present invention shall be defined by the appended claims.

Claims

1. A compatibility basket fixture, comprising: The compatible flower basket fixture includes a fixture body, the outer dimensions of which are the outer dimensions of a first-size flower basket, and the flower basket support space formed by the connection of two opposite side walls of the fixture body is a support space for a second-size flower basket, wherein the first size is larger than the second size. Two opposite sidewalls of the fixture body are supporting walls and the other two opposite sidewalls are connecting walls; The supporting wall includes a supporting rod, the two ends of which are respectively connected to the two connecting walls, and each end of the supporting rod is provided with a supporting ring for abutting against the side wall of the second-sized flower basket; A limiting ring is provided at each end of the support rod. The limiting ring is located on the side of the support ring and close to the end of the support rod. The outer diameter of the limiting ring is larger than the outer diameter of the support ring. The limiting ring and the support ring are smoothly connected. The first directional spacing between the two opposing support rings limits the spacing of the second-sized flower basket in the first direction, and the second directional spacing between the two limiting rings on the same support rod limits the spacing of the second-sized flower basket in the second direction. The second direction intersects with the first direction. The compatible flower basket fixture also includes a stop bar, the length direction of which is the arrangement direction of the silicon wafers inside the second-sized flower basket. The stop bar is detachably connected to the fixture body and is positioned above the flower basket support space.

2. The compatibility basket fixture of claim 1, wherein, The first size is selected from one of 6 inches, 8 inches and 12 inches, the second size is selected from one of 5 inches, 6 inches and 8 inches, and the first size is larger than the second size.

3. The compatible flower basket fixture as described in claim 2, characterized in that, The first size is 8 inches, and the second size is 6 inches.

4. The compatibility basket fixture of claim 1, wherein, The two ends of the support rod are detachably connected to the connecting wall.

5. The compatibility basket fixture of claim 1, wherein, The second direction is perpendicular to the first direction.

6. The compatibility basket fixture of claim 1, wherein, The support wall also includes a clamping block, with its two ends connected to the two connecting walls respectively. The clamping block is located on the outer side above the support rod, and the support wall between the clamping block and the support rod has a hollow structure.

7. The compatible flower basket fixture as described in claim 6, characterized in that, The clamping block is detachably connected to the connecting wall at both ends, and the inner side of the clamping block is provided with positioning protrusions for insertion into the side wall of the second-sized flower basket.

8. The compatible flower basket fixture as described in claim 7, characterized in that, The top surface of the clamping block is an inclined surface that slopes from the upper inner side to the lower outer side.

9. The compatibility basket fixture of claim 1, wherein, Two opposite sidewalls of the fixture body are supporting walls and the other two opposite sidewalls are connecting walls. At least one hollow groove with internal and external communication is carved in the connecting wall.

10. The compatible flower basket fixture as described in claim 9, characterized in that, The wall of the hollow groove adopts an inner and outer chamfer structure, which makes the wall of the hollow groove convex in the middle and inclined on the inner and outer sides.

11. The compatibility basket fixture of claim 1, wherein, Two opposite sidewalls of the fixture body are supporting walls and the other two opposite sidewalls are connecting walls. The top and bottom surfaces of the connecting walls have inner and outer chamfer structures, which makes the top and bottom surfaces of the connecting walls have a central protrusion and an inclined shape on the inner and outer sides.

12. The compatibility basket fixture of claim 1, wherein, Two opposite sidewalls of the fixture body are supporting walls and the other two opposite sidewalls are connecting walls; The fixture body also includes four fixing rods, each of which is integrally connected to the bottom ends of each connecting wall.

13. The compatibility basket fixture of claim 1, wherein, One end of the stop bar is rotatably connected to one of the connecting walls, and the other end of the stop bar is inserted into or snapped into another of the connecting walls.

14. The compatible flower basket fixture as described in claim 13, characterized in that, The top of the connecting wall is provided with connecting ears, and the two connecting ears are respectively a first connecting ear and a second connecting ear arranged opposite to each other; the first connecting ear is provided with a clearance opening and a rotating shaft, one end of the stop rod extends into the clearance opening and is rotatably connected to the first connecting ear through the rotating shaft; the second connecting ear is provided with a limiting opening, the top of the limiting opening is an opening, the diameter of the opening is smaller than the outer diameter of the stop rod, and the other end of the stop rod passes through the opening and is confined within the limiting opening.

15. The compatibility basket fixture of any one of claims 1 to 14, wherein, The compatibility basket fixture is made of PTFE material.

16. The compatible flower basket fixture as described in claim 15, characterized in that, The compatibility basket fixture is a fixture formed by machine tool processing.

Images