A soiled cleaning apparatus and cleaning system

Abstract

The application provides a dirt cleaning device and a cleaning system, and relates to the technical field of mask processing. The dirt cleaning device comprises: a stage, which is used for placing a product to be cleaned; a liquid control device, which is used for adding a reaction liquid to an abnormal area of the product to be cleaned, the reaction liquid being used for removing dirt in the abnormal area; a dilution device, which is used for adding a dilution liquid to the abnormal area; and a liquid adsorption device, which is used for adsorbing liquid on the product to be cleaned. The dirt cleaning device processes the abnormal area of the product to be cleaned, so that the reaction liquid stays in the abnormal area for a period of time, and then the process of adsorption, dilution and re-adsorption is performed, thereby removing dirt on the surface of the product to be cleaned. The number of times of cleaning the whole product to be cleaned can be reduced, the use of a cleaning machine and an inspection machine can be reduced, the processing time of dirt can be reduced, the success rate of dirt processing can be improved, and the product delivery rate can be improved.

Description

Technical Field

[0001] This application relates to the field of photomask processing technology, and more specifically, to a dirt cleaning device and cleaning system. Background Technology

[0002] During the photomask fabrication process, there is a risk of large dirt particles remaining after the cleaning process. If these large dirt particles are present in the graphic area, they can cause differences in light throughput, requiring repair or repeated cleaning. If the remaining dirt particles are too large and cover an overly complex graphic area, repair will be difficult, rendering the photomask unusable. If the remaining large dirt particles are located in an open area outside the graphic area, it will negatively impact the customer's perception, leading to rejection and the photomask being scrapped.

[0003] There are two main methods for removing large dirt residues. One method is to attempt repair using a repair machine. However, if the large dirt residue is too big and covers a complex pattern, it will be difficult to repair, and the photomask will be unusable. The other method is repeated cleaning. However, this method carries the risk of generating new dirt in new locations or affecting the size and penetration of the pattern area, causing irreparable damage. It also consumes a lot of cleaning and inspection machine capacity, resulting in wasted capacity. Repeated cleaning will also extend the overall production cycle of the photomask, with the risk of delayed delivery. Utility Model Content

[0004] The purpose of this application is to address the shortcomings of the prior art by providing a dirt cleaning device and system that can focus on treating abnormal dirt locations, reduce abnormal treatment time, and improve the success rate of abnormal treatment.

[0005] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows:

[0006] One aspect of this application provides a dirt cleaning device, comprising: a platform for placing a product to be cleaned; a liquid control device for adding a reaction solution to an abnormal area of ​​the product to be cleaned, the reaction solution being used to remove dirt from the abnormal area; a dilution device for adding a diluent to the abnormal area; and a liquid adsorption device for adsorbing liquid from the product to be cleaned.

[0007] Optionally, it also includes: a positioning device, which is used to acquire the location information of the abnormal area and transmit the location information to the liquid control device and the liquid adsorption device respectively.

[0008] Optionally, it also includes: a visual device for observing the surface of the product to be cleaned.

[0009] Optionally, it also includes a cleaning device for cleaning the product to be cleaned.

[0010] Optionally, it also includes: a control device for controlling the operation of the liquid control device, the dilution device, and the liquid adsorption device.

[0011] Optionally, it also includes: a first conveying device for conveying the product to be cleaned to a platform.

[0012] Optionally, it also includes a robotic arm for transferring the product to be cleaned from the first transfer device to a platform.

[0013] Optionally, it also includes a second transfer device for transferring the stage to a liquid control device, a dilution device, a liquid adsorption device, or a cleaning device.

[0014] Optionally, the liquid adsorption device includes: a first liquid adsorption device and a second liquid adsorption device, and the liquid control device, the first liquid adsorption device, the dilution device, and the second liquid adsorption device are arranged sequentially at intervals along a preset direction.

[0015] In another aspect of the embodiments of this application, a cleaning system is provided, including the dirt cleaning device as described in any of the above.

[0016] The beneficial effects of this application include:

[0017] This application provides a dirt cleaning device, comprising: a stage for placing a product to be cleaned; a liquid control device for adding a reaction solution to abnormal areas of the product to be cleaned, the reaction solution being used to remove dirt from the abnormal areas; a dilution device for adding a diluent to the abnormal areas; and a liquid adsorption device for adsorbing liquid from the product to be cleaned. This dirt cleaning device targets abnormal areas of the product to be cleaned, allowing the reaction solution to remain in the abnormal areas for a period of time, followed by an adsorption, dilution, and re-adsorption process, thereby removing dirt from the surface of the product. Using this dirt cleaning device allows for focused treatment of abnormal areas, reducing the impact of multiple cleanings on other parts of the product (e.g., abnormalities in product size, penetration, or film layer caused by multiple cleanings), reducing the number of overall cleaning cycles, reducing the use of cleaning and inspection equipment, reducing dirt treatment time, and increasing the success rate of dirt removal, thereby improving product delivery rate. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of the dirt cleaning equipment provided in the embodiments of this application.

[0020] Icons: 100 - Dirt cleaning equipment; 110 - Platform; 120 - Liquid control device; 130 - Dilution device; 140 - Liquid adsorption device; 141 - First liquid adsorption device; 142 - Second liquid adsorption device; 150 - Positioning device; 160 - Cleaning device; 200 - Product to be cleaned; 210 - Abnormal area; 300 - Reaction solution; 400 - Diluent; 500 - Cleaning solution. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0022] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. It should be noted that, unless otherwise specified, the various features in the embodiments of this application can be combined with each other, and the combined embodiments are still within the protection scope of this application.

[0023] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0024] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0025] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0026] Regarding one aspect of the embodiments of this application, please refer to Figure 1 A dirt cleaning device 100 is provided for cleaning products such as photomasks and wafers. The dirt cleaning device 100 includes: a stage 110, a liquid control device 120, a dilution device 130, and a liquid adsorption device 140. Wherein:

[0027] The stage 110 is used to place the product 200 to be cleaned. The surface of the product 200 is dirty, and the area where the dirt is located is defined as the abnormal area 210. To facilitate the removal of dirt, preferably, the abnormal area 210 of the product 200 is facing upwards after it is placed on the stage 110. Of course, if there are abnormal areas 210 on both the front and back of the product 200, then both the front and back of the product 200 will be exposed after it is placed on the stage 110.

[0028] The liquid control device 120 is used to add a reaction solution 300 to the abnormal area 210 of the product 200 to be cleaned. The reaction solution 300 is used to remove dirt from the abnormal area 210. Generally, the reaction solution 300 removes dirt by reacting chemically with the dirt. Preferably, the liquid control device 120 can control the type, concentration, and amount of the added reaction solution 300, as well as the coverage area of ​​the reaction solution 300 on the product 200 to be cleaned, thereby improving the cleaning effect.

[0029] The dilution device 130 is used to add diluent 400 to the abnormal area 210, thereby diluting the reaction solution 300 in the abnormal area 210.

[0030] The liquid adsorption device 140 is used to adsorb liquid on the product 200 to be cleaned. The liquid can be the residual liquid after the reaction solution 300 reacts with the dirt, or it can be a mixture of residual liquid and diluent 400.

[0031] The working process of the aforementioned dirt cleaning equipment 100 is as follows: The product 200 to be cleaned is placed on the platform 110. The liquid control device 120 adds reaction liquid 300 to the abnormal area 210 of the product 200. After the reaction liquid 300 reacts fully with the dirt, the liquid adsorption device 140 adsorbs the liquid (the residual liquid after the reaction liquid 300 reacts with the dirt) in the abnormal area 210 to remove most of the liquid. The dilution device 130 adds diluent 400 to the abnormal area 210 to dilute the remaining residual liquid after adsorption. Then, the liquid adsorption device 140 adsorbs the remaining residual liquid and diluent 400 in the abnormal area 210.

[0032] The aforementioned dirt cleaning equipment 100 targets abnormal areas 210 of the product 200 to be cleaned. The reaction solution 300 remains in the abnormal areas 210 for a period of time, followed by adsorption, dilution, and re-adsorption processes to remove dirt from the surface of the product 200. Using this dirt cleaning equipment 100 allows for focused treatment of abnormal areas 210, reducing the impact of multiple cleaning processes on other parts of the product 200 (e.g., abnormalities in size, penetration, or film layer caused by multiple cleaning processes). This reduces the number of overall cleaning cycles for the product 200, decreases the use of cleaning and inspection equipment, reduces dirt treatment time, and increases the success rate of dirt removal, thereby improving product delivery rates.

[0033] Optionally, the dirt cleaning equipment 100 further includes a positioning device 150, which is used to obtain the location information of the abnormal area 210 and transmit the location information to the liquid control device 120 and the liquid adsorption device 140 respectively.

[0034] The liquid control device 120 determines the location of the abnormal area 210 based on the location information and adds the reaction solution 300 to the abnormal area 210. The liquid adsorption device 140 determines the location of the abnormal area 210 based on the location information and adds the diluent 400 to the abnormal area 210.

[0035] For example, the positioning device 150 determines the location and boundaries of the abnormal area 210 by scanning the surface of the product 200 to be cleaned.

[0036] Of course, the product 200 to be cleaned can also have its abnormal area 210 located before entering the dirt cleaning equipment 100, and the location information of the abnormal area 210 has been sent to the liquid control device 120 and the liquid adsorption device 140. Alternatively, the location information of the abnormal area 210 can be determined by other means.

[0037] Optionally, the dirt cleaning equipment 100 also includes a viewing device for observing the surface of the product 200 to be cleaned.

[0038] The visual device can confirm the accuracy of the location information of the abnormal area 210 by observing the surface of the product 200 to be cleaned. It can also assist in obtaining the location information of the abnormal area 210, observe the residual changes of dirt in the abnormal area 210 during the processing, and observe the residual liquid in the abnormal area 210.

[0039] Optionally, the dirt cleaning equipment 100 also includes a cleaning device 160 for cleaning the product 200 to be cleaned.

[0040] After completing the adsorption, dilution, and re-adsorption processes, the cleaning device 160 is used to thoroughly clean the product 200 to further improve the surface cleanliness of the product 200 before it can be sent for testing.

[0041] For example, the cleaning device 160 sprays cleaning fluid 500 onto the surface of the product 200 to be cleaned in order to achieve cleaning.

[0042] Optionally, the dirt cleaning equipment 100 also includes a control device for controlling the operation of the liquid control device 120, the dilution device 130 and the liquid adsorption device 140, so that the abnormal area 210 of the product to be cleaned 200 can sequentially complete the process of adding reaction liquid 300, adsorption, dilution and re-adsorption.

[0043] Optionally, the dirt cleaning equipment 100 further includes a first transmission device for transmitting the product 200 to be cleaned to the platform 110.

[0044] The first transfer device can be used to sequentially transfer multiple products 200 to be cleaned to the stage 110, so as to facilitate the transfer of the products 200 to be cleaned onto the stage 110. In this embodiment, the stage 110 does not move, while the liquid control device 120, the dilution device 130, and the liquid adsorption device 140 are movable, thereby completing the process of adding reaction liquid 300, adsorption, dilution, and re-adsorption.

[0045] Optionally, the dirt cleaning equipment 100 further includes a robotic arm for transferring the product 200 to be cleaned on the first transfer device to the stage 110.

[0046] Optionally, the dirt cleaning equipment 100 further includes a second transmission device for transmitting the platform 110 to the liquid control device 120, the dilution device 130, the liquid adsorption device 140, or the cleaning device 160.

[0047] In this embodiment, the stage 110 moves with the second transmission device, while the liquid control device 120, dilution device 130, liquid adsorption device 140 and cleaning device 160 remain stationary. In this way, the process of adding reaction liquid 300, adsorption, dilution and re-adsorption can also be completed.

[0048] Optionally, the liquid adsorption device 140 includes: a first liquid adsorption device 141 and a second liquid adsorption device 142, and the liquid control device 120, the first liquid adsorption device 141, the dilution device 130, and the second liquid adsorption device 142 are arranged sequentially at intervals along a preset direction.

[0049] Since the liquid on the abnormal area 210 needs to be adsorbed twice during the dirt cleaning process, a first liquid adsorption device 141 and a second liquid adsorption device 142 are respectively set up. The first liquid adsorption device 141 is used for the first adsorption, and the second liquid adsorption device 142 is used for the second adsorption. In this way, the second conveying device only needs to convey the platform 110 along the preset direction to align the platform 110 with each device in sequence. The adsorption part of the liquid adsorption device 140 can be selected from adsorption materials, lint-free cloths, lint-free rods, etc.

[0050] It should be noted that in this embodiment, the specific structure of the liquid control device 120, dilution device 130, liquid adsorption device 140, positioning device 150, visual device, cleaning device 160, control device, first transmission device and second transmission device are not limited, as long as they can achieve the corresponding functions.

[0051] In another aspect of the embodiments of this application, a cleaning system is provided, including a dirt cleaning device 100 as described in any of the above claims.

[0052] This cleaning system has the same structure and beneficial effects as the dirt cleaning device 100 in the foregoing embodiments. The structure and beneficial effects of the dirt cleaning device 100 have been described in detail in the foregoing embodiments and will not be repeated here.

[0053] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A dirt cleaning device, characterized in that, include: A platform for placing products to be cleaned; A liquid control device for adding a reaction solution to an abnormal area of ​​the product to be cleaned, the reaction solution being used to remove dirt from the abnormal area; A dilution device for adding a diluent to the abnormal area; A liquid adsorption device is used to adsorb liquid from the product to be cleaned.

2. The dirt cleaning equipment as described in claim 1, characterized in that, Also includes: A positioning device is used to acquire the location information of the abnormal area and transmit the location information to the liquid control device and the liquid adsorption device respectively.

3. The dirt cleaning equipment as described in claim 1, characterized in that, Also includes: A visual device for observing the surface of the product to be cleaned.

4. The dirt cleaning equipment as described in claim 1, characterized in that, Also includes: A cleaning device for cleaning products to be cleaned.

5. The dirt cleaning equipment as described in claim 1, characterized in that, Also includes: A control device for controlling the operation of the liquid control device, the dilution device, and the liquid adsorption device.

6. The dirt cleaning equipment as described in claim 1, characterized in that, Also includes: A first transmission device is used to transfer the product to be cleaned to the platform.

7. The dirt cleaning equipment as described in claim 6, characterized in that, Also includes: A robotic arm for transferring the product to be cleaned from the first transfer device to the loading platform.

8. The dirt cleaning equipment as described in claim 4, characterized in that, Also includes: The second transmission device is used to transmit the stage to the liquid control device, the dilution device, the liquid adsorption device, or the cleaning device.

9. The dirt cleaning equipment as described in claim 8, characterized in that, The liquid adsorption device includes a first liquid adsorption device and a second liquid adsorption device, wherein the liquid control device, the first liquid adsorption device, the dilution device, and the second liquid adsorption device are arranged sequentially at intervals along a preset direction.

10. A cleaning system, characterized in that, Includes the dirt cleaning equipment as described in any one of claims 1 to 9.

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