An ultra-low pressure self-operated regulating valve
By designing a dual-diaphragm actuator, the problem of pressure fluctuation in traditional self-regulating valves under ultra-low pressure conditions is solved, achieving stable control and rapid response of fluid pressure, and meeting the precision fluid control needs of high-end manufacturing industries.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 浙江宝核工业科技集团有限公司
- Filing Date
- 2025-07-01
- Publication Date
- 2026-07-07
AI Technical Summary
Traditional self-regulating valves experience pressure fluctuations and flow changes under ultra-low pressure conditions, making it difficult to meet the precision fluid control requirements of high-end manufacturing industries.
The system employs a dual-diaphragm actuator, combining the first and second actuators. The first and second elastic elements respectively drive the first and second diaphragm units to assist the valve stem in raising and lowering, thereby achieving rapid response and precise control of fluid pressure.
The adjustment accuracy of the ultra-low pressure regulating valve has been improved, ensuring that the fluid pressure remains stable within the preset range, thereby enhancing the precision and response speed of fluid control.
Smart Images

Figure CN224469753U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of regulating valves, specifically to an ultra-low pressure self-regulating regulating valve. Background Technology
[0002] Ultra-low pressure fluid control (operating pressure ≤ 0.1 MPa) has wide applications in industrial fluid control, semiconductor manufacturing, biomedicine, and fine chemicals. Traditional self-operated control valves are generally single-diaphragm actuators that rely on a single spring for compensation. When the valve core opens, the mechanical delay between the deformation of the single diaphragm and the reset of the single spring results in significant pressure fluctuations, affecting fluid flow changes and making it difficult to support the precision fluid control requirements of high-end manufacturing industries. Utility Model Content
[0003] To overcome the above-mentioned shortcomings, the purpose of this utility model is to provide an ultra-low pressure self-regulating valve.
[0004] To achieve the above objectives, the technical solution adopted by this utility model includes: a valve body having a first flow channel and a second flow channel, and a medium channel that vertically connects the first flow channel and the second flow channel; a first actuator located on the upper part of the valve body, having at least a first valve cavity, a first diaphragm unit that isolates the first valve cavity vertically, and a first elastic member located above the first diaphragm unit in the first valve cavity and pressing against the first diaphragm unit; a second actuator located at the bottom of the valve body, having at least a second valve cavity, a second diaphragm unit that isolates the second valve cavity vertically, and a second elastic member located below the second diaphragm unit in the second valve cavity and pressing against the second diaphragm unit; and a valve stem vertically slidably disposed within the valve body and coaxial with the medium channel, wherein the top end of the valve stem extends into the first valve cavity and connects to the first diaphragm unit, the bottom end of the valve stem extends into the second valve cavity and connects to the second diaphragm unit, and a sealing element adapted to the medium channel is provided at the lower part of the valve stem.
[0005] In the preferred embodiment of the above-mentioned ultra-low pressure self-regulating valve, the first diaphragm unit includes a first thin film and a first tray fixed on the top surface of the first thin film, and the first elastic member abuts against the first tray.
[0006] In the preferred embodiment of the ultra-low pressure self-regulating valve described above, the second diaphragm unit includes a second diaphragm sheet and a second tray fixedly disposed on the bottom surface of the second diaphragm sheet, and the second elastic member abuts against the second tray.
[0007] In the preferred embodiment of the ultra-low pressure self-regulating valve described above, a pressure regulating mechanism is further included, which is located above the actuator on the valve body, for adjusting the initial pressure of the first elastic element on the first diaphragm unit.
[0008] In the preferred embodiment of the above-mentioned ultra-low pressure self-regulating valve, the pressure regulating mechanism includes at least an extension portion with an extension channel located at the top of the valve body, an adjusting seat threadedly installed in the extension channel of the extension portion, and the two ends of the first elastic member respectively abutting against the bottom surface of the adjusting seat and the top surface of the first diaphragm unit.
[0009] In the preferred embodiment of the above-mentioned ultra-low pressure self-regulating valve, a cover is detachably installed on the top of the extension of the valve body.
[0010] In the preferred embodiment of the above-mentioned ultra-low pressure self-regulating valve, the valve stem is provided with an annular portion at the lower part of the seal, and a travel pad is detachably provided between the annular portion and the seal on the valve stem.
[0011] In the preferred embodiment of the above-mentioned ultra-low pressure self-regulating valve, the first flow channel, the second flow channel and the medium channel of the valve body are coated with polytetrafluoroethylene.
[0012] In the preferred technical solution of the above-mentioned ultra-low pressure self-regulating valve, the first elastic element and the second elastic element are springs or elastic steel sheets.
[0013] The beneficial effect of this utility model is that by adding a second actuator to the lower part of the conventional micro-pressure valve body, and by using a second elastic element to push the second diaphragm unit to assist the valve stem in raising and lowering, the regulating valve of this application can significantly improve the regulating accuracy of ultra-low pressure. This allows the regulating valve of this application to respond quickly and accurately control the position of the sealing element when faced with pressure fluctuations, so that the fluid pressure in the first and second flow channels is stabilized within a preset range, thereby improving the regulation and control of the fluid pressure in the flow channels. Attached Figure Description
[0014] Figure 1 This is the front view of the present invention;
[0015] In the figure: valve body 1, first flow channel 11, second flow channel 12, medium channel 13, extension 14, extension channel 141, first actuator 2, first valve chamber 21, first diaphragm unit 22, first diaphragm sheet 221, first tray 222, first elastic element 23, second actuator 3, second valve chamber 31, second diaphragm unit 32, second diaphragm sheet 321, second tray 322, second elastic element 33, valve stem 4, annular part 41, seal 5, adjusting seat 6, cover 7, stroke pad 8. Detailed Implementation
[0016] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.
[0017] It should be noted that in the description of this utility model, terms such as "upper," "lower," "left," "right," "front," and "rear," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0018] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0019] like Figure 1 As shown, the ultra-low pressure self-regulating valve of this utility model includes: a valve body 1, having a first flow channel 11 and a second flow channel 12, and a medium channel 13 that vertically connects the first flow channel 11 and the second flow channel 12; a first actuator 2, located on the upper part of the valve body 1, having at least a first valve cavity 21, a first diaphragm unit 22 that isolates the first valve cavity 21 vertically, and a first elastic member 23 located above the first diaphragm unit 22 and pressing the first diaphragm unit 22 against it; and a second actuator 3, located at the bottom of the valve body 1, having at least a second valve cavity 31, and a medium channel 13 that vertically connects the first valve cavity 21 and the second flow channel 12. The valve body 1 has a valve stem 4, which is vertically slidably disposed within the valve body 1 and coaxial with the medium channel 13. The top end of the valve stem 4 extends into the first valve chamber 21 and is connected to the first diaphragm unit 22, and the bottom end of the valve stem 4 extends into the second valve chamber 31 and is connected to the second diaphragm unit 32. A sealing element 5 adapted to the medium channel 13 is provided at the lower part of the valve stem 4. The outer diameter of the sealing element 5 is at least larger than the inner diameter of the medium channel 13.
[0020] See Figure 1The first flow channel 11 is located above the second flow channel 12. The first flow channel 11 and the second flow channel 12 are connected by a medium channel 13, which is vertically opened on the valve body 1. A first actuator 2 is provided at the upper part of the valve body 1, and a second actuator 3 is provided at the lower part of the valve body 1. A valve stem 4 is movably installed inside the valve stem 4. The two ends of the valve stem 4 are respectively connected to the first actuator 2 and the second actuator 3. The first actuator 2 includes at least a first valve chamber 21 located at the upper part of the valve body 1 and a first membrane that isolates the first valve chamber 21 vertically. The first valve body 1 includes a diaphragm unit 22 and a first elastic member 23 located above the first diaphragm unit 22 within the first valve chamber 21. The first elastic member 23 is connected to the first diaphragm unit 22 and the inner wall of the first valve chamber 21, respectively. The second actuator 3 includes at least a second valve chamber 31 located at the lower part of the valve body 1 and a second diaphragm unit 32 that isolates the second valve chamber 31 vertically. The second elastic member 33 is located below the second diaphragm unit 32 within the second valve chamber 31. Both ends of the second elastic member 33 are connected to the second diaphragm unit 32 and the inner wall of the second valve chamber 31, respectively.
[0021] In the initial state, when the fluid has not entered the first flow channel 11 and the second flow channel 12, the first elastic element 23 exerts an upward pulling force on the first diaphragm unit 22, and the second elastic element 33 exerts an upward pushing force on the second diaphragm unit 32. When the valve stem 4 is stationary, the sealing element 5 on the valve stem 4 blocks the bottom of the medium channel 13. When the fluid flows through the first flow channel 11, the fluid pressure impacts the sealing element 5 downward. When the impact pressure of the fluid on the sealing element 5 is greater than a set threshold, the sealing element 5 and the valve stem 4 move downward synchronously, and the sealing element 5 no longer blocks the medium channel 13, allowing the fluid to flow through the first flow channel 11 and the second flow channel 12. At this time, the first elastic element 23 is in a stretched state, and the second elastic element 33 is in a compressed state. When the pressure of the fluid impacting the sealing element 5 is less than... When setting the threshold, the first elastic element 23 drives the first diaphragm unit 22 to move upward, and the second elastic element 33 pushes the second diaphragm unit 32 to move upward. This causes the valve stem 4, which is connected to the first diaphragm unit 22 and the second diaphragm unit 32 at both ends, to move upward, so that the sealing element 5 blocks the medium channel 13. By adding a second actuator 3 to the lower part of the conventional micro-pressure valve body 1, the regulating valve of this application can significantly improve the regulating accuracy of ultra-low pressure. By using the second elastic element 33 to push the second diaphragm unit 32 to assist the valve stem 4 in rising and falling, the regulating valve of this application can respond quickly when faced with pressure, accurately control the position of the sealing element 5, and stabilize the fluid pressure in the first flow channel 11 and the second flow channel 12 within the preset range, thereby improving the regulation and control of the fluid pressure in the flow channel.
[0022] In one or more embodiments, the first diaphragm unit 22 includes a first thin film 221 and a first tray 222 fixedly disposed on the top surface of the first thin film 221, and a first elastic member 23 abuts against the first tray 222; the second diaphragm unit 32 includes a second thin film 321 and a second tray 322 fixedly disposed on the bottom surface of the second thin film 321, and a second elastic member 33 abuts against the second tray 322.
[0023] See Figure 1 The surface of the first tray 222 that contacts the first diaphragm 221 is planar. This design allows for control of the deformation range of the first diaphragm 221, ensuring the stability of pressure changes in the upper and lower chambers of the first valve cavity 21. The surface of the second tray 322 that contacts the second diaphragm 321 is also planar. This allows the second tray 322 to restrict the second diaphragm 321 during the process of the second elastic member 33 pushing the second diaphragm 321 up and down, thereby further improving the stability of pressure changes in the upper and lower chambers of the second valve cavity 31.
[0024] In one or more embodiments, a pressure regulating mechanism is further included, which is disposed above the actuator in the valve body 1, for adjusting the initial pressure of the first elastic member 23 on the first diaphragm unit 22. The pressure regulating mechanism includes at least an extension 14 with an extension channel 141 disposed on the top of the valve body 1, and an adjusting seat 6 threadedly installed in the extension channel 141 of the extension 14. The two ends of the first elastic member 23 are respectively pressed against the bottom surface of the adjusting seat 6 and the top surface of the first diaphragm unit 22.
[0025] See Figure 1 The extension 14 of the extension channel 141 at the top of the valve body 1 is connected to the first valve chamber 21. The adjusting seat 6 is threadedly installed in the extension channel 141 of the extension 14. To facilitate the screwing of the adjusting seat 6, a screwing handle can be added to the top surface of the adjusting seat 6. The two ends of the first elastic member 23 are respectively pressed against the adjusting seat 6 and the first tray 222. When it is necessary to adjust the initial pressure of the first elastic member 23 acting on the first diaphragm 221, the adjusting seat 6 is screwed clockwise or counterclockwise to make the adjusting seat 6 rise or fall in the extension channel 141 of the extension 14, so that the adjusting seat 6 relaxes the compression of the first elastic member 23 or pressurizes the first elastic member 23. Through this setting, the initial pressure of the first elastic member 23 on the first diaphragm 221 can be adjusted, thereby realizing the threshold pressure adjustment when the fluid impacts the seal 5 until it separates from the medium channel 13, effectively improving the applicability of this application.
[0026] In one or more embodiments, a cover 7 is detachably mounted on the top of the extension 14 of the valve body 1.
[0027] See Figure 1The cover 7 is placed on the top of the extension 14 of the valve body 1 to block the extension channel 141 of the extension 14, thereby reducing the amount of foreign objects falling into the extension channel 141 and improving the sealing degree of the first valve chamber 21.
[0028] In one or more embodiments, the valve stem 4 has an annular portion 41 at the lower position of the seal 5, and a travel pad 8 is detachably provided between the valve stem 4 and the annular portion 41 and the seal 5. See also Figure 1 The travel pad 8 is used to adjust the distance between the seal 5 and the annular part 41 of the valve stem 4. The travel pad 8 can be detachably installed on the valve stem 4 for easy disassembly and replacement.
[0029] In one or more embodiments, the first flow channel 11, the second flow channel 12, and the medium channel 13 of the valve body 1 are coated with a polytetrafluoroethylene (PTFE) coating. It is understood that the PTFE coating has a certain self-lubricating and anti-corrosion effect. This arrangement effectively reduces the possibility of internal corrosion of the valve body 1 and extends the service life of the valve body 1.
[0030] In one or more embodiments, the first elastic element 23 and the second elastic element 33 are springs or elastic steel sheets.
[0031] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.
Claims
1. A self-regulating ultra-low pressure control valve, characterized in that, include: The valve body has a first flow channel and a second flow channel, as well as a medium channel that connects the first flow channel and the second flow channel in the vertical direction. The first actuator is located on the upper part of the valve body and has at least a first valve cavity, a first diaphragm unit that isolates the first valve cavity vertically, and a first elastic member that is located above the first diaphragm unit in the first valve cavity and presses the first diaphragm unit against it. The second actuator is located at the bottom of the valve body and has at least a second valve chamber, a second diaphragm unit that isolates the second valve chamber vertically, and a second elastic member that is located below the second diaphragm unit in the second valve chamber and presses the second diaphragm unit against it. The valve stem is vertically slidably disposed within the valve body and coaxial with the medium channel. The top end of the valve stem extends into the first valve cavity and is connected to the first diaphragm unit, while the bottom end of the valve stem extends into the second valve cavity and is connected to the second diaphragm unit. A sealing element adapted to the medium channel is provided at the lower part of the valve stem.
2. The ultra-low pressure self-regulating valve according to claim 1, characterized in that: The first diaphragm unit includes a first thin film and a first tray fixed on the top surface of the first thin film, and the first elastic member abuts against the first tray.
3. The ultra-low pressure self-regulating valve according to claim 1, characterized in that: The second diaphragm unit includes a second thin film and a second tray fixedly disposed on the bottom surface of the second thin film, with the second elastic member pressing against the second tray.
4. The ultra-low pressure self-regulating valve according to claim 1, characterized in that: It also includes a pressure regulating mechanism, located above the valve body and the actuator, for adjusting the initial pressure of the first elastic element on the first diaphragm unit.
5. The ultra-low pressure self-regulating valve according to claim 4, characterized in that: The pressure regulating mechanism includes at least an extension portion with an extension channel located on the top of the valve body, an adjusting seat threadedly installed in the extension channel of the extension portion, and the two ends of the first elastic member respectively abutting against the bottom surface of the adjusting seat and the top surface of the first diaphragm unit.
6. The ultra-low pressure self-regulating valve according to claim 5, characterized in that: The valve body has a cover that can be detachably installed at the top of the extension.
7. The ultra-low pressure self-regulating valve according to claim 1, characterized in that: The valve stem has an annular portion at the lower part of the seal, and a travel pad is detachably provided between the annular portion and the seal on the valve stem.
8. The ultra-low pressure self-regulating valve according to claim 1, characterized in that: The valve body is coated with polytetrafluoroethylene (PTFE) coating in the first flow channel, the second flow channel, and the medium channel.
9. The ultra-low pressure self-regulating valve according to claim 1, characterized in that: The first elastic element and the second elastic element are springs or elastic steel sheets.