Heating platform water cooling system and vacuum eutectic reflow soldering furnace thereof

By designing the cooling path and nitrogen purging path of the heating platform water cooling system, the safety problem of the vacuum eutectic reflow oven water cooling system was solved, achieving efficient cooling and safe operation, and reducing operating and maintenance costs.

CN224475695UActive Publication Date: 2026-07-10中科光智(重庆)科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
中科光智(重庆)科技有限公司
Filing Date
2025-08-13
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

The existing water cooling system of vacuum eutectic reflow oven has insufficient safety in high-temperature environments. The water cooling pipes are prone to vaporization, forming high-pressure steam, which may cause pipe rupture or steam leakage, endangering the safety of equipment and workpieces.

Method used

The heating platform water cooling system is adopted. By setting up cooling passages and nitrogen purging passages, the cooling water can be recycled and residual moisture can be removed. Combined with the indirect heat exchanger for cooling and pressure relief, and the check valve is used to prevent fluid backflow, ensuring the safety and reliability of the system.

Benefits of technology

It improves water resource utilization, reduces operating costs and maintenance costs, and enhances system safety and stability through the integrated design of cooling, heat exchange and purging functions.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a kind of heating platform water cooling system and vacuum eutectic reflow soldering furnace thereof, comprising: cooling passageway for cooling, cooling passageway includes sequentially intercommunicating water chiller, filter, second stop valve, cooling pipe, heat exchanger and water chiller, the cooling pipe is installed in heating platform, the heat exchanger is also communicated with tail gas pipeline;Heat exchange passageway, it includes low-temperature flow channel, wherein, the filter is also communicated with the heat exchanger, cooling water is recycled by setting heat exchange passageway, improve water resource utilization, reduce operating cost;Setting heat exchanger realizes "cooling+pressure relief" double effect, setting first check valve and second check valve avoid high-temperature steam impact, pipeline overpressure and other risks, make system overall operation safe and reliable;In addition, the utility model is simple in structure, integrates cooling, heat exchange, purging function in one, reduce the number of independent components, can reduce the maintenance cost of later operation.
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Description

Technical Field

[0001] This utility model belongs to the technical field of vacuum eutectic reflow ovens, specifically relating to a heating platform water cooling system and its vacuum eutectic reflow oven. Background Technology

[0002] Vacuum eutectic reflow ovens, as core equipment in the microelectronics industry, rely on the principle of eutectic reaction to complete high-precision welding operations in a vacuum or inert protective atmosphere. The welding process requires maintaining a high-temperature environment of 300-450℃, while subsequent processes have stringent requirements for cooling rates. Rapid cooling is not only crucial for ensuring solder joint density and reducing thermal stress damage, but also a core element for improving production efficiency.

[0003] In existing technologies, the cooling method for vacuum eutectic reflow ovens is mainly "air cooling + water cooling". Air cooling achieves initial cooling by directly blowing an inert gas (such as nitrogen) onto the workpiece surface, while water cooling indirectly removes heat through pipes in contact with the heating platform. However, the above solutions have significant safety deficiencies: in high-temperature environments (around 450°C), the water in the water-cooling pipes easily vaporizes to form high-pressure steam. If the pipes are not well-sealed or the pressure control fails, it may cause pipe rupture or steam leakage, endangering the safety of the equipment and the workpiece.

[0004] Therefore, the market urgently needs a water-cooling system that combines high-efficiency cooling capacity, safety control mechanisms, and stable operating performance. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, this utility model provides a water-cooling system for a heating platform and its vacuum eutectic reflow oven. By setting up a heat exchange path, the cooling water is recycled, improving water resource utilization and reducing operating costs. This utility model has a simple structure, integrating cooling, heat exchange, and purging functions into one unit, reducing the number of independent components and lowering maintenance costs in later operation.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] A water-cooling system for a heating platform, comprising:

[0008] A cooling passage for cooling includes a chiller unit, a filter, a second shut-off valve, a cooling pipe, a heat exchanger and the chiller unit connected in sequence. The cooling pipe is installed inside the heating platform, and the heat exchanger is also connected to the exhaust gas pipe.

[0009] A heat exchange passage, including a low-temperature flow channel, wherein the filter is also in communication with the heat exchanger; and

[0010] A nitrogen purging passage for removing residual moisture from the cooling passage includes an inert gas source, a pressure regulating valve, and a first shut-off valve connected in sequence, with the first shut-off valve connected to the cooling pipe.

[0011] Furthermore, the heat exchange passage also includes a high-temperature flow channel. The heat exchanger adopts a partitioned heat exchange structure and includes two independent flow channels, one of which is connected to the low-temperature flow channel and the other is connected to the high-temperature flow channel to allow the high-temperature fluid discharged from the cooling pipe to pass through.

[0012] Furthermore, it also includes a first check valve, which is disposed between the first shut-off valve and the pressure regulating valve, and is connected to both the first shut-off valve and the pressure regulating valve.

[0013] Furthermore, it also includes a second check valve, which is connected to one end of the cooling pipe and is connected to both the first shut-off valve and the second shut-off valve.

[0014] Furthermore, the inert gas source is nitrogen.

[0015] Furthermore, a flow switch is connected between the filter and the second shut-off valve.

[0016] In addition, this application also claims protection for a vacuum eutectic reflow oven equipped with a water-cooling system for a heating platform as described above.

[0017] Compared with existing technologies, the beneficial effects of this solution are:

[0018] A water-cooled heating platform and its vacuum eutectic reflow oven include: a cooling passage for cooling, comprising a chiller unit, a filter, a second shut-off valve, a cooling pipe, a heat exchanger, and the chiller unit connected in sequence, wherein the cooling pipe is installed inside the heating platform, and the heat exchanger is also connected to an exhaust gas pipe; a heat exchange passage, comprising a low-temperature flow channel, wherein the filter is also connected to the heat exchanger, thereby achieving water recycling by setting up the heat exchange passage, improving water resource utilization, and reducing operating costs; and the heat exchanger is used to achieve...

[0019] The system offers a dual effect of "cooling and depressurization," and the installation of a first and second check valve avoids risks such as high-temperature steam impact and pipeline overpressure, ensuring the overall safe and reliable operation of the system. In addition, this utility model has a simple structure, integrating cooling, heat exchange, and purging functions into one unit, reducing the number of independent components and lowering maintenance costs in the later stages of operation. Attached Figure Description

[0020] Figure 1 This is a schematic diagram showing the connections of the various components of the water cooling system of this heating platform.

[0021] The attached diagrams are labeled as follows: chiller unit 1, heating platform 2, cooling pipe 21, furnace body 3, heat exchanger 4. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings.

[0023] A water-cooling system for a heating platform, such as Figure 1 As shown, it includes:

[0024] The cooling passage for cooling includes a chiller unit 1, a filter, a second shut-off valve, a cooling pipe 21, a heat exchanger 4 and the chiller unit 1 connected in sequence. The cooling pipe 21 is installed in the heating platform 2 and the heat exchanger 4 is also connected to the exhaust gas pipe.

[0025] A heat exchange passage, including a low-temperature flow channel, wherein the filter is also connected to the heat exchanger 4; and

[0026] The nitrogen purging passage for removing residual moisture in the cooling passage includes an inert gas source, a pressure regulating valve, and a first shut-off valve connected in sequence. The first shut-off valve is connected to the cooling pipe 21.

[0027] According to a specific embodiment of this utility model, the cooling passage is the core component that directly cools the heating platform 2 and the workpiece. Its function is to transport the cooling water provided by the chiller unit 1 to the cooling pipe 21 of the heating platform 2. The cooling pipe 21 is arranged in a serpentine guide channel inside the heating platform 2, with both ends extending outside the heating platform 2. The heating platform 2 is installed inside the furnace body 3 of a vacuum eutectic reflow oven. The cooling water absorbs heat and is then discharged. The heat exchanger 4 is simultaneously connected to the chiller unit 1 and the exhaust gas pipeline.

[0028] Connection relationships of various components in the cooling path:

[0029] Chiller Unit 1 → Filter → Flow Switch → Second Shut-off Valve → Second Check Valve →

[0030] Cooling pipe 21 → Heat exchanger 4 → Chiller unit 1 / Exhaust gas pipe.

[0031] The working principle of the cooling path in this embodiment is as follows:

[0032] After welding is completed, close the first shut-off valve, open the second shut-off valve, and start the cooling cycle;

[0033] The cooling water output from chiller unit 1 (temperature is usually 20-25℃) flows through a flow switch (the flow rate is monitored in real time, and if the flow rate is 0, the shutdown protection is triggered).

[0034] Cooling water enters the cooling passage through the second check valve and exchanges heat with the heating platform 2 (temperature 300-450℃). After absorbing heat, the temperature rises to 80-120℃.

[0035] After absorbing heat, the high-temperature water (containing a small amount of vaporized steam) enters heat exchanger 4 to cool down and depressurize. The liquid part flows back to chiller unit 1 for recycling, and the gaseous part is discharged into the atmosphere through the exhaust pipe (to avoid excessive pressure in the pipe).

[0036] In this embodiment, the nitrogen purging passage is used to remove residual moisture in the cooling passage after the cooling cycle is completed, so as to prevent the residual water from vaporizing and generating steam pressure during the next heating.

[0037] Connection relationships of components in the nitrogen purging passage:

[0038] Nitrogen source → Pressure regulating valve → First check valve → First shut-off valve → Second check valve → Cooling pipe 21 →

[0039] Heat exchanger 4 → Exhaust gas duct.

[0040] Working principle of nitrogen purging passage:

[0041] After the cooling cycle is complete, close the second shut-off valve and open the first shut-off valve;

[0042] The nitrogen gas output from the nitrogen source is regulated by a pressure regulating valve and then enters the cooling passage through the first check valve, the first shut-off valve, and the second check valve.

[0043] Nitrogen creates positive pressure in the passage, blowing the residual moisture into heat exchanger 4. The nitrogen is eventually discharged through the exhaust pipe, while the residual moisture flows into the water tank of the chiller for recycling.

[0044] The opening time of the first shut-off valve is set by the control system to ensure the residual water removal rate.

[0045] Furthermore, the heat exchange passage also includes a high-temperature flow channel. The heat exchanger 4 adopts a partitioned heat exchange structure and includes two independent flow channels, one of which is connected to the low-temperature flow channel and the other is connected to the high-temperature flow channel to allow the high-temperature fluid discharged from the cooling pipe 21 to pass through.

[0046] The working principle of the heat exchange passage in this embodiment is as follows: Heat exchanger 4 is a key component for realizing heat transfer and pressure balance in the vacuum furnace. It drives heat transfer through temperature difference and simultaneously cools and depressurizes the high-temperature fluid. In this embodiment, heat exchanger 4 adopts an existing indirect heat exchange structure, which includes two independent flow channels: a low-temperature flow channel (through which cooling water from chiller unit 1 flows) and a high-temperature flow channel (through which high-temperature fluid discharged from the cooling passage flows). Heat exchange is achieved through a metal wall (such as copper or stainless steel): the high-temperature fluid releases heat and cools down, while the low-temperature fluid absorbs heat and heats up.

[0047] Low-temperature flow channel connection: chiller unit 1 → filter → heat exchanger 4 → chiller unit 1. This flow channel is normally open to ensure that heat exchanger 4 has continuous heat exchange capacity.

[0048] Function of high-temperature flow channel: When the high-temperature fluid (including steam) discharged from the cooling passage passes through the high-temperature flow channel, it fully exchanges heat with the cooling water in the low-temperature flow channel, and the steam condenses into liquid, achieving the dual effect of "cooling + depressurization", avoiding the direct entry of high-temperature and high-pressure fluid into the chiller unit 1 and causing failure.

[0049] Furthermore, it also includes a first check valve, which is disposed between the first shut-off valve and the pressure regulating valve, and is connected to both the first shut-off valve and the pressure regulating valve.

[0050] Furthermore, it also includes a second check valve, which is connected to one end of the cooling pipe 21, and is connected to the first shut-off valve and the second shut-off valve respectively.

[0051] In this embodiment, a valve check valve protection method is provided, namely a first check valve and a second check valve: the first check valve prevents cooling water from flowing back into the nitrogen pipeline when the first shut-off valve is damaged, thus avoiding nitrogen source contamination; the second check valve blocks high-temperature steam in the cooling passage from back impacting the first / second shut-off valves, extending the valve's service life. Simultaneously, the outlet of the high-temperature flow channel of heat exchanger 4 is directly connected to the exhaust gas pipeline (vented to the atmosphere), ensuring that overpressure gas in the system is discharged in a timely manner, preventing pipeline rupture.

[0052] Furthermore, the inert gas source is nitrogen.

[0053] According to a specific embodiment of this utility model, nitrogen, as an inert gas, is mainly used for purging the cooling passage in the system. Its inert properties provide a stable and controllable environment for the eutectic reaction, ensuring product quality and process stability. Even if there is a leak in the cooling passage, the injected nitrogen will not contaminate the product or the furnace body 3 itself.

[0054] Furthermore, a flow switch is connected between the filter and the second shut-off valve. The flow switch on the cooling path provides real-time feedback of the flow rate signal, and if a flow interruption is detected (such as valve failure or pipe blockage), a shutdown protection mechanism is immediately triggered.

[0055] In addition, this application also claims protection for a vacuum eutectic reflow oven equipped with a water-cooling system for a heating platform as described above.

[0056] Description of the structure of the water cooling system of the heating platform of this utility model.

[0057] Chiller units: the core equipment that provides low-temperature cooling water;

[0058] Filter: Located at the outlet of chiller unit 1, used to remove impurities from the cooling water;

[0059] Flow switch: connected in series at the inlet of the cooling passage to monitor the cooling water flow rate in real time;

[0060] First / Second shut-off valves: control the opening and closing of the nitrogen purging passage and the cooling passage respectively;

[0061] First / Second Check Valve: Prevents fluid from flowing backward and protects the valve and pipeline;

[0062] Cooling pipe 21: Arranged within the serpentine flow channel of heating platform 2;

[0063] Heat exchanger 4: Includes low-temperature flow channels and high-temperature flow channels to achieve heat exchange and pressure relief;

[0064] Exhaust gas duct: connects the outlet of heat exchanger 4 to the atmosphere, used to discharge overpressure gas.

[0065] Finally, it should be noted that in the description of this utility model, the terms "vertical," "upper," "lower," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0066] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0067] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A water-cooling system for a heating platform, characterized in that, include: A cooling passage for cooling includes a chiller unit, a filter, a second shut-off valve, a cooling pipe, a heat exchanger and the chiller unit connected in sequence. The cooling pipe is installed inside the heating platform, and the heat exchanger is also connected to the exhaust gas pipe. A heat exchange passage, including a low-temperature flow channel, wherein the filter is also in communication with the heat exchanger; and A nitrogen purging passage for removing residual moisture from the cooling passage includes an inert gas source, a pressure regulating valve, and a first shut-off valve connected in sequence, with the first shut-off valve connected to the cooling pipe.

2. The water-cooling system for a heating platform according to claim 1, characterized in that, include: The heat exchange passage also includes a high-temperature flow channel. The heat exchanger adopts a partitioned heat exchange structure and includes two independent flow channels, one of which is connected to the low-temperature flow channel and the other is connected to the high-temperature flow channel to allow the high-temperature fluid discharged from the cooling pipe to pass through.

3. The water-cooling system for a heating platform according to claim 2, characterized in that, It also includes a first check valve, which is disposed between the first shut-off valve and the pressure regulating valve, and is connected to both the first shut-off valve and the pressure regulating valve.

4. The water-cooling system for a heating platform according to claim 3, characterized in that, It also includes a second check valve, which is connected to one end of the cooling pipe and is connected to the first shut-off valve and the second shut-off valve respectively.

5. A water-cooling system for a heating platform according to claim 4, characterized in that, The inert gas source is nitrogen.

6. A water-cooling system for a heating platform according to any one of claims 1-5, characterized in that, A flow switch is connected between the filter and the second shut-off valve.

7. A vacuum eutectic reflow oven, characterized in that, The heating platform is equipped with a water-cooling system as described in any one of claims 1-6.