Device for detecting phosphine in hydrogen for polysilicon production
By using a two-stage concentration unit to adsorb and remove chlorosilanes and hydrogen chloride, the problem of inaccurate phosphine detection in polysilicon production has been solved, achieving efficient and accurate phosphine detection.
CN224500575UActive Publication Date: 2026-07-14XINJIANG XINTE XINNENG MATERIAL TESTING CENT CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- XINJIANG XINTE XINNENG MATERIAL TESTING CENT CO LTD
- Filing Date
- 2025-07-30
- Publication Date
- 2026-07-14
AI Technical Summary
Technical Problem
In the prior art, the detection results of phosphine in hydrogen gas used in polysilicon production are affected by impurities such as chlorosilanes and hydrogen chloride, resulting in inaccurate detection.
Method used
A two-stage concentration unit is used, including a first concentrated hydrazine and a second concentrated hydrazine, which are used to adsorb and remove chlorosilane, phosphine, and hydrogen chloride, respectively. The phosphine content is accurately detected by a detection instrument.
Benefits of technology
It improves the accuracy of phosphine detection, eliminates interference from chlorosilanes and hydrogen chloride, simplifies operation, increases detection efficiency, and enables fully automated online operation.
✦ Generated by Eureka AI based on patent content.
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Figure CN224500575U_ABST
Abstract
The utility model relates to the polycrystal silicon production field discloses a detection device of phosphine in hydrogen for polycrystal silicon production. The device is provided with two-stage concentration device, and the detection of phosphine in hydrogen for polycrystal silicon production has higher accuracy, and the influence of impurity hydrogen chloride, chlorosilane on the detection of phosphine is eliminated. In addition, the utility model has the advantages of simple structure, simple operation, improved detection and analysis efficiency, full-automatic online operation can be realized and the like.
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