A slurry recovery device

Abstract

The utility model discloses a kind of grinding fluid recovery devices, including grinder reflux pipe, recovery cover, grinder liquid outlet head, grinding fluid recovery pipe, clean water recovery pipe and drive mechanism, recovery cover is sleeved on grinder reflux pipe;Grinder liquid outlet head is slidably connected in recovery cover, the import of grinder liquid outlet head and the outlet of grinder reflux pipe are connected by hose intercommunication;The import of grinding fluid recovery pipe and the bottom of recovery cover are interconnected;The import of clean water recovery pipe and the bottom of recovery cover are interconnected;Drive mechanism is used to drive grinder liquid outlet head sliding, to make the outlet of grinder liquid outlet head and the import of grinding fluid recovery pipe or the import of clean water recovery pipe intercommunication, the beneficial effects of the utility model are: by the time sequence switching of mechanical structure, clean water of initial stage of starting and subsequent grinding fluid are completely separated, avoid clean water mixing into grinding fluid recovery system from source, solve the problem of uneven concentration of grinding fluid caused by clean water dilution.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, specifically to a grinding slurry recovery device. Background Technology

[0002] The main purpose of chip substrate polishing is to remove surface damage caused by cutting during the slicing process and to give the substrate surface a certain degree of geometric accuracy. After polishing, the polishing machine's return pipe discharges the waste liquid containing polishing debris, impurities, and abrasive particles generated during the polishing process from the polishing machine for subsequent processing and recycling, preventing the waste liquid from accumulating inside the polishing machine and affecting the polishing effect or damaging the equipment.

[0003] Chinese utility model patent CN120023710B discloses a grinding and polishing device for refining the surface of semiconductor wafers. The device includes a grinding and polishing chamber containing a conveying and transferring assembly, a rough grinding and fine polishing assembly, an adsorption and clamping assembly, and a flipping and conversion assembly. The rough grinding and fine polishing assembly includes two fixed bases. A rotary drive motor is fixedly connected to the lower surface of each fixed base. A transmission vertical shaft is fixedly connected to the end of the output shaft of the rotary drive motor. A rough grinding wheel and a fine polishing pad are fixedly connected to the upper ends of the two transmission vertical shafts, respectively. A support sleeve is fitted around the outside of each transmission vertical shaft. The lower end of the support sleeve is fixedly connected to the upper surface of the fixed base. A collection box is slidably fitted on the outer peripheral wall of each support sleeve. Several centrally symmetrical grinding fluid nozzles are fixedly connected to the inner circumferential wall of each collection box. Several centrally symmetrical water inlets are opened on the outer peripheral wall of the support sleeve near the upper end. A return pipe is connected to the outer peripheral wall of the support sleeve near the lower end, and the end of the return pipe is fixedly connected to a storage tank.

[0004] The aforementioned technologies have the following drawbacks: It takes about ten seconds for the grinding equipment to go from startup to the point where the grinding fluid flows out of the return pipe. Before that, all the water flowing out of the grinding equipment is clean water, which is mainly used for cleaning the grinding equipment's pipes. If the clean water and the grinding fluid are recycled together, it will cause the grinding fluid concentration in the recycling system to be inconsistent, affecting the reuse of the grinding fluid. Utility Model Content

[0005] The purpose of this invention is to overcome the above-mentioned technical deficiencies and propose a grinding fluid recovery device to solve the technical problem that water and grinding fluid are easily mixed during the recovery process in the prior art.

[0006] To achieve the above-mentioned technical objectives, the present invention provides a grinding fluid recovery device, including a grinding mill return pipe; A recovery cover, which is fitted onto the return pipe of the grinding machine; The grinding mill liquid outlet head is slidably connected inside the recovery hood, and the inlet of the grinding mill liquid outlet head is connected to the outlet of the grinding mill return pipe through a flexible hose; A grinding fluid recovery pipe, wherein the inlet of the grinding fluid recovery pipe is connected to the bottom of the recovery hood; A clean water recovery pipe, wherein the inlet of the clean water recovery pipe is connected to the bottom of the recovery hood; and, A driving mechanism is provided to drive the liquid outlet head of the grinder to slide, so that the outlet of the liquid outlet head of the grinder is connected to the inlet of the grinding liquid recovery pipe or the inlet of the clean water recovery pipe.

[0007] In some embodiments, the drive mechanism includes a motor and a lead screw. The motor is located on the top of the recovery hood, and the lead screw is connected to the output shaft of the motor. The lead screw is rotatably connected to the top of the recovery hood and passes through the liquid outlet of the grinder and is threadedly connected to the liquid outlet of the grinder.

[0008] In some embodiments, the recycling shroud is transparent.

[0009] In some embodiments, the drive mechanism further includes a controller and a concentration sensor, the controller being disposed on the recovery hood and the concentration sensor being disposed on the mill return pipe, and the controller, the concentration sensor and the motor being electrically connected.

[0010] In some embodiments, the recovery device further includes a filter screen disposed inside the grinding fluid recovery pipe.

[0011] In some embodiments, the filter is tapered.

[0012] In some embodiments, the grinding mill outlet head always covers the grinding fluid recovery pipe and the clean water recovery pipe.

[0013] In some embodiments, the recycling device further includes a sliding sealing gasket disposed at the bottom of the mill outlet head and abutting against the inner bottom wall of the recycling hood.

[0014] Compared with the prior art, the beneficial effects of this utility model include: by switching the timing of the mechanical structure, the clean water at the beginning of the machine is completely separated from the subsequent grinding fluid, thus preventing clean water from mixing into the grinding fluid recovery system from the source and solving the problem of uneven grinding fluid concentration caused by dilution with clean water. Attached Figure Description

[0015] Figure 1 This is a first-view overall structural cross-sectional view of the recycling device provided by this utility model; Figure 2 This is a second-view overall structural cross-sectional view of the recycling device provided by this utility model.

[0016] Explanation of reference numerals in the attached figures: 1. Grinding mill return pipe; 11. Grinding mill liquid outlet head; 12. Hose; 13. Sliding sealing gasket; 2. Recovery cover; 3. Grinding liquid recovery pipe; 31. Filter screen; 4. Clean water recovery pipe; 5. Drive mechanism; 51. Motor; 52. Lead screw; 53. Controller; 54. Concentration sensor. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0018] This utility model provides a grinding fluid recovery device, the structure of which is as follows: Figure 1 - Figure 2 As shown, it includes a grinding mill return pipe 1, a recovery cover 2, a grinding mill liquid outlet head 11, a grinding liquid recovery pipe 3, a clean water recovery pipe 4, and a drive mechanism 5.

[0019] The recycling cover 2 is fitted onto the return pipe 1 of the grinding machine.

[0020] The grinding mill outlet head 11 is slidably connected to the inside of the recovery cover 2 along the length direction of the recovery cover 2, and the inlet of the grinding mill outlet head 11 is connected to the outlet of the grinding mill return pipe 1 through a hose 12.

[0021] The inlet of the grinding fluid recovery pipe 3 is connected to the bottom of the recovery cover 2.

[0022] The inlet of the clean water recovery pipe 4 is connected to the bottom of the recovery cover 2.

[0023] The driving mechanism 5 is used to drive the grinding machine outlet head 11 to slide so that the outlet of the grinding machine outlet head 11 is connected to the inlet of the grinding fluid recovery pipe 3 or the inlet of the clean water recovery pipe 4.

[0024] In use, the recovery cover 2 is fixedly fitted outside the return pipe 1 of the grinder. The grinder outlet head 11 is connected to the return pipe through the hose 12 and can slide inside the recovery cover 2. Its outlet can be selectively aligned with the inlet of the grinding fluid recovery pipe 3 or the inlet of the clean water recovery pipe 4 below. When the grinding equipment initially discharges clean water, the drive mechanism 5 drives the grinder outlet head 11 to slide until its outlet is aligned with the inlet of the clean water recovery pipe 4, allowing the clean water to be discharged separately through the clean water recovery pipe 4. When the clean water discharge stage ends, the drive mechanism 5 drives the grinder outlet head 11 to slide again, aligning its outlet with the inlet of the grinding fluid recovery pipe 3. At this time, the outflowing grinding fluid enters the recovery system through the grinding fluid recovery pipe 3.

[0025] In this invention, the clean water at the beginning of startup is completely separated from the grinding fluid by the timing switching of the mechanical structure, thus preventing clean water from mixing into the grinding fluid recovery system from the source and solving the problem of uneven grinding fluid concentration caused by dilution with clean water.

[0026] To drive the liquid outlet head 11 of the grinder to slide, please refer to... Figure 1 In a preferred embodiment, the drive mechanism 5 includes a motor 51, a lead screw 52, ​​and a fixed base. The motor 51 is mounted on the top of the recovery hood 2. The lead screw 52 is coaxially connected to the output shaft of the motor 51 and is rotatably connected to the top of the recovery hood 2. The fixed base is fixedly connected to the liquid outlet head 11. The lead screw 52 passes through the fixed base and is threadedly connected to the fixed base.

[0027] During operation, when the grinding equipment is initially started and clean water needs to be recovered, the output shaft of motor 51 drives the lead screw 52 to rotate clockwise. Since the lead screw 52 is threadedly connected to the fixed seat, and the fixed seat is limited by the sliding groove and cannot rotate synchronously with the lead screw 52, ​​the fixed seat slides along the axial direction of the lead screw 52 under the action of the threaded transmission. This, in turn, causes the liquid outlet 11 to slide until its outlet is precisely aligned with the inlet of the clean water recovery pipe 4. At this point, clean water is discharged through this channel. When the clean water discharge stage ends, the output shaft of motor 51 drives the lead screw 52 to rotate counterclockwise. Through the threaded transmission, the grinding machine's liquid outlet 11 slides in the opposite direction along the axial direction of the lead screw 52 until its outlet switches to alignment with the inlet of the grinding fluid recovery pipe 3. At this point, the grinding fluid enters the recovery system through the corresponding channel.

[0028] To facilitate observation of the situation inside recovery hood 2, please refer to... Figure 1 In a preferred embodiment, the recycling cover 2 is transparent.

[0029] During use, operators can directly observe the sliding state of the grinding mill outlet head 11 inside the recovery hood 2 and the alignment of the outlet with the recovery pipe inlet, which facilitates real-time monitoring of whether the switching action of the equipment is accurate and timely detection of possible misalignment or other abnormalities.

[0030] For more accurate recycling of water and grinding fluid, please refer to... Figure 1 In a preferred embodiment, the drive mechanism 5 further includes a controller 53 and a concentration sensor. The controller 53 is disposed on the recovery hood 2, and the concentration sensor is disposed on the grinding mill return pipe 1. The controller 53, the concentration sensor, and the motor 51 are electrically connected.

[0031] During operation, the concentration sensor monitors the concentration changes of the fluid in the return pipe 1 of the grinder in real time. When the grinder starts and discharges clean water, the concentration sensor detects a low concentration signal and transmits it to the controller 53. The controller 53 immediately instructs the motor 51 to drive the outlet head to switch to the clean water recovery pipe 4. When the grinding fluid begins to be discharged and the concentration reaches the set threshold, the concentration sensor feeds back the signal to the controller 53. The controller 53 automatically instructs the motor 51 to reverse, causing the outlet head to switch to the grinding fluid recovery pipe 3. The entire process does not rely on a fixed time setting and achieves dynamic switching based entirely on the actual fluid properties, adapting to the different switching timings of grinding fluid and clean water under different operating conditions.

[0032] To improve the cleanliness of the recovered grinding fluid, please refer to... Figure 1 In a preferred embodiment, the recovery device further includes a filter screen 31, which is disposed inside the grinding fluid recovery pipe 3.

[0033] During use, the grinding fluid entering the recycling system can be initially filtered to effectively intercept larger particulate impurities that may be present, such as debris generated during the grinding process and worn polishing pad particles. If these impurities enter the subsequent recycling process, they may affect the purity of the grinding fluid and even damage the precision components of subsequent equipment. The filter screen 31 can reduce the occurrence of such problems from the source.

[0034] To reduce the likelihood of filter 31 becoming clogged, please refer to... Figure 1 In a preferred embodiment, the filter 31 is conical.

[0035] During use, the tapered inclined surface makes it easier for impurities to accumulate at the bottom under the action of gravity, preventing impurities from accumulating evenly on the surface of the filter screen 31 and quickly clogging it, thus ensuring the flow efficiency of the grinding fluid. When the grinding fluid flows through the tapered filter screen 31, the liquid flows along the tapered surface, which can generate a certain scouring force, reducing the probability of impurities adhering to the filter screen 31 and further improving the filtration durability of the filter screen 31.

[0036] To reduce the possibility of liquid spillage, please refer to Figure 1 In a preferred embodiment, the grinding machine outlet head 11 always covers the grinding fluid recovery pipe 3 and the clean water recovery pipe 4.

[0037] When in use, whether it is clean water or grinding fluid, after flowing out of the outlet, it will be confined within the relatively closed space formed by the outlet and the two recovery pipes, and will not splash outside the recovery hood 2, reducing liquid waste and avoiding pollution to the surrounding environment of the equipment, thus keeping the work area clean.

[0038] To improve the seal between the grinding mill outlet head 11 and the recovery hood 2, please refer to... Figure 1In a preferred embodiment, the recycling device further includes a sliding sealing gasket 13, which is made of rubber and has a thickness of 0.1 mm. The sliding sealing gasket 13 is fixedly connected to the bottom of the grinding mill outlet head 11 and abuts against the inner bottom wall of the recycling cover 2.

[0039] During use, the sliding sealing gasket 13 fills the gap between the liquid outlet head and the inner bottom wall of the recovery hood 2, preventing water or grinding fluid from leaking through the gap during flow, avoiding liquid waste and corrosion of other internal components, and ensuring the accuracy of recovery. Simultaneously, as the sealing gasket slides with the liquid outlet head, it reduces direct friction with the inner bottom wall of the recovery hood 2, reducing component wear, extending equipment lifespan, and making the sliding process smoother, ensuring stability when the liquid outlet head switches positions, further improving the reliability of diversion and recovery.

[0040] To better understand this utility model, the following is combined with... Figure 1 - Figure 2 The working principle of a grinding fluid recovery device according to the present invention is described in detail below: A recovery cover 2 is fixedly sleeved outside the return pipe 1 of the grinding machine. The grinding machine outlet head 11 is connected to the return pipe via a flexible hose 12 and can slide inside the recovery cover 2. Its outlet can selectively align with the inlet of the grinding fluid recovery pipe 3 or the inlet of the clean water recovery pipe 4 below. When clean water is discharged during the initial startup of the grinding equipment, the drive mechanism 5 drives the grinding machine outlet head 11 to slide until its outlet aligns with the inlet of the clean water recovery pipe 4, allowing clean water to be discharged solely through the clean water recovery pipe 4. When the clean water discharge stage ends, the drive mechanism 5 drives the grinding machine outlet head 11 to slide again, aligning its outlet with the inlet of the grinding fluid recovery pipe 3. At this time, the outflowing grinding fluid enters the recovery system through the grinding fluid recovery pipe 3.

[0041] The specific embodiments of this utility model described above do not constitute a limitation on the scope of protection of this utility model. Any other corresponding changes and modifications made based on the technical concept of this utility model should be included within the scope of protection of the claims of this utility model.

Claims

1. A grinding fluid recovery device, characterized in that, include: Grinding machine return pipe; A recovery cover, which is fitted onto the return pipe of the grinding machine; The grinding mill liquid outlet head is slidably connected inside the recovery hood, and the inlet of the grinding mill liquid outlet head is connected to the outlet of the grinding mill return pipe through a flexible hose; A grinding fluid recovery pipe, wherein the inlet of the grinding fluid recovery pipe is connected to the bottom of the recovery hood; A clean water recovery pipe, wherein the inlet of the clean water recovery pipe is connected to the bottom of the recovery hood; and, A driving mechanism is provided to drive the liquid outlet head of the grinder to slide, so that the outlet of the liquid outlet head of the grinder is connected to the inlet of the grinding liquid recovery pipe or the inlet of the clean water recovery pipe.

2. The grinding fluid recovery device according to claim 1, characterized in that, The drive mechanism includes a motor and a lead screw. The motor is located on the top of the recovery hood, and the lead screw is connected to the output shaft of the motor. The lead screw is rotatably connected to the top of the recovery hood, and the lead screw passes through the liquid outlet head of the grinder and is threadedly connected to the liquid outlet head of the grinder.

3. The grinding fluid recovery device according to claim 1, characterized in that, The recycling cover is transparent.

4. The grinding fluid recovery device according to claim 2, characterized in that, The drive mechanism also includes a controller and a concentration sensor. The controller is located on the recovery hood, and the concentration sensor is located on the return pipe of the grinder. The controller, the concentration sensor, and the motor are electrically connected.

5. The grinding fluid recovery device according to claim 1, characterized in that, The recovery device also includes a filter screen, which is disposed inside the grinding fluid recovery pipe.

6. The grinding fluid recovery device according to claim 5, characterized in that, The filter screen is cone-shaped.

7. The grinding fluid recovery device according to claim 1, characterized in that, The grinding machine's liquid outlet head always covers the grinding liquid recovery pipe and the clean water recovery pipe.

8. The grinding fluid recovery device according to claim 1, characterized in that, The recycling device also includes a sliding sealing gasket, which is located at the bottom of the liquid outlet of the grinder and abuts against the inner bottom wall of the recycling hood.

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