A substrate table for diamond film growth

Abstract

The utility model discloses a substrate table for diamond film growth, including water cooling part, water cooling part set up below substrate table, the substrate of substrate table is placed, the built -in bending part of water cooling part, the bending part is annular arrangement in water cooling part, the left side of bending part is connected with first water outlet pipe, the left end of first water outlet pipe is connected with cooling water pump, the left side of cooling water pump is provided with cooling water pool, and the first water outlet pipe is connected with first blowoff pipe, and the second water outlet pipe is connected with second blowoff pipe. The utility model discloses through setting up water cooling part in the bottom of substrate table, and the bending part is seted up in water cooling part, and the bending part is in the shape of'several ', when cooling water passes through first water outlet pipe and enters the bending part, the time of cooling water passing through water cooling part is greatly delayed, and since the substrate table directly contacts with the water cooling part, the purpose of uniformly cooling the substrate table can be better achieved.

Description

Technical Field

[0001] This application relates to the technical field of diamond production, and specifically relates to a substrate stage for diamond film growth. Background Art

[0002] During the production process of diamond films, temperature control is crucial. It is necessary to ensure uniform temperature of the diamond film. However, uneven temperature of the substrate stage leads to uneven temperature distribution of the diamond film, which greatly affects the film-forming quality. The existing cooling method generally uses the substrate itself to conduct out the high temperature of the diamond film, and the cooling efficiency is very low. To solve this problem, relevant technicians set some cooling devices inside the substrate stage, which also played some roles. However, there are still some problems. The cooling water is directly passed into the inside of the substrate stage for cooling. Although it solves the overall high-temperature problem to a certain extent, this cooling method makes the temperature of the substrate stage uneven and affects the final quality of the diamond film. Utility Model Content

[0003] To solve the above technical problems, based on the rich experience accumulated in the technical field of diamond production, the inventor developed a substrate stage for diamond film growth.

[0004] To achieve the above object, the present utility model provides the following technical solution: A substrate stage for diamond film growth, including a water-cooling part, the water-cooling part is arranged below the substrate stage, a substrate is placed on the substrate stage, a bent part is arranged inside the water-cooling part, the bent part is arranged in a circular arrangement inside the water-cooling part, a first water outlet pipe is connected to the left side of the bent part, the left end of the first water outlet pipe is connected to a cooling water pump, a cooling water tank is arranged on the left side of the cooling water pump, a first sewage discharge pipe is connected to the first water outlet pipe, and a second sewage discharge pipe is connected to the second water outlet pipe.

[0005] Further, the bent part includes a first bent part, a second bent part, a third bent part and a fourth bent part, and the bent part is in a "ji" shape.

[0006] Further, a water inlet pipe is arranged between the cooling water pump and the cooling water tank, a first manual valve is installed on the water inlet pipe, an automatic control valve is installed on the first water outlet pipe, and a second manual valve is installed on the second water outlet pipe.

[0007] Further, a first sewage discharge valve is arranged on the first sewage discharge pipe, and a second sewage discharge valve is arranged on the second sewage discharge pipe.

[0008] Further, the automatic control valve adjusts the flow rate of the cooling water when passing through the water-cooling part, and the opening degree of the automatic control valve is α, 20° < α < 80°.

[0009] Furthermore, the material of the substrate stage is molybdenum. A clamping block for clamping the substrate is provided on the substrate stage, and the clamping block is cylindrical.

[0010] Compared with the prior art, the utility model has the following beneficial effects: 1. By arranging a water cooling part at the bottom of the substrate stage, a bending part is provided in the water cooling part, and the bending part is in a "ji" shape. When the cooling water enters the bending part through the first water outlet pipe, the cooling water passes through the first bending part, the second bending part, the third bending part and the fourth bending part, greatly delaying the passing time of the cooling water in the water cooling part and increasing the cooling area. Since the substrate stage is directly in contact with the water cooling part, the purpose of uniformly cooling the substrate stage can be better achieved, thereby improving the growth quality of the diamond film.

[0011] 2. The utility model also installs a first sewage discharge pipe and a second sewage discharge pipe on the first water outlet pipe and the second water outlet pipe respectively, and discharges sewage from the first water outlet pipe and the second water outlet pipe regularly to ensure the normal use of the water cooling part. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 is a schematic structural diagram of the utility model.

[0013] Figure 2 is a schematic diagram of the bending part.

[0014] Figure 3 is a top view of the water cooling part and the substrate stage.

[0015] Reference numerals: 1. Water cooling part; 2. Substrate stage; 3. Bending part; 301. First bending part; 302. Second bending part; 303. Third bending part; 304. Fourth bending part; 4. Cooling water tank; 5. Water inlet pipe; 6. First manual valve; 7. Substrate; 8. Cooling water pump; 9. First water outlet pipe; 10. Automatic control valve; 11. Second manual valve; 12. Second water outlet pipe; 13. First sewage discharge pipe; 14. First sewage discharge valve; 15. Second sewage discharge pipe; 16. Second sewage discharge valve; 17. Clamping block. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0016] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Apparently, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and illustrated herein can be arranged and designed in various different configurations.

[0017] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but merely represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts fall within the scope of protection of the present application.

[0018] It should be noted that like reference numerals and letters denote like items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0019] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings or the orientation or positional relationship in which the product of this application is usually placed during use. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation of the present application. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be construed as indicating or implying relative importance.

[0020] As Figures 1-3 shown, a substrate stage for diamond film growth includes a water cooling part. The water cooling part 1 is arranged below the substrate stage 2. A substrate 7 is placed on the substrate stage 2. A bent part 3 is built in the water cooling part 1. The bent part 3 is arranged in a ring in the water cooling part 1. A first water outlet pipe 9 is connected to the left side of the bent part 3. The left end of the first water outlet pipe 9 is connected to a cooling water pump 8. A cooling water tank 4 is arranged on the left side of the cooling water pump 8. A first sewage pipe 13 is connected to the first water outlet pipe 9, and a second sewage pipe 15 is connected to the second water outlet pipe 12.

[0021] In this embodiment, the bent part 3 includes a first bent part 301, a second bent part 302, a third bent part 303 and a fourth bent part 304, and the bent part 3 is in a "ji" shape.

[0022] In this embodiment, a water inlet pipe 5 is arranged between the cooling water pump 8 and the cooling water tank 4. A first manual valve 6 is installed on the water inlet pipe 5. An automatic control valve 10 is installed on the first water outlet pipe 9. A second manual valve 11 is installed on the second water outlet pipe 12.

[0023] In this embodiment, a first sewage valve 14 is arranged on the first sewage pipe 13, and a second sewage valve 16 is arranged on the second sewage pipe 15.

[0024] In this embodiment, the self-control valve 10 regulates the flow rate of cooling water through the water-cooling section 1, and the opening degree of the self-control valve 10 is α, where 20° < α < 80°.

[0025] In this embodiment, the substrate stage 2 is made of molybdenum, and the substrate stage 2 is provided with a clamping block 17 for clamping the substrate. The clamping block 17 is cylindrical.

[0026] In practical use, when cooling the substrate stage 2 is required, firstly, open the first drain valve 14, then start the cooling water pump 8. When cooling water flows out of the first drain valve 14, close the first drain valve 14, then open the second drain valve 16. When cooling water flows out of the second drain valve 16, close the second drain valve 16. This step confirms that the bend 3 is not blocked and can be used normally. Open the second manual valve 11, and control the opening degree of the automatic valve 10 between 20° and 80° according to the cooling requirements. Through long-term observation, the inventors found that when the opening degree of the automatic valve 10 is less than 20°, it has almost no cooling effect; when the opening degree of the automatic valve 10 is greater than 80°, the cooling rate is very fast. Both of these situations are not conducive to the growth of the diamond film. When cooling is not required, simply stop the cooling water pump 8.

[0027] like Figures 1-3 As shown, viewed from the front view, the bent portion 3 can be divided into a first bent portion 301, a second bent portion 302, a third bent portion 303, and a fourth bent portion 304. Since the bent portions 3 are arranged in a ring, viewed from the left, right, and rear views, the bent portion 3 can also be divided into the same four sections. The number of bent portions 3 can be increased or decreased according to actual needs.

[0028] It is important to note that the actual pipeline arrangement of the first water outlet pipe 9 and the second water outlet pipe 12 in this utility model should be located on the same side, such as... Figure 3 As shown. Figure 1 The reason why the positions of the first water outlet pipe 9 and the second water outlet pipe 12 are not drawn on the same side is to facilitate the viewing of the drawings by those skilled in the art. Figure 1 The way the pipelines of the first water outlet pipe 9 and the second water outlet pipe 12 are drawn will not make the technical solution of this application unclear, nor will it affect the understanding of the technical solution by those skilled in the art.

[0029] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A substrate stage for diamond film growth, characterized in that: It includes a water-cooling part which is arranged under the substrate table. A substrate is placed on the substrate table. The water-cooling part is internally provided with a bending part which is arranged in a ring shape within the water-cooling part. The left side of the bending part is connected to a first water outlet pipe. The left end of the first water outlet pipe is connected to a cooling water pump. A cooling water tank is arranged on the left side of the cooling water pump. A first sewage discharge pipe is connected to the first water outlet pipe, and a second sewage discharge pipe is connected to the second water outlet pipe.

2. The substrate stage for diamond film growth according to claim 1, characterized in that: The bending part includes a first bending part, a second bending part, a third bending part and a fourth bending part, and the bending part is in a "J" shape.

3. The substrate stage for diamond film growth according to claim 1, characterized in that: A water inlet pipe is arranged between the cooling water pump and the cooling water tank. A first manual valve is installed on the water inlet pipe. An automatic control valve is installed on the first water outlet pipe. A second manual valve is installed on the second water outlet pipe.

4. The substrate stage for diamond film growth according to claim 1, characterized in that: A first sewage discharge valve is arranged on the first sewage discharge pipe, and a second sewage discharge valve is arranged on the second sewage discharge pipe.

5. A substrate stage for diamond film growth according to claim 3, characterized in that: The automatic control valve adjusts the flow rate of the cooling water when it passes through the water-cooling part. The opening degree of the automatic control valve is α, and 20° < α < 80°.

6. The substrate stage for diamond film growth according to claim 1, characterized in that: The material of the substrate table is molybdenum. Clamping blocks for clamping the substrate are arranged on the substrate table, and the clamping blocks are cylindrical.

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