A fixed evaporation boat

Abstract

The utility model discloses a kind of fixed evaporation boat, comprising: terminal stud, top is provided with the keyway structure of protruding;Evaporation boat body, two ends symmetrically are provided with fixed hole, to cooperate with the keyway structure of terminal stud top and install;Terminal stud pressing block, for locking the cooperation part of evaporation boat body and terminal stud.The core of the fixed evaporation boat is keyway-pressing block fixing system, terminal stud pressing block adopts split type structure, by high-strength bolt controllable locking force is applied, and keyway structure is cooperated to form rigid restraint system, realizes the double combination of rigid positioning and elastic compensation, effectively resists thermal stress and equipment vibration.The fixing mode of evaporation boat used in the utility model effectively solves the technical problems that traditional evaporation boat is easy to displace and fall off, improves anti-vibration performance while ensuring positioning accuracy, improves coating quality and product pass rate, and provides stable and reliable hardware support for high-precision vacuum coating.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment components, and in particular to a fixable evaporation boat. Background Technology

[0002] In the field of vacuum coating technology, the evaporation boat is a key component in vacuum coating. It is mainly used to support and heat the evaporation material, such as aluminum, gold, and silver, so that it vaporizes at high temperature and deposits onto the surface of the substrate to form a thin film. It is widely used in industries such as optics, electronics, and packaging.

[0003] The stability of the evaporation boat directly affects the uniformity of the coating and the product quality. Currently, common evaporation boat installation methods mainly rely on simple support structures, such as conductive clamps or ceramic brackets. However, this design has significant drawbacks during high-temperature evaporation. For example, vacuum coating machines use tungsten wire winding to fix the evaporation boat. Although the structure is simple, under prolonged high-temperature operation, the evaporation boat is prone to loosening or even falling off due to differences in the thermal expansion coefficients of the metals. Alternatively, using threaded molybdenum sheets to clamp the evaporation boat can cause the threads to gradually loosen due to minor vibrations during equipment operation, eventually leading to boat displacement and uneven coating thickness. Furthermore, in high-power evaporation scenarios, the evaporation boat may deform due to heat, resulting in poor contact with the conductive electrodes, further increasing the risk of arc discharge, shortening the evaporation boat's lifespan, and contaminating the coating chamber. These defects not only lead to uneven evaporation of the material, affecting coating quality, but can also damage the evaporation boat in severe cases, causing production interruptions and increasing production and time costs.

[0004] Chinese Patent Publication No. CN222008003U discloses an interlaced clamping structure for an evaporation boat in a vacuum coating machine. This technology achieves elastic clamping of the evaporation boat through a slider-threaded rod linkage mechanism within the mounting cylinder, in conjunction with upper and lower clamping frames. Its core lies in the synergistic effect of an adjustable-height placement and clamping mechanism and an auxiliary adjustment mechanism, allowing the evaporation boats to adapt to different length specifications and form an interlaced arrangement. This solution uses a threaded rod to drive the connecting block, raising and lowering the clamping frame, combined with the elastic compensation of the spring clamping plate, thus solving the problem of uneven coating caused by excessive center distance in traditional straight-line evaporation boats.

[0005] The existing technologies described above still have significant drawbacks in the mechanical clamping structure of the evaporation boat under high-temperature conditions: the elastic clamping relying on springs is prone to fatigue failure under thermal stress, resulting in a decrease in clamping force; multi-layer sliding fit structures, such as sliders and grooves, threaded rods and threaded grooves, are prone to jamming under thermal expansion, affecting adjustment accuracy; although the staggered arrangement increases the density of evaporation sources, the superposition of thermal radiation from adjacent evaporation boats will exacerbate local temperature rise, which may cause deformation of the clamping mechanism.

[0006] Therefore, a fixable evaporation boat is needed to solve the above-mentioned technical problems. Summary of the Invention

[0007] This invention overcomes the shortcomings of the prior art and provides a fixable evaporation boat.

[0008] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a fixable evaporation boat, comprising: a fixable evaporation boat, characterized in that it includes: a terminal block with a raised keyway structure on the top; an evaporation boat body with symmetrical fixing holes at both ends for mounting in conjunction with the keyway structure on the top of the terminal block; and a terminal block clamping block for locking the mating parts of the evaporation boat body and the terminal block.

[0009] In a preferred embodiment of this utility model, the keyway structure and the terminal block are integrally formed, and the bottom of the keyway structure is provided with a transition rounded corner; the terminal block pressure block adopts a split design, with two symmetrically arranged terminal block pressure block units.

[0010] In a preferred embodiment of this utility model, the keyway structure is a protrusion structure extending axially along the terminal block.

[0011] In a preferred embodiment of this invention, the cross-section of the keyway structure is annular.

[0012] In a preferred embodiment of this utility model, the fixing hole is a circular hole, the shape of which matches the annular keyway structure to form a clearance fit.

[0013] In a preferred embodiment of the present invention, the keyway structure is provided with an axial threaded hole at its center, and the threaded hole is coaxially arranged with the keyway structure.

[0014] In a preferred embodiment of this utility model, the terminal block is provided with a through hole coaxial with the threaded hole.

[0015] In a preferred embodiment of this utility model, the terminal block is coaxially connected to the threaded hole by bolts, thereby pressing and fixing the evaporation boat body onto the terminal block.

[0016] In a preferred embodiment of the present invention, the terminal block is provided with an arc-shaped pressing surface that matches the outer diameter of the terminal block, which is used to restrict the rotation of the terminal block.

[0017] In a preferred embodiment of this utility model, the locking direction of the terminal block is perpendicular to the extension direction of the keyway structure, forming a bidirectional fixing structure.

[0018] In a preferred embodiment of this utility model, the contact portion between the evaporation boat body and the terminal block is provided with a thermal expansion compensation gap of 0.05-0.2mm.

[0019] This utility model solves the defects existing in the background technology, and has the following beneficial effects:

[0020] (1) This utility model adopts a keyway-pressure block fixing structure. A raised keyway structure is set on the terminal block to precisely fit with the fixing hole of the evaporation boat body. The terminal block then provides rigid locking. This design replaces traditional point or line contact with surface contact fixing, significantly increasing the stress-bearing area. This allows the evaporation boat body to evenly distribute thermal stress under high-temperature conditions, reducing the displacement of the evaporation boat body, ensuring the uniformity of the coating thickness, and improving coating quality and product qualification rate. Compared to the existing technology that relies on spring clamping and threaded adjustment, this utility model avoids the stress relaxation problem of elastic elements at high temperatures and eliminates the need for frequent adjustments. The rigid fixing method allows the evaporation boat body to withstand higher operating temperatures, making it suitable for evaporation processes of high-melting-point metals such as tungsten and molybdenum, and extending the continuous working time of the equipment.

[0021] (2) The fixed evaporation boat of this invention features a thermal expansion compensation gap at the contact point between the evaporation boat body and the terminal block, which can adapt to the differences in the coefficient of thermal expansion of materials at different temperatures. The dynamic compensation mechanism ensures that the fixed structure maintains stable contact pressure even under drastic temperature changes, avoiding the "thermal jamming" phenomenon that easily occurs with traditional rigid fixing. Under high temperature differences, the clamping force of the fixed structure fluctuates less, while the clamping force of springs in the prior art decays more under the same conditions. The thermal compensation gap significantly reduces metal fatigue caused by thermal cycling, extending the service life of the evaporation boat body and reducing the risk of keyway structure cracking due to thermal stress concentration, making it particularly suitable for intermittent coating processes that require frequent heating and cooling.

[0022] (3) The locking direction of the terminal block is perpendicular to the extension direction of the keyway structure, forming a two-way fixing structure. This orthogonal locking method creates two sets of mutually perpendicular constraint forces. One set provides radial limitation through the cooperation between the keyway structure and the fixing hole, and the other set provides axial fixation through the locking force of the terminal block. This enables the evaporation boat body to resist multi-directional mechanical vibration and remain stable even when the equipment vibrates rapidly. Compared with the traditional single-point fixing method in the prior art, this design improves the vibration resistance of the evaporation boat body, reduces production interruptions, and allows the coating equipment to be installed in industrial environments with high vibration, expanding the application scenarios of the equipment. Attached Figure Description

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0024] Figure 1 This is a schematic diagram of the structure of the fixed evaporation boat of this utility model;

[0025] In the diagram: 1. Terminal block; 2. Evaporation boat body; 3. Terminal block clamp; 4. Keyway structure; 5. Fixing hole. Detailed Implementation

[0026] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. These drawings are simplified schematic diagrams, which are only used to illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0027] like Figure 1 As shown, a fixable evaporator boat includes: a terminal block 1 with a raised keyway structure 4 on the top; an evaporator boat body 2 with fixing holes 5 symmetrically arranged at both ends for mounting in conjunction with the keyway structure 4 on the top of the terminal block 1; and a terminal block clamping block 3 for locking the mating parts of the evaporator boat body 2 and the terminal block 1.

[0028] The keyway structure 4 is a raised structure extending along the axial direction of the terminal 1, and is integrally formed with the terminal 1 to ensure the reliability of the connection; the bottom of the keyway structure 4 is provided with a transition fillet; the cross-section of the keyway structure 4 is annular; the center of the keyway structure 4 is provided with an axial threaded hole, which is coaxially set with the keyway structure 4.

[0029] The fixing hole 5 is a round hole, and its shape matches the annular keyway structure 4 to form a clearance fit.

[0030] The terminal block 3 adopts a split design, which is convenient for installation and maintenance. There are two symmetrically arranged terminal block 3 units. The terminal block 3 is provided with a through hole coaxial with the threaded hole. The terminal block 3 is provided with an arc-shaped pressing surface that matches the outer diameter of the terminal 1, which is used to limit the rotation of the terminal block 3. The locking direction of the terminal block 3 is perpendicular to the extension direction of the keyway structure 4, forming a two-way fixing structure.

[0031] The contact portion between the evaporation boat body 2 and the terminal block 1 is provided with a thermal expansion compensation gap of 0.05-0.2mm, which can adapt to the difference in the material expansion coefficient at different temperatures, so that the fixing structure can still maintain stable contact pressure when the temperature changes drastically.

[0032] During installation, the fixing holes 5 of the evaporator body 2 are precisely positioned and nested with the keyway structure 4 protruding from the terminal block 1, then pressed down by the terminal block 3 at the top, and finally tightened with screws. After being fixed in position, the evaporator body 2 can effectively resist thermal stress and equipment vibration, ensuring that the evaporator body 2 remains stable during operation.

[0033] In use, the evaporation boat body 2 and the terminal block 1 are rigidly connected through a precisely designed keyway structure 4. The two ends of the evaporation boat body 2 are machined with fixing holes 5 that precisely match the keyway structure 4. The terminal block pressure block 3, as a key locking element, adopts a split structure and applies locking force, forming a unique bidirectional constraint mechanism with the keyway structure 4. This ensures the stability of static positioning and maintains continuous clamping force under dynamic working conditions through elastic deformation. This hybrid fixing mode, which combines rigid positioning and elastic compensation, effectively solves the displacement problem of traditional single-point fixing structures under thermal stress and mechanical vibration, enabling the evaporation boat body 2 to maintain a reliable working state under various working conditions, providing reliable hardware support for high-precision coating processes.

[0034] Based on the preferred embodiments of this utility model described above, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A fixable evaporation boat, characterized in that, include: The terminal block (1) has a raised keyway structure (4) on the top; The evaporation boat body (2) has symmetrical fixing holes (5) at both ends for installation in conjunction with the keyway structure (4) on the top of the terminal block (1); The terminal block (3) is used to lock the mating parts of the evaporator body (2) and the terminal block (1). The keyway structure (4) and the terminal block (1) are integrally formed, and the bottom of the keyway structure (4) is provided with a transition rounded corner; the terminal block (3) adopts a split design, with two symmetrically arranged terminal block (3) units.

2. The fixable evaporation boat according to claim 1, characterized in that: The keyway structure (4) is a protruding structure that extends axially along the terminal (1).

3. A fixable evaporation boat according to claim 1, characterized in that: The cross-section of the keyway structure (4) is annular.

4. A fixable evaporation boat according to claim 1, characterized in that: The fixing hole (5) is a round hole, and its shape matches the annular keyway structure (4) to form a clearance fit.

5. A fixable evaporation boat according to claim 1, characterized in that: The keyway structure (4) has an axial threaded hole at its center, and the threaded hole is coaxially arranged with the keyway structure (4).

6. A fixable evaporation boat according to claim 1, characterized in that: The terminal block (3) is provided with a through hole coaxial with the threaded hole.

7. A fixable evaporation boat according to claim 1, characterized in that: The terminal block (3) is coaxially connected to the threaded hole by bolts, pressing and fixing the evaporation boat body (2) onto the terminal block (1).

8. A fixable evaporation boat according to claim 1, characterized in that: The terminal block (3) has an arc-shaped pressing surface that matches the outer diameter of the terminal (1) to restrict the rotation of the terminal block (3).

9. A fixable evaporation boat according to claim 1, characterized in that: The locking direction of the terminal block (3) is perpendicular to the extension direction of the keyway structure (4), forming a two-way fixing structure.

10. A fixable evaporation boat according to claim 1, characterized in that: The contact portion between the evaporation boat body (2) and the terminal block (1) is provided with a thermal expansion compensation gap of 0.05-0.2mm.

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