A non-standard mask plate profile measuring device and a non-standard mask plate profile measuring system

Abstract

The utility model discloses a nonstandard mask plate appearance measuring device and nonstandard mask plate appearance measuring system, nonstandard mask plate appearance measuring device, include: put plate platform, it is equipped with the placing groove, measuring equipment is set up on the put plate platform and is used for measuring the size of nonstandard mask plate, cushion block, it is movably arranged in the placing groove, to separate the placing groove is adapted to the placing area of nonstandard mask plate and the measurement area of adjacent measuring equipment. Nonstandard mask plate appearance measuring system includes nonstandard mask plate appearance measuring device. It is suitable for the measurement of nonstandard mask plate appearance size of different size, and simple and convenient to use, only need to place nonstandard mask plate on nonstandard mask plate appearance measuring device, can fastly calculate the size result, reduces the hard contact to nonstandard mask plate when measuring nonstandard mask plate appearance size, reduces the risk of mask plate scratch, top injury.

Description

Technical Field

[0001] This utility model relates to the field of photomask technology, specifically to a non-standard photomask shape measuring device and a non-standard photomask shape measuring system. Background Technology

[0002] A photomask (also known as a chromium mask) is a pattern master used in photolithography processes commonly employed in micro- and nano-fabrication technologies. It typically consists of an opaque metallic chromium layer forming a mask pattern on a transparent glass substrate, which is then transferred to the product substrate through an exposure process.

[0003] Mask sizes are generally fixed according to the requirements of the customer's exposure machine. For example, the standard sizes have aspect ratios of 550mm x 450mm, 720mm x 620mm, 800mm x 700mm, 960mm x 800mm, etc. However, some special mask applications may have non-standard sizes, in which case the standard size mask mentioned above needs to be cut before use.

[0004] For non-standard photomasks, their external dimensions are measured to verify whether the deviation meets customer requirements. The general method is to use vernier calipers to clamp the photomask on both sides for measurement.

[0005] This measurement method has the following drawbacks: the vernier caliper clamps the mask tightly through the upper and lower clamps. In order to improve the accuracy of the values, multiple measurements of the external dimensions at multiple points are required, and the clamps are pulled repeatedly to make contact and collision with the mask. The mask is made of glass, while the vernier caliper is made of metal, which can easily cause scratches or damage to the mask, leading to the risk of the mask being scrapped. Utility Model Content

[0006] The technical problem to be solved by this utility model is that measuring non-standard photomasks with vernier calipers can easily lead to the scrapping of non-standard photomasks. The purpose is to provide a non-standard photomask shape measuring device and a non-standard photomask shape measuring system to solve the above-mentioned problem.

[0007] This utility model is achieved through the following technical solution:

[0008] In a first aspect, this utility model provides a non-standard mask shape measuring device, comprising:

[0009] A platform for placing boards, which is equipped with placement slots;

[0010] Measuring equipment, set on the plate-laying platform, is used to measure the dimensions of non-standard photomasks;

[0011] The pad is movably set in the placement slot to separate the placement slot into a placement area adapted to non-standard photomasks and a measurement area adjacent to the measuring equipment.

[0012] In one possible design, the plate-laying platform has an inner groove serving as a placement slot and a side plate portion located outside the inner groove;

[0013] The shape of the recess is adapted to non-standard photomasks;

[0014] The side panel has multiple supports divided into two groups. One group is a support group adjacent to the placement area, and the other group is a mounting group adjacent to the measuring equipment. Accordingly, the support group and the pad block form a support structure for supporting the non-standard mask, and the mounting group is used to connect the measuring equipment.

[0015] In one possible design, the side plate of the support assembly is provided with a baffle strip, which is located on the outer side of the top surface of the side plate. Correspondingly, the inner side of the top surface of the side plate is used to support the non-standard mask.

[0016] In one possible design, when the inner groove is constructed as a square groove, there are four side plates, of which two adjacent side plates connected at their ends are constructed as a support group, and the other two adjacent side plates connected at their ends are constructed as a mounting group.

[0017] In one possible design, the pad has a support groove for supporting non-standard photomasks, and the support groove faces and connects to the placement area.

[0018] In one possible design, the bottom surface of the support groove is at the same height as the top surface of the side plate of the corresponding support assembly.

[0019] In one possible design, the pad has at least one.

[0020] In one possible design, multiple measuring devices are provided and spaced apart on the mounting group;

[0021] When measuring the dimensions of a non-standard mask, at least one working end of the measuring device is aligned with the non-standard mask on the placement area.

[0022] In one possible design, an electronic rangefinder is selected as the measuring device.

[0023] Secondly, this utility model provides a non-standard mask shape measurement system, including the aforementioned non-standard mask shape measurement device.

[0024] Compared with the prior art, this utility model has the following advantages and beneficial effects:

[0025] This device is suitable for measuring the external dimensions of non-standard photomasks of different sizes. It is simple and convenient to use. Simply place the non-standard photomask on the non-standard photomask external dimension measuring device to quickly calculate the size result. At the same time, it reduces hard contact with the non-standard photomask when measuring its external dimensions, thus reducing the risk of scratches and damage to the photomask. Attached Figure Description

[0026] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings:

[0027] Figure 1 A schematic diagram of a non-standard photomask shape measuring device for placing a non-standard photomask.

[0028] Figure 2 This is a schematic diagram of a non-standard photomask shape measuring device.

[0029] Figure 3 This is a schematic diagram showing the assembly of a non-standard mask shape measuring device and a non-standard mask when the non-standard mask is pentagonal.

[0030] Figure 4 This is a schematic diagram showing the assembly of a non-standard mask shape measuring device and a non-standard mask when the non-standard mask is circular.

[0031] Figure 5 This is a schematic diagram of the pad block structure.

[0032] Figure 6 This is a schematic diagram of the assembly of the measuring equipment and the plate-laying platform when a sliding component is provided.

[0033] The attached diagram shows the markings and corresponding component names:

[0034] 1. Placing platform; 101. Placing slot; 102. Placing area; 103. Measuring area; 104. Side plate; 105. Stop bar; 2. Measuring equipment; 3. Pad block; 301. Support slot; 4. Non-standard mask plate; 5. Sliding component; 501. Slider; 502. Fixing rod. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.

[0036] Example:

[0037] like Figures 1-6 As shown, in a first aspect, this utility model provides a non-standard mask shape measuring device, comprising:

[0038] The plate placement platform 1 is provided with a placement slot 101;

[0039] Measuring device 2 is set on the plate-laying platform 1 and is used to measure the dimensions of the non-standard mask 4;

[0040] The pad 3 is movably disposed in the placement groove 101 to separate the placement groove 101 into a placement area 102 adapted to the non-standard mask plate 4 and a measurement area 103 adjacent to the measuring device 2.

[0041] Existing technologies often result in scratches, dents, or other damage to the non-standard photomask 4 due to the movement of the vernier caliper, potentially rendering it unusable. Therefore, the non-standard photomask shape measuring device improves its structure to change the measurement method. Specifically, the placement platform 1 and the pad 3 cooperate to form a placement area 102. When measuring the dimensions of the non-standard photomask 4, it is simply placed within the placement area 102. The measuring device 2, located in the measuring area 103, measures the dimensions of the non-standard photomask 4 using non-contact measurement.

[0042] The non-standard mask shape measuring device only requires placing the non-standard mask 4 into the placement area 102 during measurement. It is simple and convenient to operate, easy to use, and readily adopted. For the non-standard mask 4, the device effectively avoids damage caused by hard contact such as caliper movement during dimensional measurement, reducing the scrap rate of the non-standard mask 4, ensuring its pass rate, and improving economic efficiency.

[0043] During operation, based on the actual shape, size, and other parameters of the non-standard photomask 4, the pad 3 is moved to a suitable position in the placement slot 101 to divide the placement area 102 and the measurement area 103. Then, the non-standard photomask 4 is moved manually or using other auxiliary equipment to the placement area 102, where the measuring device 2 measures and obtains relevant data to determine the dimensions of the non-standard photomask 4. After measurement, the non-standard photomask 4 is removed. This process is repeated to complete the batch measurement of non-standard photomasks 4.

[0044] It is worth noting that there are multiple measuring devices 2, and after the pad 3 divides the placement area 102 and the measurement area 103, at least one measuring device 2 is aligned with the placement area 102 to complete the relevant measurement operation. In other words, if the non-standard mask 4 has multiple sides, at least one measuring device 2 should be aligned with each side to ensure the comprehensiveness and accuracy of the measurement.

[0045] As is easily understood, the background art uses a square mask as an example for explanation, but the mask can also be other customized shapes. Therefore, the shape of the placement area 102 should be adapted to the non-standard mask 4 to ensure the accuracy of the measurement results. Furthermore, the placement platform 1 can be constructed in any suitable shape, and the placement groove 101 can also be constructed in any suitable shape to better adapt the non-standard mask shape measuring device to the working environment.

[0046] In one possible implementation, the plate-laying platform 1 is provided with an inner groove serving as a placement slot 101 and a side plate portion 104 located outside the inner groove;

[0047] The shape of the inner groove is adapted to non-standard photomask 4;

[0048] The side plate portion 104 is provided with multiple parts and divided into two groups. One group is a support group adjacent to the placement area 102, and the other group is a mounting group adjacent to the measuring device 2. Accordingly, the support group and the pad block 3 constitute a support structure for supporting the non-standard mask plate 4, and the mounting group is used to connect the measuring device 2.

[0049] Based on the above design, the inner groove is recessed. When the non-standard mask 4 is placed in the inner groove, the main body of the non-standard mask 4 is suspended, with only the side plate 104 contacting the pad 3 and the side plate 104. Thus, the gap below the non-standard mask 4 improves the ease of assembly and disassembly.

[0050] The inner groove is adapted to the non-standard mask 4. That is, the placement platform 1 is processed according to the measured shape of the non-standard mask 4 to form a proportionally enlarged placement groove 101, reducing additional design costs.

[0051] The side plate 104 supports the non-standard photomask 4 via a support assembly and works in conjunction with the pad 3 to form multi-point support, ensuring the non-standard photomask 4 remains stable in the placement area 102. The mounting assembly is used to connect the measuring device 2, positioning it directly opposite the side of the non-standard photomask 4 to improve measurement accuracy.

[0052] It is worth noting that, such as Figure 1 and Figure 2 As shown, a baffle 105 is provided on the side plate portion 104 in the support assembly. The baffle 105 is located on the outer side of the top surface of the side plate portion 104. Correspondingly, the inner side of the top surface of the side plate portion 104 is used to support the non-standard mask plate 4.

[0053] Based on this, the stop bar 105 is used to limit the position of the non-standard mask 4, thereby positioning the non-standard mask 4 and preventing it from exceeding the range of the placement platform 1, which helps improve the measurement accuracy of the measuring device 2. In other words, when the non-standard mask 4 is placed in the placement area 102, the position of the non-standard mask 4 is quickly determined by the relative position of the side of the non-standard mask 4 and the stop bar 105, so that the non-standard mask 4 is accurately placed on the placement area 102.

[0054] Regarding the specific structure of the plate-laying platform 1, a practical and feasible solution is presented here. Optionally, such as... Figure 1As shown, when the inner groove is constructed as a square groove, there are four side plate portions 104, of which two adjacent side plate portions 104 connected at their ends are constructed as a support group, and the other two adjacent side plate portions 104 connected at their ends are constructed as an installation group.

[0055] As is easy to understand, the non-standard mask 4 can be any other suitable shape such as a circular groove, a fan-shaped groove, or a pentagonal groove, which has a wide range of applications and better adaptability. Correspondingly, the inner groove is also constructed to fit the shape.

[0056] Therefore, as Figure 1 As shown, when the inner groove is constructed as a square groove, the two sides of the non-standard mask plate 4 are placed on the side plate portion 104, and one vertex is located in the placement groove 101 and on the pad 3, thus forming a three-point support. At this time, only one pad 3 needs to be set.

[0057] like Figure 3 As shown, if the inner groove is constructed as a pentagonal groove or other polygonal groove, and one or more vertices of the non-standard mask plate 4 are located in the placement groove 101, then the pads 3 should be set in a corresponding number to support each vertex, that is, the pads 3 should have at least one.

[0058] like Figure 4 As shown, if the inner groove is constructed as a circular groove, fan-shaped groove, or other groove with an arc edge, the inner groove supports one of the arc edges through the side plate 104, and then supports the arc edge located in the placement groove 101 through the pad 3. At this time, there is one pad 3, or multiple pads can be set as needed to increase the number of support points.

[0059] In one possible implementation, the pad 3 is provided with a support groove 301 for supporting the non-standard photomask 4, and the support groove 301 faces and communicates with the placement area 102. Based on the above design, the pad 3 supports the non-standard photomask 4 through the support groove 301, and the side wall of the support groove 301 can serve as the baffle 105 in the side plate 104. The pad 3 has a simple structure, low cost, and is easy to process and manufacture.

[0060] It is worth noting that the bottom surface of the support groove 301 is at the same height as the top surface of the side plate portion 104 of the corresponding support group. Based on the above design scheme, it is ensured that the non-standard mask 4 is at the same height, avoiding the non-standard mask 4 from being skewed, and ensuring the measurement accuracy of the measuring device 2.

[0061] Optionally, at least one pad 3 is provided. Based on this, an appropriate number of pads 3 can be selected according to the different shapes of non-standard mask 4 and placement slot 101 to ensure the support effect.

[0062] In one possible implementation, multiple measuring devices 2 are provided and spaced apart on the mounting group;

[0063] When measuring device 2 measures the dimensions of non-standard mask 4, at least one working end of measuring device 2 is aligned with non-standard mask 4 on placement area 102.

[0064] Based on the above design, multiple measuring devices 2 are provided to increase the coverage area and ensure measurement operations on non-standard photomasks 4 of different sizes, thus expanding the application range of the non-standard photomask shape measuring device. At least one measuring device 2 has its working end aligned with the non-standard photomask 4 on the placement area 102, meaning the measurement operation obtains at least one set of data, from which the dimensions of the non-standard photomask 4 are calculated. Generally, obtaining multiple sets of data is preferred to improve the accuracy of the results.

[0065] Based on the data obtained by measuring device 2, and according to the specific shapes of the non-standard mask 4 and the placement slot 101, a size calculation formula is determined. This formula is then substituted into the data obtained by measuring device 2 to obtain the dimensions of the non-standard mask 4. For example, such as... Figure 1 As shown, when the inner groove is constructed as a square groove, the length of the inner groove is obtained through the measuring device 2 on an assembly. After the non-standard mask 4 is placed on the inner groove, the length of the measuring area 103 is obtained through the measuring device 2. The length of the non-standard mask 4 can be obtained by subtracting the length of the measuring area 103 from the length of the inner groove. Similarly, the width of the non-standard mask 4 can be obtained.

[0066] In one possible implementation, such as Figure 6 As shown, the measuring device 2 is slidably mounted on the mounting assembly via a sliding member 5. The sliding member 5 includes a slider 501 and a fixing rod 502. The slider 501 is provided with a groove that is adapted to the inner side plate 104 of the mounting assembly. The fixing rod 502 passes through the slider 501 and is located outside the plate placement platform 1.

[0067] Based on the above design, the sliding member 5 allows the measuring devices 2 to slide relative to each other. During each measurement operation, multiple measuring devices 2 are positioned directly opposite the side of the non-standard mask 4 to obtain multiple sets of measurement data, thus ensuring the accuracy of the measurement results. Specifically, when fixing the position of the measuring device 2, the fixing rod 502 is moved and abuts against the side plate 104 within the mounting assembly, achieving fixation through friction between the two. Conversely, when the measuring device 2 moves, the fixing rod 502 is moved away from the side plate 104 within the mounting assembly, moving along the side plate 104 to a suitable position and fixing the measuring device 2.

[0068] In one possible implementation, the measuring device 2 is an electronic rangefinder. It is readily understood that the measuring device 2 can also be any other suitable existing device, offering a wide range of choices to adapt to different working environments and requirements.

[0069] Secondly, this utility model provides a non-standard mask shape measurement system, including the aforementioned non-standard mask shape measurement device. Based on this, the non-standard mask shape measurement system can also include other suitable functional modules, making its functionality richer to meet different working requirements and improving its practicality. Furthermore, it is readily understood that the functional modules can be selected from any suitable existing equipment, offering a wide range of choices.

[0070] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above description is only a specific embodiment of this utility model and is not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A non-standard photomask shape measuring device, characterized in that, include: A plate placement platform (1) is provided with a placement slot (101); Measuring device (2) is set on the plate-laying platform (1) and used to measure the dimensions of non-standard mask (4); The pad (3) is movably set in the placement slot (101) to separate the placement slot (101) into a placement area (102) adapted to the non-standard mask plate (4) and a measurement area (103) adjacent to the measuring device (2).

2. The non-standard mask shape measuring device according to claim 1, characterized in that, The plate placement platform (1) is provided with an inner groove for placing slots (101) and a side plate (104) located outside the inner groove. The shape of the inner groove is adapted to non-standard photomasks (4); The side panel (104) is provided with multiple and divided into two groups. One group is constructed as a support group adjacent to the placement area (102), and the other group is constructed as an installation group adjacent to the measuring device (2). Accordingly, the support group and the pad (3) constitute a support structure for supporting the non-standard mask plate (4), and the installation group is used to connect the measuring device (2).

3. The non-standard mask shape measuring device according to claim 2, characterized in that, The side plate (104) in the support assembly is provided with a baffle (105). The baffle (105) is located on the outer side of the top surface of the side plate (104). Correspondingly, the inner side of the top surface of the side plate (104) is used to support the non-standard mask plate (4).

4. The non-standard mask shape measuring device according to claim 3, characterized in that, When the inner groove is constructed as a square groove, there are four side plate parts (104), of which two adjacent side plate parts (104) connected at the ends are constructed as a support group, and the other two adjacent side plate parts (104) connected at the ends are constructed as an installation group.

5. The non-standard mask shape measuring device according to any one of claims 2-4, characterized in that, The pad (3) is provided with a support groove (301) for supporting the non-standard mask plate (4), and the support groove (301) faces and connects to the placement area (102).

6. The non-standard mask shape measuring device according to claim 5, characterized in that, The bottom surface of the support groove (301) is at the same height as the top surface of the side plate part (104) of the corresponding support group.

7. The non-standard mask shape measuring device according to claim 6, characterized in that, The pad (3) is provided with at least one.

8. The non-standard mask shape measuring device according to claim 6 or 7, characterized in that, The measuring equipment (2) is provided in multiple units and is spaced apart on the installation group; When the measuring device (2) measures the dimensions of the non-standard mask (4), at least one measuring device (2) has its working end aligned with the non-standard mask (4) on the placement area (102).

9. The non-standard mask shape measuring device according to claim 8, characterized in that, (2) The measuring equipment selected is an electronic distance measuring instrument.

10. A non-standard photomask shape measurement system, characterized in that, The non-standard mask shape measuring device includes any one of claims 1-9.

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