Probe card protection device
By designing an adjustable four-point fixing structure and a U-shaped sealing structure for the probe card protection device, the problem that existing devices cannot adapt to probe cards of different shapes and sizes is solved, achieving stable fixing and waterproof protection of the probe card.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- MIXIN SEMICON (JIANGSU) CO LTD
- Filing Date
- 2025-08-20
- Publication Date
- 2026-07-21
AI Technical Summary
Existing probe card protection devices are not applicable to probe cards of different shapes and sizes, which reduces their scope of use, and their waterproof performance is poor, making them unable to effectively protect probe cards.
A protective device including a cover plate and a fixed base was designed. It adopts a four-point adjustable fixing structure, which can fix probe cards of different shapes and sizes through moving clips and limiting slides, and improves waterproof performance by forming a U-shaped sealing structure through the U-shaped clip and U-shaped groove.
It achieves stable fixation and isolation protection for probe cards of different shapes and sizes, expands the applicability of the device, and enhances its waterproof performance.
Smart Images
Figure CN224536050U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of probe cards, specifically a probe card protection device. Background Technology
[0002] Probe cards are core components in semiconductor testing, used for wafer-level chip testing. They consist of precisely arranged metal probes that directly contact the chip's pads or bumps during testing, establishing temporary electrical connections, transmitting test signals, and collecting electrical performance data. This allows for rapid screening of good products and location of defects. Probe cards directly impact testing efficiency, accuracy, and cost, and are widely used in wafer testing for logic chips, memory, and advanced packaging, serving as a crucial tool for ensuring chip quality before shipment.
[0003] Patent document CN218099228U describes a probe card protection device, including a tray and a clamping mechanism; the clamping mechanism is provided at each of the four corners of the tray end face; the clamping mechanism is used to clamp and fix the probe card. By using the clamping mechanism to clamp and fix the ball wheels at the four corners of the DD probe card, the DD probe card is stably mounted on the tray, thereby preventing the DD probe from shaking during maintenance, measurement, adjustment, and transportation. Furthermore, the cover plate isolates and protects the DD probe card mounted on the tray, improving the safety of the DD probe card during transportation. Simultaneously, the anti-static layer on the tray and cover plate prevents static electricity from damaging the components on the DD probe card.
[0004] The aforementioned probe card protection device has certain shortcomings in use. The probe card mainly consists of a base plate, probes, wires, and a socket structure. The protection device is mainly to prevent damage to the probe card. However, probe cards can be divided into two types according to the base plate structure: round and rectangular, and they also vary in size. The aforementioned protection device cannot be applied to the installation and operation of probe cards of different shapes and sizes, thus reducing its scope of application. Secondly, the aforementioned protection device has poor waterproof performance. After the protection device is installed, the probe card cannot be used directly, rendering the probe card unable to provide protection during use.
[0005] In summary, existing probe cards can be divided into two types based on their substrate structure: circular and rectangular, and they also vary in size. The aforementioned protection devices cannot be applied to the installation and operation of probe cards of different shapes and sizes, thus reducing their applicability. Utility Model Content
[0006] This utility model provides a probe card protection device, which solves the problem that existing probe cards can be divided into two types according to their substrate structure, namely circular and rectangular, and their sizes are different. The protection devices mentioned above cannot be applied to the installation and operation of probe cards of different shapes and sizes, thus reducing their scope of use.
[0007] A probe card protection device includes a cover plate and a fixed base. The cover plate is fixedly installed on the upper outer surface of the fixed base. Four sets of movable clips for fixing the probe card are movably installed on the inner side of the fixed base. Each movable clip includes a rotating clip head, a movable slide, and a lifting clip plate. The rotating clip head is movably installed on the upper outer surface of the movable slide. The lifting clip plate is located below the movable slide. The upper outer surface of the fixed base is provided with a spiral groove. The lower outer surface of the cover plate is provided with a spiral strip that cooperates with the spiral groove.
[0008] As a further technical solution of this utility model, the bottom of the fixed base has a double-layer structure, and the interior of the fixed base is provided with a limiting slide groove for use with the lifting plate. By using the setting of the limiting slide groove, the lifting plate can be moved, and the position of the rotating card head can be adjusted by the lifting plate.
[0009] As a further technical solution of this utility model, a fastening bolt is provided between the rotating chuck, the movable slide and the lifting plate. The fastening bolt is only threadedly connected to the rotating chuck. The lower end of the fastening bolt is movably connected to the lifting plate through an annular groove. By rotating the rotating chuck, the threaded structure between the rotating chuck and the fastening bolt causes the fastening bolt to move the lifting plate up and down, thereby adjusting the working height of the lifting plate. The setting of the annular groove ensures that the threaded structure on the surface of the fastening bolt will not affect the lifting plate.
[0010] As a further technical solution of this utility model, the inner side of the limiting slide groove is provided with a toothed groove, and the upper surface of the lifting plate is provided with a locking tooth. When the lifting plate moves to the corresponding position, it rotates to the rotating head, so that the lifting plate, the toothed groove and the locking tooth engage with each other, and the positioning operation of the rotating head is completed.
[0011] As a further technical solution of this utility model, the upper outer surface of the rotating clamp is inclined, and a rubber pad is fixedly installed on one side of the outer surface of the rotating clamp. By adjusting the position of the four sets of rotating clamps, the rotating clamps can meet the limiting and fixing of rectangular or circular probe cards. The rubber pad protects the side of the probe card.
[0012] As a further technical solution of this utility model, the upper outer surface of the fixed base is provided with fixed slots at the four corners, and the bottom corners of the cover plate are fixedly installed with docking heads. By docking the docking heads with the fixed slots, the fixing operation between the fixed base and the cover plate can be completed.
[0013] As a further technical solution of this utility model, the height of the docking head is greater than the height of the lifting plate, and the overall shape of the spiral-shaped strip is a spiral-shaped structure. Because the height of the docking head is greater than the height of the lifting plate, during installation, the docking head first docks with the fixed slot, which plays a docking guiding role in the installation between the spiral-shaped strip and the spiral-shaped slot.
[0014] As a further technical solution of this utility model, a sealing cover is installed on the upper end of the cover plate and the lower end of the fixing base. The fixing base has an overall concave structure. By removing the sealing cover, the probe card slot can be wired.
[0015] As a further technical solution of this utility model, the upper end of the cover plate and the lower end of the fixed base are both provided with plug grooves for use with the sealing cover.
[0016] As a further technical solution of this utility model, the limiting slide groove is arranged in a cross shape, and the limiting slide groove is slidably connected to the lifting plate. The cross-shaped limiting slide groove can arbitrarily adjust the usage position of the four sets of moving plates.
[0017] The beneficial effects of this utility model are as follows: By setting a movable locking component, this utility model provides a four-point adjustable fixing structure for the probe card protection device, which can meet the installation operation of probe cards with circular or rectangular substrate structures. It can also be adjusted arbitrarily according to the probe card size, thus expanding its applicability. During operation, the lifting plate can be moved using the limiting slide groove, and the position of the rotating locking head can be adjusted through the lifting plate. The lower end of the fastening bolt is movably connected to the lifting plate through an annular groove. By rotating the rotating locking head, the threaded structure between the rotating locking head and the fastening bolt causes the fastening bolt to move the lifting plate up and down, adjusting the height of the lifting plate. The annular groove ensures that the threaded structure on the surface of the fastening bolt will not affect the lifting plate. When the lifting plate moves to the corresponding position, rotating the rotating locking head causes the teeth and locking teeth of the lifting plate to align, completing the positioning operation of the rotating locking head. Four sets of rotating locking heads fix the four sides of the probe card, and can be adjusted according to the probe card size. After closing the cover plate and the fixing base, the probe card is isolated and protected.
[0018] By setting up the U-shaped clip and U-shaped groove, the waterproof performance of the probe card protection device is improved during use. During operation, because the height of the docking head is greater than the height of the lifting plate, the docking head first aligns with the fixed groove during installation, which guides the installation between the U-shaped clip and the U-shaped groove. After the U-shaped clip and the U-shaped groove are aligned, a U-shaped sealing structure is formed between the cover plate and the fixed base. After removing the sealing cover, the probe card slot can be wired. Attached Figure Description
[0019] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.
[0020] Figure 1 This is a schematic diagram of the structure of this utility model;
[0021] Figure 2 This is a plan view of the fixed base in this utility model;
[0022] Figure 3 This is an overall structural diagram of the movable card component in this utility model;
[0023] Figure 4 This is an overall structural diagram of the cover plate in this utility model.
[0024] In the diagram: 1. Cover plate; 2. Fixed base; 3. Probe clip; 4. U-shaped groove; 5. Moving clip; 6. Limiting slide groove; 7. Sealing cover; 8. Connecting clip head; 9. Fixed clip groove; 10. Toothed groove; 11. Rotating clip head; 12. Fastening bolt; 13. Moving slide; 14. Lifting clip plate; 15. Clip teeth; 16. Rubber pad; 17. U-shaped clip strip; 18. Plug groove. Detailed Implementation
[0025] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0026] like Figures 1-4 As shown, a probe card protection device includes a cover plate 1 and a fixed base 2. The cover plate 1 is fixedly installed on the upper outer surface of the fixed base 2. Four sets of movable clips 5 for fixing probe cards 3 are movably installed on the inner side of the fixed base 2. The movable clips 5 include a rotating clip head 11, a movable slide 13, and a lifting clip plate 14. The rotating clip head 11 is movably installed on the upper outer surface of the movable slide 13. The lifting clip plate 14 is located below the movable slide 13. The upper outer surface of the fixed base 2 is provided with a spiral groove 4. The lower outer surface of the cover plate 1 is provided with a spiral clip strip 17 that cooperates with the spiral groove 4.
[0027] The bottom of the fixed base 2 has a double-layer structure, and the interior of the fixed base 2 is provided with a limiting slide groove 6 for use with the lifting plate 14. By using the limiting slide groove 6, the lifting plate 14 can be moved, and the position of the rotating head 11 can be adjusted by the lifting plate 14.
[0028] A fastening bolt 12 is provided between the rotating chuck 11, the movable slide 13, and the lifting plate 14. The fastening bolt 12 is only threadedly connected to the rotating chuck 11. The lower end of the fastening bolt 12 is movably connected to the lifting plate 14 through an annular groove. By rotating the rotating chuck 11, the threaded structure between the rotating chuck 11 and the fastening bolt 12 causes the fastening bolt 12 to drive the lifting plate 14 to move up and down, thereby adjusting the working height of the lifting plate 14. The annular groove ensures that the threaded structure on the surface of the fastening bolt 12 will not affect the lifting plate 14.
[0029] The inner side of the limiting slide 6 is provided with a toothed groove 10, and the upper surface of the lifting plate 14 is provided with a locking tooth 15. When the lifting plate 14 moves to the corresponding position, it rotates to the rotating head 11, so that the lifting plate 14, the toothed groove 10 and the locking tooth 15 are engaged with each other, thus completing the positioning operation of the rotating head 11.
[0030] The upper outer surface of the rotating clamp 11 is inclined, and a rubber pad 16 is fixedly installed on one side of the outer surface of the rotating clamp 11. By adjusting the position of the four sets of rotating clamps 11, the rotating clamps 11 can satisfy the limiting and fixing of the rectangular or circular probe card 3. The rubber pad 16 protects the side of the probe card 3.
[0031] The upper outer surface of the fixed base 2 is provided with fixed slots 9 at all four corners, and the bottom corners of the cover plate 1 are fixedly installed with docking heads 8. By docking the docking heads 8 with the fixed slots 9, the fixed base 2 and the cover plate 1 can be fixed.
[0032] The height of the docking head 8 is greater than the height of the lifting plate 14. The overall structure of the U-shaped strip 17 is U-shaped. Because the height of the docking head 8 is greater than the height of the lifting plate 14, during installation, the docking head 8 first docks with the fixed slot 9, which plays a docking guiding role in the installation between the U-shaped strip 17 and the U-shaped slot 4.
[0033] A sealing cover 7 is installed on the upper end of the cover plate 1 and the lower end of the fixed base 2. The fixed base 2 has an overall concave structure. After removing the sealing cover 7, the probe card 3 slot can be wired.
[0034] Both the upper end of the cover plate 1 and the lower end of the fixed base 2 are provided with plug grooves 18 for use with the sealing cover 7.
[0035] The limiting slide 6 is arranged in a cross shape. The limiting slide 6 is slidably connected to the lifting plate 14. The cross-shaped limiting slide 6 can arbitrarily adjust the usage position of the four sets of moving plates 5.
[0036] A probe card protection device, by setting a movable locking component 5, has a four-point adjustable fixing structure, which can meet the installation operation of probe cards 3 with circular or rectangular substrate structures, and can be arbitrarily adjusted according to the size of the probe card 3, thus expanding its applicability. During operation, the lifting locking plate 14 can be moved by the setting of the limiting slide groove 6, and the position of the rotating locking head 11 can be adjusted by the lifting locking plate 14. The lower end of the fastening bolt 12 is movably connected to the lifting locking plate 14 through an annular groove. By rotating the rotating locking head 11, the threaded structure between the rotating locking head 11 and the fastening bolt 12 allows the... The fastening bolt 12 drives the lifting plate 14 to move up and down, adjusting the working height of the lifting plate 14. The setting of the annular groove ensures that the thread structure on the surface of the fastening bolt 12 will not affect the lifting plate 14. When the lifting plate 14 moves to the corresponding position, it rotates to the rotating head 11, so that the tooth groove 10 and the tooth 15 of the lifting plate 14 are engaged with each other, completing the positioning operation of the rotating head 11. The four sets of rotating heads 11 are used to fix the four sides of the probe card 3. The corresponding adjustment is made according to the size of the probe card 3. After closing the cover plate 1 and the fixed base 2, the isolation and protection of the probe card 3 is completed.
[0037] By setting the U-shaped clip 17 and the U-shaped groove 4, the waterproof performance of the probe card 3 protection device is improved when it is in use. During operation, because the height of the docking head 8 is greater than the height of the lifting plate 14, the docking head 8 first docks with the fixed groove 9 during installation, which plays a docking guiding role in the installation between the U-shaped clip 17 and the U-shaped groove 4. After the U-shaped clip 17 and the U-shaped groove 4 dock, a U-shaped sealing structure is formed between the cover plate 1 and the fixed base 2. After removing the sealing cover 7, the slot of the probe card 3 can be wired.
[0038] The above description is merely an example and illustration of the structure of this utility model. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of this utility model.
Claims
1. A probe card protection device, characterized in that, The device includes a cover plate (1) and a fixed base (2). The cover plate (1) is fixedly installed on the upper outer surface of the fixed base (2). Four sets of movable clips (5) for fixing probe cards (3) are movably installed on the inner side of the fixed base (2). The movable clips (5) include a rotating clip head (11), a movable slide (13), and a lifting clip plate (14). The rotating clip head (11) is movably installed on the upper outer surface of the movable slide (13). The lifting clip plate (14) is located below the movable slide (13). The upper outer surface of the fixed base (2) is provided with a spiral groove (4). The lower outer surface of the cover plate (1) is provided with a spiral clip strip (17) that works with the spiral groove (4).
2. The probe card protection device according to claim 1, characterized in that, The bottom of the fixed base (2) has a double-layer structure, and the interior of the fixed base (2) is provided with a limiting groove (6) for use with the lifting plate (14).
3. The probe card protection device according to claim 2, characterized in that, A fastening bolt (12) is provided between the rotating chuck (11), the movable slide (13) and the lifting chuck (14), and the fastening bolt (12) is only threadedly connected to the rotating chuck (11).
4. The probe card protection device according to claim 3, characterized in that, The inner side of the limiting slide groove (6) is provided with a toothed groove (10), and the upper surface of the lifting plate (14) is provided with a locking tooth (15).
5. A probe card protection device according to claim 1, characterized in that, The upper outer surface of the rotating clamp (11) is inclined, and a rubber pad (16) is fixedly installed on one side of the outer surface of the rotating clamp (11).
6. The probe card protection device according to claim 1, characterized in that, The upper outer surface of the fixed base (2) is provided with fixed slots (9) at all four corners, and the bottom corners of the cover plate (1) are fixedly installed with docking heads (8).
7. A probe card protection device according to claim 6, characterized in that, The height of the docking head (8) is greater than the height of the lifting plate (14), and the overall shape of the spiral strip (17) is spiral-shaped.
8. A probe card protection device according to claim 1, characterized in that, The upper end of the cover plate (1) and the lower end of the fixed base (2) are both equipped with sealing caps (7), and the fixed base (2) is an integral concave structure.
9. A probe card protection device according to claim 7, characterized in that, The upper end of the cover plate (1) and the lower end of the fixed base (2) are both provided with plug grooves (18) for use with the sealing cover (7).
10. A probe card protection device according to claim 2, characterized in that, The limiting slide groove (6) is arranged in a cross shape, and the limiting slide groove (6) is slidably connected to the lifting plate (14).