A high vacuum general cold trap

Abstract

The utility model relates to high temperature gas processing technical field, concretely relates to a cold trap device. A cold trap device contains: integrative first cover and second cover, both are through first sealing connecting piece butt joint. The butt joint surface of first cover is equipped with first half slot, and the butt joint surface of second cover is equipped with second half slot, and after butt joint, half slot is closely matched and forms gas passage of through -going device. The both ends of gas passage are connected with vacuum joint through second sealing connecting piece respectively. First cover is equipped with independent first water cooling passage: its outer surface has first water cooling inlet and first water cooling outlet, and the inside is equipped with first hollow pipeline, and both ends are connected with inlet and outlet respectively. The passage is used for making cooling medium flow through the inside of cover and exchanges heat with the fluid in gas passage, realizes cooling function. The cold trap device provided by the utility model has small volume, high vacuum degree, can stably operate under high vacuum environment and has efficient cooling capacity.

Description

Technical Field

[0001] This utility model relates to the field of cold trap technology, specifically to a high-vacuum universal cold trap. Background Technology

[0002] In industries requiring high-vacuum environments (such as semiconductors and photovoltaics), high-temperature exhaust gases are generated during processes like high-temperature heat treatment, hot nitrogen / oxidation, and coating. Traditional exhaust gas treatment equipment typically requires cooling the high-temperature gases before treatment, which has the following significant drawbacks:

[0003] 1. Large size: The equipment needs to integrate both cooling and gas handling functions, which takes up a lot of space.

[0004] 2. Impact on vacuum level and yield: If the processing equipment is installed before the vacuum pump, its own structural or sealing defects (for example, in some cold trap designs, cooling copper pipes are directly welded into the trap body to form a water cooling channel, and the welding sealing is insufficient) will cause the overall vacuum level of the equipment to decrease, directly affecting the process yield.

[0005] 3. Damage to the vacuum pump: If installed after the vacuum pump, the high-temperature gas that has not been cooled will directly impact the vacuum pump, severely shortening the pump's service life.

[0006] This invention addresses the shortcomings of existing technologies by disclosing a high-vacuum universal cold trap to solve the aforementioned problems. Utility Model Content

[0007] This invention addresses the technical problems existing in the prior art by providing a high-vacuum universal cold trap, which is small in size, has a high vacuum degree, can operate stably in a high vacuum environment, and has a highly efficient cooling capability.

[0008] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A high-vacuum universal cold trap, comprising:

[0009] The first cover is molded in one piece;

[0010] The second cover is integrally formed and connected to the first cover via a first sealing connector;

[0011] The first cover has a first half-groove structure on its mating surface, and the second cover has a second half-groove structure on its mating surface. The first half-groove structure and the second half-groove structure are mated to form a gas channel that runs through the entire cold trap device.

[0012] The vacuum connector is connected to both ends of the gas channel via a second sealing connector.

[0013] The first water-cooling aisle includes:

[0014] A first water-cooling inlet and a first water-cooling outlet are provided on the outer surface of the first cover body;

[0015] A first hollow pipe located inside the first cover, with its two ends connected to the first water-cooling inlet and the first water-cooling outlet, respectively;

[0016] The first water-cooling channel is used for heat exchange of the fluid in the gas channel.

[0017] Based on the above technical solution, the present invention can be further improved as follows.

[0018] Furthermore, heat exchange fins are provided on the inner sides of the first and second covers, and the heat exchange fins of the first and second covers interlock to form the gas channel.

[0019] Furthermore, the heat exchange fins have a plate-like structure, and the heat exchange fins of the first cover and the second cover are arranged in parallel and staggered from each other.

[0020] Furthermore, it also includes a second water-cooling channel, including:

[0021] A second water-cooling inlet and a second water-cooling outlet are provided on the outer surface of the second cover body;

[0022] A second hollow pipe is located inside the second cover, and the two ends of the second hollow pipe are respectively connected to the second water-cooling inlet and the second water-cooling outlet;

[0023] The second water-cooling channel is used for heat exchange of the fluid in the gas channel.

[0024] Furthermore, the first sealing connector includes a threaded connector and a sealing ring; the first cover and the second cover are fixedly connected via a plurality of threaded connectors, and the sealing ring is disposed at the threaded connector.

[0025] Furthermore, the second sealing connection is a flange, and the two ends of the gas passage are connected to vacuum joints through the flange.

[0026] Furthermore, the first water-cooling channel includes multiple consecutive fold-back sections.

[0027] Furthermore, both the first cover and the second cover are integrally formed from aluminum alloy.

[0028] The beneficial effects of this utility model are:

[0029] 1. In this embodiment, the first and second covers are integrally formed using aluminum alloy molding technology, simultaneously forming a semi-groove structure and heat exchange fins, eliminating leakage points from traditional welded joints; the water cooling channel is internally drilled to avoid welding through the cover; combined with the sealing design of the contact surface between the threaded connector and the sealing ring, and the flange connection vacuum joints at both ends of the gas channel, multiple sealing guarantees are formed, eliminating the risk of leakage from the root, ensuring the vacuum of the device, and solving the problem of insufficient vacuum in existing technologies.

[0030] 2. In this embodiment, the heat exchange fins and the cover are integrally formed and interlocked, forming a tortuous gas channel in a limited space, which greatly extends the gas flow path and increases the heat exchange area; the double cover integrates an embedded water cooling channel, and its continuous folding section design maximizes the distance the cooling water flows; combined with the high thermal conductivity of aluminum alloy, efficient heat exchange between airflow and cooling water is achieved, and the size of the device is reduced compared with the traditional external cooling system. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the external structure of the cold trap device described in an embodiment of the present invention;

[0032] Figure 2 This is a longitudinal cross-sectional schematic diagram of the cold trap device described in an embodiment of the present invention.

[0033] Figure 3 This is a schematic diagram of the structure of the second cover body in an embodiment of the present utility model;

[0034] Figure 4 This is a schematic cross-sectional view of the second cover body in an embodiment of the present invention;

[0035] Figure 5 This is a schematic diagram of the structure of the first cover body in an embodiment of the present utility model;

[0036] Figure 6 This is a top view of the first cover body in an embodiment of the present utility model;

[0037] Figure 7 This is a longitudinal cross-sectional view of the front cover of the first cover in an embodiment of the present invention;

[0038] Figure 8 This is a schematic diagram of the transverse cross-section of the bottom side cover of the first cover body in an embodiment of the present utility model;

[0039] Figure 9 This is a longitudinal cross-sectional view of the rear cover of the first cover in an embodiment of the present invention.

[0040] The attached diagram lists the components represented by each number as follows:

[0041] 1. First cover, 2. First water-cooling channel, 3. Heat exchange fins, 4. Gas channel, 5. Second cover, 6. Second water-cooling channel, 7. Threaded connector, 8. Quick-connect fitting, 9. Water-cooling plug, 10. Flange, 11. Vacuum connector, 12. First water-cooling inlet, 13. First water-cooling outlet, 14. First water-cooling inlet, 15. First water-cooling outlet. Detailed Implementation

[0042] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0043] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0044] In the description of this application, the term "for example" is used to mean "used as an example, illustration, or description." Any embodiment described as "for example" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to implement and use the present invention. Details are set forth in the following description for purposes of explanation. It should be understood that those skilled in the art will recognize that the present invention can be implemented without using these specific details. In other instances, well-known structures and processes will not be described in detail to avoid obscuring the description of the present invention with unnecessary detail. Therefore, the present invention is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed in this application.

[0045] Example

[0046] Example

[0047] A high-vacuum universal cold trap, such as Figure 1-4 As shown, it includes:

[0048] The first cover 1 is integrally molded;

[0049] The second cover 5 is integrally formed and is connected to the first cover 1 through a first sealing connector;

[0050] The first cover 1 has a first semi-groove structure on its mating surface, and the second cover 5 has a second semi-groove structure on its mating surface. The first semi-groove structure and the second semi-groove structure are connected to form a gas channel 4 that runs through the entire cold trap device.

[0051] Vacuum connector 11 is connected to both ends of the gas channel 4 via a second sealing connector;

[0052] The first water-cooling channel 2 includes:

[0053] A first water-cooling inlet 12 and a first water-cooling outlet 13 are provided on the outer surface of the first cover 1;

[0054] The first hollow pipe is located inside the first cover 1, and the two ends of the first hollow pipe are respectively connected to the first water-cooling inlet 12 and the first water-cooling outlet 13;

[0055] The first water-cooling channel 2 is used for heat exchange of the fluid in the gas channel 4.

[0056] Specifically, the first sealing connector includes a threaded connector 7 and a sealing ring; the first cover 1 and the second cover 5 are fixedly connected via multiple threaded connectors 7, and the sealing ring is disposed at each threaded connector 7. The threaded connector 7 is, for example, a bolt or screw. The sealing ring is fitted onto the threaded rod of the threaded connector 7 and is located between the head (or washer) of the threaded connector 7 and the contact surface of the first cover 1 or the second cover 5, to ensure a tight seal between the first cover 1 and the second cover 5. The upper surface of the first cover 1 forms a first semi-groove structure, and the lower surface of the second cover 5 forms a second semi-groove structure. After the first cover 1 and the second cover 5 are joined, the first and second semi-groove structures form a gas channel 4 that runs through the entire cold trap device.

[0057] Specifically, the second sealing connector is a flange 10, and both ends of the gas channel 4 are connected to vacuum connectors 11 via the flange 10. The vacuum connectors 11 are standard KF vacuum connectors 11, which are well-suited for various vacuum pipes and cavities. Specifically, both ends of the gas channel 4 are connected to square flanges 10, and KF vacuum connectors 11 are connected through these square flanges to ensure reliable sealing at the interface. One of the standard KF vacuum connectors 11 at each end is used to connect to the high-temperature exhaust gas outlet, and the other is used to connect to the vacuum pump. Under the action of the vacuum pump, the high-temperature exhaust gas passes through the gas channel 4 and is discharged through the vacuum pump.

[0058] Specifically, both the first cover 1 and the second cover 5 are integrally formed from aluminum alloy. This is to eliminate the risk of leakage from welded seams and improve sealing performance and structural strength.

[0059] In this embodiment, cooling water circulates within a first water-cooling channel 2, which is completely enclosed inside the first cover 1. This water-cooling channel is physically isolated from the gas channel 4, completely avoiding the sealing defects caused by "welding cooling copper pipes into the trap" in the prior art. This embodiment eliminates the need to drill holes in the cover to weld cooling pipes, thus eliminating weld leaks and ensuring vacuum levels.

[0060] In a preferred embodiment, heat exchange fins 3 are provided on the inner sides of the first cover 1 and the second cover 5, and the heat exchange fins 3 of the first cover 1 and the second cover 5 interlock to form the gas channel 4.

[0061] Specifically, the heat exchange fins 3 have a plate-like structure, and the heat exchange fins 3 of the first cover 1 and the second cover 5 are arranged in parallel and staggered.

[0062] In this example, the gas channels 4 formed by the parallel arrangement and staggered arrangement of the heat exchange fins 3 of the first cover 1 and the second cover 5 maximize the gas movement distance within a limited volume, thereby improving the heat exchange efficiency.

[0063] In a preferred embodiment, a second water-cooling channel 6 is also included, such as Figure 5 As shown, it includes:

[0064] A second water-cooling inlet 14 and a second water-cooling outlet 15 are provided on the outer surface of the second cover 5;

[0065] The second hollow pipe is located inside the second cover 5, and the two ends of the second hollow pipe are respectively connected to the second water-cooling inlet 14 and the second water-cooling outlet 15;

[0066] The second water-cooling channel 6 is used for heat exchange of the fluid in the gas channel 4.

[0067] Furthermore, such as Figure 6-9 As shown, the first water-cooling channel 2 includes multiple continuous folding sections.

[0068] In this embodiment, a first water-cooling channel 2 is formed by secondary machining and drilling inside the first cover 1, and a second water-cooling channel 6 is formed by secondary machining and drilling inside the second cover 5. Two holes in the first cover 1 serve as the first water-cooling inlet 12 and the first water-cooling outlet 13, respectively; two holes in the second cover 5 serve as the second water-cooling inlet 14 and the second water-cooling outlet 15, respectively. The remaining machined holes are sealed with water-cooling plugs 9. The first water-cooling inlet 12 and the second water-cooling inlet 14 are connected to an external cooling water system using quick-connect connectors 8 to introduce cooling water. The first water-cooling outlet 13 and the second water-cooling outlet 15 are used to export the cooled water after heat exchange to the external cooling water system using quick-connect interfaces.

[0069] Inside the first cover 1, such as Figure 6-9As shown, adjacent machining holes are interconnected and intersect within the first cover 1 to form a first water-cooling channel 2. Cooling water enters from the first water-cooling inlet 12, flows through the first water-cooling channel 2, and exits from the first water-cooling outlet 13. The first water-cooling channel 2 includes multiple continuous bends, forming a continuously bendable cooling flow channel, which increases the flow distance of the coolant within the cover and improves heat exchange efficiency.

[0070] In this embodiment, cooling water flows in from the first water-cooling inlet 12 located on the front side of the first cover, flows through the bottom cover, and flows out from the first water-cooling outlet 13 located on the rear side of the first cover, completing the water-cooling cycle.

[0071] The overall device manufacturing process

[0072] The cover body is integrally molded: both the first cover body 1 and the second cover body 5 are integrally cast from aluminum alloy, simultaneously forming the main body of the cover body, the first half-groove structure and the second half-groove structure of the mating surface, and the heat exchange fins 3 on the inner side. Among them, the heat exchange fins 3 have a parallel plate-like structure, and the positions of the fins of the two cover bodies are preset to be staggered.

[0073] Water-cooling channel fabrication: Multiple interconnected channels are formed inside the first cover 1 by drilling, constituting a first water-cooling channel 2 including a continuous folding section; the two end holes extend to the outer surface of the cover, serving as the first water-cooling inlet 12 and the first water-cooling outlet 13, respectively. The same process is repeated inside the second cover 5 to form a second water-cooling channel 6, with the two ends serving as the second water-cooling inlet 14 and the second water-cooling outlet 15. Non-functional holes are sealed with water-cooling plugs 9.

[0074] Interface processing: quick-connect interface mounting positions are processed at the first water-cooling inlet 12, the first water-cooling outlet 13, the second water-cooling inlet 14, and the second water-cooling outlet 15; flange 10 assembly planes are processed at both ends of the gas channel 4.

[0075] Assembly and sealing: The first cover 1 and the second cover 5 are joined together so that the first half-groove structure and the second half-groove structure are combined to form a complete gas channel 4, while the heat exchange fins 3 interlock to form a tortuous flow channel.

[0076] The two covers are fixed with bolts or screws, and a sealing ring is fitted on the screw to achieve a seal at the contact surface. A KF vacuum connector 11 is connected to the flange 10 at the assembly plane; and a quick-connect connector 8 is installed at the quick-connect interface mounting position.

[0077] The overall working process of the device is as follows:

[0078] System connection:

[0079] One end of the gas channel 4 is connected to the high-temperature exhaust gas pipeline via vacuum connector 11, and the other end is connected to the vacuum pump.

[0080] The first water-cooling inlet 12 and the first water-cooling outlet 13 are connected to the external cooling water circulation system, and the second water-cooling inlet 14 and the second water-cooling outlet are also connected to the external cooling water circulation system.

[0081] Run and start:

[0082] Cooling water is introduced: cold water enters the internal folding channels of the first cover 1 and the second cover 5 through the first water-cooling inlet 12 and the second water-cooling inlet 14 respectively for heat exchange, and is discharged from the water-cooling outlet.

[0083] Start the vacuum pump: The high-temperature exhaust gas enters the gas channel 4 under negative pressure.

[0084] Hot exchange execution:

[0085] When the gas flows through the tortuous channel formed by the interlaced heat exchange fins 3, the heat is conducted to the cooling water in the water-cooling channel through the aluminum alloy cover; after cooling, the gas is discharged from the gas channel 4 by the vacuum pump.

[0086] While embodiments or examples of this disclosure have been described with reference to the accompanying drawings, it should be understood that the methods, systems, and devices described above are merely exemplary embodiments or examples, and the scope of this utility model is not limited by these embodiments or examples, but only by the granted claims and their equivalents. Various elements in the embodiments or examples may be omitted or replaced by their equivalents. Furthermore, the steps may be performed in a different order than that described in this disclosure. Further, various elements in the embodiments or examples may be combined in various ways. Importantly, as technology evolves, many elements described herein can be replaced by equivalents that appear after this disclosure.

Claims

1. A high-vacuum universal cold trap, characterized in that, include: The first cover is molded in one piece; The second cover is integrally formed and connected to the first cover via a first sealing connector; The first cover has a first half-groove structure on its mating surface, and the second cover has a second half-groove structure on its mating surface. The first half-groove structure and the second half-groove structure are mated to form a gas channel that runs through the entire cold trap device. The vacuum connector is connected to both ends of the gas channel via a second sealing connector. The first water-cooling aisle includes: A first water-cooling inlet and a first water-cooling outlet are provided on the outer surface of the first cover body; A first hollow pipe located inside the first cover, with its two ends connected to the first water-cooling inlet and the first water-cooling outlet, respectively; The first water-cooling channel is used for heat exchange of the fluid in the gas channel.

2. The high-vacuum universal cold trap according to claim 1, characterized in that: The inner sides of the first cover and the second cover are provided with heat exchange fins, and the heat exchange fins of the first cover and the second cover interlock to form the gas channel.

3. The high-vacuum universal cold trap according to claim 2, characterized in that: The heat exchange fins are plate-shaped, and the heat exchange fins of the first cover and the second cover are arranged in parallel and staggered.

4. The high-vacuum universal cold trap according to claim 1, characterized in that: It also includes a second water-cooling channel, including: A second water-cooling inlet and a second water-cooling outlet are provided on the outer surface of the second cover body; A second hollow pipe is located inside the second cover, and the two ends of the second hollow pipe are respectively connected to the second water-cooling inlet and the second water-cooling outlet; The second water-cooling channel is used for heat exchange of the fluid in the gas channel.

5. The high-vacuum universal cold trap according to claim 1, characterized in that: The first sealing connector includes a threaded connector and a sealing ring; the first cover and the second cover are fixedly connected by a plurality of threaded connectors, and the sealing ring is disposed at the threaded connector.

6. The high-vacuum universal cold trap according to claim 1, characterized in that: The second sealing connection is a flange, and the two ends of the gas passage are connected to vacuum joints through the flange.

7. The high-vacuum universal cold trap according to claim 1, characterized in that: The first water-cooling channel contains multiple consecutive fold-back sections.

8. The high-vacuum universal cold trap according to claim 1, characterized in that: Both the first and second covers are integrally formed from aluminum alloy.

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