A cleaning apparatus and cleaning system

CN224542478UActive Publication Date: 2026-07-24QUANYI MASK PHOTOELECTRIC TECH (JINAN) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
QUANYI MASK PHOTOELECTRIC TECH (JINAN) CO LTD
Filing Date
2025-07-17
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing technologies pose a risk of backflow of cleaning agent during the back-side cleaning process of photomasks, leading to contamination of the front side of the photomask. Furthermore, existing solutions increase equipment size and affect production capacity or cleaning effectiveness.

Method used

It adopts a combination structure of rotating carrier, rear nozzle and air blowing pipe. The air blowing pipe blows protective gas into the front of the photomask to prevent back splashing of droplets, protect the front of the photomask, and does not increase the size of the equipment.

Benefits of technology

It achieves efficient cleaning results, reduces the chance of backflow of cleaning agent, maintains the small size and high capacity of the equipment, and improves cleaning efficiency.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN224542478U_ABST
    Figure CN224542478U_ABST
Patent Text Reader

Abstract

The application provides a cleaning device and a cleaning system, and relates to the technical field of mask processing. The cleaning device comprises a cleaning chamber, a rotary loading plate arranged in the cleaning chamber, a back nozzle and a blowing pipe. The rotary loading plate is used for fixing a product to be cleaned. The back nozzle is used for spraying a back cleaning agent to the back of the product to be cleaned. The blowing pipe is used for blowing a protective gas into the gap between the product to be cleaned and the cleaning chamber. The cleaning device blows the protective gas into the gap between the product to be cleaned and the cleaning chamber by using the blowing pipe, so as to scatter the splashing liquid drops. The blowing pipe is arranged by using the space above the product to be cleaned, and the volume of the device does not need to be increased. Moreover, after the blowing pipe blows the gas, the back cleaning agent splashing probability does not need to be reduced by reducing the product rotating speed, reducing the cleaning range, reducing the cleaning agent flow and the like. Therefore, the cleaning device has the advantages of small volume, high cleaning efficiency and good cleaning effect.
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