An evaporation boat

Abstract

The utility model discloses an evaporating boat, including the boat body, the boat body upper end face has the platform, the boat body is opened with the boat pool in the symmetry of platform both sides, the boat pool has the inclined plane, be equipped with capillary groove on the inclined plane. The utility model discloses two boat pools with the inclined plane design are opened on the evaporating boat, when pouring, based on gravity, metal liquid spreads from top to bottom, so it is easier to spread to both ends, the capillary groove that sets up in the boat pool bottom can control metal liquid flow rate, plays the buffering effect, prevents splashing or overflow.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation technology, and in particular to an evaporation boat. Background Technology

[0002] In the field of vacuum evaporation coating, the evaporation boat, as a resistance heating container, needs to withstand molten metal (such as aluminum) at temperatures above 1600℃. Traditional evaporation boats mostly adopt a planar boat pool structure, where molten metal droplets diffuse outwards from the central wire feeding position. This design has two inherent drawbacks: I. Thermal Imbalance Problem: When current passes through a planar boat pool with a uniform cross-section, the rapid heat dissipation at the edges leads to a temperature difference of 80-150℃ between the center and the ends of the pool. Overheating at the center causes the metal to boil violently, while the low temperature at the edges causes the molten metal to solidify prematurely, forming a dry-burning zone.

[0003] II. Liquid flow control issues: The flow rate of molten metal that spreads naturally by gravity is uncontrollable. If the flow rate is too fast, the liquid will overflow outside the pool. If the flow rate is too slow, the liquid layer in the center will be too thick, causing splashing. Utility Model Content

[0004] The purpose of this invention is to provide an evaporation boat. By opening two sloping pools on the evaporation boat, the liquid metal spreads from top to bottom due to gravity when pouring, making it easier to spread to both ends. The capillary grooves at the bottom of the pools can control the flow rate of the liquid metal, playing a buffering role and preventing splashing or overflow.

[0005] To achieve the above objectives, this utility model provides the following technical solution: An evaporation boat includes a hull, the upper surface of which has a platform, and symmetrically arranged pools on both sides of the platform, the pools having sloping surfaces; capillary grooves are formed on the sloping surfaces.

[0006] Furthermore, the angle between the slope surface and the horizontal plane of the boat does not exceed 10°.

[0007] Furthermore, the width of the capillary groove does not exceed 5 mm and the depth does not exceed 3 mm.

[0008] Furthermore, the bottom of the capillary groove has an arc-shaped cross-section.

[0009] Furthermore, the width-to-depth ratio of the capillary groove is 1-2:1.

[0010] Furthermore, the capillary grooves have a crisscrossing network structure.

[0011] Furthermore, the ratio of the platform width to the boat pool length is 1:2-3.

[0012] Furthermore, the boat body located on the outer periphery of the platform and the boat pool is provided with a stepped portion, and the stepped portion has a chamfered surface.

[0013] Furthermore, the material of the boat hull is a semiconductor material or an insulating material.

[0014] Compared with the prior art, the beneficial effects of this utility model are: 1. Compared with ordinary evaporation boats, the evaporation boat designed in this utility model has an inclined channel structure in the boat pool. Based on gravity, the metal liquid spreads from top to bottom, making it easier to spread to both ends. Moreover, the cross-sectional area of ​​the inclined channel structure decreases continuously from the center to the end, and the resistance gradually increases. The closer to the end, the greater the heat loss. This structure can just make up for the heat loss at the end, so that the heating is uniform and the aluminum vapor is more evenly sprayed on the substrate, resulting in a uniform film surface with fewer splashes.

[0015] 2. The evaporation boat designed in this utility model has a ramp with small, crisscrossing grooves. The pattern can be rectangular, rhomboid, or other polygonal shapes. This utility model mainly uses a rectangular shape as an example. Figure 1 Based on capillary action, the flow rate of metal can be indirectly controlled by setting the size of the groove or the sloping pattern, which plays a certain buffering role and prevents the flow rate from overflowing the pool and causing splashing. Attached Figure Description

[0016] Figure 1 This is a perspective view of the present utility model; Figure 2 This is a side sectional view of the present invention; In the picture: 1-Boat body, 11-Platform, 12-Boat pool, 121-Sloping surface, 122-Capillary groove, 13-Step section, 131-Chamfered surface. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] In the description of this utility model, it should be noted that the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0019] Please see Figure 1-2 In this embodiment, an evaporation boat includes a boat body 1 with a platform 11 on its upper surface. Boat pools 12 are symmetrically formed on both sides of the platform 11, and each boat pool 12 has a sloping surface 121. Capillary grooves 122 are formed on the sloping surface 121. The symmetrical double-pool design expands the effective evaporation area. The sloping surface 121 utilizes gravity to autonomously divert the molten metal, eliminating splashing caused by overload in the center of a single pool. Through the capillary grooves 122, and based on the synergy of capillary force and gravity, the liquid flow rate is controlled, preventing dry burning.

[0020] Furthermore, the angle between the ramp surface 121 and the horizontal plane of the hull 1 does not exceed 10°. An excessively large angle will cause the liquid flow to be out of control. The ≤10° design keeps the liquid flow velocity stable within a certain range, while avoiding excessive liquid level drop at the end of the ramp and ensuring thermal uniformity.

[0021] The capillary groove 122 has a width not exceeding 5 mm and a depth not exceeding 3 mm. If the width of the capillary groove is too large, it will cause the capillary force to weaken, resulting in a loss of flow control; if the width of the groove is too small, it will cause the turbulence intensity to increase, leading to splashing. Preferably, the width of the capillary groove 122 is set to 0.5-3 mm and the depth is set to 0.2-1.5 mm.

[0022] Furthermore, the bottom of the capillary groove 122 has an arc-shaped cross-section with an R angle ≥ 0.1 mm. Compared with a right-angle bottom, the arc-shaped bottom can reduce the thermal stress of the capillary groove, effectively reduce the probability of microcracks, and extend the service life of the evaporation boat.

[0023] Furthermore, the width to depth ratio of the capillary groove 122 is 1-2:1. This ratio balances the capillary force and flow resistance of the capillary groove 122: if the ratio is too large (the groove is too shallow), it will lead to insufficient capillary force and increased splashing rate; if the ratio is too small (the groove is too deep), the liquid flow will stagnate and the spreading time will be prolonged.

[0024] Furthermore, the capillary grooves 122 have a crisscrossing network structure. The intersecting grids can be rhomboid or rectangular. The network structure generates a turbulent dissipation effect, with the longitudinal grooves guiding the flow and the transverse grooves slowing it down. Compared to parallel grooves, the splash rate is reduced.

[0025] Furthermore, looking at the horizontal direction, the ratio of the length of platform 11 to the length of boat pool 12 is 1:2-3, which effectively avoids thermal runaway. If platform 11 is too narrow, it will cause heat to accumulate in the center; if boat pool 12 is too long, it will cause insufficient temperature at the end of the slope surface 121. Thermal uniformity is optimal when the ratio of the width of platform 11 to the length of boat pool 12 is 1:2.5.

[0026] Furthermore, the boat body 1 located on the outer periphery of the platform 11 and the boat pool 12 is provided with a stepped portion 13, which has a chamfered surface 131. This stepped portion 13 can prevent the liquid from being poured too quickly and causing the molten metal to overflow from the platform surface.

[0027] Furthermore, the material of the hull 1 is a semiconductor material or an insulating material. The main components are boron nitride, titanium diboride, etc.

[0028] In use, taking vacuum aluminum plating as an example, during the vacuum coating process, the wire feeder is aligned with the center of platform 11. When current is applied, the evaporation boat acts as a resistance heater to heat the upper aluminum wire, causing the molten aluminum metal to slowly drip onto platform 11. The molten metal flows along the slopes at both ends towards the bottom of the boat pool. After the liquid has spread out, it is heated steadily to generate stable metal vapor. When the temperature exceeds the saturated vapor pressure of the evaporated metal, the molten metal transforms into vapor and adheres to the base film.

[0029] Although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0030] Therefore, the above description is only a preferred embodiment of this application and is not intended to limit the scope of this application; that is, all equivalent modifications made in accordance with the scope of the claims of this application shall be within the protection scope of the claims of this application.

Claims

1. An evaporation boat, characterized in that, The vessel includes a hull (1), the upper surface of which has a platform (11), and the hull (1) located on both sides of the platform (11) has symmetrically provided boat pools (12), the boat pools (12) having a sloping surface (121); the sloping surface (121) has capillary grooves (122).

2. The evaporation boat according to claim 1, characterized in that, The angle between the slope surface (121) and the horizontal plane of the boat body (1) does not exceed 10°.

3. The evaporation boat according to claim 1, characterized in that, The width of the capillary groove (122) is no more than 5 mm and the depth is no more than 3 mm.

4. The evaporation boat according to claim 1, characterized in that, The bottom of the capillary groove (122) has an arc-shaped cross-section.

5. The evaporation boat according to claim 1, characterized in that, The width-to-depth ratio of the capillary groove (122) is 1-2:

1.

6. The evaporation boat according to claim 1, characterized in that, The capillary grooves (122) have a crisscrossing network structure.

7. The evaporation boat according to claim 1, characterized in that, The ratio of the width of the platform (11) to the length of the boat pool (12) is 1:2-3.

8. The evaporation boat according to claim 1, characterized in that, The boat body (1) located on the outer periphery of the platform (11) and the boat pool (12) is provided with a step portion (13), and the step portion (13) has a chamfered surface (131).

9. The evaporation boat according to claim 1, characterized in that, The material of the hull (1) is a semiconductor material or an insulating material.

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