Trimming vacuum capacitor
By setting electrode components and adjustment components inside the vacuum chamber, and using external adjustment nuts and set screws, the problems of cumbersome and unstable operation of existing fine-tuning vacuum capacitors are solved, and simple and stable capacitance adjustment is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- KUNSHAN GUOLI VACUUM ELECTRIC
- Filing Date
- 2025-08-08
- Publication Date
- 2026-07-24
AI Technical Summary
Existing fine-tuning vacuum capacitors require additional tools during adjustment, making the operation cumbersome and unstable. The small diameter of the adjusting screw makes it prone to vibration, resulting in poor stability of capacitance adjustment.
The electrode assembly and adjustment assembly are located within a vacuum chamber, including an adjustment rod, an adjustment nut, and a bellows. The adjustment nut is externally mounted and can be manually tightened. Combined with a set screw for fixation, this allows for stable adjustment of the coupling length of the electrode ring assembly.
The capacitance value can be easily and conveniently adjusted without the need for additional tools. The adjustment process is stable and controlled, reducing jitter and lowering the capacitance value change rate, thus meeting users' needs for ease of operation and stability.
Smart Images
Figure CN224554185U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of capacitor technology, and in particular to a fine-tuning vacuum capacitor. Background Technology
[0002] A vacuum capacitor is a type of capacitor with a ceramic insulating shell, a vacuum dielectric, and high-conductivity oxygen-free copper electrodes. Compared to other capacitors, it has advantages such as high voltage withstand capability, large current carrying capacity, low high-frequency loss, and self-healing ability after transient overload, making it particularly suitable for high-frequency, high-voltage applications. Vacuum capacitors are widely used in equipment such as broadcasting, medical MRI, high-frequency heating, semiconductor etching, and plasma cleaning. In these high-frequency devices, vacuum capacitors form resonant circuits with high-frequency inductors to achieve high-frequency impedance matching and realize stable transmission of radio frequency power.
[0003] Vacuum capacitors are mainly divided into two types: variable vacuum capacitors and fixed vacuum capacitors. Trimming variable vacuum capacitors are a type of vacuum capacitor that falls between the two. The basic structure of a trimming variable vacuum capacitor is similar to that of a variable vacuum capacitor, mainly consisting of two sets of electrodes sealed in a vacuum and a capacitance adjustment system. Since trimming capacitors do not require continuous adjustment over long periods, users have low requirements for the lifespan of the capacitance adjustment system. However, users desire simple and efficient capacitance adjustment operation.
[0004] In the prior art, referring to Figure 1 For example, in patent application number 202110114780.2, an integrated fine-tuning ceramic vacuum capacitor includes a ceramic tube 1 and a cylindrical electrode ring assembly disposed within the ceramic tube 1. The cylindrical electrode ring assembly consists of a stator electrode 2 fixed to one end of the ceramic tube 1 and a movable electrode 3 movably disposed within the other end of the ceramic tube 1. The stator electrode 2 and the movable electrode 3 are arranged opposite to each other and at least partially coupled. The integrated fine-tuning ceramic vacuum capacitor also includes an adjusting screw 4. During adjustment, an Allen wrench is inserted into the Allen wrench located on the nut end face of the adjusting screw 4, and the Allen wrench is manually rotated to rotate the adjusting screw 4 to adjust the capacitance value. That is, in the capacitance adjustment process of the above-mentioned integrated fine-tuning ceramic vacuum capacitor, not only are additional tools required, the operation is cumbersome, and the convenience is poor; moreover, due to the limitation of the installation connector size, the diameter of the adjusting screw 4 is small, the thread engagement area is small, and it is easy for the adjustment process to vibrate, resulting in poor capacitance adjustment stability.
[0005] Therefore, there is an urgent need for a fine-tuning vacuum capacitor to solve the above problems. Utility Model Content
[0006] Based on the above, the purpose of this utility model is to provide a fine-tuning vacuum capacitor that is simple and efficient to operate, and whose capacitance adjustment process is more stable.
[0007] To achieve the above objectives, the present invention adopts the following technical solution:
[0008] Trimming vacuum capacitors include:
[0009] A vacuum chamber, wherein a vacuum cavity is provided within the vacuum chamber;
[0010] An electrode assembly is disposed within the vacuum chamber, and the electrode assembly includes a first electrode ring group and a second electrode ring group that are coupled together.
[0011] An adjustment assembly includes an adjustment rod and an adjustment nut. The adjustment rod includes a connecting section, a through section, and an adjustment section arranged sequentially. The connecting section is connected to the first electrode ring group or the second electrode ring group. The through section passes through the vacuum chamber. The adjustment section extends out of the vacuum chamber and is threadedly connected to the adjustment nut. The adjustment nut is rotatably disposed on the outer wall of the vacuum chamber. Tightening the adjustment nut can change the coupling length of the first electrode ring group and the second electrode ring group.
[0012] As a preferred embodiment of the fine-tuning vacuum capacitor, the electrode assembly further includes a first mounting plate, on which the first electrode ring group is disposed; a bellows is also disposed inside the vacuum chamber, the bellows is sleeved on the adjusting rod, the bellows is axially telescopic, one end is connected to the first mounting plate, and the other end is sealed to the inner wall of the vacuum chamber; the adjusting rod is also provided with an exhaust port, which is used to connect the outside world and the inside of the bellows.
[0013] As a preferred embodiment of the fine-tuning vacuum capacitor, the vent includes an axial vent and a radial vent that are interconnected, the axial vent extending along the axial direction of the adjusting rod and the radial vent extending along the radial direction of the adjusting rod.
[0014] As a preferred embodiment of the fine-tuning vacuum capacitor, multiple radial vent holes are provided, and all of the multiple radial vent holes are connected to the axial vent holes.
[0015] As a preferred embodiment of the fine-tuning vacuum capacitor, the vacuum chamber includes a ceramic tube and a first base and a second base respectively disposed at both ends of the ceramic tube. The through section is slidably connected to the first base, the adjusting nut is rotatably disposed on the outer wall of the first base, and the second electrode ring group is disposed on the second base.
[0016] As a preferred embodiment of the fine-tuning vacuum capacitor, the first electrode ring group and the second electrode ring group are provided with positioning ceramic shafts inside. One end of the positioning ceramic shaft is fixedly connected to the second base, and the other end is slidably connected to the adjusting rod.
[0017] As a preferred embodiment of the fine-tuning vacuum capacitor, the adjustment assembly further includes a set screw that passes through the side wall of the adjusting nut and abuts against the outer wall of the adjustment section.
[0018] As a preferred embodiment of the fine-tuning vacuum capacitor, a plurality of set screws are provided, and the plurality of set screws are evenly spaced along the axial direction of the adjusting nut.
[0019] As a preferred embodiment of the fine-tuning vacuum capacitor, the adjustment assembly is provided in two sets. The electrode assembly further includes a first mounting plate and a second mounting plate. The first electrode ring group is disposed on the first mounting plate, and the second electrode ring group is disposed on the second mounting plate. The adjustment rod of one set of the adjustment assembly is connected to the first mounting plate, and the adjustment rod of the other set of the adjustment assembly is connected to the second mounting plate.
[0020] As a preferred embodiment of the fine-tuning vacuum capacitor, the first electrode ring group and the second electrode ring group are provided with positioning ceramic shafts inside. One end of the positioning ceramic shaft is fixedly connected to the adjusting rod of one of the adjusting components, and the other end is slidably connected to the adjusting rod of the other adjusting component.
[0021] The beneficial effects of this utility model are as follows:
[0022] This invention adjusts the capacitance of a vacuum capacitor by placing an electrode assembly within a vacuum chamber and an adjustment component that cooperates with both the vacuum chamber and the electrode assembly. This adjustment is used to adjust the coupling length of the first and second electrode ring assemblies. Specifically, the connecting section of the adjustment rod connects to either the first or second electrode ring assembly, the through section passes through the vacuum chamber, and the adjustment section is threadedly connected to the adjustment nut. Since the adjustment nut is rotatably mounted on the outer wall of the vacuum chamber, rotating the adjustment nut moves the electrode ring assembly connected to it, thus changing the coupling length. The adjustment nut increases the outer diameter of the adjustment rod, making the position of the electrode ring assembly more stable. Furthermore, the external placement of the adjustment nut allows the operator to directly adjust the capacitance by hand without additional tools, making the adjustment process simpler and more convenient. Additionally, the larger outer diameter of the adjustment nut provides a larger operating area, reducing the likelihood of vibration during adjustment and ensuring more stable and controlled capacitance adjustment. The coordination between the adjustment section and the vacuum chamber helps to limit the radial position of the adjustment rod, effectively avoiding sudden changes in the capacity adjustment caused by radial displacement of the adjustment rod. Attached Figure Description
[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.
[0024] Figure 1 This is a schematic diagram of an integrated fine-tuning ceramic vacuum capacitor provided in the background art;
[0025] Figure 2 This is a cross-sectional view of a fine-tuning vacuum capacitor provided in a specific embodiment of this utility model;
[0026] Figure 3 This is a cross-sectional view of another fine-tuning vacuum capacitor provided in a specific embodiment of this utility model.
[0027] In the picture:
[0028] 1. Ceramic tube; 2. Stator electrode; 3. Moving electrode; 4. Adjusting screw;
[0029] 100. Vacuum chamber; 101. Vacuum chamber; 110. Ceramic tube; 120. First base; 121. Mounting threaded hole; 130. Second base; 131. Mounting platform;
[0030] 200. Electrode assembly; 210. First electrode ring assembly; 220. Second electrode ring assembly; 230. First mounting plate; 240. Positioning ceramic shaft; 250. Second mounting plate;
[0031] 300. Adjusting assembly; 310. Adjusting rod; 311. Connecting section; 312. Through section; 313. Adjusting section; 314. Vent hole; 3141. Axial vent hole; 3142. Radial vent hole; 315. Mounting section; 320. Adjusting nut; 330. Set screw;
[0032] 400. Corrugated pipe. Detailed Implementation
[0033] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.
[0034] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.
[0035] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0036] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0037] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.
[0038] like Figure 2 and Figure 3As shown, this embodiment provides a fine-tuning vacuum capacitor, which includes a vacuum chamber 100, an electrode assembly 200, and an adjustment assembly 300. The vacuum chamber 100 contains a vacuum cavity 101. The electrode assembly 200 is disposed within the vacuum cavity 101 and includes a first electrode ring group 210 and a second electrode ring group 220 coupled together. The adjustment assembly 300 includes an adjustment rod 310 and an adjustment nut 320. The adjustment rod 310 includes a connecting section 311, a through section 312, and an adjustment section 313 arranged sequentially. The connecting section 311 is connected to the first electrode ring group 210 or the second electrode ring group 220. The through section 312 passes through the vacuum chamber 100. The adjustment section 313 extends out of the vacuum chamber 100 and is threadedly connected to the adjustment nut 320. The adjustment nut 320 is rotatably disposed on the outer wall of the vacuum chamber 100. Twisting the adjustment nut 320 can change the coupling length of the first electrode ring group 210 and the second electrode ring group 220.
[0039] By setting an electrode assembly 200 inside the vacuum chamber 101 of the vacuum chamber 100, and simultaneously setting an adjustment assembly 300 that cooperates with both the vacuum chamber 100 and the electrode assembly 200, the coupling length of the first electrode ring group 210 and the second electrode ring group 220 is adjusted, thereby achieving the adjustment of the capacitance value of the fine-tuning vacuum capacitor. Specifically, since the connecting section 311 of the adjusting rod 310 is connected to the first electrode ring group 210 or the second electrode ring group 220, the through section 312 passes through the vacuum chamber 100, and the adjusting section 313 is threadedly connected to the adjusting nut 320, and since the adjusting nut 320 is rotatably set on the outer wall of the vacuum chamber 100, when the adjusting nut 320 is rotated, the adjusting rod 310 can drive the electrode ring group connected to it to move, thereby changing the coupling length. The design of the adjusting nut 320 increases the outer diameter of the adjusting rod 310, which helps to stabilize the position of the electrode ring assembly. Furthermore, placing the adjusting nut 320 externally allows the operator to directly adjust the capacitance by hand without additional tools, making the adjustment process simpler and more convenient. Additionally, the larger outer diameter of the adjusting nut 320 provides a larger operating area, reducing the likelihood of vibration during adjustment compared to other methods. Figure 1 The capacitance adjustment of the integrated fine-tuning ceramic vacuum capacitor shown in the prior art is more stable and controlled. The cooperation between the adjustment section 313 and the vacuum chamber 100 helps to limit the radial position of the adjustment rod 310, effectively avoiding sudden changes in capacitance adjustment caused by radial displacement of the adjustment rod 310.
[0040] Specifically, the electrode assembly 200 also includes a first mounting plate 230, which is disposed within the vacuum chamber 101 for mounting the first electrode ring assembly 210. For example, the connecting section 311 of the adjusting rod 310 is connected to the first mounting plate 230, and the capacitance value is changed by altering the positions of the first mounting plate 230 and the first electrode ring assembly 210. A bellows 400 is also disposed within the vacuum chamber 101, sleeved on the adjusting rod 310, with one end connected to the first mounting plate 230 and the other end sealed to the inner wall of the vacuum chamber 100. It is worth noting that the bellows 400 is configured to extend and retract along its axial direction, thereby adapting to changes in the distance between the first mounting plate 230 and the inner wall of the vacuum chamber 100 during capacitance adjustment. Meanwhile, the bellows 400 is sealed to the inner wall of the first mounting plate 230 and the vacuum chamber 100 to ensure the vacuum level of the space enclosed by the outer side of the bellows 400 and the inner side of the vacuum chamber 100.
[0041] In this embodiment, the adjusting rod 310 is also provided with an exhaust port 314, which is used to connect the outside world and the inside of the bellows 400. By providing the exhaust port 314, the air pressure in the space between the inside of the bellows 400 and the outside of the adjusting rod 310 is made consistent with atmospheric pressure, avoiding changes in the air pressure of this space due to the adjustment of the capacitance value. This reduces capacitance fluctuations caused by changes in the air pressure of this space and the torque value required for adjustment, making the capacitance value of the fine-tuning vacuum capacitor more stable and the capacitance adjustment process more labor-saving.
[0042] Optionally, the vent 314 includes an axial vent 3141 and a radial vent 3142 that are interconnected. The axial vent 3141 extends axially along the adjusting rod 310, and the radial vent 3142 extends radially along the adjusting rod 310. Segmenting the vent 314 facilitates manufacturing. The radial vent 3142 can be a single unit.
[0043] Preferably, multiple radial vent holes 3142 are provided, and all of the multiple radial vent holes 3142 are connected to the axial vent holes 3141. In addition, the multiple radial vent holes 3142 are evenly spaced along the radial direction of the adjusting rod 310.
[0044] In this embodiment, as Figure 1As shown, the vacuum chamber 100 includes a ceramic tube 110 and a first base 120 and a second base 130 respectively sealed at both ends of the ceramic tube 110. When only one set of the adjusting assembly 300 is provided, and the first electrode ring group 210 is provided on the first mounting plate, and the adjusting rod 310 is connected to the first mounting plate 230, the through section 312 is slidably connected to the first base 120. The first base 120 is used to limit the radial displacement of the adjusting rod 310. The adjusting nut 320 is rotatably provided on the outer wall of the first base 120, and the second electrode ring group 220 is fixedly provided on the second base 130. It can be understood that at this time, the adjusting assembly 300 adjusts the capacitance by adjusting the position of the first electrode ring group 210 relative to the second electrode ring group 220.
[0045] Specifically, to ensure the coaxiality between the first electrode ring group 210 and the second electrode ring group 220, a positioning ceramic shaft 240 is provided inside the first electrode ring group 210 and the second electrode ring group 220. One end of the positioning ceramic shaft 240 is fixedly connected to the second base 130, and the other end is slidably connected to the adjusting rod 310. Further, the end of the connecting section 311 of the adjusting rod 310 away from the through section 312 is provided with an installation section 315. The installation section 315 passes through the first mounting plate 230 and is slidably connected to the positioning ceramic shaft 240. The second base 130 is provided with a mounting platform 131 facing the first mounting plate 230. The mounting platform 131 is provided with a mounting groove, and the positioning ceramic shaft 240 is disposed in the mounting groove. In other embodiments, one end of the positioning ceramic shaft 240 may be fixedly connected to the adjusting rod 310, and the other end may be slidably connected to the second base 130. Alternatively, both ends of the positioning ceramic shaft 240 may be slidably connected to both the adjusting rod 310 and the second base 130. Those skilled in the art can make such settings according to actual needs, and no specific limitations are made here.
[0046] Optionally, the first base 120 and / or the second base 130 are provided with mounting threaded holes 121 for mounting the fine-tuning vacuum capacitor.
[0047] As an optional solution for fine-tuning vacuum capacitors, to ensure the adjusted capacitance value remains stable, the adjustment assembly 300 also includes a set screw 330. The set screw 330 passes through the side wall of the adjusting nut 320. After the capacitance adjustment is completed, the set screw 330 can be tightened to abut against the outer wall of the adjustment section 313, thereby fixing the position of the adjusting rod 310 relative to the adjusting nut 320. At this point, the adjusting nut 320 cannot be tightened, thus fixing the capacitance value. By setting the set screw 330, the fine-tuning vacuum capacitor can function as a fixed capacitor in the device circuit for a long time without changing its capacitance value, increasing the applicable scenarios for the fine-tuning vacuum capacitor.
[0048] Optionally, one set screw 330 may be provided. Preferably, multiple set screws 330 are provided to improve the tightening effect. More preferably, the multiple set screws 330 are evenly spaced along the axial direction of the adjusting nut 320, thereby making the capacitance value more stable.
[0049] In another alternative to the fine-tuning vacuum capacitor, such as Figure 3 As shown, the adjustment component 300 is provided in two sets, which are used to adjust the position of the first electrode ring group 210 and the second electrode ring group 220 relative to the vacuum chamber 100, thereby realizing the adjustment of the capacitance value. The setting of the two sets of adjustment components 300 makes the capacitance adjustment range of the fine-tuning vacuum capacitor wider, so users of the fine-tuning vacuum capacitor have more choices.
[0050] Specifically, the electrode assembly 200 includes not only a first mounting plate 230 connected to the first electrode ring group 210, but also a second mounting plate 250 connected to the second electrode ring group 220. The adjusting rod 310 of one set of adjusting components 300 is connected to the first mounting plate 230, and the adjusting rod 310 of the other set of adjusting components 300 is connected to the second mounting plate 250.
[0051] In this embodiment, the second base 130 is no longer provided. Both ends of the ceramic tube 110 of the vacuum chamber 100 are set as first bases 120. One end of the positioning ceramic shaft 240 is fixedly connected to the adjusting rod 310 of one set of adjusting components 300, and the other end is slidably connected to the adjusting rod 310 of another set of adjusting components 300. The two adjusting rods 310 are respectively inserted through the two first bases 120. In other embodiments, the two ends of the positioning ceramic shaft 240 can be movably connected to the two adjusting rods 310 respectively, which is not specifically limited here.
[0052] In summary, the aforementioned fine-tuning vacuum capacitor employs an external adjusting nut 320 and a set screw 330 design, making capacitance adjustment simpler and more convenient, and ensuring the capacitance remains unchanged after fixing. Specifically, firstly, the adjusting nut 320 is externally mounted on the fine-tuning vacuum capacitor, allowing direct manual operation without the need for additional tools; capacitance adjustment is more convenient, and the required torque is reduced by approximately 30%. Secondly, the set screw 330 is located on the outside of the adjusting nut 320. After capacitance adjustment, the set screw 330 is tightened to fix the capacitance value, ensuring greater stability. By using the set screw 330, the capacitance change rate before and after vibration is reduced by more than 20% under specified vibration test conditions, meeting the user's requirement for capacitance stability. Simultaneously, the adjusting rod 310 is bidirectionally positioned by the positioning ceramic shaft 240 and the base, ensuring stable and controlled capacitance adjustment. Furthermore, an vent hole 314 is provided on the positioning rod, further reducing the required torque for capacitance adjustment, making capacitance adjustment more effortless.
[0053] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of this utility model. The content of this specification should not be construed as a limitation of this utility model.
Claims
1. A fine-tuning vacuum capacitor, characterized in that, include: A vacuum chamber (100) is provided with a vacuum cavity (101) inside the vacuum chamber (100); An electrode assembly (200) is disposed within the vacuum chamber (101), and the electrode assembly (200) includes a first electrode ring group (210) and a second electrode ring group (220) coupled together. The adjustment assembly (300) includes an adjustment rod (310) and an adjustment nut (320). The adjustment rod (310) includes a connecting section (311), a through section (312), and an adjustment section (313) arranged sequentially. The connecting section (311) is connected to the first electrode ring group (210) or the second electrode ring group (220). The through section (312) passes through the vacuum chamber (100). The adjustment section (313) extends out of the vacuum chamber (100) and is threadedly connected to the adjustment nut (320). The adjustment nut (320) is rotatably disposed on the outer wall of the vacuum chamber (100). Tightening the adjustment nut (320) can change the coupling length of the first electrode ring group (210) and the second electrode ring group (220).
2. The fine-tuning vacuum capacitor according to claim 1, characterized in that, The electrode assembly (200) further includes a first mounting plate (230), and the first electrode ring assembly (210) is disposed on the first mounting plate (230); a bellows (400) is also disposed in the vacuum chamber (101), the bellows (400) is sleeved on the adjusting rod (310), the bellows (400) is axially telescopic, and one end is connected to the first mounting plate (230), and the other end is sealed to the inner wall of the vacuum chamber (100); the adjusting rod (310) is also provided with an exhaust hole (314), the exhaust hole (314) is used to connect the outside world and the inside of the bellows (400).
3. The fine-tuning vacuum capacitor according to claim 2, characterized in that, The vent (314) includes an axial vent (3141) and a radial vent (3142) that are interconnected. The axial vent (3141) extends axially along the adjusting rod (310), and the radial vent (3142) extends radially along the adjusting rod (310).
4. The fine-tuning vacuum capacitor according to claim 3, characterized in that, Multiple radial vent holes (3142) are provided, and all of the multiple radial vent holes (3142) are connected to the axial vent holes (3141).
5. The fine-tuning vacuum capacitor according to claim 2, characterized in that, The vacuum chamber (100) includes a ceramic tube (110) and a first base (120) and a second base (130) respectively disposed at both ends of the ceramic tube (110). The through section (312) is slidably connected to the first base (120). The adjusting nut (320) is rotatably disposed on the outer wall of the first base (120). The second electrode ring assembly (220) is disposed on the second base (130).
6. The fine-tuning vacuum capacitor according to claim 5, characterized in that, The first electrode ring group (210) and the second electrode ring group (220) are provided with a positioning ceramic shaft (240). One end of the positioning ceramic shaft (240) is fixedly connected to the second base (130), and the other end is slidably connected to the adjusting rod (310).
7. The fine-tuning vacuum capacitor according to claim 1, characterized in that, The adjustment assembly (300) also includes a set screw (330) which passes through the side wall of the adjustment nut (320) and abuts against the outer wall of the adjustment section (313).
8. The fine-tuning vacuum capacitor according to claim 7, characterized in that, Multiple set screws (330) are provided, and the multiple set screws (330) are evenly spaced along the axial direction of the adjusting nut (320).
9. The fine-tuning vacuum capacitor according to claim 1, characterized in that, The adjustment assembly (300) is provided in two sets. The electrode assembly (200) further includes a first mounting plate (230) and a second mounting plate (250). The first electrode ring group (210) is disposed on the first mounting plate (230), and the second electrode ring group (220) is disposed on the second mounting plate (250). The adjustment rod (310) of one set of the adjustment assembly (300) is connected to the first mounting plate (230), and the adjustment rod (310) of the other set of the adjustment assembly (300) is connected to the second mounting plate (250).
10. The fine-tuning vacuum capacitor according to claim 9, characterized in that, The first electrode ring group (210) and the second electrode ring group (220) are provided with positioning ceramic shafts (240). One end of the positioning ceramic shaft (240) is fixedly connected to the adjusting rod (310) of one of the adjusting components (300), and the other end is slidably connected to the adjusting rod (310) of another adjusting component (300).