A slag hanging structure and a single crystal furnace

Abstract

The utility model provides a kind of slinger structure and single crystal furnace, the slinger structure includes graphite chuck, seed crystal and silicon rod, the graphite chuck top is opened with connecting groove along axial direction, the connecting groove below is opened with the installation slot that penetrates graphite chuck bottom along axial direction, graphite chuck side wall is equipped with the clamping post that can be moved and pass into the installation slot along radial direction;The seed crystal upper side is opened with the clamping groove, and lower end section is inverted T character shape;The section of the silicon rod is symmetrical double shoulder shape;Wherein, the installation slot is compatible with the upper end of seed crystal;The center of silicon rod is opened with the insertion slot that section is inverted T character shape, and the insertion slot is compatible with the lower end of seed crystal;The single crystal furnace passes through silicon rod and graphite chuck in turn from bottom to top with seed crystal, utilizes clamping post and fixes seed crystal on graphite chuck, shoulder-shaped silicon rod is lifted directly by simple structure and is slingered, cancels temperature adjustment, crystal pulling and shoulder process, effectively shortens slinger time, to improve single crystal yield.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth technology, and in particular to a slag-hanging structure and a single crystal furnace. Background Technology

[0002] To increase the yield of crystals produced by crystal growth equipment, silicon is added to the crucible again using a secondary feeding tube after the initial addition of silicon. However, the secondary feeding tube is usually made of quartz. During use, the secondary feeding tube, made of quartz, is prone to breakage. After the secondary feeding tube breaks, the quartz particles produced fall into the molten metal and float on the surface. As a result, when the crystal rod is pulled, the quartz particles and other slag tend to adhere to the pulled crystal rod, which can easily affect the quality of the crystal rod. Therefore, it is necessary to remove the quartz particles and other slag floating on the surface of the molten metal.

[0003] Traditional slag removal methods require three steps: temperature control, crystal development, and shoulder formation. After the shoulder is enlarged, it is lifted out and then immersed in liquid to allow crystallization before being lifted out again. This method is time-consuming and affects the yield of single crystals. Therefore, it is necessary to propose a slag removal structure that reduces the slag removal time to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a slag-lifting structure and a single crystal furnace to solve the problem that the traditional slag-lifting method mentioned in the background art requires three processes: temperature adjustment, crystal introduction, and shoulder formation. After the shoulder is enlarged, it is lifted and then immersed in liquid to allow the liquid surface to crystallize before being lifted again. This method is time-consuming and thus affects the yield of single crystals.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A slag-lifting structure, comprising: A graphite chuck, wherein a connecting groove is formed on the top of the graphite chuck along the axial direction, and an installation groove is formed below the connecting groove along the axial direction, penetrating the bottom of the graphite chuck; Seed crystal, wherein the upper side of the seed crystal has a locking groove and the lower end cross section is an inverted T-shape; A silicon rod, wherein the cross-section of the silicon rod is symmetrical and double-shouldered; The mounting groove is adapted to the upper end of the seed crystal; The silicon rod has an inverted T-shaped insertion slot at its center, which is adapted to the lower end of the seed crystal. The graphite chuck sidewall is provided with a snap-fit ​​post that can be movably inserted into the mounting groove along the radial direction.

[0006] Preferably, the top of the silicon rod has a groove circumferentially formed.

[0007] Preferably, the engaging groove has a engaging hole that is adapted to the engaging post.

[0008] Preferably, the groove surface of the engaging groove is an inclined surface.

[0009] A single crystal furnace, comprising the slag-hanging structure as described in any of the above claims.

[0010] Preferably, the furnace body is also included, wherein a lifting head, a guide tube, a crucible and an exhaust pipe are arranged sequentially from top to bottom inside the furnace body, a graphite seat is connected below the lifting head, and a heater is provided on the outside of the crucible.

[0011] Preferably, the connecting groove is provided with an internal thread, and the bottom of the graphite seat is provided with an external thread that matches the internal thread.

[0012] Preferably, the graphite base is fixedly connected to the lifting head by a tungsten wire rope.

[0013] Compared with existing technologies, the advantages of this invention are as follows: the seed crystal passes sequentially from bottom to top through the insertion slot on the silicon rod and the mounting slot on the graphite chuck, and is fixed to the graphite chuck using snap-fit ​​posts. This simple structure allows the shoulder-shaped silicon rod to be lifted directly for slag removal, eliminating the steps of temperature adjustment, crystal pulling, and shoulder formation, effectively shortening the slag removal time. This slag removal structure in the single crystal furnace is not only easy to operate but also effectively shortens the slag removal time, thereby increasing single crystal yield. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the overall structure of the slag-lifting structure proposed in this embodiment of the utility model; Figure 2 This is a schematic diagram of the assembly of the graphite chuck and the seed crystal according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of the single crystal furnace proposed in an embodiment of this utility model.

[0016] Reference numerals: 10, graphite chuck; 101, connecting groove; 102, mounting groove; 20, seed crystal; 201, locking groove; 30, silicon rod; 301, insertion groove; 302, recess; 40, locking post; 50, furnace body. Detailed Implementation

[0017] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0018] In the description of this utility model, it should be understood that the terms "center", "upper", "lower", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0019] In this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0020] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0021] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0022] like Figures 1-2As shown, this utility model embodiment provides a slag-lifting structure, including a graphite chuck 10, a seed crystal 20, and a silicon rod 30. The graphite chuck 10 has a connecting groove 101 on its top along the axial direction, and an installation groove 102 extending through the bottom of the graphite chuck 10 along the axial direction below the connecting groove 101. The sidewall of the graphite chuck 10 has a locking post 40 that can be movably inserted into the installation groove 102 along the radial direction. The seed crystal 20 has a locking groove 201 on its upper side, and its lower end has an inverted T-shaped cross-section. The silicon rod 30 has a symmetrical double-shoulder cross-section. The installation groove 102 is adapted to the upper end of the seed crystal 20. The silicon rod 30 has an insertion groove 301 with an inverted T-shaped cross-section in its center, which is adapted to the lower end of the seed crystal 20.

[0023] In use, the seed crystal 20 is passed sequentially from bottom to top through the insertion slot 301 on the silicon rod 30 and the mounting slot 102 on the graphite chuck 10, so that the lower end of the seed crystal 20 engages with the insertion slot 301 and the upper end of the seed crystal 20 is inserted into the mounting slot 102. Then, the locking post 40 is pushed into the locking groove 201, thereby fixing the seed crystal 20 on the graphite chuck 10 and lifting the shoulder-shaped silicon rod 30 to achieve deslagging. This deslagging structure has a simple overall structure, eliminating the processes of temperature adjustment, crystal pulling, and shoulder formation, effectively shortening the deslagging time.

[0024] The slag is mainly held by the shoulder-shaped silicon rod 30 to trap impurities. In order to trap more impurities, the top circumferential groove 302 of the silicon rod 30 is provided to increase the liquid loading capacity and thus lift more impurities.

[0025] To ensure the stability of fixing the seed crystal 20, a snap-fit ​​hole is provided on the snap-fit ​​groove 201. The snap-fit ​​hole is adapted to the snap-fit ​​post 40. When in use, the snap-fit ​​post 40 is pushed into the snap-fit ​​hole on the snap-fit ​​groove 201 to ensure the fixation of the seed crystal 20.

[0026] When there is a gap between the upper end of the seed crystal 20 and the mounting groove 102, the groove surface of the locking groove 201 is inclined to prevent the seed crystal 20 from shaking.

[0027] It is important to note that during the slag removal process, care must be taken to avoid collisions between the seed crystal 20 and the silicon rod 30, which could lead to the breakage of the seed crystal 20.

[0028] like Figure 3 As shown in the figure, this utility model embodiment also provides a single crystal furnace, including the slag-lifting structure described in any of the above embodiments. Using this slag-lifting structure in the single crystal furnace not only facilitates operation but also effectively shortens the slag-lifting time, thereby increasing single crystal yield.

[0029] In addition, the single crystal furnace also includes a furnace body 50, which contains a lifting head, a flow guide tube, a crucible and an exhaust pipe arranged from top to bottom. A graphite seat is connected below the lifting head, and a heater is provided on the outside of the crucible.

[0030] To facilitate operation and ensure the connection stability between the graphite chuck 10 and the graphite seat, the connecting groove 101 is provided with an internal thread, and the bottom of the graphite seat is provided with an external thread that matches the internal thread.

[0031] Specifically, the graphite base is fixedly connected to the lifting head by a tungsten wire rope. The tungsten wire rope, with its good corrosion resistance and tensile strength, can ensure the stability of the graphite base and the slag lifting structure.

[0032] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A slag-lifting structure, characterized in that, include: A graphite chuck (10) has a connecting groove (101) on its top along the axial direction, and an installation groove (102) that penetrates the bottom of the graphite chuck (10) is provided below the connecting groove (101) along the axial direction. Seed crystal (20), wherein a locking groove (201) is provided on the upper side of the seed crystal (20), and the lower end cross section is an inverted T-shape; Silicon rod (30), the cross-section of which is symmetrical double-shoulder shape; The mounting groove (102) is adapted to the upper end of the seed crystal (20); The silicon rod (30) has an insertion slot (301) with an inverted T-shaped cross section at its center, and the insertion slot (301) is adapted to the lower end of the seed crystal (20). The graphite chuck (10) has a snap-fit ​​post (40) on its side wall that can be movably inserted into the mounting groove (102) along the radial direction.

2. The slag-lifting structure according to claim 1, characterized in that: The silicon rod (30) has a groove (302) circumferentially formed on its top.

3. The slag-lifting structure according to claim 1, characterized in that: The engaging groove (201) is provided with a engaging hole, which is adapted to the engaging post (40).

4. The slag-lifting structure according to claim 1, characterized in that: The groove surface of the engagement groove (201) is an inclined surface.

5. A single crystal furnace, characterized in that, Includes the slag-lifting structure as described in any one of claims 1-4.

6. The single crystal furnace according to claim 5, characterized in that, It also includes a furnace body (50), in which a lifting head, a guide tube, a crucible and an exhaust tube are arranged sequentially from top to bottom inside the furnace body (50). A graphite seat is connected below the lifting head, and a heater is provided on the outside of the crucible.

7. The single crystal furnace according to claim 6, characterized in that: The connecting groove (101) is provided with an internal thread, and the bottom of the graphite seat is provided with an external thread that matches the internal thread.

8. The single crystal furnace according to claim 6, characterized in that: The graphite base is fixedly connected to the lifting head by a tungsten wire rope.

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