A multilayer filter cartridge assembly for a photoresist filter

Abstract

This utility model relates to the field of photoresist filtration technology and provides a multi-layer filter element assembly for a photoresist filter, including a housing; a discharge pipe fixedly connected to one side of the bottom end of the housing, and a feed pipe fixedly connected to the other side of the top end of the housing; an installation groove opened at the middle position of the bottom end of the housing; a sealing plate movably connected to the bottom end of the housing; a threaded disc with a threaded engagement with the internal thread fixedly connected to the top of the sealing plate; a first filter element, a second filter element, and a third filter element sequentially arranged on the top of the threaded disc; and a guide platform fixedly connected to the upper end of the inner wall of the housing. The multi-layer filter element assembly for a photoresist filter provided by this solution utilizes the first, second, and third filter elements to achieve multi-layer filtration of photoresist, ensuring filtration effect. Furthermore, the threaded engagement between the threaded disc and the internal thread facilitates the disassembly and cleaning of the first, second, and third filter elements, improving its practicality.

Description

Technical Field

[0001] This utility model belongs to the field of photoresist filtration technology, and in particular relates to a multilayer filter element assembly for a photoresist filter. Background Technology

[0002] During chip manufacturing, impurities may be present in the photoresist due to various reasons. If these impurities are not removed in time, the quality of the photoresist will be reduced, thereby affecting the quality of the chip. Therefore, appropriate photoresist filters are needed to remove particulate impurities from the photoresist and ensure the purity of the photoresist solution.

[0003] Chinese patent discloses a transplanting device for forestry afforestation, publication number CN219897261U. The paper proposes "a photoresist filtering mechanism, including a filter, a filter element disposed inside the filter, and a filter residue cleaning mechanism disposed inside the filter element; the filter residue cleaning mechanism includes a scraper plate, the scraper plate is connected to a rotary motor through a drive shaft; the scraper plate adopts a torsion structure, and by torsion in a direction that matches the rotation direction of the rotary motor, it can achieve the effect of automatically scraping the filter residue clogging the filter element, while also directionally collecting the filter residue to the bottom of the filter, so as to facilitate the uniform discharge of the filter residue."

[0004] However, the above-mentioned filtration method is relatively simple, using only one filter element, which cannot completely filter out photoresist particles and impurities. At the same time, the filter element itself is inconvenient to disassemble and install, making it difficult to thoroughly disassemble, clean, or maintain and replace. Therefore, it is necessary to design a multi-layer filter element assembly for photoresist filters. Utility Model Content

[0005] This invention provides a multi-layer filter element assembly for photoresist filters, aiming to solve the problem that some currently used filter element assemblies are inconvenient for multi-layer filtration.

[0006] This utility model is implemented as follows: a multi-layer filter element assembly for a photoresist filter includes a housing; a discharge pipe fixedly connected to one side of the bottom end of the housing, and a feed pipe fixedly connected to the other side of the top end of the housing; a mounting groove opened at the middle position of the bottom end of the housing, the inner wall of the mounting groove having an internal thread; a sealing plate movably connected to the bottom end of the housing, the top of the sealing plate being fixedly connected to a threaded disc that is threadedly engaged with the internal thread, the top of the threaded disc being sequentially provided with a first filter element, a second filter element, and a third filter element; a guide platform fixedly connected to the upper end of the inner wall of the housing; a reduction motor fixedly connected to the middle position of the top end of the housing, the output end of the reduction motor being fixedly connected to a rotating rod extending to the lower end of the housing interior via a coupling, the bottom end of the rotating rod being provided with a positioning seat, and a cleaning plate being fixedly connected to one side of the surface of the positioning seat.

[0007] Preferably, a sealing ring is fixedly connected to the upper end of the surface of the threaded disc, and the sealing ring is O-shaped.

[0008] Preferably, the cross-sectional shape of the threaded disc is convex, and the bottom end of the threaded disc and the top end of the sealing plate are welded together as an integral structure.

[0009] Preferably, the top of the threaded disc is provided with slots at equal intervals on one side, and the bottom of the first filter element, the second filter element and the third filter element are fixedly connected with a block that engages with the inside of the slot. The slots and blocks are convex in shape.

[0010] Preferably, a rotating frame is fixedly connected to the bottom end of the sealing plate, and the bottom end of the sealing plate is cross-shaped.

[0011] Preferably, an installation structure is provided between the rotating rod and the positioning seat. The installation structure is used to realize the assembly and disassembly of the rotating rod and the positioning seat. The installation structure includes: a positioning block welded to the bottom end of the rotating rod, with a bolt hole at the middle position of the bottom end of the positioning block; a positioning groove formed in the inner wall of the positioning seat, with a fixing bolt movably connected to the bottom end of the positioning seat and passing through the lower end of the positioning seat. The top end of the fixing bolt and the inside of the bolt hole form a threaded engagement structure.

[0012] Preferably, the positioning block and the positioning groove form an engaging structure, and the positioning block and the positioning groove are cross-shaped.

[0013] Preferably, the cleaning plate is L-shaped, and one side of the cleaning plate is arc-shaped.

[0014] Preferably, the inner wall of the guide platform is funnel-shaped, and the area of ​​the cross-sectional opening at the bottom of the guide platform is smaller than the area of ​​the cross-sectional opening at the top of the third filter element.

[0015] Preferably, a scraper is fixedly connected to the upper end of the rotating rod surface, and the surface of the scraper is in contact with the inner wall of the guide table.

[0016] Compared with related technologies, the multilayer filter element assembly of the photoresist filter provided by this utility model has the following beneficial effects: 1. The photoresist is filtered through a triple system of first, second, and third filters, improving the filtration effect and ensuring the purity of the photoresist. The threaded engagement between the threaded disc and the internal thread facilitates the removal of the first, second, and third filters for disassembly, cleaning, and removal of filtered impurities. Furthermore, the locking mechanism allows for the replacement of damaged first, second, and third filters, avoiding the cumbersome and inconvenient process of replacing the entire system after individual damage, thus reducing maintenance costs and enhancing practicality.

[0017] 2. By utilizing the engagement between the positioning block and the positioning groove, and the threaded engagement between the fixing bolt and the bolt hole, quick assembly and disassembly between the positioning seat and the rotating rod can be achieved. This facilitates the sliding removal of the cleaning plate for cleaning or maintenance and replacement, thus improving its practicality. Attached Figure Description

[0018] Figure 1 This is a front view cross-sectional structural diagram of the present invention; Figure 2 This is a front view structural diagram of the present utility model; Figure 3 This is an exploded view of the first, second, and third filter elements of this utility model; Figure 4 This is an exploded enlarged cross-sectional view of the rotating rod and cleaning plate of this utility model. Figure 5 This is an exploded view of a partial cross-sectional structure of the threaded disc and mounting groove of this utility model.

[0019] In the diagram: 1. Feed pipe; 2. Scraper; 3. Guide platform; 4. First filter element; 5. Second filter element; 6. Third filter element; 7. Sealing plate; 8. Rotating frame; 9. Discharge pipe; 10. Threaded disc; 11. Housing; 12. Rotating rod; 13. Gear motor; 14. Sealing ring; 15. Slot; 16. Locking block; 17. Positioning block; 18. Bolt hole; 19. Fixing bolt; 20. Positioning groove; 21. Positioning seat; 22. Cleaning plate; 23. Internal thread; 24. Mounting groove. Detailed Implementation

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.

[0021] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0022] Example 1 A preferred embodiment of the multilayer filter element assembly of the photoresist filter provided by this utility model is, for example... Figures 1 to 5 As shown: A multilayer filter element assembly for a photoresist filter includes a housing 11; a discharge pipe 9 fixedly connected to one side of the bottom end of the housing 11, and a feed pipe 1 fixedly connected to the other side of the top end of the housing 11; a mounting groove 24 opened at the middle position of the bottom end of the housing 11, the inner wall of the mounting groove 24 having an internal thread 23, a sealing plate 7 movably connected to the bottom end of the housing 11, a threaded disc 10 with a threaded engagement with the internal thread 23 fixedly connected to the top of the sealing plate 7, and a first filter element 4, a second filter element 5 and a third filter element 6 sequentially arranged at the top of the threaded disc 10; a guide platform 3 fixedly connected to the upper end of the inner wall of the housing 11, a reduction motor 13 fixedly connected to the middle position of the top end of the housing 11, the output end of the reduction motor 13 being fixedly connected to a rotating rod 12 extending to the lower end of the interior of the housing 11 via a coupling, a positioning seat 21 being provided at the bottom end of the rotating rod 12, and a cleaning plate 22 fixedly connected to one side of the surface of the positioning seat 21.

[0023] It should be noted that some existing multi-layer filter cartridges for photoresist filters still have certain shortcomings in actual use. Their filtration method is relatively simple, using only one filter cartridge, which cannot thoroughly filter out photoresist particles and impurities. At the same time, the filter cartridge itself is inconvenient to disassemble and install, making it difficult to thoroughly disassemble, clean, or maintain and replace it.

[0024] In this embodiment, photoresist is added into the housing 11 through the feed pipe 1 and guided by the guide platform 3 to flow into the third filter element 6. Initial filtration occurs through the third filter element 6, followed by secondary filtration through the second filter element 5, and finally tertiary filtration through the first filter element 4. The residue is then discharged through the discharge pipe 9. During filtration, the reduction motor 13 drives the rotating rod 12 to rotate slowly, which in turn drives the scraper 2 to rotate. This effectively reduces photoresist residue on the inner wall of the guide platform 3. Since the third filter element 6 is the first filter, it will produce significant impurities. The rotation of the rotating rod 12 drives the positioning seat 21 and cleaning plate 22 to rotate, thus scraping off impurities from the inner wall of the third filter element 6 and preventing clogging that could affect its filtration efficiency. After filtration is complete, the rotating frame 8 can be rotated to rotate the sealing plate 7, causing the threaded disc... Rotate 10 until it is completely disengaged from the inside of the mounting groove 24, so that the first filter element 4, the second filter element 5, and the third filter element 6 can be removed for easy cleaning. At the same time, if individual first filter elements 4, second filter elements 5, or third filter elements 6 are damaged, the corresponding first filter element 4, second filter element 5, and third filter element 6 can be pulled with more force to disengage the locking block 16 from the inside of the locking groove 15, so that the damaged ones can be replaced independently, reducing maintenance costs. During installation, the locking block 16 is used to engage with the inside of the locking groove 15 to achieve the engagement between the first filter element 4, second filter element 5, and third filter element 6 and the threaded disc 10. Then, it is placed into the housing 11 through the mounting groove 24. At the same time, the threaded engagement between the threaded disc 10 and the internal thread 23 is used to achieve a firm tightening installation of the threaded disc 10, and the sealing ring 14 is used to ensure the sealing between the threaded disc 10 and the mounting groove 24 after tightening.

[0025] In a further preferred embodiment of the present invention, a sealing ring 14 is fixedly connected to the upper end of the surface of the threaded disc 10, and the sealing ring 14 is O-shaped.

[0026] In this embodiment, the sealing performance of the threaded disc 10 after it is screwed into the mounting groove 24 is improved by using the O-ring 14.

[0027] In a further preferred embodiment of the present invention, the cross-sectional shape of the threaded disc 10 is convex, and the bottom end of the threaded disc 10 and the top end of the sealing plate 7 are welded together as an integral structure.

[0028] In a further preferred embodiment of the present invention, slots 15 are provided at equal intervals on one side of the top of the threaded disc 10, and a block 16 is fixedly connected to one side of the bottom of the first filter element 4, the second filter element 5 and the third filter element 6, which engages with the inside of the slot 15. The slots 15 and the block 16 are convex in shape.

[0029] In this embodiment, by utilizing the engagement between the card block 16 and the card slot 15, the corresponding damaged first filter element 4, second filter element 5 and third filter element 6 can be replaced, avoiding the cumbersome inconvenience of replacing the whole after individual damage and reducing its maintenance cost.

[0030] In a further preferred embodiment of this utility model, a rotating frame 8 is fixedly connected to the bottom end of the sealing plate 7, and the bottom end of the sealing plate 7 is cross-shaped.

[0031] In this embodiment, a cross-shaped rotating frame 8 is used to facilitate the rotation of the sealing plate 7 and the threaded disc 10.

[0032] Example 2 Based on Example 1, a preferred embodiment of the multilayer filter element assembly of the photoresist filter provided by this utility model is as follows: Figures 1 to 5 As shown: An installation structure is provided between the rotating rod 12 and the positioning seat 21. The installation structure is used to realize the assembly and disassembly of the rotating rod 12 and the positioning seat 21. The installation structure includes: a positioning block 17 welded to the bottom end of the rotating rod 12, and a bolt hole 18 is opened at the middle position of the bottom end of the positioning block 17; a positioning groove 20 opened in the inner wall of the positioning seat 21; a fixing bolt 19 movably connected to the bottom end of the positioning seat 21 and passing through the lower end of the positioning seat 21; the top of the fixing bolt 19 and the inside of the bolt hole 18 form a threaded engagement structure.

[0033] In this embodiment, after the first filter element 4, the second filter element 5, and the third filter element 6 are removed, the fixing bolt 19 can be rotated with a screwdriver or other tools until it is completely disengaged from the bolt hole 18. Then, the positioning seat 21 is pulled down so that the positioning block 17 is completely disengaged from the positioning groove 20. This allows the cleaning plate 22 to be slid off, facilitating the disassembly, cleaning, or maintenance of the cleaning plate 22. During installation, the positioning seat 21 is placed on the positioning block 17, and the fixing bolt 19 is tightened into the bolt hole 18.

[0034] In a further preferred embodiment of the present invention, the positioning block 17 and the positioning groove 20 form an engaging structure, and the positioning block 17 and the positioning groove 20 are cross-shaped.

[0035] In this embodiment, the engagement between the cross-shaped positioning block 17 and the positioning groove 20 is used to improve the firmness and stability of the engagement installation.

[0036] In a further preferred embodiment of this utility model, the cleaning plate 22 is L-shaped, and one side of the cleaning plate 22 is arc-shaped.

[0037] In this embodiment, an L-shaped and arc-shaped cleaning plate 22 is used to facilitate scraping and cleaning of the inside of the third filter element 6.

[0038] In a further preferred embodiment of this utility model, the inner wall of the guide platform 3 is funnel-shaped, and the area of ​​the cross-sectional opening at the bottom of the guide platform 3 is smaller than the area of ​​the cross-sectional opening at the top of the third filter element 6.

[0039] In this embodiment, the funnel-shaped guide platform 3 is used to facilitate the guidance of the photoresist, making it more concentrated and entering the interior of the third filter element 6.

[0040] In a further preferred embodiment of this utility model, a scraper 2 is fixedly connected to the upper end of the surface of the rotating rod 12, and the surface of the scraper 2 is in contact with the inner wall of the guide table 3.

[0041] In this embodiment, the scraper 2 is used to scrape the inner wall of the guide stage 3 to reduce the adhesion and residue of photoresist on the inner wall of the guide stage 3.

[0042] In summary, the use of the first filter element 4, the second filter element 5, and the third filter element 6 facilitates triple filtration of photoresist, improving the photoresist filtration effect. Furthermore, the threaded engagement between the threaded disc 10 and the internal thread 23 allows for easy removal of the first filter element 4, the second filter element 5, and the third filter element 6 for cleaning and clogging after filtration is completed.

[0043] It is worth noting that the circuits, electronic components, and modules involved in this utility model are all existing technologies, which can be fully implemented by those skilled in the art, and need not be elaborated upon. The content protected by this utility model does not involve any improvement to the software and methods.

[0044] It should be understood that the disclosed apparatus can be implemented in other ways, given the several embodiments provided in this application. For example, the apparatus embodiments described above are merely illustrative; the division of units described above is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or communication connections shown or discussed may be through some interfaces; the indirect coupling or communication connections between devices or units may be telecommunications or other forms.

[0045] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Although this utility model has been described in detail with reference to the above embodiments, those skilled in the art can still combine, add, delete, or otherwise adjust the features of the various embodiments of this utility model according to the circumstances without conflict or creative effort, thereby obtaining different technical solutions that do not fundamentally depart from the concept of this utility model. These technical solutions are also within the scope of protection of this utility model.

Claims

1. A multilayer filter element assembly for a photoresist filter, characterized in that, include: Box (11); A discharge pipe (9) is fixedly connected to one side of the bottom end of the box (11), and a feed pipe (1) is fixedly connected to the other side of the top end of the box (11). An installation groove (24) is provided at the middle position of the bottom end of the box (11). The inner wall of the installation groove (24) is provided with an internal thread (23). A sealing plate (7) is movably connected to the bottom end of the box (11). A threaded disc (10) that is threaded with the internal thread (23) is fixedly connected to the top end of the sealing plate (7). A first filter element (4), a second filter element (5) and a third filter element (6) are arranged sequentially on the top end of the threaded disc (10). A guide platform (3) is fixedly connected to the upper end of the inner wall of the box (11). A geared motor (13) is fixedly connected to the middle position of the top of the box (11). The output end of the geared motor (13) is fixedly connected to a rotating rod (12) extending to the lower end of the box (11) through a coupling. A positioning seat (21) is provided at the bottom end of the rotating rod (12). A cleaning plate (22) is fixedly connected to one side of the surface of the positioning seat (21).

2. The multilayer filter element assembly of the photoresist filter as described in claim 1, characterized in that, A sealing ring (14) is fixedly connected to the upper end of the surface of the threaded disc (10), and the sealing ring (14) is O-shaped.

3. The multilayer filter element assembly of the photoresist filter as described in claim 1, characterized in that, The cross-section of the threaded disc (10) is convex, and the bottom end of the threaded disc (10) and the top end of the sealing plate (7) are welded together as an integral structure.

4. The multilayer filter element assembly of the photoresist filter as described in claim 1, characterized in that, The threaded disc (10) has slots (15) evenly spaced on one side of its top end. The first filter element (4), the second filter element (5) and the third filter element (6) are fixedly connected to one side of their bottom ends with a block (16) that engages with the inside of the slot (15). The slots (15) and the blocks (16) are convex in shape.

5. The multilayer filter element assembly of the photoresist filter as described in claim 1, characterized in that, The bottom end of the sealing plate (7) is fixedly connected to a rotating frame (8), and the bottom end of the sealing plate (7) is cross-shaped.

6. The multilayer filter element assembly of the photoresist filter as described in claim 1, characterized in that, An installation structure is provided between the rotating rod (12) and the positioning seat (21). The installation structure is used to realize the disassembly and assembly of the rotating rod (12) and the positioning seat (21). The installation structure includes: A positioning block (17) is welded to the bottom end of the rotating rod (12), and a bolt hole (18) is provided at the middle position of the bottom end of the positioning block (17). A positioning groove (20) is formed in the inner wall of the positioning seat (21). A fixing bolt (19) that passes through the lower end of the positioning seat (21) is movably connected to the bottom end of the positioning seat (21). The top end of the fixing bolt (19) and the inside of the bolt hole (18) form a threaded fit structure.

7. The multilayer filter element assembly of the photoresist filter as described in claim 6, characterized in that, The positioning block (17) and the positioning groove (20) form an engaging structure, and the positioning block (17) and the positioning groove (20) are cross-shaped.

8. The multilayer filter element assembly of the photoresist filter as described in claim 1, characterized in that, The cleaning plate (22) is L-shaped, and one side of the cleaning plate (22) is arc-shaped.

9. The multilayer filter element assembly of the photoresist filter as described in claim 1, characterized in that, The inner wall of the guide platform (3) is funnel-shaped, and the area of ​​the cross-section of the bottom opening of the guide platform (3) is smaller than the area of ​​the cross-section of the top opening of the third filter element (6).

10. The multilayer filter element assembly of the photoresist filter as described in claim 1, characterized in that, A scraper (2) is fixedly connected to the upper end of the rotating rod (12), and the surface of the scraper (2) is in contact with the inner wall of the guide table (3).

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