Magnetic field assisted permeation device and coating equipment

Abstract

This application relates to a magnetic field-assisted diffusion device and a coating equipment. The magnetic field-assisted diffusion device, used to generate a magnetic field to assist the diffusion process, includes: a fixing member configured to extend in at least a first direction; and a plurality of magnetic units, each connected to the fixing member, arranged along the first direction; wherein each magnetic unit is connected to the fixing member via an adjustment mechanism, the adjustment mechanism being configured to allow a single magnetic unit to move in a second direction intersecting the first direction, thereby adjusting the relative position between the magnetic unit and the fixing member, and thus changing the magnetic field distribution formed by the plurality of magnetic units. The magnetic field-assisted diffusion device and coating equipment provided by this application can achieve flexible optimization of the magnetic field distribution to adapt to the diffusion requirements of different workpieces and improve process controllability, and can integrate plasma carburizing and magnetron sputtering coating into the same equipment to reduce production equipment costs.

Description

Technical Field

[0001] This application relates to the field of material surface treatment technology, and in particular to a magnetic field-assisted diffusion device and coating equipment. Background Technology

[0002] In the field of metal surface treatment, diffusion techniques (such as carburizing and nitriding) form a reinforcing layer by diffusing active atoms into the matrix, which is a key process for improving the hardness, wear resistance, and corrosion resistance of materials. Among existing technologies, magnetic field-assisted plasma carburizing is a relatively advanced heat treatment technology. It improves the uniformity of the carburized layer and the diffusion efficiency by applying an external magnetic field and using Lorentz force or magnetic domain effect to control the movement trajectory of active particles.

[0003] However, existing magnetic units in magnetic field-assisted plasma carburizing mostly employ fixed array structures, and their magnetic field distribution is limited by the initial design, making it difficult to dynamically adjust according to the workpiece shape, size, or process parameters. Furthermore, for some workpieces requiring both carburizing and sputtering coating, the different control conditions necessitate the use of separate carburizing and sputtering equipment, resulting in higher production costs.

[0004] Therefore, it is necessary to propose a new technical solution to overcome the shortcomings of existing technologies. Utility Model Content

[0005] Based on this, this application provides a magnetic field-assisted diffusion device and coating equipment, which can flexibly optimize the magnetic field distribution to adapt to the diffusion requirements of different workpieces and improve process controllability, and can integrate plasma carburizing and magnetron sputtering coating into the same equipment to reduce production equipment costs.

[0006] Therefore, this application adopts the following technical solution: a magnetic field-assisted diffusion device for generating a magnetic field to assist the diffusion process, the magnetic field-assisted diffusion device comprising:

[0007] The fastener is configured to extend at least in a first direction; and

[0008] Multiple magnetic units are respectively connected to the fixing member, and the multiple magnetic units are arranged along the first direction;

[0009] Each of the magnetic units is connected to the fixing member via an adjustment mechanism, which is configured to allow a single magnetic unit to move in a second direction intersecting the first direction, so as to adjust the relative position between the magnetic unit and the fixing member, thereby changing the magnetic field distribution formed by the plurality of magnetic units.

[0010] In some embodiments, the adjustment mechanism includes a recess on one of the fixing member and each magnetic unit and a protrusion on the other, the protrusion being inserted into the recess and capable of sliding within the recess.

[0011] In some embodiments, the adjustment mechanism includes a locking member, the fixing member is provided with a locking hole for the locking member to be inserted, and the insertion protrusion is provided with a plurality of connecting holes arranged along the second direction. One of the plurality of connecting holes corresponds to the locking hole, and the locking member passes through the connecting hole and the locking hole to fix the magnetic unit to the fixing member.

[0012] In some embodiments, the adjusting mechanism includes a locking member, and the fixing member is provided with a locking hole for the locking member to be inserted. The locking hole includes a screw section with internal threads. The locking member includes a pin for passing through the screw section to be inserted into the connecting hole, and a stud section that is threadedly engaged with the internal threads of the screw section. The screw section and the stud section are threadedly engaged.

[0013] In some embodiments, the fastener includes a hollow tube with a through hole extending through it in the second direction, forming the insertion recess, and the insertion protrusion is an insertion post that matches the through hole, with one end of the insertion post fixed to the magnetic unit.

[0014] In some embodiments, each of the magnetic units includes a mounting base, a magnet fixed to the mounting base, and a baffle covering the magnet.

[0015] In some embodiments, each of the magnetic units includes a plurality of magnets arranged side by side, wherein the magnetic poles of the plurality of magnets in the same row at the same end are arranged alternately as N poles and S poles.

[0016] In some embodiments, each magnetic unit includes a plurality of magnets arranged in a plane, and the baffle is a flat plate corresponding to the plane; or, each magnetic unit includes a plurality of magnets arranged in an arc shape, and the baffle is an arc-shaped plate corresponding to the arc shape.

[0017] This application also adopts the following technical solution: a coating equipment that can be used for plasma carburizing and magnetron sputtering coating, the coating equipment including a fixed frame, a rotating frame and a magnetic field-assisted diffusion device as described above, the magnetic field-assisted diffusion device being multiple in number, arranged in a circle and fixed on the fixed frame, the rotating frame being used to carry the workpiece to be coated, the rotating frame driving the workpiece to be coated to rotate relative to the fixed frame and the magnetic field-assisted diffusion device, so that the workpiece to be coated rotates to perform plasma carburizing or magnetron sputtering coating.

[0018] In some embodiments, the rotating frame is located on the outer periphery of the fixed frame, and the rotating frame is provided with a plurality of hanging rods arranged in a circle to support the workpiece to be plated; wherein the hanging rods are configured to rotate about their own axis while following the rotation of the rotating frame.

[0019] The magnetic field-assisted diffusion device provided in this application includes a fixed component and multiple magnetic units. Each magnetic unit is connected to the fixed component via an adjustment mechanism. The adjustment mechanism is configured to allow individual magnetic units to move independently, thereby adjusting the relative position between the magnetic unit and the fixed component. This alters the magnetic field distribution formed by the multiple magnetic units, enabling flexible optimization of the magnetic field distribution to adapt to the diffusion requirements of different workpieces and improve process controllability. The coating equipment provided in this application, employing the aforementioned magnetic field-assisted diffusion device, can integrate plasma carburizing and magnetron sputtering coating into a single device, thereby reducing production equipment costs. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a three-dimensional assembly diagram of an embodiment of the magnetic field-assisted diffusion device of this application.

[0022] Figure 2 This is a side view of an embodiment of the magnetic field-assisted diffusion device of this application.

[0023] Figure 3 This is a three-dimensional exploded view of an embodiment of the magnetic field-assisted diffusion device of this application.

[0024] Figure 4 for Figure 3 A magnified view of a portion of point A in the middle.

[0025] Figure 5 This is a perspective view of the fixing pin in one embodiment of the magnetic field-assisted diffusion device of this application.

[0026] Figure 6 This is a top view of an embodiment of the coating equipment of this application.

[0027] Figure 7 This is a side view of an embodiment of the coating equipment of this application.

[0028] The component labels are as follows:

[0029] 100. Magnetic field-assisted diffusion device; 1. Fixing component; 11. Insertion recess; 12. Locking hole; 2. Magnetic unit; 21. Mounting base; 22. Magnet; 23. Baffle; 3. Insertion protrusion; 31. Connecting hole; 4. Locking component; 41. Handle; 42. Locking nut; 43. Stud section; 44. Pin rod; 101. Fixing frame; 102. Rotating frame; 103. Hanging rod. Detailed Implementation

[0030] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0031] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0033] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0035] Please see Figures 1 to 5 As shown, this application provides a magnetic field-assisted diffusion device 100 for generating a magnetic field to assist the diffusion process. The diffusion process refers to the process by which active atoms (such as carbon, nitrogen, boron, etc.) diffuse from the surface of a material into its interior, forming a reinforcing layer. The diffusion process is a core mechanism of material heat treatment. In some embodiments of this application, the diffusion process includes carburizing, nitriding, and nitrocarburizing treatments.

[0036] Please see Figure 6 and Figure 7 As shown, this application also provides a coating apparatus, which includes multiple magnetic field-assisted diffusion devices 100. By adjusting the magnetic field distribution through the magnetic field-assisted diffusion devices 100, it can adapt to either plasma carburizing or magnetron sputtering coating processes, thereby enabling the coating apparatus to integrate plasma carburizing and magnetron sputtering coating into a single device, reducing production equipment costs. The following provides a detailed description of an embodiment of the magnetic field-assisted diffusion device 100 and a coating apparatus incorporating it.

[0037] Please see Figures 1 to 4 As shown, the magnetic field-assisted diffusion device 100 includes a fixing member 1 and a plurality of magnetic units 2. The fixing member 1 is configured to extend at least in a first direction F1, and the plurality of magnetic units 2 are respectively connected to the fixing member 1, and the plurality of magnetic units 2 are arranged along the first direction F1. Each of the magnetic units 2 is connected to the fixing member 1 through an adjustment mechanism, which is configured to allow a single magnetic unit 2 to move in a second direction F2 intersecting the first direction F1, so as to adjust the relative position between the magnetic unit 2 and the fixing member 1, thereby changing the magnetic field distribution formed by the plurality of magnetic units 2.

[0038] The fixing member 1 serves as a support frame for mounting multiple magnetic units 2, extending along a first direction F1. In this embodiment, the fixing member 1 is a long, vertical rod, meaning the first direction F1 is vertical. The multiple magnetic units 2 are arranged on the fixing member 1 along the vertical direction. Each magnetic unit 2 is connected to the fixing member 1 via an independent adjustment mechanism. This mechanism allows the magnetic unit 2 to move along a second direction F2 that intersects with the first direction F1, thereby adjusting its relative position to the fixing member 1 and ultimately changing the magnetic field distribution generated by the entire device. In this embodiment, the second direction F2 is horizontal and perpendicular to the first direction; however, in other embodiments, the second direction F2 may also be a direction that intersects with but is not perpendicular to the first direction F1.

[0039] The magnetic field-assisted diffusion device 100 provided in this application adjusts the independent movement of a single magnetic unit 2 through an adjustment mechanism to adjust the relative position between the magnetic unit 2 and the fixed part 1, thereby changing the magnetic field distribution formed by multiple magnetic units 2. This allows for flexible optimization of the magnetic field distribution to adapt to the diffusion requirements of different workpieces and improve process controllability.

[0040] Please continue reading. Figures 1 to 4 As shown, in some embodiments, the adjustment mechanism includes a recess 11 on one of the fixing member 1 and each magnetic unit 2, and a protrusion 3 on the other. The protrusion 3 is inserted into the recess 11 and can slide within it. Specifically, in this embodiment, the fixing member 1 includes a hollow tube with a through hole in the second direction F2. This through hole constitutes the recess 11, and the protrusion 3 is a plug that matches the through hole. One end of the plug is fixed to the magnetic unit 2.

[0041] The fixing member 1 adopts a hollow square tube structure with a rectangular cross-section and a hollow interior to reduce weight. Multiple through holes are formed in the fixing member 1 in the second direction, constituting insertion recesses 11 for mating with the insertion protrusions 3 of the magnetic unit 2. In this embodiment, the through holes are square holes, and the insertion post is a square post. The square hole design prevents the insertion post from rotating during sliding, thereby ensuring the linear motion accuracy of the magnetic unit 2 in the second direction F2.

[0042] Furthermore, the adjustment mechanism includes a locking member 4, and the fixing member 1 is provided with a locking hole 12 for the locking member 4 to be inserted. The insertion protrusion 3 is provided with a plurality of connecting holes 31 arranged along the second direction F2. One of the plurality of connecting holes 31 corresponds to the locking hole 12, and the locking member 4 passes through the connecting hole 31 and the locking hole 12 to fix the magnetic unit 2 to the fixing member 1.

[0043] Please refer to this carefully. Figure 4 As shown, in this embodiment, the fixing member 1 has a plurality of locking holes 12, which are arranged along the first direction F1 and correspond one-to-one with the plurality of magnetic units 2. The locking holes 12 are located on the side of the fixing member 1 and extend along a third direction perpendicular to the first direction F1 and the second direction F2, respectively. The locking holes 12 extend to the insertion recess 11, so that when the locking member 4 is inserted into the locking hole 12, it can extend into the insertion recess 11 to engage and lock with the insertion protrusion 3.

[0044] One end of the insertion protrusion 3 is fixedly connected to the magnetic unit 2, and the other end is a free end. The insertion protrusion 3 is inserted into the insertion recess 11 through the free end and can move back and forth in the second direction F2, forming a pull-out drawer-type structure to adjust the position of the magnetic unit 2. The side of the insertion protrusion 3 is provided with multiple connecting holes 31. When the insertion protrusion 3 is pulled out and moved in the insertion recess 11, the locking hole 12 will connect with different connecting holes 31. When the insertion protrusion 3 is pulled out and adjusted to a certain position, the locking member 4 can be passed through the locking hole 12 and the corresponding connecting hole 31 to limit the insertion protrusion 3.

[0045] Please see Figure 4 and Figure 5 As shown, in this embodiment, the locking element 4 is specifically a fixing pin, and the locking hole 12 is a pin hole. Furthermore, if the connection is only made by the pin and the pin hole engaging, the reliability is poor, and during use, the pin may fall out of the pin hole along its own axial direction. Therefore, this embodiment further provides a locking structure that engages with the locking hole 12 and the locking element 4 for mutual locking.

[0046] Specifically, the locking hole 12 includes a threaded barrel section, and the locking member 4 includes a pin 44 for passing through the barrel section and inserting into the connecting hole 31, and a stud section 43 that engages with the internal thread of the barrel section. The barrel section and the stud section 43 constitute the locking structure. In this embodiment, the barrel section can be screwed, riveted, or integrally formed on the outer surface of the side wall of the fixing member 1. The barrel section can be a nut or a sleeve with internal threads. After the pin 44 of the locking member 4 passes through the barrel section, the stud section 43 of the locking member 4 abuts against the barrel section. At this time, by rotating the locking member 4, the external thread of the stud section 43 engages with the internal thread of the barrel section, thereby locking the two in the axial direction, preventing the locking member 4 from accidentally falling off, and ensuring the reliability of the connection.

[0047] Please continue reading. Figure 5 As shown, to facilitate operation of the locking member 4, the locking member 4 further includes a handle 41 and a locking nut 42. Specifically, the locking member 4, from one end to the other, includes a handle 41, a locking nut 42, a stud section 43, and a pin 44 in sequence. In this embodiment, the handle 41 extends approximately perpendicular to the main body of the locking member 4, making the locking member 4 approximately L-shaped. Of course, in other embodiments, the handle 41 can also be constructed with other structures, such as a flat structure suitable for the thumb and forefinger to grip, similar to the structure at the end of a key; in short, the handle 41 is constructed to be suitable for user operation. The handle 41 can be used to achieve initial locking of the locking member 4 and the locking hole 12. The outer surface of the locking nut 42 is in the shape of a nut, such as a hexagonal nut, and can be used to apply force to the locking nut 42 with tools such as a wrench to further achieve final locking. The outer surface of the stud section 43 is provided with external threads, and the pin rod 44 is a smooth rod. The diameter of the pin rod 44 is smaller than the diameter of the stud section 43 to ensure that the pin rod 44 can pass smoothly through the screw section.

[0048] Please refer to it again. Figure 3 and Figure 4 As shown, in this embodiment, each magnetic unit 2 includes a mounting base 21, a magnet 22 fixed on the mounting base 21, and a baffle 23 covering the magnet 22. The mounting base 21 serves as the supporting structure for the magnet 22, with a plug-in protrusion 3 fixed on one side and the other side used to mount the magnet 22 and the baffle 23. The side of the mounting base 21 used to mount the magnet 22 has a mounting groove for mounting the magnet 22. The magnet 22 can be fixed to the mounting base 21 by means of in-mold injection molding, bonding, snap-fitting, screwing, pressing, etc.

[0049] In this embodiment, each magnetic unit 2 includes multiple magnets 22 arranged side by side. Each magnet 22 is rectangular, and the magnetic poles at the same end of the multiple magnets 22 in the same row are arranged alternately as N and S poles. When the multiple bar magnets 22 are arranged in an NSN or SNS order, the magnetic fields of each magnet 22 will superimpose in space. Specifically, the north and south poles of the magnets 22 will attract each other, forming a unified magnetic field. Due to the superposition effect of the magnetic fields, the effective magnetization directions are consistent, resulting in the superposition of external magnetic fields. The magnetic field strength at both ends of the unified magnet is stronger than that of a single magnet 22, thus enhancing the ability to attract or repel other magnetic objects. Of course, in other embodiments, the shape and arrangement of the magnets 22 are not limited to this.

[0050] In this embodiment, each magnetic unit 2 comprises a plurality of magnets 22 arranged in a planar shape, and the baffle 23 is a flat plate corresponding to the planar shape; this solution is suitable for scenarios requiring a uniform magnetic field. In other embodiments, each magnetic unit 2 comprises a plurality of magnets 22 arranged in an arc shape, and the baffle 23 is an arc-shaped plate corresponding to the arc shape; this solution is suitable for scenarios requiring a focused or specific directional magnetic field, such as for carburizing treatment of cylindrical workpieces. The shape of the magnetic unit 2 can be selectively flat or arc-shaped depending on the equipment used and the shape of the corresponding workpiece being processed, to better adapt to the equipment environment and workpiece conditions.

[0051] The following describes the specific adjustment method of the magnetic field-assisted diffusion device 100 during use. The core of the adjustment mechanism lies in the insertion and engagement of the insertion protrusion 3 and the fixing member 1, as well as the locking function of the locking member 4. Specifically, by sliding the insertion protrusion 3 along the second direction F2 within the insertion recess 11, a single magnetic unit 2 is moved. By adjusting the sliding distance of different magnetic units 2, the spacing between each magnetic unit 2 and the spacing between the right magnetic unit 2 and the workpiece to be processed can be changed, thereby adjusting the magnetic field strength and distribution. After the magnetic unit 2 is adjusted to the target position, the locking member 4 is inserted into the locking hole 12 of the fixing member 1 and the connecting hole 31 of the insertion protrusion 3. By screwing the stud section 43 of the locking member 4 into the screw section of the locking hole 12, a firm connection between the magnetic unit 2 and the fixing member 1 is achieved, ensuring the stability of the adjusted position.

[0052] Please see Figure 6 and Figure 7 As shown, this application provides a coating apparatus for plasma carburizing and magnetron sputtering coating. The coating apparatus includes a fixed frame 101, a rotating frame 102, and a magnetic field-assisted diffusion device 100 as described above. Multiple magnetic field-assisted diffusion devices 100 are arranged circumferentially and fixed to the fixed frame 101. The rotating frame 102 carries the workpiece to be coated and drives the workpiece to rotate relative to the fixed frame 101 and the magnetic field-assisted diffusion devices 100, thereby rotating the workpiece for plasma carburizing or magnetron sputtering coating.

[0053] In this embodiment, the rotating frame 102 is located on the outer periphery of the fixed frame 101. The rotating frame 102 is provided with a plurality of circumferentially arranged hanging rods 103 for supporting the workpiece to be plated. The hanging rods 103 are configured to rotate around their own axis while revolving around the rotating frame 102. Specifically, the fixed frame 101 is located inside the rotating frame 102, and the rotating frame 102 is cylindrical and rotates around the fixed frame 101. The plurality of magnetic field-assisted diffusion devices 100 are fixedly connected to the fixed frame 101 via the fixing member 1, with the magnetic unit 2 facing the rotating frame 102. The rotating frame 102 further includes a plurality of hanging rods 103, and the workpiece to be plated is disposed on the hanging rods 103. When the rotating frame 102 rotates, the workpiece rotates in the outer periphery of the plurality of magnetic field-assisted diffusion devices 100. The hanging rod 103 can be configured to rotate around its own axis, so that while the workpiece to be plated revolves with the rotating frame 102, it can also rotate on its own axis by the rotation of the hanging rod 103, ensuring that all surfaces of the workpiece to be plated can be uniformly deposited. Of course, if in some scenarios only a single or part of the surface of the workpiece to be plated needs to be deposited, the hanging rod 103 can be configured not to rotate around itself.

[0054] The coating equipment provided in this application employs the aforementioned magnetic field-assisted diffusion device 100, enabling the integration of plasma carburizing and magnetron sputtering coating into a single device, thereby reducing production equipment costs. For example, when using this coating equipment for plasma carburizing, the magnetic field distribution of the magnetic field-assisted diffusion device 100 is adjusted to match the magnetic field requirements of plasma carburizing, thus controlling the plasma trajectory and concentration in each region. This allows carbon atoms to penetrate the workpiece surface more efficiently, improving the uniformity of carburizing and enhancing color stability. At this time, the rotating frame 102 rotates at a lower speed to ensure uniform plasma contact in all areas of the workpiece. When using this coating equipment for magnetron sputtering coating, the magnetic field distribution of the magnetic field-assisted diffusion device 100 is adjusted to match the magnetic field requirements of the magnetron sputtering target. At this time, the rotating frame 102 rotates at a higher speed, improving coating uniformity through centrifugal effect.

[0055] As can be seen from the above description of the specific embodiments, the magnetic field-assisted diffusion device 100 provided in this application achieves dynamic adjustment of the magnetic field distribution. Through the cooperation of the plug-in protrusion 3 and the locking member 4, the position of the magnetic unit 2 can be adjusted to adapt to the needs of different workpiece shapes and process parameters. The coating equipment provided in this application can realize multi-process integration. The coating equipment integrates plasma carburizing and magnetron sputtering coating on the same platform. Through the speed control of the rotating frame 102 and the parameter adjustment of the magnetic field-assisted diffusion device 100, the two processes can be quickly switched, significantly reducing production costs.

[0056] The coating equipment provided in this application is highly practical and widely applicable. It can be used in various scenarios where coating is required and the uniformity of carburization needs to be controlled. It has the advantages of increasing production capacity and reducing costs. It is suitable for the integrated processing of carburization strengthening and functional coating of high-precision workpieces such as cutting tools, molds, and automotive parts.

[0057] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A magnetic field-assisted diffusion device for generating a magnetic field to assist the diffusion process, characterized in that, The magnetic field-assisted diffusion device includes: The fastener is configured to extend at least in a first direction; and Multiple magnetic units are respectively connected to the fixing member, and the multiple magnetic units are arranged along the first direction; Each of the magnetic units is connected to the fixing member via an adjustment mechanism, which is configured to allow a single magnetic unit to move in a second direction intersecting the first direction, so as to adjust the relative position between the magnetic unit and the fixing member, thereby changing the magnetic field distribution formed by the plurality of magnetic units.

2. The magnetic field-assisted diffusion device according to claim 1, characterized in that, The adjustment mechanism includes a recessed insertion portion on one of the fixing member and each magnetic unit and a protruding insertion portion on the other. The protruding insertion portion is inserted into the recessed insertion portion and can slide within the recessed insertion portion.

3. The magnetic field-assisted diffusion device according to claim 2, characterized in that, The adjustment mechanism includes a locking member. The fixing member is provided with a locking hole for the locking member to be inserted. The insertion protrusion is provided with a plurality of connecting holes arranged along the second direction. One of the plurality of connecting holes corresponds to the locking hole, and the locking member passes through the connecting hole and the locking hole to fix the magnetic unit to the fixing member.

4. The magnetic field-assisted diffusion device according to claim 2, characterized in that, The adjusting mechanism includes a locking member. The fixing member is provided with a locking hole for the locking member to be inserted. The locking hole includes a screw section with internal threads. The locking member includes a pin for passing through the screw section to engage with the insertion protrusion, and a stud section that engages with the internal threads of the screw section. The screw section and the stud section are threadedly engaged.

5. The magnetic field-assisted diffusion device according to claim 2, characterized in that, The fastener includes a hollow tube, the through hole of which forms the insertion recess in the second direction, the insertion protrusion is an insertion post that matches the through hole, and one end of the insertion post is fixed to the magnetic unit.

6. The magnetic field-assisted diffusion device according to any one of claims 1 to 5, characterized in that, Each of the magnetic units includes a mounting base, a magnet fixed on the mounting base, and a baffle covering the magnet.

7. The magnetic field-assisted diffusion device according to any one of claims 1 to 5, characterized in that, Each of the magnetic units includes a plurality of magnets arranged side by side, wherein the magnetic poles of the plurality of magnets in the same row at the same end are arranged alternately as N poles and S poles.

8. The magnetic field-assisted diffusion device according to claim 6, characterized in that, Each magnetic unit includes a plurality of magnets arranged in a plane, and the baffle is a flat plate corresponding to the plane; or, each magnetic unit includes a plurality of magnets arranged in an arc shape, and the baffle is an arc-shaped plate corresponding to the arc shape.

9. A coating apparatus for performing plasma carburizing and magnetron sputtering coating, characterized in that, The coating equipment includes a fixed frame, a rotating frame, and a magnetic field-assisted diffusion device as described in any one of claims 1 to 8. There are multiple magnetic field-assisted diffusion devices arranged in a circle and fixed on the fixed frame. The rotating frame is used to carry the workpiece to be coated. The rotating frame carries the workpiece to be coated and rotates it relative to the fixed frame and the magnetic field-assisted diffusion device, so that the workpiece to be coated is rotated to perform plasma carburizing or magnetron sputtering coating.

10. The coating equipment according to claim 9, characterized in that, The rotating frame is located on the outer periphery of the fixed frame, and the rotating frame is provided with a plurality of hanging rods arranged in a circle to support the workpiece to be plated; wherein the hanging rods are configured to rotate around their own axis while following the rotation of the rotating frame.

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