Shock absorber and damping system

Abstract

This application relates to a vibration damper and a vibration damping system, belonging to the field of precision vibration damping technology. The vibration damper includes a bottom plate and a top plate arranged at relative intervals, and a spring damping assembly and an anti-rotation limiting assembly disposed between the two. One end of the spring damping assembly is fixed to the top plate, and the other end is fixed to the bottom plate. The anti-rotation limiting assembly includes a limiting support, a limiting structure, and an elastic body. The limiting support is fixed to the bottom plate, and a limiting groove is formed on its side facing the top plate. The limiting structure is fixed to the top plate and is at least partially accommodated in the limiting groove. The elastic body is located between the outer wall of the limiting structure and the inner wall of the limiting groove, separating the outer wall of the limiting structure from the inner wall of the limiting groove. Thus, when the spring damping assembly twists, the limiting structure can compress the elastic body, at least to a certain extent preventing the top plate from horizontally shifting or twisting relative to the bottom plate. Therefore, it can improve the positional accuracy of the object being damped and improve the reliability of the vibration damper.

Description

Technical Field

[0001] This application relates to the field of precision vibration reduction technology, specifically to a vibration damper and a vibration reduction system. Background Technology

[0002] In spring-based vibration damping systems, metal coil springs are commonly used as damping units. However, when a metal coil spring is compressed, it twists around its axis to a certain extent, causing the position of the object being damped to shift relative to a reference point. In applications requiring high positional accuracy, this shift may reduce the precision of the equipment or connections, and even affect the reliability of mechanical limit functions, thus adversely impacting the system's performance or function. Utility Model Content

[0003] The purpose of this application is to provide a vibration damper and a vibration damping system to limit the positional displacement of the metal helical spring in the spring vibration damping system when it is compressed, thereby improving the positional accuracy of the damped object and ensuring that the mechanical limiting function is optimally performed.

[0004] This application provides a vibration damper, which includes: a bottom plate and a top plate arranged at relative intervals, and a spring damping assembly and an anti-rotation limiting assembly disposed between the bottom plate and the top plate; one end of the spring damping assembly is fixed to the top plate, and the other end of the spring damping assembly is fixed to the bottom plate; the anti-rotation limiting assembly includes a limiting support, a limiting structure, and an elastic body, wherein the limiting support is fixed to the bottom plate, and a limiting groove is formed on the side of the limiting support facing the top plate; the limiting structure is fixed to the top plate, and at least a portion of the limiting structure is accommodated in the limiting groove; the elastic body is located between the outer wall of the limiting structure and the inner wall of the limiting groove, and separates the outer wall of the limiting structure from the inner wall of the limiting groove.

[0005] The elastic body is a ring structure, which is sleeved on the outer wall of the limiting structure, and the ring structure has multiple slots that penetrate its side wall along its circumference.

[0006] The elastomer is fixed to the inner wall of the limiting groove.

[0007] The inner wall of the limiting groove is provided with a stepped surface, and the elastic body is located on the stepped surface; the anti-rotation limiting component also includes a pressure plate, which is located on the side of the elastic body away from the stepped surface, and the pressure plate is fixed to the limiting support seat, pressing the elastic body onto the stepped surface.

[0008] The elastomer is made of rubber or silicone.

[0009] The spring damping assembly includes a spring, an upper spring support, a lower spring support, and a support rod. The lower spring support is fixedly connected to the base plate. The upper spring support is located on the side of the lower spring support away from the base plate and is spaced apart from the lower spring support. The upper spring support is fixedly connected to the top plate. The spring is vertically arranged between the upper and lower spring supports. The support rod is vertically arranged, and one end of the support rod is fixedly connected to the base plate. The lower spring support is mounted on the support rod, and the position of the lower limit plate on the support rod is adjustable.

[0010] The shock absorber also includes a motor assembly, which includes a stator and a mover. One of the stator and the mover is fixed to the base plate, and the other of the stator and the mover is fixed to the top plate. The mover is configured to move relative to the stator in a preset direction. Furthermore, the distance from the outer wall of the limiting structure along the preset direction to the inner wall of the limiting groove is less than the distance from the mover along the preset direction to the stator.

[0011] The limiting support seat has a connecting plate protruding laterally at its end facing the top plate, and a limiting groove is specifically located on the side of the connecting plate facing the top plate and passes through the connecting plate; the limiting structure has a first end and a second end opposite to each other, the first end of the limiting structure is fixed to the top plate, and the second end of the limiting structure passes through the limiting groove and protrudes and is exposed on the side of the connecting plate away from the top plate; and the anti-rotation limiting assembly also includes a stop member, which is fixed to the part of the limiting structure that protrudes and is exposed on the side of the connecting plate away from the top plate, and the stop member is configured to prevent the limiting structure from disengaging from the limiting groove.

[0012] The top plate has a limiting structure receiving groove on the side facing the bottom plate corresponding to the limiting structure, and the first end of the limiting structure extends into the limiting structure receiving groove; a through hole is provided on the middle area of ​​the surface of the limiting structure facing the bottom plate, and the through hole penetrates the limiting structure; in addition, the anti-rotation limiting component also includes a locking screw, which passes through the through hole and is connected to the top plate to fix the first end of the limiting structure in the limiting structure receiving groove.

[0013] This application also provides a vibration reduction system, which includes the vibration damper described above.

[0014] The beneficial effects of this application are as follows: The vibration damper and vibration damping system provided by this application include a bottom plate and a top plate arranged at relatively intervals, and a spring damping assembly and an anti-rotation limiting assembly disposed between the bottom plate and the top plate; wherein, one end of the spring damping assembly is fixed to the top plate and the other end is fixed to the bottom plate; the anti-rotation limiting assembly includes a limiting support, a limiting structure, and an elastic body, wherein the limiting support is fixed to the bottom plate, and a limiting groove is formed on the side of the limiting support facing the top plate; the limiting structure is fixed to the top plate, and at least part of the limiting structure is accommodated in the limiting groove; the elastic body is located on the outer wall of the limiting structure and the limiting groove. Between the inner sidewalls, the outer sidewall of the limiting structure is separated from the inner sidewall of the limiting groove. In this way, since the elastic body can provide horizontal stiffness, the movement of the limiting structure in the horizontal direction can be restricted by the elastic body. Thus, when the spring damping assembly is torn, the limiting structure can squeeze the elastic body, which can at least prevent the top plate from horizontally shifting or torturing relative to the bottom plate to a certain extent. Therefore, it can improve the abnormal operation of other functional components that may be caused by the horizontal shift of the top plate, improve the positional accuracy of the damped object, ensure that the limiting function of the anti-rotation limiting assembly is optimally performed, and improve the damping performance and reliability of the damper. Attached Figure Description

[0015] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.

[0016] Figure 1 This is a three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application; Figure 2 This is a side view of the vibration damper provided in the embodiments of this application; Figure 3 It is along Figure 2 A schematic diagram of the cross-sectional structure taken by line A-A' in the diagram; Figure 4 It is along Figure 2 A schematic diagram of the cross-sectional structure taken by line B-B' in the diagram; Figure 5 This is a three-dimensional structural schematic diagram of the anti-rotation limiting component provided in the embodiments of this application; Figure 6 This is a side view of the anti-rotation limiting component provided in the embodiments of this application; Figure 7 It is along Figure 6 A schematic diagram of the cross-sectional structure taken by line C-C' in the diagram; Figure 8 This is a three-dimensional structural diagram of the limiting support provided in the embodiments of this application; Figure 9 This is a side view of the limiting support provided in the embodiments of this application; Figure 10 It is along Figure 9 A schematic diagram of the cross-sectional structure taken by line D-D' in the diagram; Figure 11 This is a three-dimensional structural schematic diagram of the elastic element provided in the embodiments of this application; Figure 12 This is a top view of the elastic element provided in the embodiments of this application; Figure label: 1-Vibration damper; 10-Base plate; 20-Top plate; 21-Limiting structure receiving groove; 22-First groove; 30-Anti-rotation limiting assembly; 31-Limiting support seat; 311-Limiting groove; 312-Connecting plate; 314-Fixing plate; 32-Limiting structure; 321-Through hole; 33-Stop; 34-Locking screw; 35-Elastic element; 351-Slot; 36-Pressure plate; 70-Spring vibration damping assembly; 71-Spring; 72-Upper spring support seat; 73-Lower spring support seat; 74-Support rod / screw; 75-Nut; F1-First step surface; F2-Second step surface; A1-Gap; D1-Distance. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this application and are not intended to limit this application.

[0018] When describing the structure of a component, when referring to a layer or region as being "above" or "on top of" another layer or region, it can mean that it is directly above the other layer or region, or that it contains other layers or regions between itself and the other layer or region. Furthermore, if the component is flipped, the layer or region will be located "below" or "under" the other layer or region. Additionally, the features, structures, or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0019] Furthermore, the directional terms mentioned in the embodiments of this application, such as [up], [down], [front], [back], [left], [right], [inner], [outer], [side], etc., are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrating and understanding the embodiments of this application, and not for limiting the embodiments of this application. In the various drawings, structurally similar units are represented by the same reference numerals. For clarity, the various parts in the drawings are not drawn to scale. In addition, some related parts may not be shown in the drawings.

[0020] The following detailed description is based on specific embodiments. It should be noted that the sequence numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0021] Please see Figures 1 to 7 , Figure 1 This is a three-dimensional structural diagram of the vibration damper provided in the embodiments of this application. Figure 2 This is a side view of the shock absorber provided in the embodiment of this application. Figure 3 It is along Figure 2 A schematic diagram of the cross-sectional structure taken by line A-A' in the diagram. Figure 4 It is along Figure 2 A schematic diagram of the cross-sectional structure taken by line B-B' in the diagram. Figure 5 This is a three-dimensional structural diagram of the anti-rotation limiting component provided in the embodiments of this application. Figure 6 This is a side view of the anti-rotation limiting component provided in the embodiments of this application. Figure 7 It is along Figure 6 A schematic diagram of the cross-sectional structure taken by line C-C' in the diagram. (See diagram below.) Figures 1 to 7 As shown, the vibration damper 1 includes a bottom plate 10 and a top plate 20 arranged at relative intervals, as well as a spring damping assembly 70 and an anti-rotation limiting assembly 30 disposed between the bottom plate 10 and the top plate 20.

[0022] Specifically, one end (i.e., the top end) of the spring damping assembly 70 is fixed to the top plate 20, and the other end (i.e., the bottom end) of the spring damping assembly 70 is fixed to the bottom plate 10.

[0023] Specifically, the anti-rotation limiting component 30 may include a limiting support 31, a limiting structure 32, and an elastic body 35. The limiting support 31 is fixed to the base plate 10, and a limiting groove 311 is formed on the side of the limiting support 31 facing the top plate 20. The limiting structure 32 is fixed to the top plate 20, and at least a portion of the limiting structure 32 is accommodated within the limiting groove 311. The elastic body 35 is located between the outer wall of the limiting structure 32 and the inner wall of the limiting groove 311, separating the outer wall of the limiting structure 32 from the inner wall of the limiting groove 311.

[0024] The elastic body 35 provides horizontal stiffness, and one end of the elastic body 35 in the horizontal direction can contact the inner wall of the limiting groove 311, while the other end of the elastic body 35 in the horizontal direction can contact the outer wall of the limiting structure 32. The outer wall of the limiting structure 32 does not contact the inner wall of the limiting groove 311. Thus, when the spring damping assembly 70 is torn, the limiting structure 32 can compress the elastic body 35, thereby preventing the top plate 20 from horizontally shifting or torturing relative to the bottom plate 10 to a certain extent. This can improve the abnormal operation of other functional components that may be caused by the horizontal shift of the top plate 20, and improve the damping performance and reliability of the damper 1.

[0025] Furthermore, in specific implementation, the elastic body 35 can be an elastic body with both small vertical stiffness and small horizontal stiffness to ensure that when the elastic body 35 is subjected to horizontal force, the elastic body 35 will undergo elastic deformation, and when the elastic body 35 is subjected to vertical force, the elastic body 35 will also undergo elastic deformation.

[0026] For example, the material of the elastomer 35 can be an elastic material such as rubber or silicone. For instance, the elastomer 35 can specifically be a rubber block 20.

[0027] The elastomer 35 can be made of elastic materials such as rubber or silicone. For example, such as... Figure 11 and Figure 12 As shown, the aforementioned elastomer 35 can specifically be a rubber ring 35.

[0028] Thus, by setting the outer wall of the limiting structure 32 and the inner wall of the limiting groove 311 at a relative interval, and filling the gap area between the outer wall of the limiting structure 32 and the inner wall of the limiting groove 311 with an elastic body 35 to provide horizontal stiffness, this can at least prevent the top plate 20 from horizontally shifting or twisting relative to the bottom plate 10 to a certain extent. On the other hand, the stiffness of the above-mentioned damper 10 can be adjusted by the elastic body 35, so that different stiffnesses can be obtained within a certain range by simply changing the material and hardness of the elastic body 35 while keeping other structural components unchanged, thereby achieving different degrees of anti-rotation effect.

[0029] Furthermore, it is understandable that the elastic body 35 within a certain stiffness range will not have a significant impact on the overall vibration damping performance of the damper 1. Moreover, when a certain magnitude of horizontal outward force is applied to the top plate 20, the elastic body 35 can effectively limit the excessive horizontal displacement of the top plate 20, thereby protecting other relatively moving components, such as motor assemblies, displacement sensors, speed sensors, etc. (not shown in the figure), thus effectively improving the reliability of the damper 1.

[0030] In some embodiments, such as Figure 11 and Figure 12As shown, the aforementioned elastomer 35 can be a ring structure 35. Specifically, as... Figures 5 to 7 As shown, the annular structure 35 can be sleeved on the outer wall of the limiting structure 32, and the outer peripheral sidewall of the annular structure 35 can contact the inner sidewall of the limiting groove 311, and the inner peripheral sidewall of the annular structure 35 can contact the outer wall of the limiting structure 32, thereby enabling the elastic body 35 to be snapped between the inner sidewall of the limiting groove 311 and the outer sidewall of the limiting structure 32.

[0031] Specifically, such as Figure 11 and Figure 12 As shown, the annular structure 35 may have multiple slots 351 penetrating its sidewalls along its circumference, and these multiple slots 351 may be spaced apart and evenly distributed along the circumference of the annular structure 35. For example, as... Figure 12 As shown, the annular structure 35 has eight slots 351 that penetrate its sidewalls along its circumference, and these eight slots 351 are spaced apart and evenly distributed along the circumference of the annular structure 35.

[0032] Thus, by adopting a ring structure 35 design for the elastomer 35, and specifically providing a groove 351 in its circumferential direction, this design cleverly and effectively reduces the hardening phenomenon that occurs when the elastomer 35 is subjected to excessive compression, thereby ensuring that the elastomer 35 maintains a relatively stable performance under external force. This groove 351 design allows the elastomer 35 to exhibit a near-linear stiffness characteristic during stress, meaning that within a certain stress range, its stiffness changes relatively smoothly without drastic fluctuations, thus providing a more reliable and stable mechanical performance guarantee for practical applications. This design not only extends the service life of the elastomer 35 but also greatly improves its adaptability and reliability under various working conditions.

[0033] In some embodiments, such as Figures 5 to 7 As shown, the above-mentioned elastic body 35 can be fixed to the inner wall of the limiting groove 311, for example, it can be glued to the inner wall of the limiting groove 311.

[0034] In some specific embodiments, such as Figures 5 to 10 As shown, the inner wall of the limiting groove 311 may be provided with a first stepped surface F1, and the elastic body 35 is located on the first stepped surface F1. Furthermore, the aforementioned anti-rotation limiting assembly 30 may also include a pressure plate 36, which is located on the side of the elastic body 35 away from the first stepped surface F1. The pressure plate 36 is fixed to the limiting support 31 and presses the elastic body 35 onto the first stepped surface F1, thereby fixing the elastic body 35 to the inner wall of the limiting groove 311 by the pressure plate 36.

[0035] Specifically, such as Figures 5 to 10As shown, the inner wall of the limiting groove 311 may also be provided with a second step surface F2, and the pressure plate 36 may be specifically fixed on the second step surface F2. For example, it may be fixedly connected to the second step surface F2 by screws, so that the pressure plate 36 presses the elastic body 35 on the first step surface F1, and can ensure the positional stability and functional reliability of the pressure plate 36.

[0036] Furthermore, in practical implementation, by controlling the dimensions of the elastomer 35, it can be ensured that after being pressed down by the pressure plate 36 in the initial state, the elastomer 35 can be evenly and fully filled into the gap area between the outer wall of the limiting structure 32 and the inner wall of the limiting groove 311. This uniform filling not only ensures the stability of the elastomer 35, but also allows it to fully compress the outer wall of the limiting structure 32 and the inner wall of the limiting groove 311, thereby achieving uniform pressure distribution under stress, avoiding local stress concentration, and ensuring the stability and durability of the overall structure. In addition, the fixing method of the pressure plate 36 can be adjusted according to actual needs to adapt to the usage requirements under different working conditions, ensuring the flexibility and reliability of the system. Through this design, the performance of the elastomer 35 is more consistent in different environments, effectively improving its stability and durability in complex application scenarios, and further enhancing the impact resistance and service life of the overall structure. By optimizing the material and shape of the pressure plate 36, its fixing effect and durability are further improved, ensuring that the elastomer 35 can still maintain excellent mechanical properties under various extreme conditions, thereby ensuring the long-term stable operation of the overall structure. Meanwhile, this design also facilitates later maintenance and replacement, reduces operating costs, and enhances the user experience. Through careful design, the synergistic effect of the pressure plate 36 and the elastomer 35 not only improves the structural safety but also extends its service life.

[0037] In the above embodiments, such as Figure 4 As shown, the aforementioned spring damping assembly 70 may include a spring 71, an upper spring support 72, and a lower spring support 73. The lower spring support 73 is fixedly connected to the base plate 10. The upper spring support 72 is located on the side of the lower spring support 73 facing away from the base plate 10 and is spaced apart from the lower spring support 73. The upper spring support 72 is fixedly connected to the top plate 20. The spring 71 is vertically arranged between the upper spring support 72 and the lower spring support 73, thereby achieving vertical damping function through the aforementioned spring damping assembly 70.

[0038] Specifically, the height of the lower spring support 73 relative to the base plate 10 is adjustable. This allows for adjustment of the distance between the upper spring support 72 and the lower spring support 73, thereby adjusting the deformation of the spring 71. This ensures that the load-bearing capacity of the spring 71 is adjustable within a certain range in its initial static position, enabling the damper 1 to adapt to different load weights. Furthermore, during the adjustment of the spring 71's deformation, the elastic body 35 provides horizontal stiffness, and the limiting structure 32 compresses the elastic body, thus preventing the spring 71 from twisting or tilting to at least a certain extent. This mitigates the problem of horizontal displacement or twisting of the top plate 20 caused by the horizontal movement of the spring 71. Therefore, after adjusting the deformation of the spring 71, no horizontal adjustment of the top plate 20 is required, thereby improving the damping performance and structural stability of the damper 1.

[0039] In some specific embodiments, such as Figure 4 As shown, the above-mentioned spring damping assembly 70 may further include a support rod 74. The support rod 74 may be arranged vertically, that is, the length direction of the support rod 74 may be perpendicular to the horizontal plane. Furthermore, one end (i.e., the lower end) of the support rod 74 along its length direction may be fixedly connected to the base plate 10. The above-mentioned lower spring support seat 73 may be disposed on the support rod 74, and the position of the lower spring support seat 73 on the support rod 74 is adjustable. Thus, by adjusting the position of the lower spring support seat 73 on the support rod 74, the height of the lower spring support seat 73 relative to the base plate 10 can be adjusted.

[0040] Specifically, such as Figure 4 As shown, the aforementioned spring damping assembly 70 may further include a nut 75, located between the lower spring support 73 and the base plate 10, and threadedly connected to the support rod 74. The lower spring support 73 and the nut 75 can abut against each other. This design allows for compression or release of the spring 71 by rotating the nut 75, thereby achieving vertical height adjustment. Furthermore, during vertical height adjustment, the limiting structure 32 compresses the elastic body 35 to achieve a correction function, preventing horizontal load displacement. Thus, the entire spring damping assembly 70 achieves vertical height adjustment while maintaining horizontal stability, improving the overall performance and reliability of the assembly.

[0041] For example, such as Figure 4 As shown, the support rod 74 can be a screw 74, which is adapted to the nut 75. Specifically, the lower end of the screw 74 can be threaded into the corresponding threaded hole on the base plate 10, or it can be snapped into the corresponding positioning hole on the base plate 10, thereby achieving a fixed connection between the screw 74 and the base plate 10.

[0042] In some specific embodiments, such as Figure 4 As shown, in the above-mentioned spring damping assembly 70, a first protrusion protruding towards the lower spring support 73 can be formed in the middle region of the surface (i.e., the lower surface) of the upper spring support 72 facing the lower spring support 73, and a second protrusion protruding towards the upper spring support 72 can be formed in the middle region of the surface (i.e., the upper surface) of the lower spring support 73 facing the upper spring support 72. Furthermore, one end (i.e., the upper end) of the spring 71 can be fitted onto the first protrusion, and the other end (i.e., the lower end) of the spring 71 can be fitted onto the second protrusion, thereby enabling the upper spring support 72 and the lower spring support 73 to position the spring 71.

[0043] In some specific embodiments, such as Figure 1 As shown, the vibration damper 1 includes multiple spring damping components 70, for example, four, which can be arranged at the four corners of the vibration damper 1 to ensure its stability and balance in all directions. This arrangement effectively distributes the load, reduces the stress on individual components, extends service life, and improves the overall seismic performance of the structure. Furthermore, the independent adjustment function of each spring damping component 70 allows the vibration damper 1 to adapt to different ground flatness levels, further optimizing the damping effect. By precisely controlling the height of each component, the equipment remains stable during operation, reducing vibration damage and extending the overall lifespan of the equipment.

[0044] Specifically, such as Figure 1 As shown, the number of anti-rotation limiting components 30 included in the above-mentioned shock absorber 1 can also be multiple, for example, there can be 4. The 4 anti-rotation limiting components 30 can be arranged in the middle of the four sides of the shock absorber 1 to effectively improve the problem of excessive horizontal displacement of the top plate 20 caused by the horizontal offset or torsion of the spring damping component 70, thereby protecting other relatively moving parts and effectively improving the stability and reliability of the shock absorber 1.

[0045] In some embodiments, such as Figures 5 to 10 As shown, the end of the limiting support 31 facing the top plate 20 (i.e., the top end) may have a connecting plate 312 protruding laterally. The lateral direction can be any direction parallel to the horizontal plane; for example, it can be specifically... Figure 7 and Figure 10 From right to left in the middle. In addition, the limiting groove 311 can be specifically provided on the side of the connecting plate 312 facing the top plate 20 (i.e., the top side), and can penetrate the connecting plate 312.

[0046] Specifically, the limiting structure 32 may have a first end and a second end (i.e., a top end and a bottom end), and the first end (i.e., the top end) of the limiting structure 32 may be fixed to the top plate 20, and the second end (i.e., the bottom end) of the limiting structure 32 may pass through the limiting groove 311 and protrude and be exposed on the side of the connecting plate 312 away from the top plate 20 (i.e., the bottom side).

[0047] Furthermore, the anti-rotation limiting assembly 30 may also include a stop 33, which can be fixed to the protruding portion of the limiting structure 32 exposed on the bottom side of the connecting plate 312, and the stop 33 can be configured to prevent the limiting structure 32 from disengaging from the limiting groove 311. Thus, in the vertical direction (i.e., the direction perpendicular to the horizontal plane), if the limiting structure 32 is excessively raised, the stop 33 will first strike the limiting support 31 to prevent the limiting structure 32 from disengaging upward from the limiting groove 311, thereby avoiding the problem of excessive vertical movement of the top plate 20 leading to instability, and achieving the purpose of protecting the vibration damped equipment on the top plate 20.

[0048] For example, such as Figure 7 As shown, in the anti-rotation limiting assembly 30, the stop 33 and the limiting structure 32 can be integrally formed, and the stop 33 can protrude and be disposed around the outer side wall at the bottom end of the limiting structure 32.

[0049] For example, such as Figure 7 As shown, the orthographic projection of the gap A1 between the outer wall of the limiting structure 32 and the bottom opening edge of the limiting groove 311 on the horizontal plane can be completely covered by the orthographic projection of the stop member 33 on the horizontal plane, and the orthographic projection area of ​​the stop member 33 on the horizontal plane can be greater than the orthographic projection area of ​​the gap A1 between the outer wall of the limiting structure 32 and the bottom opening edge of the limiting groove 311 on the horizontal plane, so as to ensure that the stop member 33 can effectively prevent the limiting structure 32 from disengaging from the limiting groove 311.

[0050] In some embodiments, such as Figure 3 As shown, a limiting structure receiving groove 21 can be opened on the side of the top plate 20 facing the bottom plate 10 (i.e., the bottom side) corresponding to the limiting structure 32, and the first end (i.e., the top end) of the limiting structure 32 can extend into the limiting structure receiving groove 21 and be fixed in the limiting structure receiving groove 21, thereby fixing the limiting structure 32 to the bottom side of the top plate 20.

[0051] Specifically, such as Figure 3 and Figure 4 As shown, a through hole 321 can be provided in the middle region of the surface of the limiting structure 32 facing the base plate 10 (i.e., the bottom surface), and the through hole 321 penetrates the limiting structure 32.

[0052] Furthermore, the anti-rotation limiting component 30 may also include a locking screw 34, which can pass through the through hole 321 and be connected to the top plate 20, so that the top end of the limiting structure 32 is fixed in the limiting structure receiving groove 21 by the locking screw 34.

[0053] For example, such as Figure 3 As shown, a first groove 22 can be provided on the bottom wall of the limiting structure receiving groove 21, and the locking screw 34 can be fixedly connected to the first groove 22 by thread after passing through the through hole 321.

[0054] In some specific embodiments, the area of ​​the top plate 20 facing the bottom plate 10 (i.e., the bottom side) corresponding to the limiting structure 32 may be provided with a shim protruding towards the bottom plate 10, and the limiting structure receiving groove 21 and the first groove 22 may be specifically provided on the shim protruding towards the bottom plate 10 (i.e., the bottom side). In this way, by providing the shim, the finishing area can be reduced, thereby reducing production costs.

[0055] In some embodiments, the anti-rotation limiting component 30 may have an active state and a non-active state. Specifically, such as Figure 3 and Figure 4 As shown, the anti-rotation limiting assembly 30 may also include a transport locking screw (not shown in the figure), and the transport locking screw may be configured to fix the limiting support 31 to the top plate 20 when the anti-rotation limiting assembly 30 is in a non-working state, thereby preventing the limiting support 31 from moving relative to the top plate 20 in a non-working state, so as to facilitate the transport of the shock absorber 1 in a non-working state.

[0056] Furthermore, when the anti-rotation limiting component 30 is in the working state, the transport locking screw 35 can be separated from the limiting support 31 and / or the top plate 20, thereby ensuring that the limiting support 31 can prevent the top plate 20 from horizontally shifting or twisting relative to the bottom plate 10.

[0057] Specifically, in the above embodiment where a connecting plate 312 is provided laterally protruding from the end of the limiting support 31 facing the top plate 20, a through hole (not shown in the figure) can be opened on the surface of the connecting plate 312 facing the bottom plate 10 (i.e., the bottom surface). The through hole passes through the connecting plate 312, and when the anti-rotation limiting assembly 30 is in a non-working state, the transport locking screw 35 can pass through the through hole and connect to the top plate 20, so that the top of the limiting support 31 is fixed to the bottom side of the top plate 20 by the transport locking screw 35. In a specific implementation, a second groove (not shown in the figure) can be opened on the side of the top plate 20 facing the bottom plate 10 (i.e., the bottom side) corresponding to the area of ​​the transport locking screw 35, and the transport locking screw 35 can be fixedly connected to the second groove by threads after passing through the through hole.

[0058] Specifically, in the above embodiment where a shim is provided in the area corresponding to the limiting structure 32 on the side of the top plate 20 facing the bottom plate 10, the shim can also extend from the area corresponding to the limiting structure 32 to the area corresponding to the transport locking screw 35 on the side of the top plate 20 facing the bottom plate 10, and the second groove can be specifically provided on the side of the shim facing the bottom plate 10 (i.e., the bottom side), thereby helping to further reduce the finishing area and reduce production costs.

[0059] In some embodiments, such as Figures 5 to 10 As shown, the end of the limiting support 31 away from the top plate 20 (i.e., the bottom end) may have a fixing plate 314 protruding laterally. The lateral direction can be any direction parallel to the horizontal plane; for example, it can be specifically... Figure 3 and Figure 4 From right to left in the middle. Furthermore, the fixing plate 314 can be fixedly connected to the base plate 10 by screws, thereby realizing that the limiting support 31 is fixed to the base plate 10 by the fixing plate 314.

[0060] For example, a positioning groove may be provided on the side of the bottom plate 10 facing the top plate 20 (i.e., the top side) corresponding to the fixing plate 314, and the fixing plate 314 may be specifically connected to the bottom wall of the positioning groove by screws.

[0061] For example, such as Figure 4 As shown, the fixing plate 314 and the connecting plate 312 of the limiting support 31 can be arranged at intervals relative to each other. Specifically, the limiting support 31 may also include a support body, which can be connected between the fixing plate 314 and the connecting plate 312 to play a supporting role in the limiting support 31.

[0062] In some embodiments, the vibration damper 1 may further include a motor assembly (not shown in the figure), which includes a stator and a mover. One of the stator and the mover is fixed to the base plate 10, and the other is fixed to the top plate 20. The mover is configured to move relative to the stator in a preset direction. Furthermore, the distance D1 from the outer wall of the limiting structure 32 along the preset direction to the inner wall of the limiting groove 311 may be less than the distance from the mover along the preset direction to the stator. Therefore, if the top plate 20 of the vibration damper 1 is excessively offset from the base plate 10 in the preset direction, the limiting structure 32 will first collide with the limiting support 31 to avoid the mover of the motor assembly colliding with the stator, thereby protecting the motor from collision damage, improving the reliability of the vibration damper 1, and extending the service life of the vibration damper 1.

[0063] The preset direction can be a direction parallel to the horizontal plane, that is, a horizontal direction, specifically a horizontal transverse direction and / or a horizontal longitudinal direction, with the horizontal transverse direction perpendicular to the horizontal longitudinal direction. For example, the horizontal plane can refer to a plane parallel to the X-axis and Y-axis in the attached drawing, the horizontal transverse direction can refer to a direction parallel to the X-axis in the attached drawing, and the horizontal longitudinal direction can refer to a direction parallel to the Y-axis in the attached drawing.

[0064] In some examples, the motor assembly described above may be specifically a bidirectional voice coil motor drive assembly. Accordingly, the number of movers included in the motor assembly may be two, referred to as the first mover and the second mover. The first mover may be configured to move horizontally relative to the stator, and the second mover may be configured to move vertically relative to the stator.

[0065] Furthermore, the distance from the outer wall of the limiting structure 32 along the horizontal transverse direction to the inner wall of the limiting groove 311 can be less than the distance from the first moving part along the horizontal transverse direction to the stator, and the distance from the outer wall of the limiting structure 32 along the horizontal longitudinal direction to the inner wall of the limiting groove 311 can be less than the distance from the second moving part along the horizontal transverse direction to the stator. In this way, collisions between the motor moving part and the motor stator can be prevented in both horizontal directions, thereby more effectively protecting the motor from collision damage and further improving reliability.

[0066] In some embodiments, the motor assembly may further include an adapter (not shown in the figure), and the stator may be fixed to the base plate 10 or the top plate 20 via the adapter.

[0067] In some embodiments, the vibration damper 1 may further include a sensor assembly (not shown in the figure), which is fixed to the top plate 20 and can be used to detect the movement of the top plate 20. Specifically, the vibration damper 1 may further include a controller (not shown in the figure), which can control the operation of the motor assembly based on the detection results of the sensor assembly. Exemplarily, the sensor assembly may include a speed sensor and / or a displacement sensor.

[0068] In some embodiments, such as Figure 6 and Figure 7 As shown, a motor receiving groove can be provided on the side of the top plate 20 facing the bottom plate 10 (i.e., the bottom side) corresponding to the motor assembly, and the end of the motor assembly away from the bottom plate 10 (i.e., the top part) can be accommodated in the motor receiving groove, thereby helping to improve space utilization and reduce the overall thickness of the shock absorber 1.

[0069] In some embodiments, the vibration damper 1 may further include a damping pad (not shown) and a panel (not shown), wherein the panel is disposed on the side of the top plate 20 opposite to the bottom plate 10, and the damping pad is bonded between the top plate 20 and the panel. Specifically, a layer of damping pad can be bonded between the top plate 20 and the panel with adhesive (e.g., glue or double-sided tape) to form a sandwich structure consisting of the top plate 20, the damping pad, and the panel. In this way, high-frequency vibrations of a certain frequency can be filtered through the damping pad to improve the vibration damping performance of the vibration damper 1.

[0070] For example, the material of the vibration damping pad can be rubber or silicone.

[0071] In the above embodiment, the top plate 20 can be a closed box-shaped structure welded from flat plates and profiles. This improves the overall structural rigidity of the top plate 20, enabling it to withstand loads far exceeding its own mass.

[0072] For example, the flat plate can be a steel plate. The profile can be a U-shaped profile (e.g., a U-shaped channel steel).

[0073] Specifically, in the above embodiment where a motor receiving groove is provided on the side of the top plate 20 facing the bottom plate 10 corresponding to the area of ​​the motor assembly, the motor receiving groove can be specifically provided on the side of the profile away from the flat plate (i.e., the bottom side). Furthermore, in a specific implementation, a motor observation window can be provided on the outer wall of the profile corresponding to the area of ​​the motor receiving groove. The motor observation window is connected to the motor receiving groove to expose the motor assembly inside the motor receiving groove for observation of the motor assembly.

[0074] Specifically, in the above embodiment where a shim is provided in the area corresponding to the limiting structure 32 on the side of the top plate 20 facing the bottom plate 10, the shim can be provided on the side of the profile away from the flat plate (i.e., the bottom side). For example, the shim can be fixedly connected to the bottom side of the profile away from the flat plate by welding.

[0075] In some specific embodiments, the top plate 20 can be a closed box-shaped structure welded from a flat plate and multiple profiles (e.g., four profiles). These multiple profiles can be connected end-to-end on the side of the flat plate facing the bottom plate 10 (i.e., the bottom side) to form a rectangular frame. Furthermore, the aforementioned raising blocks can be installed across two adjacent profiles to connect them, thereby increasing the connection rigidity of the top plate 20.

[0076] In the above embodiments, such as Figure 1As shown, the number of anti-rotation limiting components 30 included in the above-mentioned shock absorber 1 can be one or more (for example, four), and the number of motor components included in the above-mentioned shock absorber 1 can also be one or more (for example, four). The anti-rotation limiting components 30 and the motor components can correspond one-to-one. Furthermore, each anti-rotation limiting component 30 can be located in the vicinity of its corresponding motor component and is used to prevent the moving part and the stator of its corresponding motor component from colliding, thereby protecting its corresponding motor component from collision damage.

[0077] Furthermore, it should be noted that in the above-mentioned shock absorber 1, the specific structure of each anti-rotation limiting component 30 and its corresponding motor component can be the same as that of the anti-rotation limiting component 30 and motor component described in the above embodiment, so it will not be repeated here.

[0078] In the above embodiments, the vibration damper 1 can be used as a vibration damping platform for vibration damping of precision equipment such as semiconductor equipment and / or precision machine tools.

[0079] As can be seen from the above, the vibration damper provided in this embodiment includes a bottom plate and a top plate arranged at relatively intervals, and a spring damping assembly and an anti-rotation limiting assembly disposed between the bottom plate and the top plate; wherein, one end of the spring damping assembly is fixed to the top plate and the other end is fixed to the bottom plate; the anti-rotation limiting assembly includes a limiting support seat, a limiting structure, and an elastic body, wherein the limiting support seat is fixed to the bottom plate, and a limiting groove is opened on the side of the limiting support seat facing the top plate; the limiting structure is fixed to the top plate, and at least part of the limiting structure is accommodated in the limiting groove; the elastic body is located between the outer wall of the limiting structure and the inner wall of the limiting groove, and the limiting structure... The outer wall of the structure is separated from the inner wall of the limiting groove. In this way, since the elastic body can provide horizontal stiffness, the movement of the limiting structure in the horizontal direction can be restricted by the elastic body. Thus, when the spring damping assembly is torn, the limiting structure can squeeze the elastic body, which can at least prevent the top plate from shifting or torturing relative to the bottom plate to a certain extent. Therefore, it can improve the abnormal operation of other functional components that may be caused by the horizontal displacement of the top plate, improve the positional accuracy of the damped object, ensure that the limiting function of the anti-rotation limiting assembly is optimal, and improve the damping performance and reliability of the damper.

[0080] This application also provides a vibration reduction system, which includes the vibration damper of any of the above embodiments.

[0081] Specifically, the vibration damping system may also include a load, which can be fixed above the top plate of the vibration damper, thereby achieving vibration damping of the load.

[0082] For example, the load can be a semiconductor device, a precision machine tool, or other precision equipment.

[0083] It should be noted that the vibration reduction system provided in this application embodiment, because it is equipped with the vibration damper provided in this application embodiment, can achieve the beneficial effects that any vibration damper provided in this application embodiment can achieve, as detailed in the previous embodiments, and will not be repeated here.

[0084] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vibration damper, characterized in that, It includes a bottom plate and a top plate that are spaced apart from each other, as well as a spring damping assembly and an anti-rotation limiting assembly disposed between the bottom plate and the top plate; One end of the spring damping assembly is fixed to the top plate, and the other end of the spring damping assembly is fixed to the bottom plate; The anti-rotation limiting assembly includes a limiting support, a limiting structure, and an elastic body. The limiting support is fixed to the base plate, and a limiting groove is formed on the side of the limiting support facing the top plate. The limiting structure is fixed to the top plate, and at least a portion of the limiting structure is accommodated within the limiting groove. The elastic body is located between the outer wall of the limiting structure and the inner wall of the limiting groove, separating the outer wall of the limiting structure from the inner wall of the limiting groove.

2. The vibration damper according to claim 1, characterized in that, The elastic body is a ring structure, which is sleeved on the outer wall of the limiting structure, and the ring structure has multiple slots that penetrate its side wall along its circumference.

3. The vibration damper according to claim 1, characterized in that, The elastomer is fixed to the inner wall of the limiting groove.

4. The vibration damper according to claim 3, characterized in that, The inner wall of the limiting groove is provided with a stepped surface, and the elastic body is located on the stepped surface; The anti-rotation limiting component also includes a pressure plate, which is located on the side of the elastic body away from the step surface. The pressure plate is fixed to the limiting support seat and presses the elastic body onto the step surface.

5. The vibration damper according to claim 1, characterized in that, The elastomer is made of rubber or silicone.

6. The vibration damper according to claim 1, characterized in that, The spring damping assembly includes a spring, an upper spring support, a lower spring support, and a support rod. The lower spring support is fixedly connected to the base plate. The upper spring support is located on the side of the lower spring support away from the base plate and is spaced apart from the lower spring support. The upper spring support is fixedly connected to the top plate. The spring is vertically arranged between the upper spring support and the lower spring support. The support rod is vertically arranged, and one end of the support rod is fixedly connected to the base plate. The lower spring support is mounted on the support rod, and the position of the lower limiting plate on the support rod is adjustable.

7. The vibration damper according to claim 1, characterized in that, The vibration damper also includes a motor assembly comprising a stator and a mover, wherein one of the stator and the mover is fixed to the base plate, the other of the stator and the mover is fixed to the top plate, and the mover is configured to move relative to the stator in a preset direction. Furthermore, the distance from the outer wall of the limiting structure along the preset direction to the inner wall of the limiting groove is less than the distance from the mover along the preset direction to the stator.

8. The vibration damper according to claim 1, characterized in that, The end of the limiting support facing the top plate has a connecting plate protruding laterally, and the limiting groove is specifically located on the side of the connecting plate facing the top plate and passes through the connecting plate; The limiting structure has a first end and a second end opposite to each other. The first end of the limiting structure is fixed to the top plate, and the second end of the limiting structure passes through the limiting groove and protrudes out and is exposed on the side of the connecting plate away from the top plate. Furthermore, the anti-rotation limiting assembly also includes a stop member, which is fixed to the portion of the limiting structure that protrudes and is exposed on the side of the connecting plate away from the top plate, and the stop member is configured to prevent the limiting structure from disengaging from the limiting groove.

9. The vibration damper according to claim 8, characterized in that, A limiting structure receiving groove is formed on the side of the top plate facing the bottom plate in the area corresponding to the limiting structure, and the first end of the limiting structure extends into the limiting structure receiving groove. The limiting structure has a through hole in the central area of ​​the surface of the base plate, and the through hole penetrates the limiting structure. Furthermore, the anti-rotation limiting assembly also includes a locking screw, which passes through the through hole and is connected to the top plate to fix the first end of the limiting structure in the limiting structure receiving groove.

10. A vibration reduction system, characterized in that, Includes the vibration damper as described in any one of claims 1 to 9.

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